JP2021528845A - 埋め込みパッケージにおける応力緩衝層 - Google Patents
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Abstract
Description
Claims (20)
- 集積回路(IC)パッケージであって、
前記ICパッケージ内のICダイの上で横方向に分散された複数の伝導性パッドであって、前記複数の伝導性パッドの各々が前記ICダイの非導電性表面に接している、前記複数の伝導性パッド、
前記複数の伝導性パッドの各々の直接上で横方向に分散された複数の伝導性ポストであって、前記複数の伝導性ポストの各々が、前記複数の伝導性パッドの対応する伝導性パッドの横幅より小さい横幅を有する、前記複数の伝導性ポスト、及び
前記複数の伝導性ポストに取り付けられたヒートスプレッダであって、前記ICパッケージから露出された表面を含む、前記ヒートスプレッダ、
を含む、集積回路(IC)パッケージ。 - 請求項1に記載のICパッケージであって、前記複数の伝導性パッドの各々及び前記複数の伝導性ポストの各々が銅を含む、ICパッケージ。
- 請求項1に記載のICパッケージであって、前記複数の伝導性パッドの各々及び前記複数の伝導性ポストの各々が実質的に円筒形形状を含む、ICパッケージ。
- 請求項1に記載のICパッケージであって、前記複数の伝導性パッド及び対応する複数の伝導性ポストの各ペアが実質的に等しく離間されている、ICパッケージ。
- 請求項1に記載のICパッケージであって、前記ヒートスプレッダの高さが15μm〜60μmの範囲であるとき、前記複数の伝導性パッド及び対応する複数の伝導性ポストの各ペアの全高が、30μm〜60μmの範囲である、ICパッケージ。
- 請求項1に記載のICパッケージであって、前記ヒートスプレッダが約40μmであるとき、前記複数の伝導性パッド及び対応する複数の伝導性ポストの各ペアの全高が約40μmである、ICパッケージ。
- 請求項1に記載のICパッケージであって、前記複数の伝導性ポストの各々の高さと各対応する伝導性パッドの高さとの比が約3:1である、ICパッケージ。
- 請求項1に記載のICパッケージであって、前記ICダイの前記非導電性表面と前記複数の伝導性パッドの各々との間に形成されるシード層を更に含む、ICパッケージ。
- 集積回路(IC)パッケージ内の熱を放散するために用いる放熱構造を製造するための方法であって、前記方法が、
前記ICパッケージ内のICダイの上に第1のマスク層を堆積させること、
前記ICダイの対応する非導電性表面を露出させる第1の開口をつくるように、前記第1のマスク層の或る領域を除去すること、
前記ICダイの前記露出された対応する非導電性表面の上の前記第1の開口の各々において、前記第1のマスク層の高さまで、伝導性パッドを形成すること、
各形成された伝導性パッドと前記第1のマスク層の残りの部分との上に第2のマスク層を堆積させること、
第2の開口をつくるように前記第2のマスク層の領域を除去することであって、前記第2の開口の各々が、対応する形成された伝導性パッドの一部のみを露出させること、
前記第2の開口の各々において、及び、各対応する伝導性パッドの前記露出された部分の直接上に、伝導性ポストを形成すること、
前記第1及び第2のマスク層を除去すること、
前記ICダイ、伝導性パッド、及び伝導性ポストの上に封止誘電体材料を前記伝導性ポストの高さまで堆積させること、及び
前記封止誘電体材料及び前記伝導性ポスト上にヒートスプレッダを形成することであって、前記ヒートスプレッダの遠位表面が前記封止誘電体材料から露出されていること、
を含む、方法。 - 請求項9に記載の方法であって、第1のマスク層を堆積させること及び前記第1のマスク層の領域を除去すること、並びに、第2のマスク層を堆積させること及び前記第2のマスク層の領域を除去することが、フォトリソグラフィプロセスを含む、方法。
- 請求項9に記載の方法であって、前記第1の開口の各々において伝導性パッドを形成すること、及び、前記第2の開口の各々において伝導性ポストを形成することが、めっきプロセスを含む、方法。
- 請求項9に記載の方法であって、前記伝導性パッド及び伝導性ポストが銅を含む、方法。
- 請求項9に記載の方法であって、前記第1のマスク層を堆積させる前に、前記ICダイの非導電性表面上にシード層を形成することを更に含む、方法。
- 請求項9に記載の方法であって、前記ヒートスプレッダを形成する前に、前記封止誘電体材料及び前記伝導性ポスト上にシード層を形成することを更に含む、方法。
- 集積回路(IC)パッケージであって、
ICダイの外で分散された導電性ボンドパッド及び非導電性表面を有する、前記ICダイ、
前記導電性ボンドパッドの1つ又は複数に接続される導電性ビア、
応力緩衝層、及び
ヒートスプレッダ、
を含むICパッケージであって、
前記応力緩衝層が、
ICパッケージ内に封止されるICダイ上で横方向に分散された複数の伝導性パッドであって、前記複数の伝導性パッドの各々が、前記ICダイの前記非導電性表面の1つに接する近位端を有し、前記複数の伝導性パッドの各々の各近位端とは反対の遠位端を有する、前記複数の伝導性パッドと、
前記複数の伝導性パッドの各々の直接上で横方向に分散された複数の伝導性ポストであって、前記複数の伝導性ポストの各々が、前記複数の伝導性パッドの各伝導性パッドのそれぞれの遠位端に接する近位端を有し、前記複数の伝導性ポストの各々の各近位端とは反対の遠位端を有し、各伝導性ポストが、その対応する伝導性パッドの横幅より小さい横幅を有する、前記複数の伝導性ポストと、
を含み、
前記ヒートスプレッダが、前記複数の伝導性ポストの前記遠位端に接する近位表面を有し、前記ICパッケージから露出された遠位表面を有する、
ICパッケージ。 - 請求項15に記載のICパッケージであって、前記複数の伝導性パッドの各々及び前記複数の伝導性ポストの各々が銅を含む、ICパッケージ。
- 請求項15に記載のICパッケージであって、前記ヒートスプレッダが15μm〜60μmの範囲であるとき、前記複数の伝導性パッド及び対応する複数の伝導性ポストの各ペアの全高が30μm〜60μmの範囲である、ICパッケージ。
