CN112448559B - 线性致动器 - Google Patents
线性致动器 Download PDFInfo
- Publication number
- CN112448559B CN112448559B CN202010909392.9A CN202010909392A CN112448559B CN 112448559 B CN112448559 B CN 112448559B CN 202010909392 A CN202010909392 A CN 202010909392A CN 112448559 B CN112448559 B CN 112448559B
- Authority
- CN
- China
- Prior art keywords
- heat
- heat transfer
- linear actuator
- carriage
- coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000012546 transfer Methods 0.000 claims abstract description 196
- 230000005855 radiation Effects 0.000 claims abstract description 65
- 238000012545 processing Methods 0.000 claims description 47
- 239000012809 cooling fluid Substances 0.000 claims description 14
- 239000012530 fluid Substances 0.000 claims description 12
- 238000001514 detection method Methods 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 6
- 230000008569 process Effects 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 description 19
- 230000020169 heat generation Effects 0.000 description 16
- 238000007689 inspection Methods 0.000 description 14
- 238000001816 cooling Methods 0.000 description 11
- 230000006870 function Effects 0.000 description 10
- 239000000463 material Substances 0.000 description 9
- 238000007781 pre-processing Methods 0.000 description 7
- 239000000498 cooling water Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 238000012805 post-processing Methods 0.000 description 6
- 230000007423 decrease Effects 0.000 description 5
- 230000008859 change Effects 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 239000002826 coolant Substances 0.000 description 2
- 230000004069 differentiation Effects 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000191 radiation effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G54/00—Non-mechanical conveyors not otherwise provided for
- B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
- H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K9/00—Arrangements for cooling or ventilating
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K9/00—Arrangements for cooling or ventilating
- H02K9/22—Arrangements for cooling or ventilating by solid heat conducting material embedded in, or arranged in contact with, the stator or rotor, e.g. heat bridges
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Electromagnetism (AREA)
- Linear Motors (AREA)
- Non-Mechanical Conveyors (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019161316A JP7321847B2 (ja) | 2019-09-04 | 2019-09-04 | リニアアクチュエータ |
| JP2019-161316 | 2019-09-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112448559A CN112448559A (zh) | 2021-03-05 |
| CN112448559B true CN112448559B (zh) | 2024-08-20 |
Family
ID=74679367
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010909392.9A Active CN112448559B (zh) | 2019-09-04 | 2020-09-02 | 线性致动器 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US11502580B2 (https=) |
| JP (1) | JP7321847B2 (https=) |
| CN (1) | CN112448559B (https=) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE112019007127B4 (de) * | 2019-03-29 | 2026-04-02 | Yamaha Hatsudoki Kabushiki Kaisha | Linearfördersystem, Steuerverfahren für Linearfördersystem, Steuerprogramm für Linearfördersystem und Speichermedium |
| US11724894B2 (en) * | 2019-04-16 | 2023-08-15 | Yamaha Hatsudoki Kabushiki Kaisha | Linear conveyor system, a control method for a linear conveyor system, a control program for a linear conveyor system and a recording medium |
| US12187550B2 (en) * | 2019-04-23 | 2025-01-07 | Yamaha Hatsudoki Kabushiki Kaisha | Linear conveyor system, a control method for a linear conveyor system, a control program for a linear conveyor system and a recording medium |
