JP7302953B2 - シリコンカーバイド部品とシリコンカーバイド部品を製造する方法 - Google Patents
シリコンカーバイド部品とシリコンカーバイド部品を製造する方法 Download PDFInfo
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical group [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims description 320
- 238000000034 method Methods 0.000 title claims description 65
- 238000004519 manufacturing process Methods 0.000 title claims description 26
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 310
- 239000000758 substrate Substances 0.000 claims description 57
- 238000002955 isolation Methods 0.000 claims description 40
- 230000036961 partial effect Effects 0.000 claims description 37
- 238000002161 passivation Methods 0.000 claims description 11
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- 230000015556 catabolic process Effects 0.000 claims description 9
- 230000007547 defect Effects 0.000 claims description 9
- 238000010521 absorption reaction Methods 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 150000002500 ions Chemical class 0.000 claims description 6
- 230000005669 field effect Effects 0.000 claims description 5
- 238000013532 laser treatment Methods 0.000 claims description 4
- 229920006254 polymer film Polymers 0.000 claims description 4
- 230000003750 conditioning effect Effects 0.000 claims description 3
- 238000005468 ion implantation Methods 0.000 claims description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 3
- 229920005591 polysilicon Polymers 0.000 claims description 3
- 230000008646 thermal stress Effects 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 111
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- 239000004065 semiconductor Substances 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 230000002829 reductive effect Effects 0.000 description 5
- 230000000903 blocking effect Effects 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 230000001419 dependent effect Effects 0.000 description 4
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- 238000002360 preparation method Methods 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 238000000407 epitaxy Methods 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
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- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
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- 230000008929 regeneration Effects 0.000 description 2
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- 230000002441 reversible effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 229910052720 vanadium Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910005883 NiSi Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
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- 239000011521 glass Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
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- 238000003754 machining Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910021334 nickel silicide Inorganic materials 0.000 description 1
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 230000000930 thermomechanical effect Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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Description
210 nドープ(n+)バッファ層
220 ドリフト層
230 接続パッド
240 パッシベーション層
250 分離領域
260 研磨
270 シリコンカーバイド基板
400 シリコンカーバイド部品
410 シリコンカーバイド基板
412 第1の面
414 第2の面
420 ドープ領域
430 中心
Claims (22)
- シリコンカーバイド部品を製造する方法(100)であって、