- 請求項15に記載のICパッケージであって、前記ヒートスプレッダの高さが約40μmであるとき、前記複数の伝導性パッド及び対応する複数の伝導性ポストの各ペアの全高が約40μmである、ICパッケージ。
- 請求項15に記載のICパッケージであって、前記複数の伝導性ポストの各々の高さと各対応する伝導性パッドとの高さの比が約3:1である、ICパッケージ。
- 請求項15に記載のICパッケージであって、前記ICダイの前記非導電性表面と、前記複数の伝導性パッドの各々との間に形成されるシード層を更に含む、ICパッケージ。
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US16/008,119 US10580715B2 (en) | 2018-06-14 | 2018-06-14 | Stress buffer layer in embedded package |
US16/008,119 | 2018-06-14 | ||
PCT/US2019/037149 WO2019241610A1 (en) | 2018-06-14 | 2019-06-14 | Stress buffer layer in embedded package |
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US10580715B2 (en) * | 2018-06-14 | 2020-03-03 | Texas Instruments Incorporated | Stress buffer layer in embedded package |
TWI734545B (zh) * | 2020-07-03 | 2021-07-21 | 財團法人工業技術研究院 | 半導體封裝結構 |
CN114678335B (zh) * | 2022-05-27 | 2022-08-16 | 合肥矽迈微电子科技有限公司 | 一种芯片散热结构、工艺及半导体器件 |
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JP2001298131A (ja) * | 2000-03-13 | 2001-10-26 | Internatl Business Mach Corp <Ibm> | 効率のよい熱伝達のための内部構造を備えたチップ・パッケージ |
US20120032350A1 (en) * | 2010-08-06 | 2012-02-09 | Conexant Systems, Inc. | Systems and Methods for Heat Dissipation Using Thermal Conduits |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0766332A (ja) * | 1993-08-25 | 1995-03-10 | Seiko Epson Corp | 半導体装置 |
JPH0997930A (ja) * | 1995-07-27 | 1997-04-08 | Aisin Seiki Co Ltd | 熱電冷却モジュール及びその製造方法 |
JP2001217340A (ja) * | 2000-02-01 | 2001-08-10 | Nec Corp | 半導体装置及びその製造方法 |
US8350384B2 (en) * | 2009-11-24 | 2013-01-08 | Stats Chippac, Ltd. | Semiconductor device and method of forming electrical interconnect with stress relief void |
US7299639B2 (en) * | 2004-06-22 | 2007-11-27 | Intel Corporation | Thermoelectric module |
US7355289B2 (en) * | 2005-07-29 | 2008-04-08 | Freescale Semiconductor, Inc. | Packaged integrated circuit with enhanced thermal dissipation |
US7855397B2 (en) * | 2007-09-14 | 2010-12-21 | Nextreme Thermal Solutions, Inc. | Electronic assemblies providing active side heat pumping |
US8008125B2 (en) * | 2009-03-06 | 2011-08-30 | General Electric Company | System and method for stacked die embedded chip build-up |
US7960827B1 (en) * | 2009-04-09 | 2011-06-14 | Amkor Technology, Inc. | Thermal via heat spreader package and method |
US8241955B2 (en) * | 2009-06-19 | 2012-08-14 | Stats Chippac Ltd. | Integrated circuit packaging system with mountable inward and outward interconnects and method of manufacture thereof |
KR101698932B1 (ko) * | 2010-08-17 | 2017-01-23 | 삼성전자 주식회사 | 반도체 패키지 및 그 제조방법 |
US8946888B2 (en) * | 2011-09-30 | 2015-02-03 | Taiwan Semiconductor Manufacturing Company, Ltd. | Package on packaging structure and methods of making same |
US8916481B2 (en) * | 2011-11-02 | 2014-12-23 | Stmicroelectronics Pte Ltd. | Embedded wafer level package for 3D and package-on-package applications, and method of manufacture |
