JP7500367B2 - 半導体ウェハおよび半導体装置の製造方法 - Google Patents
半導体ウェハおよび半導体装置の製造方法 Download PDFInfo
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- 229910052710 silicon Inorganic materials 0.000 description 10
- 239000010703 silicon Substances 0.000 description 10
- 239000007772 electrode material Substances 0.000 description 9
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- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
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- 238000004544 sputter deposition Methods 0.000 description 5
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
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- 239000010931 gold Substances 0.000 description 3
- 229910021389 graphene Inorganic materials 0.000 description 3
- 229910052741 iridium Inorganic materials 0.000 description 3
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 3
- 229910052763 palladium Inorganic materials 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 239000010970 precious metal Substances 0.000 description 3
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- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
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- 239000011148 porous material Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
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- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
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- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
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- 239000011737 fluorine Substances 0.000 description 1
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- 150000002367 halogens Chemical class 0.000 description 1
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- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
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- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
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- 238000007254 oxidation reaction Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000004876 x-ray fluorescence Methods 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
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Description
図1は、半導体ウェハの外観模式図であり、図2は、半導体ウェハの構造例を示す断面模式図であり、X軸とX軸およびY軸に直交するZ軸とを含むX-Z断面の一部を示す。
図3は、半導体ウェハの構造例を示す上面模式図であり、半導体ウェハのX軸とX軸に直交するY軸とを含むX-Y平面の一部を示す。
本実施形態では、溝11の他の形状例について説明する。図12ないし図15は、溝11の他の形状例を示す模式図であり、半導体ウェハ1のX-Y平面の一部を示す。なお、上記半導体ウェハ1の説明と同じ部分については上記説明を適宜援用することができる。
本実施形態では、半導体ウェハ1の他の構造例について説明する。図19および図20は、半導体ウェハ1の他の構造例を示す断面模式図であり、X-Z断面の一部を示す。なお、上記半導体ウェハ1の説明と同じ部分については上記説明を適宜援用することができる。
溝11の形状は、特に限定されないが、ここでは、ライン状の溝として説明する。
本実施形態では、半導体ウェハ1の他の構造例について説明する。図21は、半導体ウェハ1の他の構造例を示す断面模式図であり、X-Z断面の一部を示す。なお、上記半導体ウェハ1の説明と同じ部分については上記説明を適宜援用することができる。
本実施形態では、半導体ウェハ1の他の構造例について説明する。図25は、半導体ウェハ1の他の構造例を示す断面模式図であり、X-Z断面の一部を示す。なお、上記半導体ウェハ1の説明と同じ部分については上記説明を適宜援用することができる。
本実施形態では、半導体ウェハ1の他の構造例について説明する。図26は、半導体ウェハ1の他の構造例を示す断面模式図である。なお、上記半導体ウェハ1の説明と同じ部分については上記説明を適宜援用することができる。
本実施形態では、半導体ウェハ1の他の構造例について説明する。図27は、半導体ウェハ1の他の構造例を示す断面模式図である。なお、上記半導体ウェハ1の説明と同じ部分については上記説明を適宜援用することができる。
本実施形態では、半導体ウェハ1の他の構造例について説明する。図33は、半導体ウェハ1の他の構造例を示す断面模式図である。なお、上記半導体ウェハ1の説明と同じ部分については上記説明を適宜援用することができる。
本実施形態では、半導体ウェハの使用方法例として、半導体装置の製造工程において上記半導体ウェハ1をダミーウェハとして使用する例について図35ないし図38を用いて説明する。
Claims (9)
- 内壁面を含む溝を有する表面を具備し、
前記内壁面は、凹部を有し、
前記溝は、前記内壁面が露出する、半導体ウェハ。 - 前記内壁面は、複数の前記凹部を有し、
複数の前記凹部は、前記溝の深さ方向または前記溝の内周に沿って間隔を空けて配置される、請求項1に記載の半導体ウェハ。 - 内底面と内壁面とを含む溝を有する表面と、
前記内底面および前記内壁面に面して設けられた多孔質領域と、を具備する、半導体ウェハ。 - 第1の内底面を含む第1の溝と、
前記第1の内底面に設けられ、第2の内底面を含む第2の溝と、
を有する表面を具備する、半導体ウェハ。 - 内壁面を含む溝を有する表面と、
前記表面の一部の上に設けられ、前記内壁面に沿って延在する半導体層と、
を具備する、半導体ウェハ。 - デバイスウェハを処理室内に載置するステップと、
請求項1ないし請求項5のいずれか一項に記載の半導体ウェハを前記処理室内に載置するステップと、
前記処理室内で、前記デバイスウェハと前記半導体ウェハとを同時に処理するステップと、
を具備する、
半導体装置の製造方法。 - 前記デバイスウェハは、交互に積層された第1の層と第2の層とを有する、請求項6に記載の半導体装置の製造方法。
- 前記処理は、成膜処理、エッチング処理、および改質処理からなる群より選ばれる少なくとも一つの処理を含む、請求項6または請求項7に記載の半導体装置の製造方法。
- 複数の前記半導体ウェハを前記処理室内に載置する、請求項6ないし請求項8のいずれか一項に記載の半導体装置の製造方法。
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