JP7467278B2 - 半導体記憶装置 - Google Patents
半導体記憶装置 Download PDFInfo
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- JP7467278B2 JP7467278B2 JP2020137608A JP2020137608A JP7467278B2 JP 7467278 B2 JP7467278 B2 JP 7467278B2 JP 2020137608 A JP2020137608 A JP 2020137608A JP 2020137608 A JP2020137608 A JP 2020137608A JP 7467278 B2 JP7467278 B2 JP 7467278B2
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- 239000004065 semiconductor Substances 0.000 title claims description 14
- 230000002093 peripheral effect Effects 0.000 claims description 23
- 238000003491 array Methods 0.000 claims description 3
- 239000000872 buffer Substances 0.000 description 20
- 238000010586 diagram Methods 0.000 description 14
- 230000006870 function Effects 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 239000002184 metal Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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Classifications
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/30—Power supply circuits
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/08—Address circuits; Decoders; Word-line control circuits
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C5/00—Details of stores covered by group G11C11/00
- G11C5/06—Arrangements for interconnecting storage elements electrically, e.g. by wiring
- G11C5/063—Voltage and signal distribution in integrated semi-conductor memory access lines, e.g. word-line, bit-line, cross-over resistance, propagation delay
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/04—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
- G11C16/0483—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells having several storage transistors connected in series
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/10—Programming or data input circuits
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/10—Programming or data input circuits
- G11C16/14—Circuits for erasing electrically, e.g. erase voltage switching circuits
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/24—Bit-line control circuits
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/26—Sensing or reading circuits; Data output circuits
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C5/00—Details of stores covered by group G11C11/00
- G11C5/02—Disposition of storage elements, e.g. in the form of a matrix array
- G11C5/025—Geometric lay-out considerations of storage- and peripheral-blocks in a semiconductor storage device
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/20—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels
- H10B41/23—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels
- H10B41/27—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels the channels comprising vertical portions, e.g. U-shaped channels
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/40—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region
- H10B41/42—Simultaneous manufacture of periphery and memory cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/50—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the boundary region between the core region and the peripheral circuit region
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/20—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels
- H10B43/23—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels
- H10B43/27—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels the channels comprising vertical portions, e.g. U-shaped channels
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/40—EEPROM devices comprising charge-trapping gate insulators characterised by the peripheral circuit region
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/50—EEPROM devices comprising charge-trapping gate insulators characterised by the boundary region between the core and peripheral circuit regions
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Semiconductor Memories (AREA)
- Non-Volatile Memory (AREA)
- Read Only Memory (AREA)
- Semiconductor Integrated Circuits (AREA)
Description
3:メモリセル部
5:ロウデコーダ
6:周辺回路
71,72,73,74,75,76,77,78:信号線
301:メモリセルアレイ
81,82,83:配線領域
Claims (5)
- 半導体記憶装置であって、
複数のメモリセルアレイを含むメモリセル部と、
前記メモリセル部に対する書込み動作、読出し動作、及び消去動作を含む電圧転送制御を実行する周辺回路と、
前記周辺回路と前記メモリセル部とに接続され、少なくとも一部が、前記メモリセル部の前記メモリセルアレイの周辺に形成された周辺領域の内、前記メモリセル部と前記周辺回路とが対向していない非対向領域に形成された信号線と、を備え、
前記信号線は、前記メモリセルアレイに接続されたワード線を制御するロウデコーダと平面視において重なる領域を通過し、
前記ロウデコーダは、配線密度が高い第1領域と、前記第1領域よりも配線密度が低い第2領域とを含み、
