JP7446677B2 - 加工装置 - Google Patents
加工装置 Download PDFInfo
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- JP7446677B2 JP7446677B2 JP2020037099A JP2020037099A JP7446677B2 JP 7446677 B2 JP7446677 B2 JP 7446677B2 JP 2020037099 A JP2020037099 A JP 2020037099A JP 2020037099 A JP2020037099 A JP 2020037099A JP 7446677 B2 JP7446677 B2 JP 7446677B2
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- turntable
- grinding
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 26
- 238000005192 partition Methods 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 4
- 230000008569 process Effects 0.000 claims description 2
- 238000000227 grinding Methods 0.000 description 127
- 230000007423 decrease Effects 0.000 description 19
- 235000012431 wafers Nutrition 0.000 description 18
- 238000005498 polishing Methods 0.000 description 16
- 239000002699 waste material Substances 0.000 description 7
- 238000004140 cleaning Methods 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 230000032258 transport Effects 0.000 description 5
- 239000006061 abrasive grain Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 230000005856 abnormality Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 239000003595 mist Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 230000007723 transport mechanism Effects 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 208000033748 Device issues Diseases 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
- B23Q11/0042—Devices for removing chips
- B23Q11/0046—Devices for removing chips by sucking
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
- B23Q11/08—Protective coverings for parts of machine tools; Splash guards
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
- B23Q17/002—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring the holding action of work or tool holders
- B23Q17/005—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring the holding action of work or tool holders by measuring a force, a pressure or a deformation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
- B23Q3/02—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for mounting on a work-table, tool-slide, or analogous part
- B23Q3/06—Work-clamping means
- B23Q3/08—Work-clamping means other than mechanically-actuated
- B23Q3/088—Work-clamping means other than mechanically-actuated using vacuum means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
- B24B41/068—Table-like supports for panels, sheets or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q2703/00—Work clamping
- B23Q2703/02—Work clamping means
- B23Q2703/04—Work clamping means using fluid means or a vacuum
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Auxiliary Devices For Machine Tools (AREA)
- Machine Tool Sensing Apparatuses (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Dicing (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Description
4:基台
4a:凹部
6:搬送ロボット
8a,8b:カセット載置領域
10a,10b:カセット
11:被加工物
12:位置決めテーブル
14:ローディングアーム
16:ターンテーブル
18:チャックテーブル
18a:保持面
22a,22b:支持構造
24:研削送りユニット
26:Z軸ガイドレール
28:Z軸移動プレート
30:Z軸ボールネジ
32:Z軸パルスモーター
36a:粗研削ユニット
36b:仕上げ研削ユニット
38:保持部材
40:スピンドルハウジング
42:スピンドル
44:モーター
48:ホイールマウント
50a:粗研削ホイール
50b:仕上げ研削ホイール
52a:ホイール基台
54a:粗研削砥石
56:アンローディングアーム
58:スピンナ洗浄ユニット
60a,60b:カバー部材
62a,62b:研削室
64a,64b:排気ダクト
66:吸引源
68:排気ユニット
70a:排気経路
72a:貫通開口
74a:箱体
76a:圧力センサ
78:仕切板
82a:貫通開口
90,92:グラフ
A:搬入搬出領域
B:粗研削領域
C:仕上げ研削領域
Claims (2)
- チャックテーブルで保持された被加工物に加工水を供給しながら、スピンドルを有する加工ユニットで該被加工物を加工する加工装置であって、
上板と、複数の側板と、を含み、該チャックテーブルと該加工ユニットの一部とを覆うカバー部材と、
該カバー部材に接続された排気ダクトと、
上面側に該チャックテーブルが配置されており、該カバー部材の該上板よりも下方に配置された円盤状のターンテーブルと、を備え、
該ターンテーブルは、該ターンテーブルの該上面から突出している複数の仕切板を有し、該ターンテーブルの静止時には、該複数の仕切板は、該複数の側板のうちそれぞれ対応する側板の下方に配置されており、
該ターンテーブルの静止時には、少なくとも、該カバー部材、該ターンテーブルの該上面及び該複数の仕切り板で規定される空間が所定の負圧に維持されるが、
該ターンテーブルの回転により、該空間が開放されると、該空間の圧力が上昇し、
該排気ダクトは、
一端が該カバー部材に接続され、他端が吸引源を有する排気ユニットに接続される排気経路と、
該排気ダクトの側面に形成された開口部を介して該排気経路に連通しており、内部に圧力センサを含む箱体と、を有し、
該開口部は、該排気ダクトの内径の0.11%以上0.56%以下の直径を有することを特徴とする加工装置。 - 該加工ユニット及び該ターンテーブルの動作を制御する制御部を含むことを特徴とする請求項1に記載の加工装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020037099A JP7446677B2 (ja) | 2020-03-04 | 2020-03-04 | 加工装置 |
TW110106158A TW202135156A (zh) | 2020-03-04 | 2021-02-22 | 加工裝置 |
KR1020210026638A KR20210112243A (ko) | 2020-03-04 | 2021-02-26 | 가공 장치 |
CN202110228175.8A CN113427339A (zh) | 2020-03-04 | 2021-03-02 | 加工装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020037099A JP7446677B2 (ja) | 2020-03-04 | 2020-03-04 | 加工装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2021137909A JP2021137909A (ja) | 2021-09-16 |
JP7446677B2 true JP7446677B2 (ja) | 2024-03-11 |
Family
ID=77667381
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020037099A Active JP7446677B2 (ja) | 2020-03-04 | 2020-03-04 | 加工装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP7446677B2 (ja) |
KR (1) | KR20210112243A (ja) |
CN (1) | CN113427339A (ja) |
TW (1) | TW202135156A (ja) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006194680A (ja) | 2005-01-12 | 2006-07-27 | Denso Corp | 圧力センサ |
JP2016198838A (ja) | 2015-04-08 | 2016-12-01 | 株式会社ディスコ | 切削装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4170428B2 (ja) | 1997-12-25 | 2008-10-22 | 株式会社ディスコ | 排気装置 |
-
2020
- 2020-03-04 JP JP2020037099A patent/JP7446677B2/ja active Active
-
2021
- 2021-02-22 TW TW110106158A patent/TW202135156A/zh unknown
- 2021-02-26 KR KR1020210026638A patent/KR20210112243A/ko active Search and Examination
- 2021-03-02 CN CN202110228175.8A patent/CN113427339A/zh active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006194680A (ja) | 2005-01-12 | 2006-07-27 | Denso Corp | 圧力センサ |
JP2016198838A (ja) | 2015-04-08 | 2016-12-01 | 株式会社ディスコ | 切削装置 |
Also Published As
Publication number | Publication date |
---|---|
TW202135156A (zh) | 2021-09-16 |
JP2021137909A (ja) | 2021-09-16 |
CN113427339A (zh) | 2021-09-24 |
KR20210112243A (ko) | 2021-09-14 |
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