JP7371344B2 - 集積回路装置、発振器、電子機器及び移動体 - Google Patents

集積回路装置、発振器、電子機器及び移動体 Download PDF

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Publication number
JP7371344B2
JP7371344B2 JP2019069775A JP2019069775A JP7371344B2 JP 7371344 B2 JP7371344 B2 JP 7371344B2 JP 2019069775 A JP2019069775 A JP 2019069775A JP 2019069775 A JP2019069775 A JP 2019069775A JP 7371344 B2 JP7371344 B2 JP 7371344B2
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circuit
integrated circuit
pad
power supply
oscillation
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JP2019069775A
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Japanese (ja)
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JP2020170885A (ja
JP2020170885A5 (enExample
Inventor
光章 澤田
巨樹 井伊
洋佑 板坂
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2019069775A priority Critical patent/JP7371344B2/ja
Priority to CN202310606189.8A priority patent/CN116566327A/zh
Priority to CN202010235030.6A priority patent/CN111800087B/zh
Priority to US16/835,440 priority patent/US11038463B2/en
Publication of JP2020170885A publication Critical patent/JP2020170885A/ja
Publication of JP2020170885A5 publication Critical patent/JP2020170885A5/ja
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
    • H03B5/36—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator active element in amplifier being semiconductor device
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
    • H03B5/36—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator active element in amplifier being semiconductor device
    • H03B5/362—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator active element in amplifier being semiconductor device the amplifier being a single transistor
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/02—Details
    • H03B5/04—Modifications of generator to compensate for variations in physical values, e.g. power supply, load, temperature
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
    • H03B5/36—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator active element in amplifier being semiconductor device
    • H03B5/366—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator active element in amplifier being semiconductor device and comprising means for varying the frequency by a variable voltage or current
    • H03B5/368—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator active element in amplifier being semiconductor device and comprising means for varying the frequency by a variable voltage or current the means being voltage variable capacitance diodes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
    • H03L1/00—Stabilisation of generator output against variations of physical values, e.g. power supply
    • H03L1/02—Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B2200/00—Indexing scheme relating to details of oscillators covered by H03B
    • H03B2200/003—Circuit elements of oscillators
    • H03B2200/0034—Circuit elements of oscillators including a buffer amplifier
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B2200/00—Indexing scheme relating to details of oscillators covered by H03B
    • H03B2200/006—Functional aspects of oscillators
    • H03B2200/0062—Bias and operating point
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
    • H03H9/0557—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement the other elements being buried in the substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP2019069775A 2019-04-01 2019-04-01 集積回路装置、発振器、電子機器及び移動体 Active JP7371344B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2019069775A JP7371344B2 (ja) 2019-04-01 2019-04-01 集積回路装置、発振器、電子機器及び移動体
CN202310606189.8A CN116566327A (zh) 2019-04-01 2020-03-30 集成电路装置和振荡器
CN202010235030.6A CN111800087B (zh) 2019-04-01 2020-03-30 集成电路装置、振荡器、电子设备以及移动体
US16/835,440 US11038463B2 (en) 2019-04-01 2020-03-31 Integrated circuit device, oscillator, electronic apparatus, and vehicle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019069775A JP7371344B2 (ja) 2019-04-01 2019-04-01 集積回路装置、発振器、電子機器及び移動体

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JP2020170885A JP2020170885A (ja) 2020-10-15
JP2020170885A5 JP2020170885A5 (enExample) 2022-03-02
JP7371344B2 true JP7371344B2 (ja) 2023-10-31

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US (1) US11038463B2 (enExample)
JP (1) JP7371344B2 (enExample)
CN (2) CN116566327A (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7567400B2 (ja) * 2020-11-26 2024-10-16 セイコーエプソン株式会社 振動デバイス
JP7581797B2 (ja) * 2020-11-26 2024-11-13 セイコーエプソン株式会社 振動デバイス
JP7625868B2 (ja) * 2021-01-25 2025-02-04 セイコーエプソン株式会社 集積回路装置及び発振器
JP7596817B2 (ja) * 2021-01-27 2024-12-10 セイコーエプソン株式会社 振動デバイス
JP7655039B2 (ja) * 2021-03-29 2025-04-02 セイコーエプソン株式会社 集積回路装置、デバイス及び製造方法
JP7855848B2 (ja) * 2021-11-16 2026-05-11 セイコーエプソン株式会社 回路装置及び発振器
JP7786227B2 (ja) * 2022-01-31 2025-12-16 セイコーエプソン株式会社 発振器の製造方法及び発振器群
JP2024108397A (ja) * 2023-01-31 2024-08-13 セイコーエプソン株式会社 振動デバイス
JP2024136548A (ja) * 2023-03-24 2024-10-04 セイコーエプソン株式会社 回路装置、発振器

