JP7561619B2 - 熱ガスセンサの評価装置、方法およびコンピュータプログラム - Google Patents

熱ガスセンサの評価装置、方法およびコンピュータプログラム Download PDF

Info

Publication number
JP7561619B2
JP7561619B2 JP2020537150A JP2020537150A JP7561619B2 JP 7561619 B2 JP7561619 B2 JP 7561619B2 JP 2020537150 A JP2020537150 A JP 2020537150A JP 2020537150 A JP2020537150 A JP 2020537150A JP 7561619 B2 JP7561619 B2 JP 7561619B2
Authority
JP
Japan
Prior art keywords
signal
information
detector
evaluation device
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2020537150A
Other languages
English (en)
Japanese (ja)
Other versions
JP2021515882A5 (https=
JP2021515882A (ja
Inventor
フランク ヘートリヒ
ベルント エーアブレヒト
ゲルハルト カッティンガー
カート クリシェ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hann Schickard Gesellschaft fuer Angewandte Forschung eV
GS Elektromedizinische Geraete G Stemple GmbH
Original Assignee
Hann Schickard Gesellschaft fuer Angewandte Forschung eV
GS Elektromedizinische Geraete G Stemple GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hann Schickard Gesellschaft fuer Angewandte Forschung eV, GS Elektromedizinische Geraete G Stemple GmbH filed Critical Hann Schickard Gesellschaft fuer Angewandte Forschung eV
Publication of JP2021515882A publication Critical patent/JP2021515882A/ja
Priority to JP2022075661A priority Critical patent/JP7460682B2/ja
Publication of JP2021515882A5 publication Critical patent/JP2021515882A5/ja
Priority to JP2023196781A priority patent/JP2024020474A/ja
Application granted granted Critical
Publication of JP7561619B2 publication Critical patent/JP7561619B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/18—Investigating or analyzing materials by the use of thermal means by investigating thermal conductivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/6888—Thermoelectric elements, e.g. thermocouples, thermopiles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/483—Physical analysis of biological material
    • G01N33/497—Physical analysis of biological material of gaseous biological material, e.g. breath

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Biomedical Technology (AREA)
  • Molecular Biology (AREA)
  • Fluid Mechanics (AREA)
  • Medicinal Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Urology & Nephrology (AREA)
  • Hematology (AREA)
  • Biophysics (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP2020537150A 2018-01-05 2019-01-07 熱ガスセンサの評価装置、方法およびコンピュータプログラム Active JP7561619B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2022075661A JP7460682B2 (ja) 2018-01-05 2022-05-02 熱ガスセンサの評価装置、方法およびコンピュータプログラム
JP2023196781A JP2024020474A (ja) 2018-01-05 2023-11-20 熱ガスセンサの評価装置、方法およびコンピュータプログラム

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP18150496 2018-01-05
EP18150496.0 2018-01-05
PCT/EP2019/050261 WO2019135002A2 (de) 2018-01-05 2019-01-07 Auswerteanordnung für einen thermischen gassensor, verfahren und computerprogramme

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2022075661A Division JP7460682B2 (ja) 2018-01-05 2022-05-02 熱ガスセンサの評価装置、方法およびコンピュータプログラム

Publications (3)

Publication Number Publication Date
JP2021515882A JP2021515882A (ja) 2021-06-24
JP2021515882A5 JP2021515882A5 (https=) 2022-05-18
JP7561619B2 true JP7561619B2 (ja) 2024-10-04

Family

ID=60990632

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2020537150A Active JP7561619B2 (ja) 2018-01-05 2019-01-07 熱ガスセンサの評価装置、方法およびコンピュータプログラム
JP2022075661A Active JP7460682B2 (ja) 2018-01-05 2022-05-02 熱ガスセンサの評価装置、方法およびコンピュータプログラム
JP2023196781A Pending JP2024020474A (ja) 2018-01-05 2023-11-20 熱ガスセンサの評価装置、方法およびコンピュータプログラム

