JP7535687B2 - レーザ装置及びそれを用いたレーザ加工装置 - Google Patents

レーザ装置及びそれを用いたレーザ加工装置 Download PDF

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Publication number
JP7535687B2
JP7535687B2 JP2021571218A JP2021571218A JP7535687B2 JP 7535687 B2 JP7535687 B2 JP 7535687B2 JP 2021571218 A JP2021571218 A JP 2021571218A JP 2021571218 A JP2021571218 A JP 2021571218A JP 7535687 B2 JP7535687 B2 JP 7535687B2
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JP
Japan
Prior art keywords
laser
laser light
optical axis
optical path
optical
Prior art date
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JP2021571218A
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English (en)
Japanese (ja)
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JPWO2021145357A1 (https=
Inventor
正敏 西尾
学 西原
義典 佐々木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Intellectual Property Management Co Ltd
Original Assignee
Panasonic Intellectual Property Management Co Ltd
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Publication of JPWO2021145357A1 publication Critical patent/JPWO2021145357A1/ja
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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/042—Automatically aligning the laser beam
    • B23K26/043—Automatically aligning the laser beam along the beam path, i.e. alignment of laser beam axis relative to laser beam apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • B23K26/705—Beam measuring devices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1822—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors comprising means for aligning the optical axis
    • G02B7/1827—Motorised alignment
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/262—Optical details of coupling light into, or out of, or between fibre ends, e.g. special fibre end shapes or associated optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3586—Control or adjustment details, e.g. calibrating
    • G02B6/3588—Control or adjustment details, e.g. calibrating of the processed beams, i.e. controlling during switching of orientation, alignment, or beam propagation properties such as intensity, size or shape
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Laser Beam Processing (AREA)
  • Light Guides In General And Applications Therefor (AREA)
JP2021571218A 2020-01-15 2021-01-14 レーザ装置及びそれを用いたレーザ加工装置 Active JP7535687B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020004767 2020-01-15
JP2020004767 2020-01-15
PCT/JP2021/000963 WO2021145357A1 (ja) 2020-01-15 2021-01-14 レーザ装置及びそれを用いたレーザ加工装置

Publications (2)

Publication Number Publication Date
JPWO2021145357A1 JPWO2021145357A1 (https=) 2021-07-22
JP7535687B2 true JP7535687B2 (ja) 2024-08-19

Family

ID=76864669

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021571218A Active JP7535687B2 (ja) 2020-01-15 2021-01-14 レーザ装置及びそれを用いたレーザ加工装置

Country Status (4)

Country Link
US (1) US20220326478A1 (https=)
EP (1) EP4092473A4 (https=)
JP (1) JP7535687B2 (https=)
WO (1) WO2021145357A1 (https=)

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003295075A (ja) 2002-04-03 2003-10-15 Toshiba Corp 光スイッチ装置とその制御方法
US20040208468A1 (en) 2001-10-24 2004-10-21 Zbigniew Sufleta Variable optical attenuator
JP2007157937A (ja) 2005-12-02 2007-06-21 Furukawa Electric Co Ltd:The 半導体レーザモジュール及び半導体レーザモジュールの製造方法
JP2010207879A (ja) 2009-03-11 2010-09-24 Panasonic Corp レーザ加工方法およびレーザ加工装置
WO2011013666A1 (ja) 2009-07-28 2011-02-03 新日本製鐵株式会社 レーザ処理装置及び容器製造装置
JP2011115806A (ja) 2009-12-01 2011-06-16 Mitsubishi Electric Corp レーザ加工装置
WO2016117472A1 (ja) 2015-01-21 2016-07-28 三菱電機株式会社 光学装置の光軸調芯方法および装置ならびに光学装置の製造方法
WO2019049914A1 (ja) 2017-09-11 2019-03-14 パナソニックＩｐマネジメント株式会社 レーザ装置
JP2019192757A (ja) 2018-04-24 2019-10-31 パナソニックＩｐマネジメント株式会社 レーザ発振器及びそれを用いたレーザ加工装置、レーザ発振器の点検方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60130935A (ja) * 1983-12-19 1985-07-12 Mitsubishi Electric Corp レ−ザビ−ム伝送装置
JPS6271288A (ja) * 1985-09-25 1987-04-01 Hitachi Ltd レ−ザ加工装置
JPS63171283A (ja) * 1987-01-09 1988-07-15 Mitsubishi Electric Corp レ−ザ光軸ずれ検出装置
JPH01113191A (ja) * 1987-10-23 1989-05-01 Mitsubishi Electric Corp レーザビーム位置検出装置
JP4067167B2 (ja) * 1998-03-18 2008-03-26 川崎重工業株式会社 レーザ共振器のビーム軸ずれ検出装置およびビーム軸位置制御装置
JP3470867B2 (ja) 1998-03-20 2003-11-25 シャープ株式会社 光送受信モジュール
JP4184288B2 (ja) * 2004-01-20 2008-11-19 日立ビアメカニクス株式会社 レーザ加工機
DE102004041682B4 (de) * 2004-08-25 2007-09-13 Jenoptik Automatisierungstechnik Gmbh CO2-Laserbearbeitungskopf mit integrierter Überwachungseinrichtung
US7321114B2 (en) * 2005-03-10 2008-01-22 Hitachi Via Mechanics, Ltd. Apparatus and method for beam drift compensation
KR100939043B1 (ko) * 2007-11-19 2010-01-27 에이피시스템 주식회사 레이저 가공장치
JP7270169B2 (ja) * 2018-05-15 2023-05-10 パナソニックＩｐマネジメント株式会社 レーザ装置及びそれを用いたレーザ加工装置

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040208468A1 (en) 2001-10-24 2004-10-21 Zbigniew Sufleta Variable optical attenuator
JP2003295075A (ja) 2002-04-03 2003-10-15 Toshiba Corp 光スイッチ装置とその制御方法
JP2007157937A (ja) 2005-12-02 2007-06-21 Furukawa Electric Co Ltd:The 半導体レーザモジュール及び半導体レーザモジュールの製造方法
JP2010207879A (ja) 2009-03-11 2010-09-24 Panasonic Corp レーザ加工方法およびレーザ加工装置
WO2011013666A1 (ja) 2009-07-28 2011-02-03 新日本製鐵株式会社 レーザ処理装置及び容器製造装置
JP2011115806A (ja) 2009-12-01 2011-06-16 Mitsubishi Electric Corp レーザ加工装置
WO2016117472A1 (ja) 2015-01-21 2016-07-28 三菱電機株式会社 光学装置の光軸調芯方法および装置ならびに光学装置の製造方法
WO2019049914A1 (ja) 2017-09-11 2019-03-14 パナソニックＩｐマネジメント株式会社 レーザ装置
JP2019192757A (ja) 2018-04-24 2019-10-31 パナソニックＩｐマネジメント株式会社 レーザ発振器及びそれを用いたレーザ加工装置、レーザ発振器の点検方法

Also Published As

Publication number Publication date
US20220326478A1 (en) 2022-10-13
EP4092473A4 (en) 2023-08-16
WO2021145357A1 (ja) 2021-07-22
EP4092473A1 (en) 2022-11-23
JPWO2021145357A1 (https=) 2021-07-22

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