JPWO2021220535A1 - - Google Patents
Info
- Publication number
- JPWO2021220535A1 JPWO2021220535A1 JP2022518594A JP2022518594A JPWO2021220535A1 JP WO2021220535 A1 JPWO2021220535 A1 JP WO2021220535A1 JP 2022518594 A JP2022518594 A JP 2022518594A JP 2022518594 A JP2022518594 A JP 2022518594A JP WO2021220535 A1 JPWO2021220535 A1 JP WO2021220535A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders or supports
- H03H9/10—Mounting in enclosures
- H03H9/1057—Mounting in enclosures for microelectro-mechanical devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders or supports
- H03H9/0595—Holders or supports the holder support and resonator being formed in one body
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
- H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
- H03H9/2468—Tuning fork resonators
- H03H9/2478—Single-Ended Tuning Fork resonators
- H03H9/2489—Single-Ended Tuning Fork resonators with more than two fork tines
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H2009/02488—Vibration modes
- H03H2009/02511—Vertical, i.e. perpendicular to the substrate plane
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020078246 | 2020-04-27 | ||
| JP2020078246 | 2020-04-27 | ||
| PCT/JP2020/041997 WO2021220535A1 (ja) | 2020-04-27 | 2020-11-11 | 共振子及び共振装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2021220535A1 true JPWO2021220535A1 (https=) | 2021-11-04 |
| JPWO2021220535A5 JPWO2021220535A5 (https=) | 2022-10-19 |
| JP7459937B2 JP7459937B2 (ja) | 2024-04-02 |
Family
ID=78373509
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022518594A Active JP7459937B2 (ja) | 2020-04-27 | 2020-11-11 | 共振子及び共振装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US11824517B2 (https=) |
| JP (1) | JP7459937B2 (https=) |
| CN (1) | CN115398802B (https=) |
| WO (1) | WO2021220535A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116601870A (zh) * | 2020-12-17 | 2023-08-15 | 株式会社村田制作所 | 谐振子以及谐振装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016174789A1 (ja) * | 2015-04-27 | 2016-11-03 | 株式会社村田製作所 | 共振子及び共振装置 |
| WO2017064916A1 (ja) * | 2015-10-13 | 2017-04-20 | 株式会社村田製作所 | 共振子及び共振装置 |
| WO2018216264A1 (ja) * | 2017-05-25 | 2018-11-29 | 株式会社村田製作所 | 共振子及び共振装置 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102498666B (zh) * | 2009-09-18 | 2015-10-14 | 株式会社大真空 | 压电振动片以及压电振动片的制造方法 |
| WO2016175218A1 (ja) | 2015-04-28 | 2016-11-03 | 株式会社村田製作所 | 共振子及び共振装置 |
| JP6742601B2 (ja) * | 2016-06-01 | 2020-08-19 | 株式会社村田製作所 | 共振子及び共振装置 |
| CN108490216A (zh) * | 2018-01-31 | 2018-09-04 | 嘉兴市纳杰微电子技术有限公司 | 一种硅微谐振式加速度计 |
-
2020
- 2020-11-11 WO PCT/JP2020/041997 patent/WO2021220535A1/ja not_active Ceased
- 2020-11-11 JP JP2022518594A patent/JP7459937B2/ja active Active
- 2020-11-11 CN CN202080099331.9A patent/CN115398802B/zh active Active
-
2022
- 2022-09-28 US US17/954,892 patent/US11824517B2/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016174789A1 (ja) * | 2015-04-27 | 2016-11-03 | 株式会社村田製作所 | 共振子及び共振装置 |
| WO2017064916A1 (ja) * | 2015-10-13 | 2017-04-20 | 株式会社村田製作所 | 共振子及び共振装置 |
| WO2018216264A1 (ja) * | 2017-05-25 | 2018-11-29 | 株式会社村田製作所 | 共振子及び共振装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN115398802B (zh) | 2025-11-11 |
| CN115398802A (zh) | 2022-11-25 |
| WO2021220535A1 (ja) | 2021-11-04 |
| US20230014350A1 (en) | 2023-01-19 |
| US11824517B2 (en) | 2023-11-21 |
| JP7459937B2 (ja) | 2024-04-02 |
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