CN115398802B - 谐振子以及谐振装置 - Google Patents

谐振子以及谐振装置

Info

Publication number
CN115398802B
CN115398802B CN202080099331.9A CN202080099331A CN115398802B CN 115398802 B CN115398802 B CN 115398802B CN 202080099331 A CN202080099331 A CN 202080099331A CN 115398802 B CN115398802 B CN 115398802B
Authority
CN
China
Prior art keywords
base
support arm
resonator
arm
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202080099331.9A
Other languages
English (en)
Chinese (zh)
Other versions
CN115398802A (zh
Inventor
维莱·卡亚卡里
河合良太
樋口敬之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of CN115398802A publication Critical patent/CN115398802A/zh
Application granted granted Critical
Publication of CN115398802B publication Critical patent/CN115398802B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0595—Holders or supports the holder support and resonator being formed in one body
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1057—Mounting in enclosures for microelectro-mechanical devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2468—Tuning fork resonators
    • H03H9/2478—Single-Ended Tuning Fork resonators
    • H03H9/2489—Single-Ended Tuning Fork resonators with more than two fork tines
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02511—Vertical, i.e. perpendicular to the substrate plane

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
CN202080099331.9A 2020-04-27 2020-11-11 谐振子以及谐振装置 Active CN115398802B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020078246 2020-04-27
JP2020-078246 2020-04-27
PCT/JP2020/041997 WO2021220535A1 (ja) 2020-04-27 2020-11-11 共振子及び共振装置

Publications (2)

Publication Number Publication Date
CN115398802A CN115398802A (zh) 2022-11-25
CN115398802B true CN115398802B (zh) 2025-11-11

Family

ID=78373509

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080099331.9A Active CN115398802B (zh) 2020-04-27 2020-11-11 谐振子以及谐振装置

Country Status (4)

Country Link
US (1) US11824517B2 (https=)
JP (1) JP7459937B2 (https=)
CN (1) CN115398802B (https=)
WO (1) WO2021220535A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116601870A (zh) * 2020-12-17 2023-08-15 株式会社村田制作所 谐振子以及谐振装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107431472A (zh) * 2015-04-27 2017-12-01 株式会社村田制作所 谐振子以及谐振装置
CN110663176A (zh) * 2017-05-25 2020-01-07 株式会社村田制作所 谐振器以及谐振装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102498666B (zh) * 2009-09-18 2015-10-14 株式会社大真空 压电振动片以及压电振动片的制造方法
WO2016175218A1 (ja) 2015-04-28 2016-11-03 株式会社村田製作所 共振子及び共振装置
WO2017064916A1 (ja) * 2015-10-13 2017-04-20 株式会社村田製作所 共振子及び共振装置
JP6742601B2 (ja) * 2016-06-01 2020-08-19 株式会社村田製作所 共振子及び共振装置
CN108490216A (zh) * 2018-01-31 2018-09-04 嘉兴市纳杰微电子技术有限公司 一种硅微谐振式加速度计

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107431472A (zh) * 2015-04-27 2017-12-01 株式会社村田制作所 谐振子以及谐振装置
CN110663176A (zh) * 2017-05-25 2020-01-07 株式会社村田制作所 谐振器以及谐振装置

Also Published As

Publication number Publication date
CN115398802A (zh) 2022-11-25
JPWO2021220535A1 (https=) 2021-11-04
WO2021220535A1 (ja) 2021-11-04
US20230014350A1 (en) 2023-01-19
US11824517B2 (en) 2023-11-21
JP7459937B2 (ja) 2024-04-02

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