JP7471352B2 - 信号層と放熱層とが分離されるtmvパッケージ構造及びその製造方法 - Google Patents
信号層と放熱層とが分離されるtmvパッケージ構造及びその製造方法 Download PDFInfo
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- JP7471352B2 JP7471352B2 JP2022125067A JP2022125067A JP7471352B2 JP 7471352 B2 JP7471352 B2 JP 7471352B2 JP 2022125067 A JP2022125067 A JP 2022125067A JP 2022125067 A JP2022125067 A JP 2022125067A JP 7471352 B2 JP7471352 B2 JP 7471352B2
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- layer
- substrate
- signal circuit
- circuit layer
- heat dissipation
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- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
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Description
(1)チップが基板表面に貼り合せられてワイヤボンディングするのは、パッケージ体積を増大し、高密度集積、小型化の発展要求を満足することができない。
(2)チップがパッケージングされた後に、一方の面がパッケージ材料であり、他方がボンディングパッドによりPCBに溶接され、チップの放熱効果が悪く、チップの裏面には放熱用銅面を設置しても、パッケージ構造により放熱用銅面の空間が制限され、チップが発生中の放熱問題を確実に改善することができない。
対向する第1側と第2側を有する基板を提供し、かつ前記基板の第2側の表面に仮支持面を加工するステップであって、前記基板にはパッケージ室、第1内層信号回路層及び第1金属柱が設けられ、前記パッケージ室は、前記基板の対向する第1側と第2側を貫通し、前記第1内層信号回路層の一部又は全部が前記基板の第1側の表面に設けられ、前記第1金属柱の第1端と前記第1内層信号回路層とが電気的に接続され、前記第1金属柱の第2端が前記基板の第2側の表面から露出され、前記仮支持面が前記パッケージ室をカバーするステップと、
パッケージ対象であるチップを前記パッケージ室に貼り付けて、かつ前記第1内層信号回路層にワイヤボンディングするステップであって、前記チップの能動面は、前記基板の第1側に向けて、前記チップの受動面と前記仮支持面とが接続されるステップと、
前記基板の第1側に第1導通金属柱を加工し、かつ第2絶縁媒体材料によりパッケージングされてパッケージ層を形成するステップであって、前記第1導通金属柱と前記第1内層信号回路層とが接続されるステップと、
前記仮支持面を除去し、かつ前記基板の第2側の表面に第2内層信号回路層を加工するステップであって、前記第2内層信号回路層が第2内層信号回路と熱伝導用金属面を含み、前記第2内層信号回路と前記第1金属柱とが接続され、前記熱伝導用金属面と前記チップの受動面とが接続されるステップと、
前記熱伝導用金属面に熱伝導用金属柱を加工し、積層して圧合して隔離層を形成するステップと、
前記パッケージ層の表面に外層信号回路層を加工し、及び前記隔離層の表面に放熱用金属面を加工するステップであって、前記外層信号回路層と前記第1導通金属柱とが接続され、前記放熱用金属面と前記熱伝導用金属柱とが接続されるステップと、を含む。
或いは、前記第1内層信号回路層は、単一層の回路層を含み、単一層の前記回路層は、前記基板の第1側の表面に設けられる。
前記第1導通金属柱を前記基板の第1側の、前記第1内層信号回路層の対応する位置に貼り付けるステップと、
半田により前記第1導通金属柱と前記第1内層信号回路層とを溶接するステップとを含む。
前記基板の第1側に、前記第1導通金属柱に適合する窓が設けられた感光性遮蔽膜を加工するステップと、
前記基板を電気めっきして前記窓に前記第1導通金属柱を形成するステップと、
前記感光性遮蔽膜を除去するステップとを含む。
