JP7294572B2 - 光導波路型受光素子 - Google Patents
光導波路型受光素子 Download PDFInfo
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- JP7294572B2 JP7294572B2 JP2020035029A JP2020035029A JP7294572B2 JP 7294572 B2 JP7294572 B2 JP 7294572B2 JP 2020035029 A JP2020035029 A JP 2020035029A JP 2020035029 A JP2020035029 A JP 2020035029A JP 7294572 B2 JP7294572 B2 JP 7294572B2
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- 230000003287 optical effect Effects 0.000 title claims description 250
- 239000010410 layer Substances 0.000 claims description 691
- 239000004065 semiconductor Substances 0.000 claims description 272
- 230000031700 light absorption Effects 0.000 claims description 80
- 239000012792 core layer Substances 0.000 claims description 66
- 239000012535 impurity Substances 0.000 claims description 33
- 230000005684 electric field Effects 0.000 description 86
- 239000000758 substrate Substances 0.000 description 30
- 239000002184 metal Substances 0.000 description 26
- 229910052751 metal Inorganic materials 0.000 description 26
- 230000004048 modification Effects 0.000 description 20
- 238000012986 modification Methods 0.000 description 20
- 239000003990 capacitor Substances 0.000 description 13
- 230000000694 effects Effects 0.000 description 10
- 239000000203 mixture Substances 0.000 description 9
- 210000001503 joint Anatomy 0.000 description 8
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 230000015556 catabolic process Effects 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000004888 barrier function Effects 0.000 description 4
- 238000001039 wet etching Methods 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 230000001427 coherent effect Effects 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 125000005842 heteroatom Chemical group 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 238000005253 cladding Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 230000010363 phase shift Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 229910004541 SiN Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- ORQBXQOJMQIAOY-UHFFFAOYSA-N nobelium Chemical compound [No] ORQBXQOJMQIAOY-UHFFFAOYSA-N 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
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Description
最初に、本開示の実施形態を列記して説明する。一実施形態に係る光導波路型受光素子は、第1導電型を有する第1半導体層と、第1半導体層の第1領域上に設けられた光導波路構造と、第1半導体層の第1領域と隣接する第2領域上に設けられた導波路型フォトダイオード構造と、を備える。光導波路構造は、第1半導体層上に設けられた光導波コア層と、光導波コア層上に設けられたクラッド層と、を含む。導波路型フォトダイオード構造は、第1半導体層上に設けられ、光導波コア層と光結合された光吸収層と、光吸収層上に設けられた第2導電型を有する第2半導体層と、第1半導体層と光吸収層との間に設けられた、第1半導体層より低い不純物濃度の第1導電型またはアンドープの増倍層と、増倍層と光吸収層との間に設けられ、光吸収層よりも高い不純物濃度の第2導電型を有する第3半導体層と、を含む。光導波路構造と導波路型フォトダイオード構造との界面を第1界面とし、第1半導体層と導波路型フォトダイオード構造との界面を第2界面とするとき、第1界面と第2界面との成す角が90°より小さい。増倍層及び第3半導体層は、第1半導体層の第1領域と光導波コア層との間に延在している。
本開示の光導波路型受光素子の具体例を、以下に図面を参照しつつ説明する。なお、本発明はこれらの例示に限定されるものではなく、特許請求の範囲によって示され、特許請求の範囲と均等の意味及び範囲内でのすべての変更が含まれることが意図される。以下の説明では、図面の説明において同一の要素には同一の符号を付し、重複する説明を省略する。なお、以下の説明においてアンドープとは、例えば不純物濃度が1×1015cm-3以下といった極めて低い濃度であることをいう。
図1は、本発明の第1実施形態に係る光導波路型受光素子を備える受光デバイスの構成を示す平面図である。図2は図1に示されたII-II線に沿った断面を示しており、図3は図2の一部を拡大して示している。図4は、図1に示されたIV-IV線に沿った断面を示している。図5は、図1に示されたV-V線に沿った断面を示している。なお、図5では、絶縁膜16,17の図示を省略している。
