JP7384915B2 - 配位子修飾フィルター及び液体組成物から金属を低減するための方法 - Google Patents
配位子修飾フィルター及び液体組成物から金属を低減するための方法 Download PDFInfo
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- JP7384915B2 JP7384915B2 JP2021545662A JP2021545662A JP7384915B2 JP 7384915 B2 JP7384915 B2 JP 7384915B2 JP 2021545662 A JP2021545662 A JP 2021545662A JP 2021545662 A JP2021545662 A JP 2021545662A JP 7384915 B2 JP7384915 B2 JP 7384915B2
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Description
[0001]この出願は、2019年2月8日に出願された米国仮特許出願第62/803,145号の35USC 119に基づく利益を主張し、その開示は、参照によりその全体が本明細書に組み込まれる。
粒子保持率 = [供給量]-[ろ液量]/[供給量]×100%
多孔質ポリマー樹脂の洗浄
[0102]次の例は、微量金属の除去に使用する多孔質ポリマー樹脂を洗浄するために使用される方法を示している。
静的浸漬実験を使用したキレート配位子を含む多孔質ポリマー樹脂によるTMAHの金属低減の測定
[0104]次の例は、静的浸漬の条件下で2.38%TMAHの金属濃度を低減する多孔質ポリマー樹脂の能力を測定するために使用される方法を示している。結果は、N-メチルグルカミン配位子及びジホスホン酸配位子を有する樹脂が、それぞれ67.2%及び76.7%の総金属除去によって標的金属(Na、Al、K、Ca、Ti、Cr、Mn、Fe、及びZn)を除去するのに効果的であることを示している。
動的フロースルー実験を使用したキレート配位子を含む多孔質ポリマー樹脂によるTMAHの金属低減の測定
[0106]次の例は、動的流動条件下で2.38%TMAHの金属濃度を低減する多孔質ポリマー樹脂の能力を測定するために使用される方法を示している。
静的浸漬実験を使用したキレート配位子を含む多孔質ポリマー樹脂による35%HCl中の金属低減の測定
[0108]次の例は、静的浸漬の条件下で35%HCl中の金属濃度を低減する多孔質ポリマー樹脂の能力を測定するために使用される方法を示している。結果は、N-メチルグルカミン配位子を有する樹脂が、35%HCl中で100%標的金属であるTi及びFeを除去するのに効果的であることを示している。
動的フロースルー実験を使用したキレート配位子を含む多孔質ポリマー樹脂による35%HClでの金属低減の測定
[0110]次の例は、動的流動条件下で35%HCl中の金属濃度を低下させるN-メチルグルカミン配位子を含む多孔質ポリマー樹脂の能力を測定するために使用される方法を示している。
静的浸漬実験を使用したキレート配位子を含む多孔質ポリマー樹脂による3.5%HCl中の金属低減の測定
[0112]次の例は、静的浸漬の条件下で3.5%HCl中の金属濃度を低下させる多孔質ポリマー樹脂の能力を測定するために使用される方法を示している。結果は、ジホスホン酸を含む樹脂が3.5%HClから標的金属であるTi及びFeを除去するのに効果的であることを示している。
動的フロースルー実験を使用したキレート配位子を含む多孔質ポリマー樹脂による14%NH 4 OHの金属低減の測定
[0114]次の例は、動的流動条件下で、ジホスホン酸とN-メチルグルカミン配位子を含む多孔質ポリマー樹脂が、14%NH4OH中の金属濃度を低下させる能力を測定するために使用される方法を示している。
動的フロースルー実験を使用したキレート配位子を含む多孔質ポリマー樹脂によるOK73 Thinneの金属低減の測定
[0116]次の例は、動的流動条件下でOK73(PGME/PGMEA)の金属濃度を低下させるジホスホン酸配位子を含む多孔質ポリマー樹脂の能力を測定するために使用される方法を示している。
ポリ(ビニルベンジルクロリド/N-メチル-D-グルカミン)で表面修飾された0.2μm及び0.05μmのUPE膜
[0118]この例は、ポリ(ビニルベンジルクロリド/N-メチル-D-グルカミン)P(VBC/NMDG)による0.2μm及び0.05umの超高分子量ポリエチレン(UPE)膜の表面修飾を示している。
動的流動実験を使用したN-メチル-D-グルカミン修飾UPE膜による10%TBAHの金属低減の測定
[0122]次の例は、動的流動条件下で10%テトラブチルアンモニウムヒドロキシド(TBAH)中の金属濃度を低下させるN-メチル-D-グルカミン修飾UPE膜の能力を測定するために使用される方法を示している。結果は、N-メチル-D-グルカミンで修飾されたUPE膜が、10%TBAH中の標的金属であるAl、Cr、Fe、Mn、及びTiの除去に効果的であることを示している。
