JP7395708B2 - 静電チャック用の多層のための接地機構および関連する方法 - Google Patents
静電チャック用の多層のための接地機構および関連する方法 Download PDFInfo
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- JP7395708B2 JP7395708B2 JP2022503806A JP2022503806A JP7395708B2 JP 7395708 B2 JP7395708 B2 JP 7395708B2 JP 2022503806 A JP2022503806 A JP 2022503806A JP 2022503806 A JP2022503806 A JP 2022503806A JP 7395708 B2 JP7395708 B2 JP 7395708B2
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- 238000000034 method Methods 0.000 title description 19
- 239000012212 insulator Substances 0.000 claims description 49
- 238000000576 coating method Methods 0.000 claims description 45
- 239000011248 coating agent Substances 0.000 claims description 43
- 229920000642 polymer Polymers 0.000 claims description 32
- 239000010409 thin film Substances 0.000 claims description 13
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 8
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 229910000990 Ni alloy Inorganic materials 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 4
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 229910052759 nickel Inorganic materials 0.000 claims description 4
- 239000010936 titanium Substances 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 229910052726 zirconium Inorganic materials 0.000 claims description 4
- ZVWKZXLXHLZXLS-UHFFFAOYSA-N zirconium nitride Chemical compound [Zr]#N ZVWKZXLXHLZXLS-UHFFFAOYSA-N 0.000 claims description 4
- 238000009413 insulation Methods 0.000 claims 2
- 239000000758 substrate Substances 0.000 description 20
- 235000012431 wafers Nutrition 0.000 description 20
- 238000004049 embossing Methods 0.000 description 11
- 229910052751 metal Inorganic materials 0.000 description 10
- 239000002184 metal Substances 0.000 description 10
- 238000005229 chemical vapour deposition Methods 0.000 description 8
- 239000004020 conductor Substances 0.000 description 8
- 238000000151 deposition Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 238000012986 modification Methods 0.000 description 6
- 230000004048 modification Effects 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 238000000231 atomic layer deposition Methods 0.000 description 4
- 230000032798 delamination Effects 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 238000004377 microelectronic Methods 0.000 description 4
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 4
- 230000003068 static effect Effects 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- 238000009825 accumulation Methods 0.000 description 3
- 239000002243 precursor Substances 0.000 description 3
- 239000004593 Epoxy Substances 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000012671 ceramic insulating material Substances 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a coating or a hardness or a material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Chemical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
Description
本出願は、2019年7月24日提出の米国仮出願第62/877,919号の優先権および利益を主張するものであり、その内容はあらゆる目的のために参照により本明細書に組み込まれる。
態様1は、誘電体層と、誘電体層上の導電性フィールドコーティングと、誘電体層下の電極層と、電極層下の絶縁体層と、誘電体層下および絶縁体層上のポリマー結合層と、ポリマー結合層上および誘電体層下にあり、導電性フィールドコーティングと電気的に接続された接地層と、絶縁体層の位置からポリマー結合層を通り接地層に延びる接地ピン開口部と、接地ピン開口部に位置し、接地層に電気的に接続された接地ピンとを備える多層静電チャックアセンブリである。
Claims (8)
- 誘電体層と、
誘電体層上の導電性フィールドコーティングと、
誘電体層下の電極層と、
電極層下の絶縁体層と、
誘電体層下及び絶縁体層上のポリマー結合層と、
ポリマー結合層上及び誘電体層下にあり、導電性フィールドコーティングと電気的に接続された接地層と、
絶縁体層の位置からポリマー結合層を通り接地層に延びる接地ピン開口部と、
接地ピン開口部に位置し、接地層に電気的に接続された接地ピンと
を備え、
導電性フィールドコーティングの少なくとも一部が、誘電体層の上面から誘電体層の外径面方向に延びており、接地層が、導電性フィールドコーティングから誘電体層の外径面にわたって延びる導電性接地経路により、導電性接地経路の上面と導電性接地経路の誘電体層の外径面に対して反対側の面とで、導電性フィールドコーティングに電気的に接続されている、多層静電チャックアセンブリ。 - 接地層が、ポリマー結合層の上面及び誘電体層の下面に接触する、請求項1に記載のアセンブリ。
- 接地層が、導電性蒸着薄膜である、請求項1又は2に記載のアセンブリ。
- 接地層が、ニッケル、ニッケル合金、チタン、アルミニウム、ジルコニウム、窒化チタン、窒化ジルコニウム、又は導電性炭素を含む蒸着薄膜である、請求項1から3のいずれか一項に記載のアセンブリ。
- 接地層が、100ナノメートル~10マイクロメートルの範囲の厚さ及び10ナノメートル~100マイクロメートルの範囲の幅を有する、請求項1から4のいずれか一項に記載のアセンブリ。
- 接地層が、アセンブリの全周にわたって途切れることなく延びる、請求項1から5のいずれか一項に記載のアセンブリ。
- 絶縁体層を支持する、絶縁体層下のベースを更に備える、請求項1から6のいずれか一項に記載のアセンブリ。
- 誘電体層と、誘電体層上の導電性フィールドコーティングと、誘電体層下に配置された電極層と、電極層下の絶縁体層と、誘電体層及び電極層下で、かつ絶縁体層上に配置されたポリマー結合層と、ポリマー結合層上及び誘電体層下に配置され、導電性フィールドコーティングと電気的に接続された接地層とを含む多層構造に、絶縁体層の位置からポリマー結合層を通り接地層に延びる接地ピン開口部を形成することと、
接地ピンを接地ピン開口部に挿入し、接地ピンを接地層に電気的に接続することと
