JPWO2021220535A5 - - Google Patents

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Publication number
JPWO2021220535A5
JPWO2021220535A5 JP2022518594A JP2022518594A JPWO2021220535A5 JP WO2021220535 A5 JPWO2021220535 A5 JP WO2021220535A5 JP 2022518594 A JP2022518594 A JP 2022518594A JP 2022518594 A JP2022518594 A JP 2022518594A JP WO2021220535 A5 JPWO2021220535 A5 JP WO2021220535A5
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Japan
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resonator
arm
frame
base
vibrating
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JP2022518594A
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English (en)
Japanese (ja)
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JPWO2021220535A1 (https=
JP7459937B2 (ja
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Priority claimed from PCT/JP2020/041997 external-priority patent/WO2021220535A1/ja
Publication of JPWO2021220535A1 publication Critical patent/JPWO2021220535A1/ja
Publication of JPWO2021220535A5 publication Critical patent/JPWO2021220535A5/ja
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JP2022518594A 2020-04-27 2020-11-11 共振子及び共振装置 Active JP7459937B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020078246 2020-04-27
JP2020078246 2020-04-27
PCT/JP2020/041997 WO2021220535A1 (ja) 2020-04-27 2020-11-11 共振子及び共振装置

Publications (3)

Publication Number Publication Date
JPWO2021220535A1 JPWO2021220535A1 (https=) 2021-11-04
JPWO2021220535A5 true JPWO2021220535A5 (https=) 2022-10-19
JP7459937B2 JP7459937B2 (ja) 2024-04-02

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ID=78373509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022518594A Active JP7459937B2 (ja) 2020-04-27 2020-11-11 共振子及び共振装置

Country Status (4)

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US (1) US11824517B2 (https=)
JP (1) JP7459937B2 (https=)
CN (1) CN115398802B (https=)
WO (1) WO2021220535A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116601870A (zh) * 2020-12-17 2023-08-15 株式会社村田制作所 谐振子以及谐振装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102498666B (zh) * 2009-09-18 2015-10-14 株式会社大真空 压电振动片以及压电振动片的制造方法
JP6468350B2 (ja) * 2015-04-27 2019-02-13 株式会社村田製作所 共振子及び共振装置
WO2016175218A1 (ja) 2015-04-28 2016-11-03 株式会社村田製作所 共振子及び共振装置
WO2017064916A1 (ja) * 2015-10-13 2017-04-20 株式会社村田製作所 共振子及び共振装置
JP6742601B2 (ja) * 2016-06-01 2020-08-19 株式会社村田製作所 共振子及び共振装置
WO2018216264A1 (ja) * 2017-05-25 2018-11-29 株式会社村田製作所 共振子及び共振装置
CN108490216A (zh) * 2018-01-31 2018-09-04 嘉兴市纳杰微电子技术有限公司 一种硅微谐振式加速度计

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