JP7420756B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP7420756B2 JP7420756B2 JP2021020634A JP2021020634A JP7420756B2 JP 7420756 B2 JP7420756 B2 JP 7420756B2 JP 2021020634 A JP2021020634 A JP 2021020634A JP 2021020634 A JP2021020634 A JP 2021020634A JP 7420756 B2 JP7420756 B2 JP 7420756B2
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- 239000004065 semiconductor Substances 0.000 title claims description 102
- 238000004519 manufacturing process Methods 0.000 title claims description 20
- 239000010410 layer Substances 0.000 claims description 93
- 238000000034 method Methods 0.000 claims description 55
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical group [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 53
- 229910002601 GaN Inorganic materials 0.000 claims description 51
- 238000000137 annealing Methods 0.000 claims description 29
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 28
- 229910052749 magnesium Inorganic materials 0.000 claims description 28
- 239000011777 magnesium Substances 0.000 claims description 28
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 26
- 150000001875 compounds Chemical class 0.000 claims description 26
- 229910052733 gallium Inorganic materials 0.000 claims description 26
- 238000005468 ion implantation Methods 0.000 claims description 21
- 229910052751 metal Inorganic materials 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 14
- 239000002344 surface layer Substances 0.000 claims description 6
- JLVVSXFLKOJNIY-UHFFFAOYSA-N Magnesium ion Chemical compound [Mg+2] JLVVSXFLKOJNIY-UHFFFAOYSA-N 0.000 claims description 4
- 229910001425 magnesium ion Inorganic materials 0.000 claims description 4
- 229910021645 metal ion Inorganic materials 0.000 claims description 4
- 230000007547 defect Effects 0.000 description 8
- 230000002776 aggregation Effects 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 5
- 238000005054 agglomeration Methods 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 4
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 description 4
- 238000004220 aggregation Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000003213 activating effect Effects 0.000 description 2
- 210000000746 body region Anatomy 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 229910001195 gallium oxide Inorganic materials 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000010191 image analysis Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02387—Group 13/15 materials
- H01L21/02389—Nitrides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/34—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/0405, H01L21/0445, H01L21/06, H01L21/16 and H01L21/18 with or without impurities, e.g. doping materials
- H01L21/46—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428
- H01L21/477—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/2654—Bombardment with radiation with high-energy radiation producing ion implantation in AIIIBV compounds
- H01L21/26546—Bombardment with radiation with high-energy radiation producing ion implantation in AIIIBV compounds of electrically active species
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/2654—Bombardment with radiation with high-energy radiation producing ion implantation in AIIIBV compounds
- H01L21/26546—Bombardment with radiation with high-energy radiation producing ion implantation in AIIIBV compounds of electrically active species
- H01L21/26553—Through-implantation
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- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
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- H01L2223/54426—Marks applied to semiconductor devices or parts for alignment
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- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- High Energy & Nuclear Physics (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Description
Claims (8)
- ガリウム系化合物半導体層(10)の非素子領域(10A)にアライメントマーク(30)を形成するアライメントマーク形成工程と、
前記アライメントマーク形成工程の後に、前記ガリウム系化合物半導体層の素子領域(10B)に素子構造を形成する素子構造形成工程と、を備えており、
前記アライメントマーク形成工程は、
前記ガリウム系化合物半導体層の前記非素子領域の表層部の一部に金属をイオン注入するイオン注入工程(S1)と、
前記ガリウム系化合物半導体層をアニール処理するアニール処理工程(S2)と、を有する、半導体装置の製造方法。 - 前記ガリウム系化合物半導体層が窒化ガリウム系半導体層であり、
前記金属がマグネシウムである、請求項1に記載の半導体装置の製造方法。 - 前記イオン注入工程では、前記マグネシウムのピーク濃度が1×1019cm-3以上となるように、前記窒化ガリウム系半導体層に前記マグネシウムがイオン注入される、請求項2に記載の半導体装置の製造方法。
- 前記イオン注入工程では、前記マグネシウムの濃度がピークとなる位置が、前記窒化ガリウム系半導体層の内部に位置するように、前記窒化ガリウム系半導体層に前記マグネシウムがイオン注入される、請求項2又は3に記載の半導体装置の製造方法。
- 前記イオン注入工程では、前記マグネシウムの前記窒化ガリウム系半導体層の表面における濃度が1×1017cm-3以下となるように、前記窒化ガリウム系半導体層に前記マグネシウムがイオン注入される、請求項4に記載の半導体装置の製造方法。
- 前記アニール処理工程では、前記窒化ガリウム系半導体層が1000℃以上となるように、前記窒化ガリウム系半導体層が加熱される、請求項2~5のいずれか一項に記載の半導体装置の製造方法。
- 前記素子構造形成工程は、
エピタキシャル成長技術を利用して前記ガリウム系化合物半導体層の表面上にエピタキシャル層(12)を成膜する成膜工程(S11)を有する、請求項1~6のいずれか一項に記載の半導体装置の製造方法。 - 前記素子構造形成工程は、
前記ガリウム系化合物半導体層をアニール処理するアニール処理工程(S12)を有しており、
前記素子構造形成工程の前記アニール処理工程は、前記アライメントマーク形成工程の前記アニール処理工程よりも前記ガリウム系化合物半導体層が高温となるように前記ガリウム系化合物半導体層を加熱する、請求項1~7のいずれか一項に記載の半導体装置の製造方法。
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JP2021020634A JP7420756B2 (ja) | 2021-02-12 | 2021-02-12 | 半導体装置の製造方法 |
US17/591,202 US11791156B2 (en) | 2021-02-12 | 2022-02-02 | Method for manufacturing semiconductor device having gallium-based compound semiconductor layer |
CN202210121575.3A CN114927501A (zh) | 2021-02-12 | 2022-02-09 | 制造具有镓基化合物半导体层的半导体器件的方法 |
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JP2021020634A JP7420756B2 (ja) | 2021-02-12 | 2021-02-12 | 半導体装置の製造方法 |
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JP7420756B2 true JP7420756B2 (ja) | 2024-01-23 |
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Citations (2)
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JP2011023453A (ja) | 2009-07-14 | 2011-02-03 | Panasonic Corp | 半導体装置の製造方法 |
JP2018181892A (ja) | 2017-04-03 | 2018-11-15 | 富士電機株式会社 | 窒化ガリウム半導体装置および窒化ガリウム半導体装置の製造方法 |
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US10446700B2 (en) * | 2013-05-22 | 2019-10-15 | W&Wsens Devices, Inc. | Microstructure enhanced absorption photosensitive devices |
JP6977509B2 (ja) | 2017-11-29 | 2021-12-08 | 株式会社デンソー | 半導体基板の製造方法 |
JP7110796B2 (ja) | 2018-07-30 | 2022-08-02 | 株式会社デンソー | 半導体装置の製造方法 |
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JP2011023453A (ja) | 2009-07-14 | 2011-02-03 | Panasonic Corp | 半導体装置の製造方法 |
JP2018181892A (ja) | 2017-04-03 | 2018-11-15 | 富士電機株式会社 | 窒化ガリウム半導体装置および窒化ガリウム半導体装置の製造方法 |
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JP2022123363A (ja) | 2022-08-24 |
US11791156B2 (en) | 2023-10-17 |
CN114927501A (zh) | 2022-08-19 |
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