JP7459937B2 - 共振子及び共振装置 - Google Patents

共振子及び共振装置 Download PDF

Info

Publication number
JP7459937B2
JP7459937B2 JP2022518594A JP2022518594A JP7459937B2 JP 7459937 B2 JP7459937 B2 JP 7459937B2 JP 2022518594 A JP2022518594 A JP 2022518594A JP 2022518594 A JP2022518594 A JP 2022518594A JP 7459937 B2 JP7459937 B2 JP 7459937B2
Authority
JP
Japan
Prior art keywords
base
resonator
support arm
vibrating
arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022518594A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2021220535A5 (https=
JPWO2021220535A1 (https=
Inventor
ヴィレ カーヤカリ
良太 河合
敬之 樋口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of JPWO2021220535A1 publication Critical patent/JPWO2021220535A1/ja
Publication of JPWO2021220535A5 publication Critical patent/JPWO2021220535A5/ja
Application granted granted Critical
Publication of JP7459937B2 publication Critical patent/JP7459937B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1057—Mounting in enclosures for microelectro-mechanical devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0595—Holders or supports the holder support and resonator being formed in one body
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2468—Tuning fork resonators
    • H03H9/2478—Single-Ended Tuning Fork resonators
    • H03H9/2489—Single-Ended Tuning Fork resonators with more than two fork tines
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02511—Vertical, i.e. perpendicular to the substrate plane

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2022518594A 2020-04-27 2020-11-11 共振子及び共振装置 Active JP7459937B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020078246 2020-04-27
JP2020078246 2020-04-27
PCT/JP2020/041997 WO2021220535A1 (ja) 2020-04-27 2020-11-11 共振子及び共振装置

Publications (3)

Publication Number Publication Date
JPWO2021220535A1 JPWO2021220535A1 (https=) 2021-11-04
JPWO2021220535A5 JPWO2021220535A5 (https=) 2022-10-19
JP7459937B2 true JP7459937B2 (ja) 2024-04-02

Family

ID=78373509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022518594A Active JP7459937B2 (ja) 2020-04-27 2020-11-11 共振子及び共振装置

Country Status (4)

Country Link
US (1) US11824517B2 (https=)
JP (1) JP7459937B2 (https=)
CN (1) CN115398802B (https=)
WO (1) WO2021220535A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116601870A (zh) * 2020-12-17 2023-08-15 株式会社村田制作所 谐振子以及谐振装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016174789A1 (ja) 2015-04-27 2016-11-03 株式会社村田製作所 共振子及び共振装置
WO2017064916A1 (ja) 2015-10-13 2017-04-20 株式会社村田製作所 共振子及び共振装置
WO2018216264A1 (ja) 2017-05-25 2018-11-29 株式会社村田製作所 共振子及び共振装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102498666B (zh) * 2009-09-18 2015-10-14 株式会社大真空 压电振动片以及压电振动片的制造方法
WO2016175218A1 (ja) 2015-04-28 2016-11-03 株式会社村田製作所 共振子及び共振装置
JP6742601B2 (ja) * 2016-06-01 2020-08-19 株式会社村田製作所 共振子及び共振装置
CN108490216A (zh) * 2018-01-31 2018-09-04 嘉兴市纳杰微电子技术有限公司 一种硅微谐振式加速度计

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016174789A1 (ja) 2015-04-27 2016-11-03 株式会社村田製作所 共振子及び共振装置
WO2017064916A1 (ja) 2015-10-13 2017-04-20 株式会社村田製作所 共振子及び共振装置
WO2018216264A1 (ja) 2017-05-25 2018-11-29 株式会社村田製作所 共振子及び共振装置

Also Published As

Publication number Publication date
CN115398802B (zh) 2025-11-11
CN115398802A (zh) 2022-11-25
JPWO2021220535A1 (https=) 2021-11-04
WO2021220535A1 (ja) 2021-11-04
US20230014350A1 (en) 2023-01-19
US11824517B2 (en) 2023-11-21

Similar Documents

Publication Publication Date Title
US12267060B2 (en) Resonance device
US12170514B2 (en) Resonator and resonance device including same
US11876503B2 (en) Resonance device
JP7482402B2 (ja) 共振子及び共振装置
JP7154487B2 (ja) パッケージ構造及びその製造方法
WO2020067484A1 (ja) 共振子及び共振装置
JP7459937B2 (ja) 共振子及び共振装置
US11990890B2 (en) Resonator and resonance device including same
JP7544146B2 (ja) 共振子及び共振装置
US20240333249A1 (en) Resonator and resonating device
JP7133134B2 (ja) 共振装置
WO2020070942A1 (ja) 共振子及び共振装置
JP7591182B2 (ja) 共振装置及びその製造方法
US12574006B2 (en) Resonator and resonance device
WO2024009553A1 (ja) 共振装置
WO2022163020A1 (ja) 共振装置及びその製造方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20220810

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20220810

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20231024

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20231221

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20240220

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20240304

R150 Certificate of patent or registration of utility model

Ref document number: 7459937

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150