JP7431250B2 - マルチ深度光学デバイスのパターニング - Google Patents
マルチ深度光学デバイスのパターニング Download PDFInfo
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- JP7431250B2 JP7431250B2 JP2021559629A JP2021559629A JP7431250B2 JP 7431250 B2 JP7431250 B2 JP 7431250B2 JP 2021559629 A JP2021559629 A JP 2021559629A JP 2021559629 A JP2021559629 A JP 2021559629A JP 7431250 B2 JP7431250 B2 JP 7431250B2
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- 238000000059 patterning Methods 0.000 title claims description 16
- 239000000758 substrate Substances 0.000 claims description 85
- 238000000034 method Methods 0.000 claims description 74
- 238000005530 etching Methods 0.000 claims description 31
- 239000000463 material Substances 0.000 description 12
- 238000001020 plasma etching Methods 0.000 description 8
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 7
- 238000005229 chemical vapour deposition Methods 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 238000000231 atomic layer deposition Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 5
- 238000005240 physical vapour deposition Methods 0.000 description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 4
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- XPDWGBQVDMORPB-UHFFFAOYSA-N Fluoroform Chemical compound FC(F)F XPDWGBQVDMORPB-UHFFFAOYSA-N 0.000 description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 3
- 238000005266 casting Methods 0.000 description 3
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- 239000011737 fluorine Substances 0.000 description 3
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- 239000000843 powder Substances 0.000 description 3
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- 238000010345 tape casting Methods 0.000 description 3
- 229910001887 tin oxide Inorganic materials 0.000 description 3
- 229910018503 SF6 Inorganic materials 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- PXBRQCKWGAHEHS-UHFFFAOYSA-N dichlorodifluoromethane Chemical compound FC(F)(Cl)Cl PXBRQCKWGAHEHS-UHFFFAOYSA-N 0.000 description 2
- 235000019404 dichlorodifluoromethane Nutrition 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 239000011344 liquid material Substances 0.000 description 2
- 239000002086 nanomaterial Substances 0.000 description 2
- 239000002105 nanoparticle Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 description 2
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 239000004338 Dichlorodifluoromethane Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000003190 augmentative effect Effects 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- QKCGXXHCELUCKW-UHFFFAOYSA-N n-[4-[4-(dinaphthalen-2-ylamino)phenyl]phenyl]-n-naphthalen-2-ylnaphthalen-2-amine Chemical compound C1=CC=CC2=CC(N(C=3C=CC(=CC=3)C=3C=CC(=CC=3)N(C=3C=C4C=CC=CC4=CC=3)C=3C=C4C=CC=CC4=CC=3)C3=CC4=CC=CC=C4C=C3)=CC=C21 QKCGXXHCELUCKW-UHFFFAOYSA-N 0.000 description 1
- 238000001127 nanoimprint lithography Methods 0.000 description 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 229910000069 nitrogen hydride Inorganic materials 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- -1 phosphides Chemical class 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical class [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 229940071182 stannate Drugs 0.000 description 1
- 150000004763 sulfides Chemical class 0.000 description 1
- 229960000909 sulfur hexafluoride Drugs 0.000 description 1
- 150000004772 tellurides Chemical class 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
- BNEMLSQAJOPTGK-UHFFFAOYSA-N zinc;dioxido(oxo)tin Chemical compound [Zn+2].[O-][Sn]([O-])=O BNEMLSQAJOPTGK-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/12—Optical coatings produced by application to, or surface treatment of, optical elements by surface treatment, e.g. by irradiation
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0035—Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/02—Diffusing elements; Afocal elements
- G02B5/0268—Diffusing elements; Afocal elements characterized by the fabrication or manufacturing method
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/34—Optical coupling means utilising prism or grating
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12107—Grating
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12173—Masking
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12176—Etching
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Optical Integrated Circuits (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Drying Of Semiconductors (AREA)
