JP7548995B2 - 複合材料薄膜、その調製方法及び表示パネル - Google Patents
複合材料薄膜、その調製方法及び表示パネル Download PDFInfo
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- JP7548995B2 JP7548995B2 JP2022505370A JP2022505370A JP7548995B2 JP 7548995 B2 JP7548995 B2 JP 7548995B2 JP 2022505370 A JP2022505370 A JP 2022505370A JP 2022505370 A JP2022505370 A JP 2022505370A JP 7548995 B2 JP7548995 B2 JP 7548995B2
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- 239000002131 composite material Substances 0.000 title claims description 80
- 239000010409 thin film Substances 0.000 title claims description 79
- 238000002360 preparation method Methods 0.000 title description 7
- 239000011148 porous material Substances 0.000 claims description 118
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 101
- 239000003446 ligand Substances 0.000 claims description 78
- 239000002105 nanoparticle Substances 0.000 claims description 69
- 239000000377 silicon dioxide Substances 0.000 claims description 50
- 239000004094 surface-active agent Substances 0.000 claims description 41
- 239000010410 layer Substances 0.000 claims description 40
- UHYPYGJEEGLRJD-UHFFFAOYSA-N cadmium(2+);selenium(2-) Chemical compound [Se-2].[Cd+2] UHYPYGJEEGLRJD-UHFFFAOYSA-N 0.000 claims description 36
- 238000000034 method Methods 0.000 claims description 17
- LZZYPRNAOMGNLH-UHFFFAOYSA-M Cetrimonium bromide Chemical compound [Br-].CCCCCCCCCCCCCCCC[N+](C)(C)C LZZYPRNAOMGNLH-UHFFFAOYSA-M 0.000 claims description 16
- 239000010408 film Substances 0.000 claims description 15
- 229910052751 metal Inorganic materials 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 14
- -1 phosphate ester Chemical class 0.000 claims description 12
- 150000003384 small molecules Chemical class 0.000 claims description 12
- 229910019142 PO4 Inorganic materials 0.000 claims description 11
- GVGUFUZHNYFZLC-UHFFFAOYSA-N dodecyl benzenesulfonate;sodium Chemical compound [Na].CCCCCCCCCCCCOS(=O)(=O)C1=CC=CC=C1 GVGUFUZHNYFZLC-UHFFFAOYSA-N 0.000 claims description 11
- 229940080264 sodium dodecylbenzenesulfonate Drugs 0.000 claims description 11
- 239000002346 layers by function Substances 0.000 claims description 10
- 239000002563 ionic surfactant Substances 0.000 claims description 9
- 229910044991 metal oxide Inorganic materials 0.000 claims description 9
- 150000004706 metal oxides Chemical class 0.000 claims description 9
- 239000002808 molecular sieve Substances 0.000 claims description 9
- 239000010452 phosphate Substances 0.000 claims description 9
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 claims description 9
- 239000000344 soap Substances 0.000 claims description 8
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 7
- 239000012528 membrane Substances 0.000 claims description 7
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 7
- 239000012454 non-polar solvent Substances 0.000 claims description 7
- 150000004028 organic sulfates Chemical class 0.000 claims description 7
- 229910052698 phosphorus Inorganic materials 0.000 claims description 7
- 239000011574 phosphorus Substances 0.000 claims description 7
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 claims description 7
- 150000003573 thiols Chemical class 0.000 claims description 7
- 150000001412 amines Chemical class 0.000 claims description 6
- OOCMUZJPDXYRFD-UHFFFAOYSA-L calcium;2-dodecylbenzenesulfonate Chemical compound [Ca+2].CCCCCCCCCCCCC1=CC=CC=C1S([O-])(=O)=O.CCCCCCCCCCCCC1=CC=CC=C1S([O-])(=O)=O OOCMUZJPDXYRFD-UHFFFAOYSA-L 0.000 claims description 6
- 150000003014 phosphoric acid esters Chemical class 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 claims description 4
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims description 4
- 229910000673 Indium arsenide Inorganic materials 0.000 claims description 3
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 claims description 3
- 238000002156 mixing Methods 0.000 claims description 3
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- LNETULKMXZVUST-UHFFFAOYSA-N 1-naphthoic acid Chemical compound C1=CC=C2C(C(=O)O)=CC=CC2=C1 LNETULKMXZVUST-UHFFFAOYSA-N 0.000 claims description 2
- YSIQDTZQRDDQNF-UHFFFAOYSA-L barium(2+);2,3-di(nonyl)naphthalene-1-sulfonate Chemical compound [Ba+2].C1=CC=C2C(S([O-])(=O)=O)=C(CCCCCCCCC)C(CCCCCCCCC)=CC2=C1.C1=CC=C2C(S([O-])(=O)=O)=C(CCCCCCCCC)C(CCCCCCCCC)=CC2=C1 YSIQDTZQRDDQNF-UHFFFAOYSA-L 0.000 claims description 2
- 229910018219 SeTe Inorganic materials 0.000 claims 1
- 229910052980 cadmium sulfide Inorganic materials 0.000 claims 1
- 150000001735 carboxylic acids Chemical class 0.000 claims 1
- FESBVLZDDCQLFY-UHFFFAOYSA-N sete Chemical compound [Te]=[Se] FESBVLZDDCQLFY-UHFFFAOYSA-N 0.000 claims 1
- 239000002096 quantum dot Substances 0.000 description 77
- 239000000243 solution Substances 0.000 description 60
- 239000000463 material Substances 0.000 description 31
- 239000004005 microsphere Substances 0.000 description 17
- 239000011258 core-shell material Substances 0.000 description 14
- 230000000694 effects Effects 0.000 description 13
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 12
- 238000010586 diagram Methods 0.000 description 10
- 238000004070 electrodeposition Methods 0.000 description 9
- 238000005516 engineering process Methods 0.000 description 9
- 239000000203 mixture Substances 0.000 description 9
- 235000021317 phosphate Nutrition 0.000 description 9
- 238000003756 stirring Methods 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 6
- 239000008367 deionised water Substances 0.000 description 6
- 229910021641 deionized water Inorganic materials 0.000 description 6
- 239000000693 micelle Substances 0.000 description 6
- 239000000843 powder Substances 0.000 description 6
- 230000004048 modification Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 239000002086 nanomaterial Substances 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 239000002243 precursor Substances 0.000 description 5
- DKIDEFUBRARXTE-UHFFFAOYSA-N 3-mercaptopropanoic acid Chemical compound OC(=O)CCS DKIDEFUBRARXTE-UHFFFAOYSA-N 0.000 description 4
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- FFEARJCKVFRZRR-BYPYZUCNSA-N L-methionine Chemical compound CSCC[C@H](N)C(O)=O FFEARJCKVFRZRR-BYPYZUCNSA-N 0.000 description 4
- WHNWPMSKXPGLAX-UHFFFAOYSA-N N-Vinyl-2-pyrrolidone Chemical compound C=CN1CCCC1=O WHNWPMSKXPGLAX-UHFFFAOYSA-N 0.000 description 4
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 4
- 229930182817 methionine Natural products 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 239000011734 sodium Substances 0.000 description 4
- JIAARYAFYJHUJI-UHFFFAOYSA-L zinc dichloride Chemical compound [Cl-].[Cl-].[Zn+2] JIAARYAFYJHUJI-UHFFFAOYSA-L 0.000 description 4
- 239000002659 electrodeposit Substances 0.000 description 3
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 125000003277 amino group Chemical group 0.000 description 2
- JPNZKPRONVOMLL-UHFFFAOYSA-N azane;octadecanoic acid Chemical class [NH4+].CCCCCCCCCCCCCCCCCC([O-])=O JPNZKPRONVOMLL-UHFFFAOYSA-N 0.000 description 2
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 2
- 229910002113 barium titanate Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- PSIBWKDABMPMJN-UHFFFAOYSA-L cadmium(2+);diperchlorate Chemical compound [Cd+2].[O-]Cl(=O)(=O)=O.[O-]Cl(=O)(=O)=O PSIBWKDABMPMJN-UHFFFAOYSA-L 0.000 description 2
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- IXCSERBJSXMMFS-UHFFFAOYSA-N hcl hcl Chemical compound Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000007641 inkjet printing Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000013335 mesoporous material Substances 0.000 description 2
- UFWIBTONFRDIAS-UHFFFAOYSA-N naphthalene-acid Natural products C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 2
- 150000002790 naphthalenes Chemical class 0.000 description 2
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 150000003013 phosphoric acid derivatives Chemical class 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- YUKQRDCYNOVPGJ-UHFFFAOYSA-N thioacetamide Chemical compound CC(N)=S YUKQRDCYNOVPGJ-UHFFFAOYSA-N 0.000 description 2
- DLFVBJFMPXGRIB-UHFFFAOYSA-N thioacetamide Natural products CC(N)=O DLFVBJFMPXGRIB-UHFFFAOYSA-N 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- 229910001930 tungsten oxide Inorganic materials 0.000 description 2
- 238000002525 ultrasonication Methods 0.000 description 2
- 239000011592 zinc chloride Substances 0.000 description 2
- 235000005074 zinc chloride Nutrition 0.000 description 2