対向する第1側と第2側を有する基板を提供し、かつ前記基板の第2側の表面に仮支持面を加工するステップであって、前記基板には、パッケージ室と第1内層信号回路層とが設けられ、前記パッケージ室は、前記基板の対向する第1側と第2側を貫通し、前記第1内層信号回路層の一部又は全部は前記基板の第1側の表面に設けられ、前記第1内層信号回路層と前記基板の第2側の表面との間には隔離層が設けられ、前記仮支持面は前記パッケージ室をカバーするステップと、
パッケージ対象であるチップを前記パッケージ室に貼り付けてかつ前記第1内層信号回路層にワイヤボンディングするステップであって、前記チップの能動面が前記基板の第1側に向けて、前記チップの受動面と前記仮支持面とが接続されるステップと、
前記基板の第1側に第1導通金属柱を加工し、かつ第2絶縁媒体材料によりパッケージングされてパッケージ層を形成するステップであって、前記第1導通金属柱と前記第1内層信号回路層とが接続されるステップと、
前記仮支持面を除去するステップと、
前記パッケージ層の表面に外層信号回路層を加工し、及び前記隔離層の表面に放熱用金属面を加工するステップであって、前記外層信号回路層と前記第1導通金属柱とが接続され、前記放熱用金属面と前記チップの受動面とが接続されるステップとを含む。
或いは、前記第1内層信号回路層は、単一層の回路層を含み、単一層の前記回路層は、前記基板の第1側の表面に設けられる。
前記第1導通金属柱を前記基板の第1側の、前記第1内層信号回路層の対応する位置に貼り付けるステップと、
半田により前記第1導通金属柱と前記第1内層信号回路層とを溶接するステップとを含む。
前記基板の第1側に、前記第1導通金属柱に適合する窓が設けられた感光性遮蔽膜を加工するステップと、
前記基板を電気めっきして前記窓に前記第1導通金属柱を形成するステップと、
前記感光性遮蔽膜を除去するステップとを含む。
本発明の上記及び/又は付加な形態、及び利点は、添付した図面を参照して説明される以下の実施の形態の説明から容易に理解されるであろう。
図1に示すように、本実施形態は、絶縁媒体材料体100と、内層信号回路層150と、外層信号回路層160と、放熱用金属面170と、チップ180とを含む、信号層と放熱層とが分離されるTMVパッケージ構造を開示する。
図3に示すように、本実施形態は、絶縁媒体材料体100と、内層信号回路層150と、外層信号回路層160と、放熱用金属面170と、チップ180とを含む、信号層と放熱層とが分離されるTMVパッケージ構造を開示する。
本実施形態は、信号層と放熱層とが分離されるTMVパッケージ構造(図示せず)を開示し、絶縁媒体材料体100と、内層信号回路層150と、外層信号回路層160と、放熱用金属面170と、チップ180とを含む。本実施形態に係る絶縁媒体材料体100は、絶縁層とパッケージ層120を含み、絶縁層が単一層又は複数層の構造であり、内層信号回路層150が単一層の構造であり(図示せず)、内層信号回路層150が絶縁層に設けられかつパッケージ層との境界に位置している点が、実施形態2と異なる。
本実施形態は、基板の製造方法を提供し、ステップS010~S090を含み、以下、各ステップを詳しく説明する。
本実施形態は、信号層と放熱層とが分離されるTMVパッケージ構造の製造方法を開示し、ステップS110~ステップS160を含み、以下、各ステップを詳しく説明する。
本実施形態は、信号層と放熱層とが分離されるTMVパッケージ構造の製造方法を開示し、前記製造方法は、以下のステップを含む。
Claims (8)
- 信号層と放熱層とが分離されるTMVパッケージ構造の製造方法であって、
対向する第1側と第2側を有する基板を提供し、かつ前記基板の第2側の表面に仮支持面を加工するステップであって、前記基板にはパッケージ室、第2内層信号回路層及び第1金属柱が設けられ、前記パッケージ室は、前記基板の対向する第1側と第2側を貫通し、前記第2内層信号回路層の一部又は全部が前記基板の第1側の表面に設けられ、前記第1金属柱の第1端と前記第2内層信号回路層とが電気的に接続され、前記第1金属柱の第2端が前記基板の第2側の表面から露出され、前記仮支持面が前記パッケージ室をカバーするステップと、
パッケージ対象であるチップを前記パッケージ室に貼り付けて、かつ前記第2内層信号回路層にワイヤボンディングするステップであって、前記チップの能動面は、前記基板の第1側に向けて、前記チップの受動面と前記仮支持面とが接続されるステップと、
前記基板の第1側に第1導通金属柱を加工し、かつ第2絶縁媒体材料によりパッケージングされてパッケージ層を形成するステップであって、前記第1導通金属柱と前記第2内層信号回路層とが接続されるステップと、