Description
Claims (3)
- 光学デバイスを形成する方法であって、
基板の上面の上に配置されたデバイス層の上に平坦化層を配置することであって、前記デバイス層が、
前記基板の前記上面から第1の高さを有する第1の部分、及び
前記基板の前記上面から第2の高さを有する第2の部分を有する、平坦化層を配置することと、
前記平坦化層の上にレジスト層を配置することと、
前記レジスト層をパターニングして、
前記デバイス層の前記第1の部分の上に、複数の第1の開口が形成された第1のレジスト層パターンを形成し、かつ
前記デバイス層の前記第2の部分の上に、複数の第2の開口が形成された第2のレジスト層パターンを、前記第2のレジスト層パターンの厚さが前記第1のレジスト層パターンの厚さと異なるように形成することと
前記複数の第1の開口及び前記複数の第2の開口によって画定された前記平坦化層の露出部分をエッチングして、
前記デバイス層の前記第1の部分のマスクされていない第1のデバイス層セグメントを露出させ、かつ
前記デバイス層の前記第2の部分のマスクされていない第2のデバイス層セグメントを露出させることと、
前記第1のデバイス層セグメント及び前記第2のデバイス層セグメントをエッチングすることと
を含み、
前記第1のデバイス層セグメントが、前記光学デバイス内に複数の第1の構造体の少なくとも一部を形成するように構成され、前記第1の構造体が、前記基板の前記上面に対して第1の深度を有し、
前記第2のデバイス層セグメントが、前記光学デバイス内に少なくとも複数の第2の構造体を形成するように構成され、前記第2の構造体が、前記基板の前記上面に対して第2の深度を有する、方法。 - 前記基板上にエッチング停止層が配置されている、請求項1に記載の方法。
- 前記第1の深度が、前記第2の深度より浅い、請求項1に記載の方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2023203548A JP2024026240A (ja) | 2019-04-11 | 2023-12-01 | マルチ深度光学デバイスのパターニング |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201962832807P | 2019-04-11 | 2019-04-11 | |
US62/832,807 | 2019-04-11 | ||
PCT/US2020/027370 WO2020210425A1 (en) | 2019-04-11 | 2020-04-09 | Patterning of multi-depth optical devices |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2023203548A Division JP2024026240A (ja) | 2019-04-11 | 2023-12-01 | マルチ深度光学デバイスのパターニング |
Publications (2)
Publication Number | Publication Date |
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JP2022526635A JP2022526635A (ja) | 2022-05-25 |
JP7431250B2 true JP7431250B2 (ja) | 2024-02-14 |
Family
ID=72747390
Family Applications (2)
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JP2021559629A Active JP7431250B2 (ja) | 2019-04-11 | 2020-04-09 | マルチ深度光学デバイスのパターニング |
JP2023203548A Pending JP2024026240A (ja) | 2019-04-11 | 2023-12-01 | マルチ深度光学デバイスのパターニング |
Family Applications After (1)
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JP2023203548A Pending JP2024026240A (ja) | 2019-04-11 | 2023-12-01 | マルチ深度光学デバイスのパターニング |
Country Status (7)
Country | Link |
---|---|
US (2) | US11226556B2 (ja) |
EP (1) | EP3953746A4 (ja) |
JP (2) | JP7431250B2 (ja) |
KR (1) | KR20210135630A (ja) |
CN (1) | CN113574421A (ja) |
TW (1) | TW202046449A (ja) |
WO (1) | WO2020210425A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022204192A1 (en) * | 2021-03-25 | 2022-09-29 | Applied Materials, Inc. | Ion implantation to modify glass locally for optical devices |
WO2023136892A1 (en) * | 2022-01-13 | 2023-07-20 | Google Llc | Waveguide including an optical grating with reduced contamination and methods of production thereof |
WO2023136182A1 (ja) * | 2022-01-14 | 2023-07-20 | Scivax株式会社 | メタサーフェス |
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2020
- 2020-04-09 JP JP2021559629A patent/JP7431250B2/ja active Active
- 2020-04-09 KR KR1020217035800A patent/KR20210135630A/ko not_active Application Discontinuation
- 2020-04-09 EP EP20788675.5A patent/EP3953746A4/en active Pending
- 2020-04-09 CN CN202080020654.4A patent/CN113574421A/zh active Pending
- 2020-04-09 US US16/844,636 patent/US11226556B2/en active Active
- 2020-04-09 WO PCT/US2020/027370 patent/WO2020210425A1/en unknown
- 2020-04-10 TW TW109112103A patent/TW202046449A/zh unknown
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2021
- 2021-12-08 US US17/545,554 patent/US11614685B2/en active Active
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2023
- 2023-12-01 JP JP2023203548A patent/JP2024026240A/ja active Pending
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JP2006065312A (ja) | 2004-07-26 | 2006-03-09 | Nippon Sheet Glass Co Ltd | 透過型回折光学素子 |
US20090097122A1 (en) | 2005-09-14 | 2009-04-16 | Mirage Innovations Ltd | Diffractive Optical Device and System |
JP2009015302A (ja) | 2007-06-07 | 2009-01-22 | Seiko Epson Corp | 光学素子、液晶装置、電子機器、光学素子の製造方法、液晶装置の製造方法 |
US20160033784A1 (en) | 2014-07-30 | 2016-02-04 | Tapani Levola | Optical Components |
WO2019054756A1 (ko) | 2017-09-12 | 2019-03-21 | 주식회사 엘지화학 | 회절 도광판 및 회절 도광판의 제조 방법 |
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TW202046449A (zh) | 2020-12-16 |
US20220100084A1 (en) | 2022-03-31 |
US20200326621A1 (en) | 2020-10-15 |
JP2022526635A (ja) | 2022-05-25 |
CN113574421A (zh) | 2021-10-29 |
JP2024026240A (ja) | 2024-02-28 |
US11614685B2 (en) | 2023-03-28 |
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US11226556B2 (en) | 2022-01-18 |
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