| JP7083964B2 (ja) * | 2019-04-23 | 2022-06-13 | ヤマハ発動機株式会社 | リニアコンベアシステム、リニアコンベアシステムの制御方法、リニアコンベアシステムの制御プログラムおよび記録媒体 |
| KR102577093B1 (ko) * | 2021-06-01 | 2023-09-08 | 에스케이씨 주식회사 | 무선충전장치 및 이를 갖는 전기이동장치 |
| US11945665B1 (en) * | 2022-08-03 | 2024-04-02 | Amazon Technologies, Inc. | Automated lateral transfer and elevation of sortation shuttles |
| US20260012120A1 (en) * | 2023-03-01 | 2026-01-08 | Mitsubishi Electric Corporation | Transfer system |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1965459A (zh) * | 2004-07-12 | 2007-05-16 | 住友重机械工业株式会社 | 线性马达及使用该线性马达的载物台装置 |
| CN109557769A (zh) * | 2017-09-26 | 2019-04-02 | 株式会社斯库林集团 | 载物台驱动装置及描画装置 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4749921A (en) * | 1986-07-21 | 1988-06-07 | Anwar Chitayat | Linear motor with non-magnetic armature |
| JP3818342B2 (ja) * | 1997-10-06 | 2006-09-06 | 株式会社安川電機 | リニアモータ |
| JPH11307430A (ja) * | 1998-04-23 | 1999-11-05 | Canon Inc | 露光装置およびデバイス製造方法ならびに駆動装置 |
| JP3750793B2 (ja) * | 2000-11-21 | 2006-03-01 | 株式会社安川電機 | リニアモータ |
| EP2747257A3 (en) * | 2002-06-05 | 2016-06-29 | Jacobs Automation, Inc. | Controlled motion system |
| JP4478920B2 (ja) * | 2003-08-18 | 2010-06-09 | 株式会社安川電機 | ム−ビングマグネット形リニアアクチュエータ |
| JP2006287014A (ja) * | 2005-04-01 | 2006-10-19 | Canon Inc | 位置決め装置およびリニアモータ |
| JP2013212024A (ja) * | 2012-03-30 | 2013-10-10 | Mitsubishi Electric Corp | リニアモータ |
| JP6086824B2 (ja) * | 2013-06-14 | 2017-03-01 | ヤマハ発動機株式会社 | 駆動ステージ及び駆動ステージを用いた部品実装装置 |
| US9680352B2 (en) * | 2013-09-30 | 2017-06-13 | Ta Instruments-Waters L.L.C. | Convection cooling system for motors |
| JP6740088B2 (ja) * | 2016-11-07 | 2020-08-12 | キヤノン株式会社 | リニアモータ |
| JP7058977B2 (ja) * | 2017-10-27 | 2022-04-25 | キヤノン株式会社 | 搬送装置、加工システム、および物品の製造方法 |
-
2019
- 2019-09-04 JP JP2019161316A patent/JP7321847B2/ja active Active
-
2020
- 2020-08-28 US US17/006,488 patent/US11502580B2/en active Active
- 2020-09-02 CN CN202010909392.9A patent/CN112448559B/zh active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1965459A (zh) * | 2004-07-12 | 2007-05-16 | 住友重机械工业株式会社 | 线性马达及使用该线性马达的载物台装置 |
| CN109557769A (zh) * | 2017-09-26 | 2019-04-02 | 株式会社斯库林集团 | 载物台驱动装置及描画装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP7321847B2 (ja) | 2023-08-07 |
| US20210067007A1 (en) | 2021-03-04 |
| JP2021040443A (ja) | 2021-03-11 |
| US11502580B2 (en) | 2022-11-15 |
| CN112448559A (zh) | 2021-03-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN112448559B (zh) | 线性致动器 | |
| CN109720789B (zh) | 运输系统、加工系统和物品制造方法 | |
| CN114025926B (zh) | 模块化材料处理机器人平台 | |
| US6946755B2 (en) | Linear motor | |
| CN101784367B (zh) | 机床的移动体的冷却方法及装置 | |
| KR102035210B1 (ko) | 객체의 파지, 위치 결정 및/또는 이동 장치 | |
| KR102844098B1 (ko) | 반송 시스템, 가공 시스템 및 물품의 제조방법 | |
| KR102941382B1 (ko) | 반송 시스템, 가공 시스템 및 물품의 제조방법 | |
| JPH11206099A (ja) | シャフト型リニアモータ | |
| JP5960411B2 (ja) | リニアコンベア | |
| JP7058977B2 (ja) | 搬送装置、加工システム、および物品の製造方法 | |
| JP2015043260A (ja) | ステージ装置およびそれを用いた荷電粒子線装置 | |
| JP7130845B2 (ja) | リニアコンベア | |
| JP6740088B2 (ja) | リニアモータ | |
| US20210099067A1 (en) | Linear motor, transport apparatus, and production apparatus | |
| JP2019103225A (ja) | 搬送装置、加工システム、および物品の製造方法 | |
| KR101648883B1 (ko) | 냉각장치를 구비한 전자식 엑츄에이터 | |
| JP6972246B2 (ja) | リニアモータおよび物品の製造方法 | |
| JP2003230264A (ja) | リニアモータ | |
| EP4654253A2 (en) | Stage device, charged particle beam apparatus, and vacuum device | |
| JP7351645B2 (ja) | 部品実装機 | |
| US20240055970A1 (en) | Linear motor, transport apparatus, and production apparatus | |
| JP2003189678A (ja) | リニアモータ保護装置、および、電子部品搭載装置 | |
| JP2007089245A (ja) | 平面サーボモータ | |
| JPWO2019176064A1 (ja) | 情報処理装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |