JP7314181B2 - 半導体層を形成するための方法及び材料堆積システム - Google Patents
半導体層を形成するための方法及び材料堆積システム Download PDFInfo
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- JP7314181B2 JP7314181B2 JP2020567913A JP2020567913A JP7314181B2 JP 7314181 B2 JP7314181 B2 JP 7314181B2 JP 2020567913 A JP2020567913 A JP 2020567913A JP 2020567913 A JP2020567913 A JP 2020567913A JP 7314181 B2 JP7314181 B2 JP 7314181B2
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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Description
本出願は、2018年6月7日に出願された「材料堆積システム及び方法」という表題の米国仮特許出願第62/682,005号に基づく優先権を主張し、この出願は、あらゆる目的のために参照により本明細書に組み込まれる。
従来の材料堆積システム
図1は、当該技術分野で公知の高真空反応チャンバー10の一部の等角図であり、これは、基板22の膜形成面26に対して軸外にあり、かつある角度で配置されている材料供給源18を含む。高真空反応チャンバー10は、MBEシステム5の反応チャンバーであってもよい。真空環境14は、真空ポンプ16によって高真空反応チャンバー10内で維持される。例えば、真空環境14は、約10-12torr~約10-7torr、約10-11torr~約10-9torr、または約10-11torr~10-5torrの範囲であってもよい。十分に準備され、実質的に漏れのない反応器は、反応器のポンピング速度と供給源によって生成する入射ビーム圧力とに直接関連するベース圧力及び成長圧力(すなわち堆積中)を有する。
(i)堆積面の絶対回転中心を標的にするように配置された材料供給源プルームの対称軸SA、
(ii)供給源から基板までのRsrc-sub、及び堆積面の中心に対して円筒対称または球対称で構成される基板回転軸AXに対する供給源VFP重心の横方向距離X、
(iii)X≦Rsrc-subかつβ=tan-1(X/Rsrc-sub)≦45°(βは垂直軸Zと対称軸SAの間の角度である)となるような割合の反応器寸法、及び
(iv)0≦α≦45°の範囲に制限された仮想フラックス面傾斜角。
供給源の配置が最適化された材料堆積システム
図2は、いくつかの実施形態による、材料堆積システム50の一部の等角図である。分子線エピタキシーシステムである材料堆積システム50は、高真空反応チャンバー100を有する。材料堆積システム50は、軸外に、基板122の基板堆積面126に対してある角度で、かつ量Roffsetだけずらされて配置されている材料供給源118を含む。すなわち、材料供給源118は、絶対中心ではなく、量Roffsetだけ基板122の絶対中心からずらされた地点に向けられた対称軸SAを有する。材料供給源118は、基板堆積面126の領域122P上に材料を堆積する。真空環境114は、真空ポンプ116によって高真空反応チャンバー110内で維持される。例えば、真空環境114は、一例では約10-12torr~約10-7torr、別の例では約10-11torr~約10-9torr、または更に別の例では約10-11torr~10-5torrの範囲であってもよい。
材料供給源配置の最適化
図4~図7は、基板堆積面126に対する材料供給源118の特定の位置の構成空間のプロットの例であり、計算された膜の不均一性は、材料供給源118の座標X及びZの関数としてプロットされている。図4~図7のそれぞれのプロットで示されている構成空間は、特定のVFP傾斜角α、材料供給源118の特定の余弦N係数、及び基板堆積面126の特定のRSUB(膜形成の領域を示す)に対して一意である。方法は、図4~図7のプロットに示されている構成空間のみに限定されず、これらの構成空間は例示にすぎない。MBEを使用した連続的な高スループット膜形成プロセスの支援に適した、VFP傾斜角α、余弦N係数、及びRSUB値の任意の組み合わせについての構成空間が存在する。表1は、図4~図7に示されているプロットに対応する構成空間を示す。