動的流動実験を使用したN-メチル-D-グルカミン修飾UPE膜による2.38%TMAHの金属低減の測定
[0124]次の例は、動的流動条件下で2.38%テトラメチルアンモニウムヒドロキシドの金属濃度を低下させるN-メチル-D-グルカミン修飾UPE膜の能力を測定するために使用される方法を示している。結果は、N-メチル-D-グルカミンで修飾されたUPE膜が、2.38%TMAH中の標的金属であるFe、Cr、Cu、Mg、Mn、及びNiの除去に効果的であることを示している。
Claims (5)
- 3つ以上のヒドロキシル基を有するアミノポリオール配位子及びアミノポリホスホン酸配位子又はアミノジホスホン酸配位子である、ポリホスホン酸配位子を含むフィルター材料であって、金属又は金属イオンが激減された液体組成物を提供するためのマイクロエレクトロニクス製造システムと組み合わせて使用されるように構成されている、超高分子量ポリエチレン(UPE)多孔質ポリマーフィルター膜である、フィルター材料。
- 液体組成物から1つ又は複数の金属又は金属イオンを除去する方法であって:
3つ以上のヒドロキシル基を有するポリオール配位子及びアミノポリホスホン酸配位子又はアミノジホスホン酸配位子である、ポリホスホン酸配位子を含む超高分子量ポリエチレン(UPE)多孔質ポリマーフィルター膜である、フィルター材料を、1つ又は複数の金属又は金属イオンを含む液体組成物と接触させることと、
液体組成物中の1つ又は複数の金属又は金属イオンの量を低減することとを含む、方法。 - 液体組成物が、約10~約14の範囲のpHを有する水性塩基性組成物である、請求項2に記載の方法。
- 液体組成物が、TMAH、TBAH、水酸化アンモニウム、又は10%を超えるHCl濃度を有する濃HClを含む、請求項2に記載の方法。
- 第1のフィルター材料及び第2のフィルター材料を含む複合膜であって、
第1のフィルター材料が、多孔質ポリマーフィルター膜であり、第2のフィルター材料が、ポリマー樹脂粒子であり、
第1のフィルター材料又は第2のフィルター材料は、3つ以上のヒドロキシル基を有するポリオール配位子を含み、第2のフィルター材料は、第1のフィルター材料とは異なり、
複合膜は、金属又は金属イオンが激減された液体組成物を提供するためのマイクロエレクトロニクス製造システムと組み合わせて使用されるように構成される、複合膜。
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PCT/US2020/016252 WO2020163181A1 (en) | 2019-02-08 | 2020-01-31 | Ligand-modified filter and methods for reducing metals from liquid compositions |
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US20220380520A1 (en) * | 2021-05-04 | 2022-12-01 | Sachem, Inc. | Strong binding metal-chelating resins using macrocycle molecules |
WO2022235768A1 (en) * | 2021-05-04 | 2022-11-10 | Sachem, Inc. | Strong binding metal-chelating resins |
WO2023086276A1 (en) * | 2021-11-12 | 2023-05-19 | Entegris, Inc. | Membrane for removing anionic materials |
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KR102646311B1 (ko) | 2024-03-13 |
US20220410084A1 (en) | 2022-12-29 |
US11465104B2 (en) | 2022-10-11 |
JP2022519624A (ja) | 2022-03-24 |
CN111545075A (zh) | 2020-08-18 |
WO2020163181A1 (en) | 2020-08-13 |
TWI733330B (zh) | 2021-07-11 |
KR20210102991A (ko) | 2021-08-20 |
SG11202108507TA (en) | 2021-09-29 |
EP3921067A1 (en) | 2021-12-15 |
EP3921067A4 (en) | 2022-11-09 |
IL285301A (en) | 2021-09-30 |
KR20240036713A (ko) | 2024-03-20 |
US20200254398A1 (en) | 2020-08-13 |
TW202039054A (zh) | 2020-11-01 |
CN111545075B (zh) | 2023-08-01 |
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