図9は、上記実施形態の第1変形例に係る光導波路型受光素子2Bの構造を示す断面図であって、図1のV-V線に対応する断面を示している。光導波路型受光素子2Bは、上記実施形態の光導波路型受光素子2Aの構成に加えて、バッファ層111及びn型電界制御層112を更に備えている。
図10は、上記実施形態の第2変形例に係る光導波路型受光素子2Cの構造を示す断面図であって、図1のV-V線に対応する断面を示している。光導波路型受光素子2Cは、上記実施形態の光導波路型受光素子2Aの構成に加えて、ヘテロ障壁緩和層113を更に備えている。ヘテロ障壁緩和層113は、本変形例における第5半導体層である。ヘテロ障壁緩和層113は、n型半導体層10の領域D上におけるp型電界制御層12と光吸収層13との間に設けられており、n型半導体層10の領域E上には延在していない。ヘテロ障壁緩和層113は、p型電界制御層12と光吸収層13との間のヘテロエネルギー障壁を緩和するために設けられる。
図11は、上記実施形態の第3変形例に係る光導波路型受光素子2Dの構造を示す断面図であって、図1のV-V線に対応する断面を示している。光導波路型受光素子2Dは、上記実施形態の電子注入型の増倍層11を、ホール注入型の増倍層11Cに変更した構成を備える。なお、以下に説明する点を除いて、光導波路型受光素子2Dの構成は、上記実施形態の光導波路型受光素子2Aと同様である。
図12は、第2実施形態に係る光導波路型受光素子2Eの構造を示す断面図であって、図1のV-V線に対応する断面を示している。光導波路型受光素子2Eは、第1実施形態の増倍層11及びp型電界制御層12に代えて、増倍層11A及びp型電界制御層12Aを備える。増倍層11Aは、第1実施形態の増倍層11と同じ組成及び厚さを有するが、n型半導体層10の領域Dと光吸収層13との間にのみ設けられ、n型半導体層10の領域Eと光導波コア層81との間には延在していない。同様に、p型電界制御層12Aは、第1実施形態のp型電界制御層12と同じ組成及び厚さを有するが、n型半導体層10の領域Dと光吸収層13との間にのみ設けられ、n型半導体層10の領域Eと光導波コア層81との間には延在していない。p型電界制御層12Aは、本変形例における第7半導体層である。
2A~2F…光導波路型受光素子
2a,2b…端縁
3A,3B…信号増幅部
4a,4b…入力ポート
5…光分岐部
6,6a~6d…受光素子部
7a~7d…キャパシタ部
8,8a~8f…光導波路部
9…基板
10…n型半導体層
10a…上面
11,11A,11C…増倍層
11j…側面
12,12A…p型電界制御層
12C…n型電界制御層
13…光吸収層
14…p型半導体層
15…p型コンタクト層
16,17…絶縁膜
18…埋込領域
19…導波路型フォトダイオード構造
20a~20m…ボンディングワイヤ
21a~21d…信号出力用電極パッド
22a~22f…バイアス電圧側電極パッド
23,23a~23d…基準電位側電極パッド
31…p型オーミック電極
32…配線
41…n型オーミック電極
42…バイアス配線
51…ビア
61a~61d…信号入力用電極パッド
62a~62f…基準電位用電極パッド
71…ワイヤ
80,80B…光導波路構造
81…光導波コア層
82…クラッド層
83…p型半導体層
101…p型半導体層
102…光導波路型受光素子
111…バッファ層
112…n型電界制御層
113…ヘテロ障壁緩和層
114…光吸収層
115…n型半導体層
116…n型コンタクト層
117…導波路型フォトダイオード構造
131…n型オーミック電極
132…配線
C1~C4…界面
D,E…領域
La…光信号
Lb…局部発振光
Lc1~Lc4…信号成分
Ws,Wc…空乏化幅
Claims (5)
- 第1導電型を有する第1半導体層と、
前記第1半導体層の第1領域上に設けられた光導波路構造と、
前記第1半導体層の前記第1領域と隣接する第2領域上に設けられた導波路型フォトダイオード構造と、
を備え、
前記光導波路構造は、
前記第1半導体層上に設けられた光導波コア層と、
前記光導波コア層上に設けられたクラッド層と、
を含み、
前記導波路型フォトダイオード構造は、
前記第1半導体層上に設けられ、前記光導波コア層と光結合された光吸収層と、
前記光吸収層上に設けられた第2導電型を有する第2半導体層と、
前記第1半導体層と前記光吸収層との間に設けられた、前記第1半導体層より低い不純物濃度の第1導電型またはアンドープの増倍層と、
前記増倍層と前記光吸収層との間に設けられ、前記光吸収層よりも高い不純物濃度の第2導電型を有する第3半導体層と、
を含み、
前記光導波路構造と前記導波路型フォトダイオード構造との界面を第1界面とし、前記第1半導体層と前記導波路型フォトダイオード構造との界面を第2界面とするとき、第1界面と第2界面との成す角が90°より小さく、
前記増倍層及び前記第3半導体層は、前記第1半導体層の前記第1領域と前記光導波コア層との間に延在している、光導波路型受光素子。 - 前記第1半導体層の前記第1領域と前記光導波コア層との間の前記増倍層及び前記第3半導体層は、前記光導波路構造の全域にわたって設けられている、請求項1に記載の光導波路型受光素子。
- 前記導波路型フォトダイオード構造は、
前記第1半導体層の前記第2領域と前記増倍層との間に設けられた、前記第1半導体層より低い不純物濃度の第1導電型またはアンドープのバッファ層と、
前記バッファ層と前記増倍層との間に設けられ、前記増倍層より高い不純物濃度の第1導電型を有する第4半導体層と、
を更に含み、
前記バッファ層及び前記第4半導体層は、前記第1半導体層の前記第1領域と前記増倍層との間に延在している、請求項1または請求項2に記載の光導波路型受光素子。 - 前記導波路型フォトダイオード構造は、前記第3半導体層と前記光吸収層の間に設けられた第5半導体層を更に含む、請求項1または2に記載の光導波路型受光素子。
- 第1導電型を有する第1半導体層と、
前記第1半導体層の第1領域上に設けられた光導波路構造と、
前記第1半導体層の前記第1領域と隣接する第2領域上に設けられた導波路型フォトダイオード構造と、
を備え、
前記光導波路構造は、
前記第1半導体層上に設けられた第6半導体層と、
前記第6半導体層上に設けられた光導波コア層と、
前記光導波コア層上に設けられたクラッド層と、
を含み、
前記導波路型フォトダイオード構造は、
前記第1半導体層上に設けられ、前記光導波コア層と光結合された光吸収層と、
前記光吸収層上に設けられた第2導電型を有する第2半導体層と、
前記第1半導体層と前記光吸収層との間に設けられた、前記第1半導体層より低い不純物濃度の第1導電型またはアンドープの増倍層と、
前記増倍層と前記光吸収層との間に設けられ、前記光吸収層よりも高い不純物濃度の第2導電型を有する第7半導体層と、
を含み、
前記光導波路構造と前記導波路型フォトダイオード構造との界面を第1界面とし、前記第1半導体層と前記導波路型フォトダイオード構造との界面を第2界面とするとき、第1界面と第2界面との成す角が90°より小さく、
前記第6半導体層は、前記第7半導体層よりも低い不純物濃度の第2導電型を有し、前記第1界面において前記増倍層及び前記第7半導体層と接する、光導波路型受光素子。
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