JP7480939B2 - Fe基ナノ・マイクロ突起体の製造方法 - Google Patents
Fe基ナノ・マイクロ突起体の製造方法 Download PDFInfo
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- JP7480939B2 JP7480939B2 JP2020046966A JP2020046966A JP7480939B2 JP 7480939 B2 JP7480939 B2 JP 7480939B2 JP 2020046966 A JP2020046966 A JP 2020046966A JP 2020046966 A JP2020046966 A JP 2020046966A JP 7480939 B2 JP7480939 B2 JP 7480939B2
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- irradiation
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- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 150000002500 ions Chemical class 0.000 claims description 55
- 229910045601 alloy Inorganic materials 0.000 claims description 9
- 239000000956 alloy Substances 0.000 claims description 9
- 238000004544 sputter deposition Methods 0.000 claims description 9
- 102200082816 rs34868397 Human genes 0.000 description 17
- 238000009792 diffusion process Methods 0.000 description 9
- 239000000758 substrate Substances 0.000 description 8
- 229910052802 copper Inorganic materials 0.000 description 6
- 229910052742 iron Inorganic materials 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 230000004913 activation Effects 0.000 description 4
- 125000004429 atom Chemical group 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910052725 zinc Inorganic materials 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 3
- 239000003054 catalyst Substances 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 239000000470 constituent Substances 0.000 description 2
- 229910052748 manganese Inorganic materials 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- 229910017518 Cu Zn Inorganic materials 0.000 description 1
- -1 Cu and Zn Chemical class 0.000 description 1
- 229910017752 Cu-Zn Inorganic materials 0.000 description 1
- 229910017827 Cu—Fe Inorganic materials 0.000 description 1
- 229910017943 Cu—Zn Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910000963 austenitic stainless steel Inorganic materials 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 239000010962 carbon steel Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- TVZPLCNGKSPOJA-UHFFFAOYSA-N copper zinc Chemical compound [Cu].[Zn] TVZPLCNGKSPOJA-UHFFFAOYSA-N 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000004453 electron probe microanalysis Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000036962 time dependent Effects 0.000 description 1
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- Catalysts (AREA)
- Cold Cathode And The Manufacture (AREA)
Description
Claims (2)
- FeまたはFe基合金の表面に圧縮残留応力を付与したうえに、スパッタ率がArイオンのピーク値を超える入射エネルギーの領域でGaイオンを照射してGaイオン照射方向に円錐状に成長させることを特徴とするFe基ナノ・マイクロ突起体の製造方法。
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JP2020046966A JP7480939B2 (ja) | 2020-02-28 | 2020-02-28 | Fe基ナノ・マイクロ突起体の製造方法 |
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JP2020046966A JP7480939B2 (ja) | 2020-02-28 | 2020-02-28 | Fe基ナノ・マイクロ突起体の製造方法 |
Publications (2)
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JP2021141033A JP2021141033A (ja) | 2021-09-16 |
JP7480939B2 true JP7480939B2 (ja) | 2024-05-10 |
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JP2020046966A Active JP7480939B2 (ja) | 2020-02-28 | 2020-02-28 | Fe基ナノ・マイクロ突起体の製造方法 |
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JP (1) | JP7480939B2 (ja) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008221439A (ja) | 2007-03-15 | 2008-09-25 | Tohoku Univ | ナノ突起構造体及びその製造方法 |
JP2014026197A (ja) | 2012-07-30 | 2014-02-06 | Tohoku Univ | 金属ナノ・マイクロ突起黒体及びその製造方法 |
JP2014042977A (ja) | 2012-08-29 | 2014-03-13 | Tohoku Univ | ナノ・マイクロ突起体 |
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2020
- 2020-02-28 JP JP2020046966A patent/JP7480939B2/ja active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008221439A (ja) | 2007-03-15 | 2008-09-25 | Tohoku Univ | ナノ突起構造体及びその製造方法 |
JP2014026197A (ja) | 2012-07-30 | 2014-02-06 | Tohoku Univ | 金属ナノ・マイクロ突起黒体及びその製造方法 |
JP2014042977A (ja) | 2012-08-29 | 2014-03-13 | Tohoku Univ | ナノ・マイクロ突起体 |
Non-Patent Citations (1)
Title |
---|
鈴江 巧、柳沢 淳一,「Si基板表面への低エネルギーGaイオン照射によるナノ突起構造の形成と評価」,第65回応用物理学会春季学術講演会 講演概要集,2018年,06-031 |
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JP2021141033A (ja) | 2021-09-16 |
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