前記信号線は、前記第2領域と重なる領域を通過する半導体記憶装置。 - 請求項1に記載の半導体記憶装置であって、
前記信号線は、前記非対向領域の端部で前記メモリセルアレイの外周に沿って屈曲するコーナー部を備えており、前記コーナー部に演算回路が設けられている半導体記憶装置。 - 半導体記憶装置であって、
複数のメモリセルアレイを含むメモリセル部と、
前記メモリセル部に対する書込み動作、読出し動作、及び消去動作を含む電圧転送制御を実行する周辺回路と、
前記周辺回路と前記メモリセル部とに接続され、少なくとも一部が、前記メモリセル部の前記メモリセルアレイの周辺に形成された周辺領域の内、前記メモリセル部と前記周辺回路とが対向していない非対向領域に形成された信号線と、を備え、
前記信号線は、前記非対向領域の端部で前記メモリセルアレイの外周に沿って屈曲するコーナー部を備えており、前記コーナー部に演算回路が設けられている半導体記憶装置。 - 請求項3に記載の半導体記憶装置であって、
前記信号線は、前記メモリセルアレイに接続されたワード線を制御するロウデコーダと平面視において重なる領域を通過する半導体記憶装置。 - 請求項4に記載の半導体記憶装置であって、
前記ロウデコーダは、配線密度が高い第1領域と、前記第1領域よりも配線密度が低い第2領域とを含み、
前記信号線は、前記第2領域と重なる領域を通過する半導体記憶装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020137608A JP7467278B2 (ja) | 2020-08-17 | 2020-08-17 | 半導体記憶装置 |
TW110104996A TWI782417B (zh) | 2020-08-17 | 2021-02-09 | 半導體記憶裝置 |
CN202110206802.8A CN114078489A (zh) | 2020-08-17 | 2021-02-23 | 半导体存储装置 |
US17/183,958 US11417404B2 (en) | 2020-08-17 | 2021-02-24 | Semiconductor storage device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020137608A JP7467278B2 (ja) | 2020-08-17 | 2020-08-17 | 半導体記憶装置 |
Publications (2)
Publication Number | Publication Date |
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JP2022033615A JP2022033615A (ja) | 2022-03-02 |
JP7467278B2 true JP7467278B2 (ja) | 2024-04-15 |
Family
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Family Applications (1)
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JP2020137608A Active JP7467278B2 (ja) | 2020-08-17 | 2020-08-17 | 半導体記憶装置 |
Country Status (4)
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---|---|
US (1) | US11417404B2 (ja) |
JP (1) | JP7467278B2 (ja) |
CN (1) | CN114078489A (ja) |
TW (1) | TWI782417B (ja) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004342889A (ja) | 2003-05-16 | 2004-12-02 | Sharp Corp | 半導体記憶装置、半導体装置、半導体記憶装置の製造方法、および携帯電子機器 |
JP2011108352A (ja) | 2009-11-12 | 2011-06-02 | Hynix Semiconductor Inc | アドレス制御回路及び半導体メモリ装置 |
JP2012204643A (ja) | 2011-03-25 | 2012-10-22 | Elpida Memory Inc | 半導体装置 |
JP2013201293A (ja) | 2012-03-26 | 2013-10-03 | Toshiba Corp | 半導体記憶装置 |
JP2015138802A (ja) | 2014-01-20 | 2015-07-30 | ユニサンティス エレクトロニクス シンガポール プライベート リミテッドUnisantis Electronics Singapore Pte Ltd. | 半導体装置 |
JP2015185613A (ja) | 2014-03-20 | 2015-10-22 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4856207B2 (ja) * | 2009-03-30 | 2012-01-18 | 株式会社東芝 | 不揮発性半導体記憶装置 |
JP2014067942A (ja) | 2012-09-27 | 2014-04-17 | Toshiba Corp | 不揮発性半導体記憶装置 |
US9030879B2 (en) * | 2012-11-15 | 2015-05-12 | Conversant Intellectual Property Management Incorporated | Method and system for programming non-volatile memory with junctionless cells |
KR102249172B1 (ko) * | 2014-09-19 | 2021-05-11 | 삼성전자주식회사 | 불 휘발성 메모리 장치 |
KR20160061673A (ko) * | 2014-11-24 | 2016-06-01 | 에스케이하이닉스 주식회사 | 반도체 메모리 장치 그것의 동작 방법 |
KR102282138B1 (ko) | 2014-12-09 | 2021-07-27 | 삼성전자주식회사 | 반도체 소자 |
KR102251815B1 (ko) * | 2015-07-02 | 2021-05-13 | 삼성전자주식회사 | 메모리 장치 및 메모리 시스템 |
KR102628007B1 (ko) * | 2018-05-09 | 2024-01-22 | 삼성전자주식회사 | 수직형 메모리 장치 |
US20190043868A1 (en) | 2018-06-18 | 2019-02-07 | Intel Corporation | Three-dimensional (3d) memory with control circuitry and array in separately processed and bonded wafers |
KR102549172B1 (ko) * | 2018-10-29 | 2023-07-03 | 삼성전자주식회사 | 반도체 소자의 제조 방법 |
KR102658194B1 (ko) * | 2018-12-21 | 2024-04-18 | 삼성전자주식회사 | 반도체 장치 |
-
2020
- 2020-08-17 JP JP2020137608A patent/JP7467278B2/ja active Active
-
2021
- 2021-02-09 TW TW110104996A patent/TWI782417B/zh active
- 2021-02-23 CN CN202110206802.8A patent/CN114078489A/zh active Pending
- 2021-02-24 US US17/183,958 patent/US11417404B2/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004342889A (ja) | 2003-05-16 | 2004-12-02 | Sharp Corp | 半導体記憶装置、半導体装置、半導体記憶装置の製造方法、および携帯電子機器 |
JP2011108352A (ja) | 2009-11-12 | 2011-06-02 | Hynix Semiconductor Inc | アドレス制御回路及び半導体メモリ装置 |
JP2012204643A (ja) | 2011-03-25 | 2012-10-22 | Elpida Memory Inc | 半導体装置 |
JP2013201293A (ja) | 2012-03-26 | 2013-10-03 | Toshiba Corp | 半導体記憶装置 |
JP2015138802A (ja) | 2014-01-20 | 2015-07-30 | ユニサンティス エレクトロニクス シンガポール プライベート リミテッドUnisantis Electronics Singapore Pte Ltd. | 半導体装置 |
JP2015185613A (ja) | 2014-03-20 | 2015-10-22 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
TWI782417B (zh) | 2022-11-01 |
TW202209320A (zh) | 2022-03-01 |
US11417404B2 (en) | 2022-08-16 |
CN114078489A (zh) | 2022-02-22 |
US20220051731A1 (en) | 2022-02-17 |
JP2022033615A (ja) | 2022-03-02 |
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