同様に、0.5%の膜不均一性の特定の島が、1%の膜不均一領域(すなわち曲線518の頂点の近く)に存在し得る。
酸化物系半導体の構造
高スループットの成長速度で高度に均一な膜層を得るために材料供給源が特別に設計された位置及び角度に配置された上述のシステムは、酸化物系半導体デバイスを製造するために使用することができる。p型にドープされたMg系層などの、様々な材料のp型ドープを行うこともできる。例えば、MgxZn1-xO(x>0)の酸化物に基づく層、p型にドープされたMgxZn1-xO層(0≦x<0.45)、またはMgZnON層などのマグネシウム系及び亜鉛系の酸化物を形成することができる。いくつかの実施形態では、酸化物に基づく層は、a)MgO及びZnO、b)MgZnO及びZnO、またはc)MgZnO及びMgOの副層を含む超格子である。いくつかの実施形態では、酸化物に基づく層は、p型ドープ層であり、材料は、活性窒素プラズマ、亜酸化窒素(N2O)、アンモニア(NH3)、リン、酸素プラズマ、または欠陥のあるMgもしくはZnのうちの少なくとも1つを使用して放出される。本開示は、DUV LEDを説明するものとされているが、他のタイプの半導体も同じ技術を使用して製造することができる。
Claims (14)
- 基板堆積面の中心軸の周りで基板の前記基板堆積面を回転させる回転機構、
前記基板を加熱するように構成されたヒーター、
前記基板に材料を供給する材料供給源であって、i)出口開口面を有する出口開口部、及びii)前記出口開口面からの既定の材料放出空間分布を有し、前記既定の材料放出空間分布が、前記中心軸からずれた地点で前記基板と交差する対称軸を有し、前記出口開口部が、前記中心軸に対して、ある直交方向距離、ある横方向距離、及びある傾斜角で配置される、前記材料供給源、並びに
前記直交方向距離、前記横方向距離、または前記傾斜角を動的に調整することができる位置調整機構、を含む材料堆積システム。 - 前記出口開口部が、望まれる層成長速度での望まれる層の堆積均一性を実現するために前記直交方向距離及び前記横方向距離を最小化するように配置される、請求項1に記載のシステム。
- 前記回転機構及び前記材料供給源が収容される反応チャンバーを更に含み、
前記反応チャンバーのサイズが、前記基板の半径RSUBに対する前記横方向距離及び前記直交方向距離の関係に基づいてスケーリングされる、請求項1に記載のシステム。 - 前記反応チャンバーのサイズが、前記材料供給源を配置するための最小距離に基づいて小型化され、前記最小距離は前記横方向距離および前記直交方向距離である、請求項3に記載のシステム。
- 前記位置調整機構が前記材料供給源に連結されている、請求項1に記載のシステム。
- 前記位置調整機構が前記回転機構に結合されている、請求項1に記載のシステム。
- 前記材料供給源が余弦N供給源であり、N≧2である、請求項1に記載のシステム。
- 前記基板が6インチ(150mm)以上の直径を有する、請求項1に記載のシステム。
- 前記材料供給源が活性窒素を放出する窒素プラズマ源であり、
前記システムが酸素プラズマ源を更に含む、請求項1に記載のシステム。 - Mg、P、Al、ZnまたはGaのうちの1つ以上の供給源を含む追加の材料供給源を更に含む、請求項1に記載のシステム。
- 前記基板及び前記材料供給源が10-11torrから10-5torrの真空環境に含まれ、前記真空環境はベース圧力より高い成長圧力を膜形成中に有し、
前記基板堆積面からの前記材料供給源の前記直交方向距離および前記横方向距離は前記材料供給源から放出された材料の平均自由行程以下である、請求項1に記載のシステム。 - 前記位置調整機構は、製造実施の合間に動的な調整が行われることを可能にし、前記直交方向距離、前記横方向距離または前記傾斜角は使用される前記材料供給源の前記材料放出空間分布に依存する、請求項1に記載のシステム。
- 前記位置調整機構は、スロットに沿って固定されるブラケット、リニアアクチュエータ、調整可能な長さを有するアーム、または調整可能な長さを有するポストを備える、請求項1に記載のシステム。
- 前記材料供給源が余弦N供給源でありN≧2であり、
前記基板が6インチ(150mm)以上の直径を有し、
前記基板及び前記材料供給源が10-11torrから10-5torrの真空環境に含まれ、
前記基板堆積面からの前記材料供給源の前記直交方向距離および前記横方向距離は前記材料供給源から放出された材料の平均自由行程以下である、請求項1に記載のシステム。
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