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2022075661A Active JP7460682B2 (ja) 2018-01-05 2022-05-02 熱ガスセンサの評価装置、方法およびコンピュータプログラム
JP2023196781A Pending JP2024020474A (ja) 2018-01-05 2023-11-20 熱ガスセンサの評価装置、方法およびコンピュータプログラム

Country Status (8)

Country Link
US (3) US11686695B2 (https=)
EP (3) EP3735580B1 (https=)
JP (3) JP7561619B2 (https=)
KR (2) KR102558160B1 (https=)
CN (2) CN112055811B (https=)
AU (2) AU2019205103B2 (https=)
CA (2) CA3088990C (https=)
WO (1) WO2019135002A2 (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7561619B2 (ja) 2018-01-05 2024-10-04 ハーン－シッカート－ゲゼルシャフト フュア アンゲヴァンテ フォアシュング アインゲトラーゲナー フェライン 熱ガスセンサの評価装置、方法およびコンピュータプログラム
US11073415B2 (en) 2019-10-21 2021-07-27 Flusso Limited Thermal fluid flow sensor having a dielectric membrane comprising discontinuities between the heating element and an edge
JP7452323B2 (ja) * 2020-08-18 2024-03-19 株式会社デンソー ガス濃度検出装置
WO2022079535A2 (en) * 2020-10-13 2022-04-21 Alcon Inc. Apparatus and methods for gas verification
EP4009008B1 (en) * 2020-12-03 2024-01-31 Sensirion AG Fault detection in a thermal sensor device
EP4198504B1 (en) * 2021-12-17 2025-07-02 Sensirion AG Thermal sensor device and method for determining concentration of a target gas in a gas sample
DE102022209906A1 (de) * 2022-09-20 2024-03-21 Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. Sensoranordnung
DE102022209905A1 (de) * 2022-09-20 2024-03-21 Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. Sensoranordnung
DE102022127043B4 (de) * 2022-10-15 2024-05-23 Sensirion Ag Driftkompensation für einen Sensor zur Messung der Konzentration eines Stoffes in einem Fluid
DE102022214190A1 (de) * 2022-12-21 2024-06-27 Vitesco Technologies GmbH Verfahren zur Diagnose eines Gaskonzentrationssensors, Gaskonzentrationssensor, Computerprogramm und computerlesbares Medium
US12596085B2 (en) * 2023-07-17 2026-04-07 Posifa Technologies Inc. Method and apparatus for simultaneously measuring air contained hydrogen and water vapor concentrations via a single MEMS thermal conductivity sensor
EP4610642A1 (de) * 2024-02-29 2025-09-03 Hahn-Schickard-Gesellschaft für angewandte Forschung e. V. Verfahren und thermischer sensor zur detektion von mikroplastik

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000028558A (ja) 1998-07-08 2000-01-28 Shinku Riko Kk 熱物性測定方法と装置
US20160290849A1 (en) 2013-11-19 2016-10-06 Endress+Hauser Flowtec Ag Measuring device and method for determining a corrected mass flow and uses of the measuring device

