JP7392735B2 - 懸垂式搬送車及び保管システム - Google Patents
懸垂式搬送車及び保管システム Download PDFInfo
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- JP7392735B2 JP7392735B2 JP2021555920A JP2021555920A JP7392735B2 JP 7392735 B2 JP7392735 B2 JP 7392735B2 JP 2021555920 A JP2021555920 A JP 2021555920A JP 2021555920 A JP2021555920 A JP 2021555920A JP 7392735 B2 JP7392735 B2 JP 7392735B2
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- 230000032258 transport Effects 0.000 description 27
- 238000012986 modification Methods 0.000 description 4
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- 230000007246 mechanism Effects 0.000 description 2
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0407—Storage devices mechanical using stacker cranes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
- B65G2203/02—Control or detection
- B65G2203/0266—Control or detection relating to the load carrier(s)
- B65G2203/0283—Position of the load carrier
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
- B65G2203/04—Detection means
- B65G2203/042—Sensors
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Warehouses Or Storage Devices (AREA)
Description
Claims (6)
- 天井に支持される軌道に沿って走行すると共に、床面に設置されたラックの棚部に物品を移載する懸垂式搬送車であって、
前記軌道に沿って走行する車輪と、前記車輪を駆動する駆動部と、を有する走行部と、
前記走行部から下方に吊り下げられると共に前記ラックの棚部に前記物品を移載する移載部を有する天井側部材と、
前記天井側部材に対して相対移動可能に設けられると共に前記床面又は前記床面に設置された部材との接触部を有する床面側部材と、
前記天井側部材と前記床面側部材との相対距離を検出する距離検出部と、を備える、懸垂式搬送車。 - 前記天井側部材は、前記走行部から下方に延在するマストと、前記マストに沿って昇降可能に設けられると共に前記移載部が設けられる昇降部と、を有し、
前記懸垂式搬送車は、前記昇降部の昇降を制御するコントローラを更に備え、
前記コントローラは、前記距離検出部によって検出された前記相対距離に基づいて、前記ラックの棚部に前記物品を移載するときの前記昇降部の高さ位置を決定する、請求項1記載の懸垂式搬送車。 - 前記床面側部材は、前記接触部である走行ローラと、前記床面に設けられたガイド部材にガイドされ、前記マストが鉛直方向から所定角度以上傾くことを防止する傾き防止用のガイドローラと、を有している、請求項2記載の懸垂式搬送車。
- 前記距離検出部は、反射部材と、前記反射部材までの距離を検出する距離センサと、を含んで構成されており、
前記天井側部材には、前記反射部材及び前記距離センサの一方が配置され、前記床面側部材には、前記反射部材及び前記距離センサの他方が設けられている、請求項1~3の何れか一項記載の懸垂式搬送車。 - 前記距離センサは、前記天井側部材に設けられ、前記反射部材は、前記床面側部材に設けられている、請求項4記載の懸垂式搬送車。
- 請求項1~5の何れか一項記載の懸垂式搬送車と、
前記床面に設置されると共に、前記懸垂式搬送車の前記移載部によって前記物品が移載されるラックと、を備える、保管システム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019204845 | 2019-11-12 | ||
JP2019204845 | 2019-11-12 | ||
PCT/JP2020/034894 WO2021095350A1 (ja) | 2019-11-12 | 2020-09-15 | 懸垂式搬送車及び保管システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2021095350A1 JPWO2021095350A1 (ja) | 2021-05-20 |
JP7392735B2 true JP7392735B2 (ja) | 2023-12-06 |
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ID=75912173
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021555920A Active JP7392735B2 (ja) | 2019-11-12 | 2020-09-15 | 懸垂式搬送車及び保管システム |
Country Status (5)
Country | Link |
---|---|
US (1) | US11845608B2 (ja) |