前記仮支持面を除去し、かつ前記基板の第2側の表面に第2内層信号回路層を加工するステップであって、前記第2内層信号回路層が第2内層信号回路と熱伝導用金属面を含み、前記第2内層信号回路と前記第1金属柱とが接続され、前記熱伝導用金属面と前記チップの受動面とが接続されるステップと、
前記熱伝導用金属面に熱伝導用金属柱を加工し、かつ積層して圧合して隔離層を形成するステップと、
前記パッケージ層の表面に外層信号回路層を加工し、及び前記隔離層の表面に放熱用金属面を加工するステップであって、前記外層信号回路層と前記第1導通金属柱とが接続され、前記放熱用金属面と前記熱伝導用金属柱とが接続されるステップとを含む、ことを特徴とする信号層と放熱層とが分離されるTMVパッケージ構造の製造方法。 - 前記第2内層信号回路層は、複数層の回路層を含み、そのうちの一層の前記回路層が前記基板の第1側の表面に設けられ、残りの前記回路層が前記基板に嵌め込まれ、複数層の前記回路層同士が金属柱により接続される、
或いは、前記第2内層信号回路層は、単一層の回路層を含み、単一層の前記回路層は、前記基板の第1側の表面に設けられる、ことを特徴とする請求項1に記載の信号層と放熱層とが分離されるTMVパッケージ構造の製造方法。 - 前記基板の第1側に第1導通金属柱を加工する前記ステップは、
前記第1導通金属柱を前記基板の第1側の、前記第2内層信号回路層の対応する位置に貼り付けるステップと、
半田により前記第1導通金属柱と前記第2内層信号回路層とを溶接するステップとを含む、ことを特徴とする請求項1に記載の信号層と放熱層とが分離されるTMVパッケージ構造の製造方法。 - 前記基板の第1側に第1導通金属柱を加工する前記ステップは、
前記基板の第1側に、前記第1導通金属柱に適合する窓が設けられた感光性遮蔽膜を加工するステップと、
前記基板を電気めっきして前記窓に前記第1導通金属柱を形成するステップと、
前記感光性遮蔽膜を除去するステップとを含む、ことを特徴とする請求項1に記載の信号層と放熱層とが分離されるTMVパッケージ構造の製造方法。 - 対向する第1側と第2側を有する基板を提供し、かつ前記基板の第2側の表面に仮支持面を加工するステップであって、前記基板には、パッケージ室と第2内層信号回路層とが設けられ、前記パッケージ室は、前記基板の対向する第1側と第2側を貫通し、前記第2内層信号回路層の一部又は全部が前記基板の第1側の表面に設けられ、前記第2内層信号回路層と前記基板の第2側の表面との間には隔離層が設けられ、前記仮支持面が前記パッケージ室をカバーするステップと、
パッケージ対象であるチップを前記パッケージ室に貼り付けてかつ前記第2内層信号回路層にワイヤボンディングするステップであって、前記チップの能動面が前記基板の第1側に向けて、前記チップの受動面と前記仮支持面とが接続されるステップと、
前記基板の第1側に第1導通金属柱を加工し、かつ第2絶縁媒体材料によりパッケージングされてパッケージ層を形成するステップであって、前記第1導通金属柱と前記第2内層信号回路層とが接続されるステップと、
前記仮支持面を除去するステップと、
前記パッケージ層の表面に外層信号回路層を加工し、及び前記隔離層の表面に放熱用金属面を加工するステップであって、前記外層信号回路層と前記第1導通金属柱とが接続され、前記放熱用金属面と前記チップの受動面とが接続されるステップとを含む、ことを特徴とする信号層と放熱層とが分離されるTMVパッケージ構造の製造方法。 - 前記第2内層信号回路層は、複数層の回路層を含み、そのうちの一層の前記回路層は、前記基板の第1側の表面に設けられ、残りの前記回路層は、前記基板に嵌め込まれ、複数層の前記回路層同士は、金属柱により接続される、
或いは、前記第2内層信号回路層は、単一層の回路層を含み、単一層の前記回路層は、前記基板の第1側の表面に設けられる、ことを特徴とする請求項5に記載の信号層と放熱層とが分離されるTMVパッケージ構造の製造方法。 - 前記基板の第1側に第1導通金属柱を加工する前記ステップは、
前記第1導通金属柱を前記基板の第1側の、前記第2内層信号回路層の対応する位置に貼り付けるステップと、
半田により前記第1導通金属柱と前記第2内層信号回路層とを溶接する、ことを特徴とする請求項5に記載の信号層と放熱層とが分離されるTMVパッケージ構造の製造方法。 - 前記基板の第1側に第1導通金属柱を加工する前記ステップは、
前記基板の第1側に、前記第1導通金属柱に適合する窓が設けられた感光性遮蔽膜を加工するステップと、
前記基板を電気めっきすることにより前記窓に前記第1導通金属柱を形成するステップと、