Family Cites Families (57)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3866108A (en) * 1971-12-06 1975-02-11 Westinghouse Electric Corp Control system and method for controlling dual fuel operation of industrial gas turbine power plants, preferably employing a digital computer
US4259835A (en) * 1978-02-06 1981-04-07 Westinghouse Electric Corp. System and method for monitoring industrial gas turbine operating parameters and for providing gas turbine power plant control system inputs representative thereof
JPH0493648A (ja) 1990-08-03 1992-03-26 Yamatake Honeywell Co Ltd ガスクロマトグラフ
DE4338200A1 (de) * 1993-11-09 1995-05-11 Efu Ges Fuer Ur Umformtechnik Verfahren zur Messung der Temperatur von metallischen Werkstücken oder ihres Feststoffanteils im teilerstarrten Zustand
JP3370801B2 (ja) 1994-11-02 2003-01-27 リコーエレメックス株式会社 温度補償付き雰囲気検出装置
US5897836A (en) * 1996-12-19 1999-04-27 J And N Associates, Inc. Thermal gas sensing apparatus
US10130787B2 (en) 1997-06-17 2018-11-20 Fisher & Paykel Healthcare Limited Humidity controller
US6169965B1 (en) 1997-12-31 2001-01-02 Honeywell International Inc. Fluid property and flow sensing via a common frequency generator and FFT
US6019505A (en) 1997-12-31 2000-02-01 Honeywell Inc. Time lag approach for measuring thermal conductivity and specific heat
US6079253A (en) 1997-12-31 2000-06-27 Honeywell Inc. Method and apparatus for measuring selected properties of a fluid of interest using a single heater element
EP1144958B1 (de) * 1998-12-22 2004-03-24 Sensirion AG Verfahren und sensor zur messung eines massenflusses
DE19944181A1 (de) * 1999-09-15 2001-04-12 Bosch Gmbh Robert Sensor zur Bestimmung der Konzentration von Gaskomponenten in Gasgemischen
DE19949327A1 (de) * 1999-10-13 2001-04-19 Grunewald Axel Ulrich Verfahren und Einrichtung zur Bestimmung der Gaskonzentrationen in einem Gasgemisch
JP3843880B2 (ja) 2001-05-31 2006-11-08 株式会社デンソー ガス濃度センサのヒータ制御装置
GR1004040B (el) 2001-07-31 2002-10-31 Μεθοδος για την κατασκευη αιωρουμενων μεμβρανων πορωδους πυριτιου και εφαρμογης της σε αισθητηρες αεριων
US20080044939A1 (en) * 2002-01-24 2008-02-21 Nassiopoulou Androula G Low power silicon thermal sensors and microfluidic devices based on the use of porous sealed air cavity technology or microchannel technology
CA2513126A1 (en) * 2003-01-23 2004-08-05 Ems-Patent Ag Increased-accuracy gas energy meter
JP4500904B2 (ja) * 2005-01-31 2010-07-14 一平 鳥越 熱伝達特性測定方法および装置
JP4662339B2 (ja) 2005-02-04 2011-03-30 エプソンイメージングデバイス株式会社 液晶表示パネル
DE102005023695A1 (de) * 2005-05-23 2006-11-30 Robert Bosch Gmbh Verfahren und Vorrichtung zur Korrektur der Alterung eines Gasmessfühlers
DE102005059304B3 (de) * 2005-12-09 2007-05-31 Areva Np Gmbh Verfahren und Einrichtung zum Kalibrieren eines Feuchtigkeitssensors
EP1840535B1 (en) * 2006-03-31 2011-01-12 Sensirion Holding AG Flow sensor with thermocouples
DE102006054505A1 (de) 2006-11-20 2008-05-29 Escube Gmbh & Co. Kg Vorrichtung und Verfahren zur Bestimmung der Konzentration eines Stoffes in einem Gas
US7780343B2 (en) 2007-07-09 2010-08-24 Siargo Ltd. Micromachined gas and liquid concentration sensor and method of making the same
DE102008047511A1 (de) 2007-09-13 2009-03-19 Weinmann Geräte für Medizin GmbH + Co. KG Vorrichtung und Verfahren zur Atemgasanalyse
US8174416B2 (en) * 2007-09-28 2012-05-08 Nxp B.V. Automatic common-mode rejection calibration
US8331892B2 (en) * 2008-03-29 2012-12-11 Qualcomm Incorporated Method and system for DC compensation and AGC
JP4983726B2 (ja) 2008-05-29 2012-07-25 トヨタ自動車株式会社 ガス濃度センサの暖機制御装置
JP5745205B2 (ja) 2008-08-22 2015-07-08 木村　光照 加熱励振を利用した熱伝導型気圧センサ
