JP7451751B2 - 分析システム及び管理システム、並びに分析方法、並びに分析プログラム - Google Patents

分析システム及び管理システム、並びに分析方法、並びに分析プログラム Download PDF

Info

Publication number
JP7451751B2
JP7451751B2 JP2022555219A JP2022555219A JP7451751B2 JP 7451751 B2 JP7451751 B2 JP 7451751B2 JP 2022555219 A JP2022555219 A JP 2022555219A JP 2022555219 A JP2022555219 A JP 2022555219A JP 7451751 B2 JP7451751 B2 JP 7451751B2
Authority
JP
Japan
Prior art keywords
meter
sample
electrical conductivity
analysis
tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022555219A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2022074814A1 (enrdf_load_stackoverflow
Inventor
勝 千代丸
寛明 三河
友一 奥崎
満智 岡本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Publication of JPWO2022074814A1 publication Critical patent/JPWO2022074814A1/ja
Application granted granted Critical
Publication of JP7451751B2 publication Critical patent/JP7451751B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Molecular Biology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP2022555219A 2020-10-09 2020-10-09 分析システム及び管理システム、並びに分析方法、並びに分析プログラム Active JP7451751B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/038270 WO2022074814A1 (ja) 2020-10-09 2020-10-09 分析システム及び管理システム、並びに分析方法、並びに分析プログラム

Publications (2)

Publication Number Publication Date
JPWO2022074814A1 JPWO2022074814A1 (enrdf_load_stackoverflow) 2022-04-14
JP7451751B2 true JP7451751B2 (ja) 2024-03-18

Family

ID=81126384

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022555219A Active JP7451751B2 (ja) 2020-10-09 2020-10-09 分析システム及び管理システム、並びに分析方法、並びに分析プログラム

Country Status (2)

Country Link
JP (1) JP7451751B2 (enrdf_load_stackoverflow)
WO (1) WO2022074814A1 (enrdf_load_stackoverflow)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012178424A (ja) 2011-02-25 2012-09-13 Dainippon Screen Mfg Co Ltd エッチング液濃度管理装置
CN205691527U (zh) 2016-02-03 2016-11-16 浙江恒达仪器仪表股份有限公司 一种降水在线监测系统
JP2017111135A (ja) 2015-12-14 2017-06-22 株式会社堀場製作所 測定装置
CN206583484U (zh) 2017-03-07 2017-10-24 中国科学院寒区旱区环境与工程研究所 一种用于河水样品采集及现场分析装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5594559U (enrdf_load_stackoverflow) * 1978-09-20 1980-06-30
JPS6131952A (ja) * 1984-07-25 1986-02-14 Horiba Ltd 自動校正機能付濃度計
JPH05215708A (ja) * 1992-02-06 1993-08-24 Kubota Corp pH計自動校正方法
JP2599994Y2 (ja) * 1992-07-30 1999-09-27 株式会社堀場製作所 実験室用イオン濃度計の自動校正装置
JPH0720118A (ja) * 1993-06-23 1995-01-24 Toyota Motor Corp 酸性雨計測方法及びその装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012178424A (ja) 2011-02-25 2012-09-13 Dainippon Screen Mfg Co Ltd エッチング液濃度管理装置
JP2017111135A (ja) 2015-12-14 2017-06-22 株式会社堀場製作所 測定装置
CN205691527U (zh) 2016-02-03 2016-11-16 浙江恒达仪器仪表股份有限公司 一种降水在线监测系统
CN206583484U (zh) 2017-03-07 2017-10-24 中国科学院寒区旱区环境与工程研究所 一种用于河水样品采集及现场分析装置

Also Published As

Publication number Publication date
WO2022074814A1 (ja) 2022-04-14
JPWO2022074814A1 (enrdf_load_stackoverflow) 2022-04-14

Similar Documents

Publication Publication Date Title
US6471845B1 (en) Method of controlling chemical bath composition in a manufacturing environment
US5352350A (en) Method for controlling chemical species concentration
KR20210037641A (ko) 기판 액처리 장치 및 기판 액처리 방법
JP5931484B2 (ja) 基板処理方法および基板処理装置
US11714059B2 (en) Isolating interferences in alkalinity measurement
US20180247839A1 (en) Substrate treatment apparatus and substrate treatment method
KR20070012525A (ko) 전기화학 침착 용액의 유기 첨가제를 모니터링하기 위한방법 및 장치
TW201809369A (zh) 鍍覆裝置、鍍覆方法、及記錄媒體
TWI679696B (zh) 基板處理裝置與基板處理方法
DE102012216641B4 (de) Halbleiterchiptestverfahren und Halbleiterchiptestvorrichtung
JP7451751B2 (ja) 分析システム及び管理システム、並びに分析方法、並びに分析プログラム
KR20190120736A (ko) 기판 처리 장치 및 기판 처리 방법
JP2012074552A (ja) 基板処理方法
JP2000150447A (ja) 薬液濃度管理方法、管理装置および薬液処理装置
JP6657306B2 (ja) 基板液処理装置及び基板液処理方法
US6494961B2 (en) Method of controlling solution concentration in strip cleaning line
KR20190127653A (ko) 규정 농도수의 공급 방법 및 장치
JP7126927B2 (ja) 基板処理装置および基板処理方法
EP2488350B1 (en) Method and device for maintaining a concentration of a treatment bath
JP2747647B2 (ja) エッチング液管理装置
TWI827478B (zh) 鋼帶清洗系統與鋼帶清洗方法
TWI839145B (zh) 基板處理方法及基板處理裝置
JP2019045947A (ja) 薬液の濃度を管理する役務の料金算出方法
WO2013077261A1 (ja) 濃度管理方法および濃度管理装置
JP4243509B2 (ja) 薬液装置

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20221102

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20231114

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20240112

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20240206

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20240306

R150 Certificate of patent or registration of utility model

Ref document number: 7451751

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150