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006054269A (ja) 2004-08-10 2006-02-23 Epson Toyocom Corp 圧電発振器用ｉｃとこれを用いた圧電発振器
JP2006191517A (ja) 2004-12-07 2006-07-20 Seiko Epson Corp 温度補償型圧電発振器
JP2007067967A (ja) 2005-08-31 2007-03-15 Kyocera Kinseki Corp 温度補償型水晶発振器
JP2016025452A (ja) 2014-07-18 2016-02-08 セイコーエプソン株式会社 無線通信装置、電子機器及び移動体
JP2016134738A (ja) 2015-01-19 2016-07-25 セイコーエプソン株式会社 発振器、電子機器及び移動体
JP2016134889A (ja) 2015-01-22 2016-07-25 セイコーエプソン株式会社 半導体回路装置、発振器、電子機器および移動体
JP2017175202A (ja) 2016-03-18 2017-09-28 セイコーエプソン株式会社 発振器、電子機器および移動体
CN107681980A (zh) 2017-11-01 2018-02-09 江门市迪司利光电股份有限公司 一种低噪声温度补偿晶体振荡器
JP2018098428A (ja) 2016-12-16 2018-06-21 セイコーエプソン株式会社 回路装置、発振器、電子機器及び移動体

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JP3030951B2 (ja) * 1991-08-09 2000-04-10 セイコーエプソン株式会社 半導体集積装置
US5500628A (en) * 1995-01-24 1996-03-19 Motorola, Inc. Double-sided oscillator package and method of coupling components thereto
JP5926578B2 (ja) 2012-02-29 2016-05-25 京セラクリスタルデバイス株式会社 圧電デバイス
JP6414430B2 (ja) * 2014-09-26 2018-10-31 セイコーエプソン株式会社 半導体回路、発振器、電子機器及び移動体
JP6540943B2 (ja) * 2015-01-22 2019-07-10 セイコーエプソン株式会社 半導体回路装置、発振器、電子機器および移動体
JP6561487B2 (ja) 2015-02-16 2019-08-21 セイコーエプソン株式会社 発振回路、発振器、電子機器および移動体
JP6759539B2 (ja) * 2015-08-06 2020-09-23 セイコーエプソン株式会社 発振器、電子機器および基地局
JP6680121B2 (ja) 2016-01-06 2020-04-15 セイコーエプソン株式会社 回路装置、発振器、電子機器及び移動体
US10177770B2 (en) 2016-01-06 2019-01-08 Seiko Epson Corporation Circuit device, oscillator, electronic apparatus, and vehicle
JP6790705B2 (ja) * 2016-10-13 2020-11-25 セイコーエプソン株式会社 回路装置、発振器、電子機器及び移動体
JP2019012872A (ja) * 2017-06-29 2019-01-24 セイコーエプソン株式会社 振動デバイス、電子機器及び移動体

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006054269A (ja) 2004-08-10 2006-02-23 Epson Toyocom Corp 圧電発振器用ｉｃとこれを用いた圧電発振器
JP2006191517A (ja) 2004-12-07 2006-07-20 Seiko Epson Corp 温度補償型圧電発振器
JP2007067967A (ja) 2005-08-31 2007-03-15 Kyocera Kinseki Corp 温度補償型水晶発振器
JP2016025452A (ja) 2014-07-18 2016-02-08 セイコーエプソン株式会社 無線通信装置、電子機器及び移動体
JP2016134738A (ja) 2015-01-19 2016-07-25 セイコーエプソン株式会社 発振器、電子機器及び移動体
JP2016134889A (ja) 2015-01-22 2016-07-25 セイコーエプソン株式会社 半導体回路装置、発振器、電子機器および移動体
JP2017175202A (ja) 2016-03-18 2017-09-28 セイコーエプソン株式会社 発振器、電子機器および移動体
JP2018098428A (ja) 2016-12-16 2018-06-21 セイコーエプソン株式会社 回路装置、発振器、電子機器及び移動体
CN107681980A (zh) 2017-11-01 2018-02-09 江门市迪司利光电股份有限公司 一种低噪声温度补偿晶体振荡器

Also Published As

Publication number Publication date
JP2020170885A (ja) 2020-10-15
CN111800087A (zh) 2020-10-20
US11038463B2 (en) 2021-06-15
CN111800087B (zh) 2023-06-13
CN116566327A (zh) 2023-08-08
US20200313619A1 (en) 2020-10-01

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