JP7321847B2 - リニアアクチュエータ - Google Patents
リニアアクチュエータ Download PDFInfo
- Publication number
- JP7321847B2 JP7321847B2 JP2019161316A JP2019161316A JP7321847B2 JP 7321847 B2 JP7321847 B2 JP 7321847B2 JP 2019161316 A JP2019161316 A JP 2019161316A JP 2019161316 A JP2019161316 A JP 2019161316A JP 7321847 B2 JP7321847 B2 JP 7321847B2
- Authority
- JP
- Japan
- Prior art keywords
- heat
- heat transfer
- linear actuator
- carriage
- transfer member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K9/00—Arrangements for cooling or ventilating
- H02K9/22—Arrangements for cooling or ventilating by solid heat conducting material embedded in, or arranged in contact with, the stator or rotor, e.g. heat bridges
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
- H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K9/00—Arrangements for cooling or ventilating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G54/00—Non-mechanical conveyors not otherwise provided for
- B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Electromagnetism (AREA)
- Linear Motors (AREA)
- Non-Mechanical Conveyors (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019161316A JP7321847B2 (ja) | 2019-09-04 | 2019-09-04 | リニアアクチュエータ |
| US17/006,488 US11502580B2 (en) | 2019-09-04 | 2020-08-28 | Linear actuator with improved heat transfer path |
| CN202010909392.9A CN112448559B (zh) | 2019-09-04 | 2020-09-02 | 线性致动器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019161316A JP7321847B2 (ja) | 2019-09-04 | 2019-09-04 | リニアアクチュエータ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2021040443A JP2021040443A (ja) | 2021-03-11 |
| JP2021040443A5 JP2021040443A5 (https=) | 2022-09-08 |
| JP7321847B2 true JP7321847B2 (ja) | 2023-08-07 |
Family
ID=74679367
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019161316A Active JP7321847B2 (ja) | 2019-09-04 | 2019-09-04 | リニアアクチュエータ |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US11502580B2 (https=) |
| JP (1) | JP7321847B2 (https=) |
| CN (1) | CN112448559B (https=) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE112019007127B4 (de) * | 2019-03-29 | 2026-04-02 | Yamaha Hatsudoki Kabushiki Kaisha | Linearfördersystem, Steuerverfahren für Linearfördersystem, Steuerprogramm für Linearfördersystem und Speichermedium |
| US11724894B2 (en) * | 2019-04-16 | 2023-08-15 | Yamaha Hatsudoki Kabushiki Kaisha | Linear conveyor system, a control method for a linear conveyor system, a control program for a linear conveyor system and a recording medium |
| US12187550B2 (en) * | 2019-04-23 | 2025-01-07 | Yamaha Hatsudoki Kabushiki Kaisha | Linear conveyor system, a control method for a linear conveyor system, a control program for a linear conveyor system and a recording medium |
| JP7083964B2 (ja) * | 2019-04-23 | 2022-06-13 | ヤマハ発動機株式会社 | リニアコンベアシステム、リニアコンベアシステムの制御方法、リニアコンベアシステムの制御プログラムおよび記録媒体 |
| KR102577093B1 (ko) * | 2021-06-01 | 2023-09-08 | 에스케이씨 주식회사 | 무선충전장치 및 이를 갖는 전기이동장치 |
| US11945665B1 (en) * | 2022-08-03 | 2024-04-02 | Amazon Technologies, Inc. | Automated lateral transfer and elevation of sortation shuttles |
| US20260012120A1 (en) * | 2023-03-01 | 2026-01-08 | Mitsubishi Electric Corporation | Transfer system |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002165433A (ja) | 2000-11-21 | 2002-06-07 | Yaskawa Electric Corp | リニアモータ |
| JP2006287014A (ja) | 2005-04-01 | 2006-10-19 | Canon Inc | 位置決め装置およびリニアモータ |