を含み、
導電性フィールドコーティングの少なくとも一部が、誘電体層上から誘電体層の外径面方向に延びており、接地層が、導電性フィールドコーティングから誘電体層の外径面にわたって延びる導電性接地経路により、導電性接地経路の上面と導電性接地経路の誘電体層の外径面に対して反対側の面とで、導電性フィールドコーティングに電気的に接続される、方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201962877919P | 2019-07-24 | 2019-07-24 | |
US62/877,919 | 2019-07-24 | ||
PCT/US2020/043564 WO2021016584A1 (en) | 2019-07-24 | 2020-07-24 | Grounding mechanism for multi-layer for electrostatic chuck, and related methods |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2022541906A JP2022541906A (ja) | 2022-09-28 |
JP7395708B2 true JP7395708B2 (ja) | 2023-12-11 |
Family
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Application Number | Title | Priority Date | Filing Date |
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JP2022503806A Active JP7395708B2 (ja) | 2019-07-24 | 2020-07-24 | 静電チャック用の多層のための接地機構および関連する方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US11309207B2 (ja) |
EP (1) | EP4004973A4 (ja) |
JP (1) | JP7395708B2 (ja) |
KR (1) | KR20220034903A (ja) |
CN (2) | CN112289731A (ja) |
TW (1) | TWI762978B (ja) |
WO (1) | WO2021016584A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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US11282729B2 (en) * | 2018-12-27 | 2022-03-22 | Areesys Technologies, Inc. | Method and apparatus for poling polymer thin films |
JP2022060859A (ja) * | 2020-10-05 | 2022-04-15 | キオクシア株式会社 | 静電チャック装置及び半導体製造装置 |
US20230060192A1 (en) * | 2021-09-02 | 2023-03-02 | Entegris, Inc. | Methods and apparatus for processing an electrostatic chuck |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002170871A (ja) | 2000-12-04 | 2002-06-14 | Kyocera Corp | 静電チャック |
JP2006040993A (ja) | 2004-07-23 | 2006-02-09 | Nikon Corp | 静電チャック |
JP2007311399A (ja) | 2006-05-16 | 2007-11-29 | Sumitomo Osaka Cement Co Ltd | 静電チャック |
JP2013542590A (ja) | 2010-09-08 | 2013-11-21 | インテグリス・インコーポレーテッド | 高導電性静電チャック |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5155652A (en) * | 1991-05-02 | 1992-10-13 | International Business Machines Corporation | Temperature cycling ceramic electrostatic chuck |
KR100511854B1 (ko) * | 2002-06-18 | 2005-09-02 | 아네르바 가부시키가이샤 | 정전 흡착 장치 |
TWI475594B (zh) * | 2008-05-19 | 2015-03-01 | Entegris Inc | 靜電夾頭 |
WO2014070764A1 (en) * | 2012-11-02 | 2014-05-08 | Entegris, Inc. | Electrostatic chuck with photo-patternable soft protrusion contact surface |
US8861170B2 (en) * | 2009-05-15 | 2014-10-14 | Entegris, Inc. | Electrostatic chuck with photo-patternable soft protrusion contact surface |
KR101776562B1 (ko) * | 2015-08-20 | 2017-09-07 | 엔지케이 인슐레이터 엘티디 | 정전 척 히터 |
CN113056816A (zh) * | 2018-11-19 | 2021-06-29 | 恩特格里斯公司 | 具有电荷耗散涂层的静电卡盘 |
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2020
- 2020-07-23 TW TW109124880A patent/TWI762978B/zh active
- 2020-07-24 KR KR1020227005710A patent/KR20220034903A/ko not_active Application Discontinuation
- 2020-07-24 WO PCT/US2020/043564 patent/WO2021016584A1/en active Application Filing
- 2020-07-24 CN CN202010722741.6A patent/CN112289731A/zh active Pending
- 2020-07-24 EP EP20843974.5A patent/EP4004973A4/en active Pending
- 2020-07-24 CN CN202021483706.5U patent/CN213366557U/zh active Active
- 2020-07-24 US US16/938,547 patent/US11309207B2/en active Active
- 2020-07-24 JP JP2022503806A patent/JP7395708B2/ja active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002170871A (ja) | 2000-12-04 | 2002-06-14 | Kyocera Corp | 静電チャック |
JP2006040993A (ja) | 2004-07-23 | 2006-02-09 | Nikon Corp | 静電チャック |
JP2007311399A (ja) | 2006-05-16 | 2007-11-29 | Sumitomo Osaka Cement Co Ltd | 静電チャック |
JP2013542590A (ja) | 2010-09-08 | 2013-11-21 | インテグリス・インコーポレーテッド | 高導電性静電チャック |
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Publication number | Publication date |
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WO2021016584A1 (en) | 2021-01-28 |
KR20220034903A (ko) | 2022-03-18 |
TWI762978B (zh) | 2022-05-01 |
CN213366557U (zh) | 2021-06-04 |
EP4004973A1 (en) | 2022-06-01 |
CN112289731A (zh) | 2021-01-29 |
US20210028046A1 (en) | 2021-01-28 |
EP4004973A4 (en) | 2023-08-16 |
TW202114039A (zh) | 2021-04-01 |
US11309207B2 (en) | 2022-04-19 |
JP2022541906A (ja) | 2022-09-28 |
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