EP2175246B1 (en) * 2008-10-09 2017-07-19 Sensirion AG A method for measuring a fluid composition parameter by means of a flow sensor
FR2949155B1 (fr) * 2009-08-14 2012-04-06 Neosens Procede de mesure ou de detection de l'encrassement d'un reacteur
JP5055349B2 (ja) 2009-12-28 2012-10-24 日立オートモティブシステムズ株式会社 熱式ガスセンサ
EP2348292A1 (en) * 2010-01-13 2011-07-27 Sensirion AG Sensor device
DE102011075519A1 (de) * 2011-05-09 2012-11-15 Innovative Sensor Technology Ist Ag Verfahren und Vorrichtung zum thermischen Bestimmen des Massedurchflusses eines Mediums in einer Leitung
DE102011081922B4 (de) * 2011-08-31 2021-12-23 Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. Strömumgssensor zur Bestimmung eines Strömungsparameters
US8907803B2 (en) 2012-01-09 2014-12-09 Intwine Energy Networked air quality monitoring
US20130234330A1 (en) * 2012-03-08 2013-09-12 Infineon Technologies Ag Semiconductor Packages and Methods of Formation Thereof
JP5779131B2 (ja) 2012-03-27 2015-09-16 アズビル株式会社 発熱量測定システム及び発熱量の測定方法
DE102012102979A1 (de) 2012-04-05 2013-10-24 Endress + Hauser Flowtec Ag Durchflussmessgerät, Messrohr sowie Verfahren zur Herstellung eines Durchflussmessgeräts
JP5782406B2 (ja) 2012-06-14 2015-09-24 日本特殊陶業株式会社 ガスセンサシステム
DE102013102398B8 (de) * 2013-03-11 2024-06-27 Innovative Sensor Technology Ist Ag Thermischer Strömungssensor zur Bestimmung der Zusammensetzung eines Gasgemisches, sowie dessen Strömungsgeschwindigkeit
DE102014000939A1 (de) 2013-06-20 2014-12-24 Hydrometer Gmbh Verfahren zum Bestimmen wenigstens eines Gasparameters eines strömenden Gases
EP2840385A1 (en) * 2013-08-23 2015-02-25 DCG Systems, Inc. Lock-in thermography method and system for determining material layer parameters of a sample
JP2015064305A (ja) 2013-09-25 2015-04-09 木村　光照 熱型センサとこれを用いた熱計測モジュール
DE102014106729A1 (de) * 2014-05-13 2015-11-19 Endress + Hauser Flowtec Ag Verfahren zum Betreiben eines Messgerätes und Messgerät
EP2887057A1 (en) * 2013-12-17 2015-06-24 Sensirion AG Device and method of humidity compensated gas concentration monitoring by thermal conductivity measurements
US9453807B2 (en) 2014-04-08 2016-09-27 Ams International Ag Thermal conductivity gas sensor with amplification material
EP2985592B1 (de) * 2014-08-13 2017-09-27 Siemens Aktiengesellschaft Absorptionsspektrometer und Verfahren zur Messung der Konzentration einer interessierenden Gaskomponente eines Messgases
JP6470985B2 (ja) 2015-01-27 2019-02-13 日本特殊陶業株式会社 マイクロヒータ及びセンサ
US10211673B2 (en) * 2015-03-04 2019-02-19 Siemens Industry, Inc. Apparatus and methods for timestamping electrical data in a panel meter
DE102015107584A1 (de) 2015-05-13 2016-11-17 Innovative Sensor Technology Ist Ag Verfahren zur Bestimmung eines Produktes aus Wärmekapazität und Dichte
JP6459788B2 (ja) 2015-06-12 2019-01-30 株式会社デンソー センサの印加電圧制御装置
GB2545426B (en) 2015-12-14 2021-08-04 Sciosense Bv Sensing Layer Formation
WO2019034570A1 (de) * 2017-08-14 2019-02-21 Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. Sensoranordnung mit drucksensor und thermischem gassensor
EP3502687B1 (en) * 2017-12-20 2022-06-29 Sensirion AG Determination of gas parameters
JP7561619B2 (ja) 2018-01-05 2024-10-04 ハーン－シッカート－ゲゼルシャフト フュア アンゲヴァンテ フォアシュング アインゲトラーゲナー フェライン 熱ガスセンサの評価装置、方法およびコンピュータプログラム
JP7130290B2 (ja) 2020-10-27 2022-09-05 株式会社I’mbesideyou 情報抽出装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000028558A (ja) 1998-07-08 2000-01-28 Shinku Riko Kk 熱物性測定方法と装置
US20160290849A1 (en) 2013-11-19 2016-10-06 Endress+Hauser Flowtec Ag Measuring device and method for determining a corrected mass flow and uses of the measuring device