| JP2013212024A (ja) | 2012-03-30 | 2013-10-10 | Mitsubishi Electric Corp | リニアモータ |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4749921A (en) * | 1986-07-21 | 1988-06-07 | Anwar Chitayat | Linear motor with non-magnetic armature |
| JP3818342B2 (ja) * | 1997-10-06 | 2006-09-06 | 株式会社安川電機 | リニアモータ |
| JPH11307430A (ja) * | 1998-04-23 | 1999-11-05 | Canon Inc | 露光装置およびデバイス製造方法ならびに駆動装置 |
| EP2747257A3 (en) * | 2002-06-05 | 2016-06-29 | Jacobs Automation, Inc. | Controlled motion system |
| JP4478920B2 (ja) * | 2003-08-18 | 2010-06-09 | 株式会社安川電機 | ム−ビングマグネット形リニアアクチュエータ |
| JP2006033910A (ja) * | 2004-07-12 | 2006-02-02 | Sumitomo Heavy Ind Ltd | リニアモータ及びこのリニアモータを用いたステージ装置 |
| JP6086824B2 (ja) * | 2013-06-14 | 2017-03-01 | ヤマハ発動機株式会社 | 駆動ステージ及び駆動ステージを用いた部品実装装置 |
| US9680352B2 (en) * | 2013-09-30 | 2017-06-13 | Ta Instruments-Waters L.L.C. | Convection cooling system for motors |
| JP6740088B2 (ja) * | 2016-11-07 | 2020-08-12 | キヤノン株式会社 | リニアモータ |
| JP6917848B2 (ja) * | 2017-09-26 | 2021-08-11 | 株式会社Screenホールディングス | ステージ駆動装置および描画装置 |
| JP7058977B2 (ja) * | 2017-10-27 | 2022-04-25 | キヤノン株式会社 | 搬送装置、加工システム、および物品の製造方法 |
-
2019
- 2019-09-04 JP JP2019161316A patent/JP7321847B2/ja active Active
-
2020
- 2020-08-28 US US17/006,488 patent/US11502580B2/en active Active
- 2020-09-02 CN CN202010909392.9A patent/CN112448559B/zh active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002165433A (ja) | 2000-11-21 | 2002-06-07 | Yaskawa Electric Corp | リニアモータ |
| JP2006287014A (ja) | 2005-04-01 | 2006-10-19 | Canon Inc | 位置決め装置およびリニアモータ |
| JP2013212024A (ja) | 2012-03-30 | 2013-10-10 | Mitsubishi Electric Corp | リニアモータ |
Also Published As
| Publication number | Publication date |
|---|---|
| US20210067007A1 (en) | 2021-03-04 |
| JP2021040443A (ja) | 2021-03-11 |
| US11502580B2 (en) | 2022-11-15 |
| CN112448559B (zh) | 2024-08-20 |
| CN112448559A (zh) | 2021-03-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP7321847B2 (ja) | リニアアクチュエータ | |
| CN109720789B (zh) | 运输系统、加工系统和物品制造方法 | |
| CN114025926B (zh) | 模块化材料处理机器人平台 | |
| KR102035210B1 (ko) | 객체의 파지, 위치 결정 및/또는 이동 장치 | |
| CN113939384A (zh) | 磁性导向物料搬运机器人 | |
| JP7410615B2 (ja) | 加工システム、および物品の製造方法 | |
| JP2021040443A5 (https=) | ||
| JP7058977B2 (ja) | 搬送装置、加工システム、および物品の製造方法 | |
| JP2015043260A (ja) | ステージ装置およびそれを用いた荷電粒子線装置 | |
| US11843300B2 (en) | Linear motor, transport apparatus, and production apparatus | |
| JP2001169529A (ja) | 移動体および移動体システム | |
| JP2019103225A (ja) | 搬送装置、加工システム、および物品の製造方法 | |
| JP7130845B2 (ja) | リニアコンベア | |
| JP6740088B2 (ja) | リニアモータ | |
| KR101648883B1 (ko) | 냉각장치를 구비한 전자식 엑츄에이터 | |
| JP6972246B2 (ja) | リニアモータおよび物品の製造方法 | |
| JP4770046B2 (ja) | 移動体システム | |
| US20240055970A1 (en) | Linear motor, transport apparatus, and production apparatus | |
| KR101828541B1 (ko) | 부품 실장기 | |
| JP7351645B2 (ja) | 部品実装機 | |
| JP7058976B2 (ja) | 搬送装置、加工システム、および物品の製造方法 | |
| JP2025176268A (ja) | ステージ装置、荷電粒子線装置および真空装置 | |
| KR20250090866A (ko) | 반송 유닛, 이를 포함하는 기판 처리 장치 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RD01 | Notification of change of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7421 Effective date: 20220630 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220831 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20220831 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20230619 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20230627 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20230726 |
|
| R151 | Written notification of patent or utility model registration |
Ref document number: 7321847 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |