JP7540506B2 - 量子回路の製造方法 - Google Patents

量子回路の製造方法 Download PDF

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Publication number
JP7540506B2
JP7540506B2 JP2022566521A JP2022566521A JP7540506B2 JP 7540506 B2 JP7540506 B2 JP 7540506B2 JP 2022566521 A JP2022566521 A JP 2022566521A JP 2022566521 A JP2022566521 A JP 2022566521A JP 7540506 B2 JP7540506 B2 JP 7540506B2
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region
main surface
color center
laser light
quantum circuit
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Japanese (ja)
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JPWO2022118366A1 (https=
JPWO2022118366A5 (https=
Inventor
哲也 宮武
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Fujitsu Ltd
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Fujitsu Ltd
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004—Combinations of two or more optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/121—Channel; buried or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
JP2022566521A 2020-12-01 2020-12-01 量子回路の製造方法 Active JP7540506B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/044622 WO2022118366A1 (ja) 2020-12-01 2020-12-01 量子回路、量子コンピュータ及び量子回路の製造方法

Publications (3)

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JPWO2022118366A1 JPWO2022118366A1 (https=) 2022-06-09
JPWO2022118366A5 JPWO2022118366A5 (https=) 2023-08-08
JP7540506B2 true JP7540506B2 (ja) 2024-08-27

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JP2022566521A Active JP7540506B2 (ja) 2020-12-01 2020-12-01 量子回路の製造方法

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US (1) US12461305B2 (https=)
EP (1) EP4258029A4 (https=)
JP (1) JP7540506B2 (https=)
CN (1) CN116235091A (https=)
WO (1) WO2022118366A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2024042602A1 (https=) * 2022-08-23 2024-02-29
CN120469014B (zh) * 2025-04-27 2026-03-24 武汉大学 光电共封装器件及其制备方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003506731A (ja) 1999-07-29 2003-02-18 コーニング インコーポレイテッド フェムト秒パルスレーザを用いるシリカベースガラスへの光デバイスの直接書込
JP2005538392A (ja) 2002-08-02 2005-12-15 フェムトニックス・コーポレーション フェムト秒光パルスを有する光導波路デバイスのミクロ構造化

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013544441A (ja) 2010-12-03 2013-12-12 アデレイド リサーチ アンド イノヴェイション プロプライエタリー リミテッド 光の増幅のための素子及びその製造方法
US9157859B2 (en) 2011-06-13 2015-10-13 President And Fellows Of Harvard College Efficient fluorescence detection in solid state spin systems
JP2013076618A (ja) * 2011-09-30 2013-04-25 Sony Corp 光伝導素子、レンズ、テラヘルツ放射顕微鏡及びデバイスの製造方法
CN103743390B (zh) * 2013-12-31 2016-08-17 北京航空航天大学 基于nv-色心金刚石—mems混合结构的陀螺仪及制作方法
RU2655026C1 (ru) * 2017-04-24 2018-05-23 Федеральное государственное бюджетное научное учреждение "Федеральный исследовательский центр Институт прикладной физики Российской академии наук" (ИПФ РАН) Способ получения фотолюминесценции отдельных центров окраски в осажденном из газовой фазы алмазе
WO2021222097A1 (en) * 2020-04-28 2021-11-04 Board Of Trustees Of Michigan State University Laser activated luminescence system

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003506731A (ja) 1999-07-29 2003-02-18 コーニング インコーポレイテッド フェムト秒パルスレーザを用いるシリカベースガラスへの光デバイスの直接書込
JP2005538392A (ja) 2002-08-02 2005-12-15 フェムトニックス・コーポレーション フェムト秒光パルスを有する光導波路デバイスのミクロ構造化

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
BOOTH, M. and SALTER P.，Dynamic optical laser fabrication for engineering of quantum photonic devices，Quantum Sensing and Nano Electronics and Photonics XVI，SPIE，2019年02月01日，Vol. 10926，pp. 10926Y-1-pp. 10926Y-6，DOI:10.1117/12.2509144
HADDEN et al.，Integrated waveguides and deterministically positioned nitrogen vacancy centers in diamond created by femtosecond laser writing，Optics Letters，米国，OSA Publishing，2018年08月01日，Vol. 43, No. 15，pp. 3586-3589
HANAFI et al.，Polycrystalline diamond photonic waveguides realized by femtosecond laser lithography，Optical Materials Express，米国，OSA Publishing，2019年06月24日，Vol. 9, No. 7，pp. 3109-3114，DOI:10.1364/OME.9.003109
SOTILLO et al.，Diamond photonics platform enabled by femtosecond laser writing，Scientific Reports，Springer Nature，2016年10月17日，Vol. 6, Article No.: 35566，pp. 1-9，DOI:10.1038/srep35566

Also Published As

Publication number Publication date
EP4258029A1 (en) 2023-10-11
US12461305B2 (en) 2025-11-04
CN116235091A (zh) 2023-06-06
EP4258029A4 (en) 2024-01-17
WO2022118366A1 (ja) 2022-06-09
US20230280528A1 (en) 2023-09-07
JPWO2022118366A1 (https=) 2022-06-09

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