JP7272440B2 - 弾性波フィルタおよびマルチプレクサ - Google Patents

弾性波フィルタおよびマルチプレクサ Download PDF

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Publication number
JP7272440B2
JP7272440B2 JP2021533071A JP2021533071A JP7272440B2 JP 7272440 B2 JP7272440 B2 JP 7272440B2 JP 2021533071 A JP2021533071 A JP 2021533071A JP 2021533071 A JP2021533071 A JP 2021533071A JP 7272440 B2 JP7272440 B2 JP 7272440B2
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Japan
Prior art keywords
electrode
pitch
electrode finger
comb
elastic wave
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JP2021533071A
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Japanese (ja)
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JPWO2021010379A5 (https=
JPWO2021010379A1 (https=
Inventor
明 野口
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/14576—Transducers whereby only the last fingers have different characteristics with respect to the other fingers, e.g. different shape, thickness or material, split finger
    • H03H9/14582—Transducers whereby only the last fingers have different characteristics with respect to the other fingers, e.g. different shape, thickness or material, split finger the last fingers having a different pitch
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H03H9/14541—Multilayer finger or busbar electrode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H03H9/644—Coupled resonator filters having two acoustic tracks
    • H03H9/6456—Coupled resonator filters having two acoustic tracks being electrically coupled
    • H03H9/6469—Coupled resonator filters having two acoustic tracks being electrically coupled via two connecting electrodes
    • H03H9/6476—Coupled resonator filters having two acoustic tracks being electrically coupled via two connecting electrodes the tracks being electrically parallel
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H03H9/6483—Ladder SAW filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
    • H03H9/72—Networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
    • H03H9/72—Networks using surface acoustic waves
    • H03H9/725—Duplexers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/542—Filters comprising resonators of piezoelectric or electrostrictive material including passive elements

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP2021533071A 2019-07-17 2020-07-13 弾性波フィルタおよびマルチプレクサ Active JP7272440B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019131525 2019-07-17
JP2019131525 2019-07-17
PCT/JP2020/027273 WO2021010379A1 (ja) 2019-07-17 2020-07-13 弾性波フィルタおよびマルチプレクサ

Publications (3)

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JPWO2021010379A1 JPWO2021010379A1 (https=) 2021-01-21
JPWO2021010379A5 JPWO2021010379A5 (https=) 2022-03-29
JP7272440B2 true JP7272440B2 (ja) 2023-05-12

Family

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Family Applications (1)

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JP2021533071A Active JP7272440B2 (ja) 2019-07-17 2020-07-13 弾性波フィルタおよびマルチプレクサ

Country Status (5)

Country Link
US (1) US12107563B2 (https=)
JP (1) JP7272440B2 (https=)
KR (1) KR102656794B1 (https=)
CN (1) CN114097175B (https=)
WO (1) WO2021010379A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023003114A (ja) 2021-06-23 2023-01-11 株式会社村田製作所 表面弾性波共振子、弾性波フィルタおよびマルチプレクサ
WO2023063254A1 (ja) * 2021-10-14 2023-04-20 株式会社村田製作所 弾性波フィルタおよびマルチプレクサ
JP2023184052A (ja) 2022-06-17 2023-12-28 株式会社村田製作所 弾性波フィルタ
CN116633307B (zh) * 2023-05-23 2024-09-10 无锡市好达电子股份有限公司 弹性波装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008252678A (ja) 2007-03-30 2008-10-16 Tdk Corp 縦結合共振子型弾性表面波フィルタ
WO2016208236A1 (ja) 2015-06-22 2016-12-29 株式会社村田製作所 弾性波フィルタ装置
WO2018123657A1 (ja) 2016-12-28 2018-07-05 株式会社村田製作所 縦結合共振子型弾性波フィルタ

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09130203A (ja) * 1995-11-01 1997-05-16 Toyo Commun Equip Co Ltd 二段縦続接続縦結合二重モードｓａｗフィルタ
JP3358615B2 (ja) 2000-06-26 2002-12-24 株式会社村田製作所 縦結合共振子型弾性表面波フィルタ
US6972643B2 (en) 2001-06-29 2005-12-06 Matsushita Electric Industrial Co., Ltd. Surface acoustic wave filter
JP2003087096A (ja) 2001-09-17 2003-03-20 Toyo Commun Equip Co Ltd ラダー型弾性表面波フィルタ
US7679474B2 (en) * 2004-01-09 2010-03-16 Panasonic Corporation Surface acoustic wave resonator, and surface acoustic wave filter
JP4646700B2 (ja) * 2005-05-27 2011-03-09 京セラ株式会社 弾性表面波共振器および弾性表面波装置ならびに通信装置
CN101292421B (zh) * 2005-10-27 2011-08-24 京瓷株式会社 声表面波装置和通信装置
US8436696B2 (en) * 2007-06-28 2013-05-07 Kyocera Corporation Surface acoustic wave device and communication device
CN102197591B (zh) * 2008-10-24 2014-05-14 精工爱普生株式会社 表面声波谐振器、表面声波振荡器以及表面声波模块装置
KR20110081865A (ko) * 2008-10-24 2011-07-14 엡슨 토요콤 가부시키 가이샤 탄성 표면파 공진자, 탄성 표면파 발진기 및 탄성 표면파 모듈 장치
CN103597743B (zh) * 2012-02-15 2016-08-17 天工松下滤波方案日本有限公司 多模式弹性波元件
US10148246B2 (en) * 2016-06-08 2018-12-04 Murata Manufacturing Co., Ltd. Multiplexer and radio-frequency (RF) front-end module
JP6798562B2 (ja) * 2016-10-28 2020-12-09 株式会社村田製作所 ラダー型フィルタ、デュプレクサ及び弾性波フィルタ装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008252678A (ja) 2007-03-30 2008-10-16 Tdk Corp 縦結合共振子型弾性表面波フィルタ
WO2016208236A1 (ja) 2015-06-22 2016-12-29 株式会社村田製作所 弾性波フィルタ装置
WO2018123657A1 (ja) 2016-12-28 2018-07-05 株式会社村田製作所 縦結合共振子型弾性波フィルタ

Also Published As

Publication number Publication date
CN114097175B (zh) 2025-07-01
US12107563B2 (en) 2024-10-01
JPWO2021010379A1 (https=) 2021-01-21
WO2021010379A1 (ja) 2021-01-21
US20220140809A1 (en) 2022-05-05
CN114097175A (zh) 2022-02-25
KR20220018020A (ko) 2022-02-14
KR102656794B1 (ko) 2024-04-12

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