EP (1) | EP4046941A4 (ja) |
JP (1) | JP7392735B2 (ja) |
KR (1) | KR20220097969A (ja) |
WO (1) | WO2021095350A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP4046941A4 (en) | 2019-11-12 | 2023-11-22 | Murata Machinery, Ltd. | SUSPENSION TYPE TRANSPORT VEHICLE AND STORAGE SYSTEM |
KR20220060028A (ko) * | 2020-11-02 | 2022-05-11 | 삼성디스플레이 주식회사 | 적재부 및 그것을 포함하는 윈도우 제조 시스템 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012240795A (ja) | 2011-05-19 | 2012-12-10 | Daifuku Co Ltd | 物品収納設備 |
JP2018070307A (ja) | 2016-10-26 | 2018-05-10 | 村田機械株式会社 | 自動倉庫 |
WO2018207462A1 (ja) | 2017-05-11 | 2018-11-15 | 村田機械株式会社 | 搬送システム及び搬送方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
LU51022A1 (ja) * | 1966-05-03 | 1968-02-12 | ||
US3863772A (en) * | 1973-02-02 | 1975-02-04 | United States Steel Corp | Crane hoist height control |
JPS5339165B2 (ja) | 1974-04-03 | 1978-10-19 | ||
JP2929848B2 (ja) * | 1992-07-28 | 1999-08-03 | 株式会社ダイフク | 棚設備 |
JPH08198407A (ja) * | 1995-01-27 | 1996-08-06 | Kumahira Safe Co Inc | ファイルフォルダの自動入出庫装置 |
JPH0925087A (ja) * | 1995-07-10 | 1997-01-28 | Tokyo Seiko Co Ltd | モノレール式スタッカクレーン |
JP4348613B2 (ja) | 2003-12-09 | 2009-10-21 | 株式会社ダイフク | 搬送設備 |
JP5339165B2 (ja) | 2009-06-09 | 2013-11-13 | 村田機械株式会社 | 搬送システムと搬送システムの高さ補正方法 |
JP5692363B2 (ja) * | 2011-03-29 | 2015-04-01 | 村田機械株式会社 | 自動倉庫 |
WO2014034174A1 (ja) * | 2012-08-31 | 2014-03-06 | 村田機械株式会社 | 移載装置 |
KR102230179B1 (ko) | 2016-10-18 | 2021-03-19 | 무라다기카이가부시끼가이샤 | 스태커 크레인 |
EP4046941A4 (en) | 2019-11-12 | 2023-11-22 | Murata Machinery, Ltd. | SUSPENSION TYPE TRANSPORT VEHICLE AND STORAGE SYSTEM |
-
2020
- 2020-09-15 EP EP20887951.0A patent/EP4046941A4/en active Pending
- 2020-09-15 JP JP2021555920A patent/JP7392735B2/ja active Active
- 2020-09-15 WO PCT/JP2020/034894 patent/WO2021095350A1/ja unknown
- 2020-09-15 US US17/775,823 patent/US11845608B2/en active Active
- 2020-09-15 KR KR1020227019174A patent/KR20220097969A/ko not_active Application Discontinuation
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012240795A (ja) | 2011-05-19 | 2012-12-10 | Daifuku Co Ltd | 物品収納設備 |
JP2018070307A (ja) | 2016-10-26 | 2018-05-10 | 村田機械株式会社 | 自動倉庫 |
WO2018207462A1 (ja) | 2017-05-11 | 2018-11-15 | 村田機械株式会社 | 搬送システム及び搬送方法 |
Also Published As
Publication number | Publication date |
---|---|
KR20220097969A (ko) | 2022-07-08 |
JPWO2021095350A1 (ja) | 2021-05-20 |
EP4046941A1 (en) | 2022-08-24 |
EP4046941A4 (en) | 2023-11-22 |
US20220380125A1 (en) | 2022-12-01 |
TW202128542A (zh) | 2021-08-01 |
CN114667260A (zh) | 2022-06-24 |
US11845608B2 (en) | 2023-12-19 |
WO2021095350A1 (ja) | 2021-05-20 |
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