JP7401557B2 - 塗布装置および塗布方法 - Google Patents
塗布装置および塗布方法 Download PDFInfo
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- JP7401557B2 JP7401557B2 JP2021557851A JP2021557851A JP7401557B2 JP 7401557 B2 JP7401557 B2 JP 7401557B2 JP 2021557851 A JP2021557851 A JP 2021557851A JP 2021557851 A JP2021557851 A JP 2021557851A JP 7401557 B2 JP7401557 B2 JP 7401557B2
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- JP
- Japan
- Prior art keywords
- air
- liquid
- coating
- section
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000000576 coating method Methods 0.000 title claims description 111
- 239000011248 coating agent Substances 0.000 title claims description 96
- 239000007788 liquid Substances 0.000 claims description 125
- 238000002347 injection Methods 0.000 claims description 74
- 239000007924 injection Substances 0.000 claims description 74
- 239000000758 substrate Substances 0.000 claims description 19
- 239000003112 inhibitor Substances 0.000 claims description 9
- 239000007921 spray Substances 0.000 claims description 6
- 210000002445 nipple Anatomy 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 230000001360 synchronised effect Effects 0.000 description 5
- 239000003795 chemical substances by application Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 238000001035 drying Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C21/00—Accessories or implements for use in connection with applying liquids or other fluent materials to surfaces, not provided for in groups B05C1/00 - B05C19/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0208—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
- B05C5/0212—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles only at particular parts of the articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
- B05B12/16—Arrangements for controlling delivery; Arrangements for controlling the spray area for controlling the spray area
- B05B12/18—Arrangements for controlling delivery; Arrangements for controlling the spray area for controlling the spray area using fluids, e.g. gas streams
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
- B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
- B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
- B05B15/55—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter using cleaning fluids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/02—Spray pistols; Apparatus for discharge
- B05B7/08—Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point
- B05B7/0807—Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point to form intersecting jets
- B05B7/0815—Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point to form intersecting jets with at least one gas jet intersecting a jet constituted by a liquid or a mixture containing a liquid for controlling the shape of the latter
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/32—Processes for applying liquids or other fluent materials using means for protecting parts of a surface not to be coated, e.g. using stencils, resists
Landscapes
- Coating Apparatus (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
Description
2 液ノズル部
3 エアノズル部
4 エアニップル
5 筐体
6 塗布液タンク
10 噴射制御部
11 エアポンプ
12 負圧ポンプ
13 切替バルブ
14 配管
31 端部
32 突出部
33 通路
100 基板
110 電子部品
200 塗布液
300 カップ
310 硬化防止剤
400 空カップ
Claims (6)
- 基板に実装された電子部品に塗布液を噴射する液ノズル部と、
前記液ノズル部に対して同心円状に配置され、前記基板に向かってエアを噴射するエアノズル部と、
前記液ノズル部による前記塗布液の噴射タイミングよりも前のタイミングで前記エアノズル部から前記エアの噴射を開始する噴射制御部と、
を備え、
前記エアノズル部は、
前記液ノズル部に向かって突出する複数の突出部を有すること
を特徴とする塗布装置。 - 前記噴射制御部は、
前記噴射タイミングを含む所定期間に亘って前記エアを噴射すること
を特徴とする請求項1に記載の塗布装置。 - 前記複数の突出部は、
前記液ノズル部の周囲に沿って等間隔で配置されること
