JP7391692B2 - 配線基板及び配線基板の製造方法 - Google Patents
配線基板及び配線基板の製造方法 Download PDFInfo
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- JP7391692B2 JP7391692B2 JP2020018318A JP2020018318A JP7391692B2 JP 7391692 B2 JP7391692 B2 JP 7391692B2 JP 2020018318 A JP2020018318 A JP 2020018318A JP 2020018318 A JP2020018318 A JP 2020018318A JP 7391692 B2 JP7391692 B2 JP 7391692B2
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- layer
- pad
- metal layer
- wiring board
- surface treatment
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- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 239000010410 layer Substances 0.000 claims description 260
- 239000002335 surface treatment layer Substances 0.000 claims description 48
- 229910052751 metal Inorganic materials 0.000 claims description 43
- 239000002184 metal Substances 0.000 claims description 43
- 238000000034 method Methods 0.000 claims description 24
- 238000005530 etching Methods 0.000 claims description 12
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- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims 2
- 238000010030 laminating Methods 0.000 claims 2
- 238000003475 lamination Methods 0.000 claims 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 37
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 34
- 239000010949 copper Substances 0.000 description 33
- 239000012790 adhesive layer Substances 0.000 description 28
- 229910000679 solder Inorganic materials 0.000 description 26
- 229910052802 copper Inorganic materials 0.000 description 22
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 16
- 238000010586 diagram Methods 0.000 description 15
- 239000010931 gold Substances 0.000 description 12
- 239000010936 titanium Substances 0.000 description 9
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- 239000000956 alloy Substances 0.000 description 6
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- 238000009713 electroplating Methods 0.000 description 5
- 238000007747 plating Methods 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- 229910052719 titanium Inorganic materials 0.000 description 5
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- 239000011651 chromium Substances 0.000 description 4
- 229910052763 palladium Inorganic materials 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
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- 239000013078 crystal Substances 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 229910000570 Cupronickel Inorganic materials 0.000 description 2
- 229910000990 Ni alloy Inorganic materials 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- YOCUPQPZWBBYIX-UHFFFAOYSA-N copper nickel Chemical compound [Ni].[Cu] YOCUPQPZWBBYIX-UHFFFAOYSA-N 0.000 description 2
- 239000012792 core layer Substances 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- XEMZLVDIUVCKGL-UHFFFAOYSA-N hydrogen peroxide;sulfuric acid Chemical compound OO.OS(O)(=O)=O XEMZLVDIUVCKGL-UHFFFAOYSA-N 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
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- 230000004048 modification Effects 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- JRKICGRDRMAZLK-UHFFFAOYSA-L peroxydisulfate Chemical compound [O-]S(=O)(=O)OOS([O-])(=O)=O JRKICGRDRMAZLK-UHFFFAOYSA-L 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- QDWJUBJKEHXSMT-UHFFFAOYSA-N boranylidynenickel Chemical compound [Ni]#B QDWJUBJKEHXSMT-UHFFFAOYSA-N 0.000 description 1
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- 230000007423 decrease Effects 0.000 description 1
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- 238000005516 engineering process Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- OFNHPGDEEMZPFG-UHFFFAOYSA-N phosphanylidynenickel Chemical compound [P].[Ni] OFNHPGDEEMZPFG-UHFFFAOYSA-N 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
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Description
111 配線層
120 絶縁層
120a ビアホール
120b 上面
121、121a 密着層
122、122a シード層
130 接続端子
131 パッド
131a 斜面
132 表面処理層
132a Ni層
132b Pd層
132c Au層
133 空隙
140 レジスト層
Claims (6)
- 絶縁層と、
前記絶縁層の上面に形成された接続端子とを有し、
前記接続端子は、
前記絶縁層の上面に積層された第1の金属層と、
前記第1の金属層の上面に積層された第2の金属層と、
前記第2の金属層の上面に積層された金属のパッドと、
前記パッドの上面及び側面を被覆し、前記絶縁層の上面に接触する表面処理層とを有し、
前記第2の金属層の端部は、前記表面処理層に接触し、
前記第1の金属層の端部は、前記第2の金属層の端部よりも前記パッドの中央側に位置し、前記表面処理層との間に空隙を形成する
ことを特徴とする配線基板。 - 前記第2の金属層は、前記パッドと同じ金属の層であり、
前記第1の金属層は、前記第2の金属層と異なる金属の層である
ことを特徴とする請求項1記載の配線基板。 - 前記第2の金属層の端部は、前記パッドの側面と同じ位置まで延び、
前記表面処理層は、前記パッドの側面とともに前記第2の金属層の端部を被覆する
ことを特徴とする請求項1記載の配線基板。 - 前記第2の金属層の端部は、前記パッドの側面よりも中央側に位置し、
前記パッドは、当該パッドの側面と前記第2の金属層の端部とを接続する斜面を有し、
前記表面処理層は、前記パッドの側面とともに前記斜面及び前記第2の金属層の端部を被覆する
ことを特徴とする請求項1記載の配線基板。 - 絶縁層の上面に第1の金属層を積層する第1積層工程と、
前記第1の金属層の上面に第2の金属層を積層する第2積層工程と、
前記第2の金属層の上面に金属のパッドを形成するパッド形成工程と、
前記第2の金属層の前記パッドに覆われていない部分を除去する第1除去工程と、
前記第1の金属層の前記パッドに覆われていない部分を除去する第2除去工程と、
前記パッドの上面及び側面を被覆する表面処理層を形成する表面処理層形成工程とを有し、
前記第2除去工程は、
前記第1除去工程後の前記第2の金属層の端部よりも前記パッドの中央側まで前記第1の金属層を除去し、
前記表面処理層形成工程は、
前記第2除去工程後の前記の第1の金属層の端部との間に空隙を有する前記表面処理層を形成する
ことを特徴とする配線基板の製造方法。 - 前記第2除去工程は、フッ酸をエッチング液として用いるウェットエッチングにより前記第1の金属層を除去する
ことを特徴とする請求項5記載の配線基板の製造方法。
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JP2007335629A (ja) | 2006-06-15 | 2007-12-27 | Sony Corp | 電子部品及びこれを用いた半導体装置並びに電子部品の製造方法 |
JP2014241320A (ja) | 2013-06-11 | 2014-12-25 | ソニー株式会社 | 半導体装置、半導体装置の製造方法 |
JP2015195382A (ja) | 2013-11-12 | 2015-11-05 | チップモス テクノロジーズ インコーポレイテッドChipmos Technologies Inc. | 半導体構造およびその製造方法 |
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JP4661122B2 (ja) | 2004-05-18 | 2011-03-30 | ソニー株式会社 | 部品実装配線基板および配線基板への部品の実装方法 |
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US9691723B2 (en) * | 2015-10-30 | 2017-06-27 | Taiwan Semiconductor Manufacturing Company, Ltd. | Connector formation methods and packaged semiconductor devices |
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JP2005268374A (ja) | 2004-03-17 | 2005-09-29 | Sony Corp | 半導体素子とその製造方法、及び半導体装置 |
JP2007335629A (ja) | 2006-06-15 | 2007-12-27 | Sony Corp | 電子部品及びこれを用いた半導体装置並びに電子部品の製造方法 |
JP2014241320A (ja) | 2013-06-11 | 2014-12-25 | ソニー株式会社 | 半導体装置、半導体装置の製造方法 |
JP2015195382A (ja) | 2013-11-12 | 2015-11-05 | チップモス テクノロジーズ インコーポレイテッドChipmos Technologies Inc. | 半導体構造およびその製造方法 |
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