前記感光性遮蔽膜を除去するステップとを含む、ことを特徴とする請求項5に記載の信号層と放熱層とが分離されるTMVパッケージ構造の製造方法。
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JP2022125067A Active JP7471352B2 (ja) | 2021-10-27 | 2022-08-04 | 信号層と放熱層とが分離されるtmvパッケージ構造及びその製造方法 |
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US (1) | US20230127494A1 (ja) |
JP (1) | JP7471352B2 (ja) |
KR (1) | KR20230060446A (ja) |
CN (1) | CN114093840A (ja) |
TW (1) | TW202318597A (ja) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090072384A1 (en) | 2007-09-14 | 2009-03-19 | Phoenix Precision Technology Corporation | Packaging substrate having heat-dissipating structure |
US20170084596A1 (en) | 2015-09-17 | 2017-03-23 | Deca Technologies Inc. | Thermally enhanced fully molded fan-out module |
JP2021528845A (ja) | 2018-06-14 | 2021-10-21 | テキサス インスツルメンツ インコーポレイテッド | 埋め込みパッケージにおける応力緩衝層 |
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2021
- 2021-10-27 CN CN202111258931.8A patent/CN114093840A/zh active Pending
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2022
- 2022-07-15 TW TW111126708A patent/TW202318597A/zh unknown
- 2022-08-04 JP JP2022125067A patent/JP7471352B2/ja active Active
- 2022-08-08 KR KR1020220098833A patent/KR20230060446A/ko not_active Application Discontinuation
- 2022-08-23 US US17/821,725 patent/US20230127494A1/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090072384A1 (en) | 2007-09-14 | 2009-03-19 | Phoenix Precision Technology Corporation | Packaging substrate having heat-dissipating structure |
US20170084596A1 (en) | 2015-09-17 | 2017-03-23 | Deca Technologies Inc. | Thermally enhanced fully molded fan-out module |
JP2021528845A (ja) | 2018-06-14 | 2021-10-21 | テキサス インスツルメンツ インコーポレイテッド | 埋め込みパッケージにおける応力緩衝層 |
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US20230127494A1 (en) | 2023-04-27 |
JP2023065298A (ja) | 2023-05-12 |
KR20230060446A (ko) | 2023-05-04 |
TW202318597A (zh) | 2023-05-01 |
CN114093840A (zh) | 2022-02-25 |
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