を特徴とする請求項1または2に記載の塗布装置。 - 前記エアノズル部へ前記エアを供給するエアポンプと、
前記エアノズル部から吸気する負圧ポンプと、
前記エアノズル部の連通先である前記エアポンプおよび前記負圧ポンプを切り替える切替バルブと、をさらに備え、
前記噴射制御部は、
前記液ノズル部から前記塗布液を塗布する場合には、前記切替バルブを切り替えて、前記エアノズル部および前記エアポンプを連通させ、
前記液ノズル部を硬化防止剤に浸漬させる場合には、前記切替バルブを切り替えて、前記エアノズル部および前記負圧ポンプを連通させること
を特徴とする請求項1~3のいずれか1つに記載の塗布装置。 - 前記噴射制御部は、
前記液ノズル部からの前記塗布液の噴射量に応じた噴射量の前記エアを噴射すること
を特徴とする請求項1~4のいずれか1つに記載の塗布装置。 - 基板に実装された電子部品に塗布液を噴射する液ノズル部と、
前記液ノズル部に対して同心円状に配置され、前記基板に向かってエアを噴射するエアノズル部と、を備える塗布装置が実行する塗布方法であって、
前記液ノズル部による前記塗布液の噴射タイミングよりも前のタイミングで前記エアノズル部から前記エアの噴射を開始する噴射制御工程、
を含み、
前記エアノズル部は、
前記液ノズル部に向かって突出する複数の突出部を有すること
を特徴とする塗布方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2020/034013 WO2022054146A1 (ja) | 2020-09-08 | 2020-09-08 | 塗布装置および塗布方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2022054146A1 JPWO2022054146A1 (ja) | 2022-03-17 |
JP7401557B2 true JP7401557B2 (ja) | 2023-12-19 |
Family
ID=80631371
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021557851A Active JP7401557B2 (ja) | 2020-09-08 | 2020-09-08 | 塗布装置および塗布方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20220323989A1 (ja) |
JP (1) | JP7401557B2 (ja) |
CN (1) | CN114502288B (ja) |
WO (1) | WO2022054146A1 (ja) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005262167A (ja) | 2004-03-22 | 2005-09-29 | Matsushita Electric Ind Co Ltd | ディスペンサノズル |
JP2010087198A (ja) | 2008-09-30 | 2010-04-15 | M Setek Co Ltd | レジスト塗布装置とその塗布方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62106861A (ja) * | 1985-10-31 | 1987-05-18 | Nippon Seiki Co Ltd | 電動噴霧装置における保護装置 |
JPH09187709A (ja) * | 1996-01-05 | 1997-07-22 | Matsushita Electric Ind Co Ltd | 塗布剤供給方法及び装置 |
JPH09239297A (ja) * | 1996-03-11 | 1997-09-16 | Nissan Motor Co Ltd | 回転霧化静電塗装方法および装置 |
JP3412746B2 (ja) * | 1997-10-14 | 2003-06-03 | 株式会社ビービーリッチ | エアーブラシ |
US20040202787A1 (en) * | 2003-03-03 | 2004-10-14 | Creo Inc. | Method and apparatus for applying and removing imageable materials |
JP2006056116A (ja) * | 2004-08-19 | 2006-03-02 | Sharp Corp | 液体噴射ヘッド及びその保湿方法 |
JP2008066403A (ja) * | 2006-09-05 | 2008-03-21 | Athlete Fa Kk | ポッティング装置 |
JP5293989B2 (ja) * | 2007-07-24 | 2013-09-18 | ノードソン株式会社 | 少量液体の噴霧装置 |
JP2009076856A (ja) * | 2007-08-28 | 2009-04-09 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
CN101639074B (zh) * | 2008-08-02 | 2012-11-28 | 胡宁成 | 离心轴流式真空泵湿法除尘系统及相应的吸尘器和擦地机 |
EP2248598B2 (de) * | 2009-05-07 | 2016-06-08 | Robatech AG | Vorrichtung mit mehreren Trockenluftdüsen sowie Verfahren zum Abgeben eines Klebstoffs |
JP4877372B2 (ja) * | 2009-08-28 | 2012-02-15 | カシオ計算機株式会社 | 塗布装置及び塗布方法 |
JP5537581B2 (ja) * | 2012-03-08 | 2014-07-02 | 株式会社東芝 | 塗布装置及び塗布体の製造方法 |
JP2015060932A (ja) * | 2013-09-18 | 2015-03-30 | 株式会社東芝 | スパイラル塗布装置 |
JP6527716B2 (ja) * | 2015-02-27 | 2019-06-05 | 株式会社Screenホールディングス | 基板処理装置および基板処理装置の制御方法 |
JP7218098B2 (ja) * | 2018-05-31 | 2023-02-06 | 株式会社デンソーテン | 塗布装置および塗布方法 |
-
2020
- 2020-09-08 CN CN202080018452.6A patent/CN114502288B/zh active Active
- 2020-09-08 US US17/435,374 patent/US20220323989A1/en active Pending
- 2020-09-08 WO PCT/JP2020/034013 patent/WO2022054146A1/ja active Application Filing
- 2020-09-08 JP JP2021557851A patent/JP7401557B2/ja active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005262167A (ja) | 2004-03-22 | 2005-09-29 | Matsushita Electric Ind Co Ltd | ディスペンサノズル |
JP2010087198A (ja) | 2008-09-30 | 2010-04-15 | M Setek Co Ltd | レジスト塗布装置とその塗布方法 |
Also Published As
Publication number | Publication date |
---|---|
JPWO2022054146A1 (ja) | 2022-03-17 |
CN114502288A (zh) | 2022-05-13 |
WO2022054146A1 (ja) | 2022-03-17 |
CN114502288B (zh) | 2023-08-11 |
US20220323989A1 (en) | 2022-10-13 |
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