KR101928005B1 (ko) * | 2011-12-01 | 2019-03-13 | 삼성전자주식회사 | 열전 냉각 패키지 및 이의 열관리 방법 |
US9299688B2 (en) * | 2013-12-10 | 2016-03-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Packaged semiconductor devices and methods of packaging semiconductor devices |
DE102014101366B3 (de) * | 2014-02-04 | 2015-05-13 | Infineon Technologies Ag | Chip-Montage an über Chip hinausstehender Adhäsions- bzw. Dielektrikumsschicht auf Substrat |
US10340199B2 (en) * | 2014-11-20 | 2019-07-02 | Mediatek Inc. | Packaging substrate with block-type via and semiconductor packages having the same |
US9875988B2 (en) * | 2015-10-29 | 2018-01-23 | Semtech Corporation | Semiconductor device and method of forming DCALGA package using semiconductor die with micro pillars |
CN107424973B (zh) * | 2016-05-23 | 2020-01-21 | 凤凰先驱股份有限公司 | 封装基板及其制法 |
KR102448099B1 (ko) * | 2016-06-02 | 2022-09-27 | 에스케이하이닉스 주식회사 | 히트 스프레더 구조를 포함하는 반도체 패키지 |
DE112016007304T5 (de) * | 2016-09-30 | 2019-06-19 | Intel Corporation | Eingebetteter die in interposer-gehäusen |
US9865570B1 (en) * | 2017-02-14 | 2018-01-09 | Globalfoundries Inc. | Integrated circuit package with thermally conductive pillar |
US10510704B2 (en) * | 2018-01-30 | 2019-12-17 | Taiwan Semiconductor Manufacturing Co., Ltd. | Package structure and method of manufacturing the same |
US10580715B2 (en) * | 2018-06-14 | 2020-03-03 | Texas Instruments Incorporated | Stress buffer layer in embedded package |
-
2018
- 2018-06-14 US US16/008,119 patent/US10580715B2/en active Active
-
2019
- 2019-06-14 EP EP19818882.3A patent/EP3807923A4/en active Pending
- 2019-06-14 JP JP2020569781A patent/JP2021528845A/ja active Pending
- 2019-06-14 WO PCT/US2019/037149 patent/WO2019241610A1/en unknown
- 2019-06-14 CN CN201980030258.7A patent/CN112074934A/zh active Pending
-
2020
- 2020-03-03 US US16/808,018 patent/US11183441B2/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001298131A (ja) * | 2000-03-13 | 2001-10-26 | Internatl Business Mach Corp <Ibm> | 効率のよい熱伝達のための内部構造を備えたチップ・パッケージ |
US20120032350A1 (en) * | 2010-08-06 | 2012-02-09 | Conexant Systems, Inc. | Systems and Methods for Heat Dissipation Using Thermal Conduits |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7471352B2 (ja) | 2021-10-27 | 2024-04-19 | 珠海越亜半導体股▲分▼有限公司 | 信号層と放熱層とが分離されるtmvパッケージ構造及びその製造方法 |
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US11183441B2 (en) | 2021-11-23 |
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US20200203249A1 (en) | 2020-06-25 |
CN112074934A (zh) | 2020-12-11 |
WO2019241610A1 (en) | 2019-12-19 |
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US20190385924A1 (en) | 2019-12-19 |
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