Also Published As

Publication number Publication date
EP3926335B1 (de) 2022-10-26
KR20200101988A (ko) 2020-08-28
AU2022200416A1 (en) 2022-02-17
KR102400465B1 (ko) 2022-05-20
AU2019205103A1 (en) 2020-07-23
CA3088990A1 (en) 2019-07-11
US11686695B2 (en) 2023-06-27
JP2022119773A (ja) 2022-08-17
US11874242B2 (en) 2024-01-16
EP3735580A2 (de) 2020-11-11
EP4141430B1 (de) 2025-06-18
KR20220069122A (ko) 2022-05-26
WO2019135002A2 (de) 2019-07-11
CN117309929A (zh) 2023-12-29
CN112055811A (zh) 2020-12-08
CA3088990C (en) 2023-12-19
JP2021515882A (ja) 2021-06-24
CN112055811B (zh) 2023-12-26
EP3926335A1 (de) 2021-12-22
EP3735580B1 (de) 2022-04-27
AU2022200416B2 (en) 2023-06-15
JP2024020474A (ja) 2024-02-14
US12385862B2 (en) 2025-08-12
US20220390397A1 (en) 2022-12-08
CA3185299C (en) 2025-08-05
JP7460682B2 (ja) 2024-04-02
KR102558160B1 (ko) 2023-07-21
WO2019135002A3 (de) 2019-08-29
US20200333273A1 (en) 2020-10-22
EP4141430A1 (de) 2023-03-01
CA3185299A1 (en) 2019-07-11
AU2019205103B2 (en) 2021-11-04
US20240159696A1 (en) 2024-05-16

Similar Documents

Publication Publication Date Title
JP7561619B2 (ja) 熱ガスセンサの評価装置、方法およびコンピュータプログラム
JP7055543B2 (ja) ガスセンサおよびその動作方法
US8504311B2 (en) Method and mass flow controller for enhanced operating range
US10451575B2 (en) Gas measurement device and measurement method thereof
CN114072670A (zh) 用于确定流体环境中的目标气体浓度的方法和系统
JPH1114580A (ja) 多レベル感度回路を有するガス・センサ
JP4270711B2 (ja) ガス検知方法及び装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20200904

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20200904

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20211102

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20220131

A524 Written submission of copy of amendment under article 19 pct

Free format text: JAPANESE INTERMEDIATE CODE: A524

Effective date: 20220502

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20220830

A524 Written submission of copy of amendment under article 19 pct

Free format text: JAPANESE INTERMEDIATE CODE: A524

Effective date: 20221223

C60 Trial request (containing other claim documents, opposition documents)

Free format text: JAPANESE INTERMEDIATE CODE: C60

Effective date: 20221223

C11 Written invitation by the commissioner to file amendments

Free format text: JAPANESE INTERMEDIATE CODE: C11

Effective date: 20230110

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20230105

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20230126

C21 Notice of transfer of a case for reconsideration by examiners before appeal proceedings

Free format text: JAPANESE INTERMEDIATE CODE: C21

Effective date: 20230131

A912 Re-examination (zenchi) completed and case transferred to appeal board

Free format text: JAPANESE INTERMEDIATE CODE: A912

Effective date: 20230310

C211 Notice of termination of reconsideration by examiners before appeal proceedings

Free format text: JAPANESE INTERMEDIATE CODE: C211

Effective date: 20230314

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20240617

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20240924

R150 Certificate of patent or registration of utility model

Ref document number: 7561619

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150