初期ウエハ上にシリコンカーバイド層を形成するステップ(110)と、
前記製造されるシリコンカーバイド部品のドープ領域を前記シリコンカーバイド層内に形成するステップ(120)と、
前記製造されるシリコンカーバイド部品の導電性接点構造を前記シリコンカーバイド層の表面に形成するステップ(130)であって、前記導電性接点構造は前記ドープ領域と電気的に接触する、ステップ(130)と、
前記導電性接点構造を形成する前記ステップ(130)の後に前記シリコンカーバイド層及び前記初期ウエハのうちの少なくとも一方を分離するステップ(140)であって、これによって、前記製造されるシリコンカーバイド部品の少なくともシリコンカーバイド基板が分離される、ステップ(140)と、
分離する前記ステップ(140)の前に前記シリコンカーバイド層の前記表面にパッシベーション層を形成するステップであって、前記パッシベーション層の開口部内に、前記導電性接点構造が配置される、ステップと、
を含む方法。 - 前記分離されたシリコンカーバイド基板は、厚さが30μm超である、請求項1に記載の方法。
- シリコンカーバイド部品を製造する方法(300)であって、
初期ウエハ上にシリコンカーバイド層を形成するステップ(110)と、
前記製造されるシリコンカーバイド部品のドープ領域を前記シリコンカーバイド層内に形成するステップ(120)と、
前記ドープ領域を形成する前記ステップ(120)の後に前記シリコンカーバイド層又は前記初期ウエハを分離するステップ(140)であって、これによって、前記製造されるシリコンカーバイド部品の少なくともシリコンカーバイド基板が分離され、前記シリコンカーバイド基板は厚さが30μm超である、ステップ(140)と、
分離する前記ステップ(140)の前に前記シリコンカーバイド層の表面にパッシベーション層を形成するステップであって、前記パッシベーション層の開口部内に、前記ドープ領域と電気的に接触する導電性接点構造が配置される、ステップと、
を含む方法。 - 前記初期ウエハの少なくとも一方の面がシリコンカーバイドを含み、前記シリコンカーバイド層を形成する前記ステップ(120)が、前記初期ウエハの前記面にシリコンカーバイドをエピタキシャル成長させることを含む、請求項1~3のいずれか一項に記載の方法。
- 前記シリコンカーバイド層を形成する前記ステップ(110)が、
平均ドープ濃度が5×1017cm-3超である、前記シリコンカーバイド層の第1の部分層を形成するステップと、
平均ドープ濃度が1×1017cm-3未満である、前記シリコンカーバイド層の第2の部分層を形成するステップと、
を含む、
請求項1~4のいずれか一項に記載の方法。 - 前記シリコンカーバイド層の前記第1の部分層の厚さは20μm超である、請求項5に記載の方法。
- 前記シリコンカーバイド層の前記第2の部分層の厚さは30μm未満である、請求項5又は6に記載の方法。
- 前記シリコンカーバイド層の前記第2の部分層の厚さは、前記シリコンカーバイド層の前記第1の部分層の厚さより小さい、請求項5、6、又は7に記載の方法。
- 前記第2の部分層の少なくとも一部分が、前記製造されるシリコンカーバイド部品のドリフト領域を形成する、請求項5~8のいずれか一項に記載の方法。
- 分離する前記ステップ(140)の前に、前記シリコンカーバイド層の前記表面に形成された層スタックに担体ウエハ又は担体フィルムを固定するステップを更に含む、請求項1~9のいずれか一項に記載の方法。
- 分離する前記ステップ(140)の後に、前記初期ウエハの少なくとも一部分を含む、残っているウエハの表面を調整するステップを更に含む、請求項1~10のいずれか一項に記載の方法。
- 前記残っているウエハに更なるシリコンカーバイド層を形成するステップと、
前記更なるシリコンカーバイド層に、更なる製造されるシリコンカーバイド部品のドープ領域を形成するステップと、
前記更なる製造されるシリコンカーバイド部品の前記ドープ領域を形成する前記ステップの後に、前記更なるシリコンカーバイド層又は前記残っているウエハを分離するステップであって、これによって、前記更なる製造されるシリコンカーバイド部品の少なくとも更なるシリコンカーバイド基板が分離される、分離するステップと、
を更に含む、請求項11に記載の方法。 - 予損傷分離領域を生成するステップを更に含み、前記分離領域は、
(i)前記初期ウエハ又は前記シリコンカーバイド層にイオンを打ち込むステップであって、既知の波長範囲のレーザ放射に対する前記予損傷分離領域の吸収係数が、前記初期ウエハ又は前記シリコンカーバイド層の、前記予損傷分離領域の外側の領域の吸収係数の少なくとも5倍である、打ち込むステップ、又は
(ii)前記分離領域を予損傷する為に、前記導電性接点構造を形成する前記ステップ(120)の前に前記分離領域のレーザ処置を行うステップ
によって生成される、
請求項1~12のいずれか一項に記載の方法。 - 前記分離領域に沿って分離する前記ステップ(140)は、
(i)ポリマーフィルムを貼り付けるステップ、
(ii)熱応力を生成するステップ、及び
(iii)前記初期ウエハ又は前記シリコンカーバイド層に既知の波長範囲のレーザ放射を照射するステップ
のうちの少なくとも1つのステップを含む、
請求項13に記載の方法。 - 分離する前記ステップ(140)は、前記シリコンカーバイド層又は前記初期ウエハの分離領域へのイオン打ち込み又はレーザボンバードメントによって実施される、請求項1~14のいずれか一項に記載の方法。
- 分離する前記ステップ(140)は前記シリコンカーバイド層を分離するステップであり、これにより、分離する前記ステップ(140)の後に、前記シリコンカーバイド層の一部が前記初期ウエハ上に残る、請求項1~15のいずれか一項に記載の方法。
- 前記導電性接点構造は、金属及びポリシリコンの少なくとも一方を含む、請求項1~16のいずれか一項に記載の方法。
- 分離する前記ステップ(140)の前に、製造されるシリコンカーバイド部品の間の領域において前記シリコンカーバイド層を分離するステップを更に含む、請求項1~17のいずれか一項に記載の方法。
- シリコンカーバイド部品(400)であって、
厚さが30μm超であるシリコンカーバイド基板(410)と、
前記シリコンカーバイド部品(400)の、前記シリコンカーバイド基板(410)の第1の面(412)に配置されたドープ領域(420)と、
を含み、
前記シリコンカーバイド基板(410)の前記第1の面(412)と反対側の第2の面(414)との間の、前記シリコンカーバイド基板(410)の中心(430)における点欠陥密度が5×1014cm-3未満であり、
前記シリコンカーバイド基板の前記第1の面に形成されたパッシベーション層の開口部内に、前記ドープ領域と電気的に接触する導電性接点構造が配置され、
前記シリコンカーバイド基板は予損傷分離領域を含み、既知の波長範囲のレーザ放射に対する前記予損傷分離領域の吸収係数が、前記シリコンカーバイド基板の、前記予損傷分離領域の外側の領域の吸収係数の少なくとも5倍である、
シリコンカーバイド部品(400)。 - 前記シリコンカーバイド部品(400)の少なくとも1つの縦型部品構造が、ダイオード、電界効果トランジスタ、又は絶縁ゲートバイポーラトランジスタを含む、請求項19に記載のシリコンカーバイド部品。
- 前記シリコンカーバイド部品(400)の少なくとも1つの縦型部品構造の降伏電圧が100V超である、請求項19又は20に記載のシリコンカーバイド部品。
- 前記シリコンカーバイド基板(410)の前記中心(430)における平均ドープ濃度が5×1017cm-3超である、請求項19~21のいずれか一項に記載のシリコンカーバイド部品。
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