- SWLVFNYSXGMGBS-UHFFFAOYSA-N ammonium bromide Chemical compound [NH4+].[Br-] SWLVFNYSXGMGBS-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000000295 emission spectrum Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000005525 hole transport Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000005424 photoluminescence Methods 0.000 description 1
- 230000005476 size effect Effects 0.000 description 1
- 238000009210 therapy by ultrasound Methods 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
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Description
前記細孔の孔径寸法は、前記ナノ粒子又は前記有機小分子の寸法と対応する複合材料薄膜が提案される。
多孔質材料ユニット溶液を調製することと、
前記多孔質材料ユニット溶液における多孔質材料ユニットの表面が帯電するように前記多孔質材料ユニット溶液に帯電リガンドを添加することと、
前記ナノ粒子溶液におけるナノ粒子が前記多孔質材料ユニットの細孔に入り込んで複合材料溶液を形成するように前記多孔質材料ユニット溶液と前記ナノ粒子溶液とを混合することと、
電極を前記複合材料溶液に入れることと、
前記ナノ粒子を担持する前記多孔質材料ユニットが前記電極に堆積するように前記電極に通電することと、を含む複合材料薄膜の調製方法がさらに提案される。
前記基板に設けられる薄膜トランジスタ素子層と、
前記薄膜トランジスタ素子層に設けられる陽極層と、
前記陽極層に設けられる発光機能層と、
前記発光機能層に設けられる陰極層と、
前記陰極層に設けられる封止層と、を含み、
前記発光機能層は、複合材料薄膜を含み、
前記複合材料薄膜は、量子ドットナノ粒子を担持する細孔を表面に有する多孔質材料ユニットを含む少なくとも一つの膜層を含み、
前記細孔の孔径寸法は、前記量子ドットナノ粒子の寸法と対応する表示パネルがさらに提案される。
ナノ粒子溶液を調製するステップS1と、
多孔質材料ユニット溶液を調製するステップS2と、
前記多孔質材料ユニット溶液における多孔質材料ユニットの表面が帯電するように前記多孔質材料ユニット溶液に帯電リガンドを添加するステップS3と、
前記ナノ粒子溶液におけるナノ粒子が前記多孔質材料ユニットの細孔に入り込んで複合材料溶液を形成するように前記多孔質材料ユニット溶液と前記ナノ粒子溶液とを混合するステップS4と、
電極を前記複合材料溶液に入れるステップS5と、
前記ナノ粒子を担持する前記多孔質材料ユニットが前記電極に堆積するように前記電極に通電するステップS6と、を含む。
Claims (13)
- ナノ粒子溶液を調製することと、
多孔質材料ユニット溶液を調製することと、
前記多孔質材料ユニット溶液における多孔質材料ユニットの表面が帯電するように前記多孔質材料ユニット溶液に帯電リガンドを添加することと、
前記ナノ粒子溶液におけるナノ粒子が前記多孔質材料ユニットの細孔に入り込んで複合材料溶液を形成するように前記多孔質材料ユニット溶液と前記ナノ粒子溶液とを混合することと、
電極を前記複合材料溶液に入れることと、
前記ナノ粒子を担持する前記多孔質材料ユニットが前記電極に堆積するように前記電極に通電することと、を含み、
前記帯電リガンドは、化学結合を介して前記多孔質材料ユニットの表面に接続され、イオン性界面活性剤から選択され、
前記多孔質材料ユニット溶液は、非極性溶媒によって調製され、前記界面活性剤の濃度は臨界濃度よりも大きい、
複合材料薄膜の調製方法。 - 前記多孔質材料ユニットは、メソポーラスシリカ、メソポーラスカーボンモレキュラーシーブ及びメソポーラス金属酸化物の少なくとも一つから選択される、
請求項1に記載の複合材料薄膜の調製方法。 - 請求項1に記載の複合材料薄膜の調製方法によって製造される複合材料薄膜であって、
ナノ粒子又は有機小分子を担持する細孔を表面に有する多孔質材料ユニットを含む少なくとも一つの膜層を含み、
前記細孔の孔径寸法は、前記ナノ粒子又は前記有機小分子の寸法と対応する、
複合材料薄膜。 - 前記多孔質材料ユニットの表面にリガンドがグラフトされる、
請求項3に記載の複合材料薄膜。 - 前記ナノ粒子は、ZnCdSe 2 、InP、Cd 2 Se、CdSe、Cd 2 SeTe及びInAsの少なくとも一つ並びにCdS、ZnSe、ZnCdSe 2 、ZnS及びZnOの少なくとも一つを含む量子ドットナノ粒子を含む、
請求項3に記載の複合材料薄膜。 - 前記リガンドは、アミノリガンド、チオールリガンド、カルボン酸リガンド及びリンリガンドの少なくとも一つを含む、
請求項4に記載の複合材料薄膜。 - 前記界面活性剤は、有機硫酸塩、ヘキサデシルトリメチルアンモニウムブロミド、金属石鹸、有機アミン、有機リン酸塩、リン酸エステルの少なくとも一つを含む、
請求項3に記載の複合材料薄膜。 - 前記有機硫酸塩は、ドデシルベンゼンスルホン酸カルシウム、ドデシルベンゼンスルホン酸ナトリウム及びジノニルナフタレンスルホン酸バリウムの少なくとも一つを含む、
請求項7に記載の複合材料薄膜。 - 前記金属石鹸は、ナフトエ酸金属塩及びステアリン酸塩の少なくとも一つを含む、
請求項7に記載の複合材料薄膜。 - 前記イオン性界面活性剤は、ドデシルベンゼンスルホン酸ナトリウム、リン酸エステル系界面活性剤及びヘキサデシルトリメチルアンモニウムブロミドの少なくとも一つを含む、
請求項3に記載の複合材料薄膜。 - 前記多孔質材料ユニットの寸法は、50~1000nmであり、前記孔径寸法は、2~50nmであり、前記ナノ粒子又は前記有機小分子の寸法は、2~50nmである、
請求項3に記載の複合材料薄膜。 - 前記ナノ粒子又は前記有機小分子と前記多孔質材料ユニットとの質量比は、10:1~1:100である、
請求項11に記載の複合材料薄膜。 - 基板と、
前記基板に設けられる薄膜トランジスタ素子層と、
前記薄膜トランジスタ素子層に設けられる陽極層と、
前記陽極層に設けられる発光機能層と、
前記発光機能層に設けられる陰極層と、
前記陰極層に設けられる封止層と、を含み、
前記発光機能層は、請求項3~12のいずれか一項に記載の複合材料薄膜を含む、
表示パネル。
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