CN103597743B - 多模式弹性波元件 - Google Patents
多模式弹性波元件 Download PDFInfo
- Publication number
- CN103597743B CN103597743B CN201380001627.2A CN201380001627A CN103597743B CN 103597743 B CN103597743 B CN 103597743B CN 201380001627 A CN201380001627 A CN 201380001627A CN 103597743 B CN103597743 B CN 103597743B
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- CN
- China
- Prior art keywords
- electrode
- finger pitch
- reflector
- elastic wave
- electrode finger
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000000034 method Methods 0.000 claims abstract description 76
- 239000000758 substrate Substances 0.000 claims description 19
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- 238000005516 engineering process Methods 0.000 description 6
- 230000001629 suppression Effects 0.000 description 6
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- 230000000694 effects Effects 0.000 description 5
- 238000003780 insertion Methods 0.000 description 4
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- 238000010295 mobile communication Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 2
- 230000024241 parasitism Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 210000001520 comb Anatomy 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
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- 239000002184 metal Substances 0.000 description 1
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- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000010897 surface acoustic wave method Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
- H03H9/14544—Transducers of particular shape or position
- H03H9/14588—Horizontally-split transducers
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/0023—Balance-unbalance or balance-balance networks
- H03H9/0028—Balance-unbalance or balance-balance networks using surface acoustic wave devices
- H03H9/008—Balance-unbalance or balance-balance networks using surface acoustic wave devices having three acoustic tracks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
- H03H9/0566—Constructional combinations of supports or holders with electromechanical or other electronic elements for duplexers
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
- H03H9/14544—Transducers of particular shape or position
- H03H9/14576—Transducers whereby only the last fingers have different characteristics with respect to the other fingers, e.g. different shape, thickness or material, split finger
- H03H9/14582—Transducers whereby only the last fingers have different characteristics with respect to the other fingers, e.g. different shape, thickness or material, split finger the last fingers having a different pitch
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/64—Filters using surface acoustic waves
- H03H9/6423—Means for obtaining a particular transfer characteristic
- H03H9/6433—Coupled resonator filters
- H03H9/6436—Coupled resonator filters having one acoustic track only
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
- H03H9/0566—Constructional combinations of supports or holders with electromechanical or other electronic elements for duplexers
- H03H9/0576—Constructional combinations of supports or holders with electromechanical or other electronic elements for duplexers including surface acoustic wave [SAW] devices
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
Description
Claims (22)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012-030274 | 2012-02-15 | ||
JP2012030274 | 2012-02-15 | ||
PCT/JP2013/000609 WO2013121734A1 (ja) | 2012-02-15 | 2013-02-05 | 多重モード弾性波素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103597743A CN103597743A (zh) | 2014-02-19 |
CN103597743B true CN103597743B (zh) | 2016-08-17 |
Family
ID=48983871
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201380001627.2A Active CN103597743B (zh) | 2012-02-15 | 2013-02-05 | 多模式弹性波元件 |
Country Status (4)
Country | Link |
---|---|
US (1) | US9473107B2 (zh) |
JP (1) | JP5716096B2 (zh) |
CN (1) | CN103597743B (zh) |
WO (1) | WO2013121734A1 (zh) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108496308B (zh) * | 2016-01-29 | 2021-11-16 | 京瓷株式会社 | 弹性波谐振器、弹性波滤波器、分波器及通信装置 |
JP6465047B2 (ja) * | 2016-02-19 | 2019-02-06 | 株式会社村田製作所 | 弾性波共振子、帯域通過型フィルタ及びデュプレクサ |
JP6627816B2 (ja) * | 2016-06-08 | 2020-01-08 | 株式会社村田製作所 | マルチプレクサおよび高周波フロントエンドモジュール |
US10148246B2 (en) * | 2016-06-08 | 2018-12-04 | Murata Manufacturing Co., Ltd. | Multiplexer and radio-frequency (RF) front-end module |
JP6625579B2 (ja) | 2017-03-21 | 2019-12-25 | 太陽誘電株式会社 | 弾性波フィルタ |
US11621691B2 (en) * | 2018-07-16 | 2023-04-04 | Qorvo Us, Inc. | Reflective structures for surface acoustic wave devices |
JP2020123854A (ja) * | 2019-01-30 | 2020-08-13 | 太陽誘電株式会社 | フィルタおよびマルチプレクサ |
US11437976B2 (en) | 2019-05-06 | 2022-09-06 | Skyworks Solutions, Inc. | Acoustic wave filter with shunt resonator having multiple resonant frequencies |
US11742829B2 (en) | 2019-08-28 | 2023-08-29 | Skyworks Solutions, Inc. | Multiplexer with filter having increased reflection characteristic |
US11881836B2 (en) * | 2019-11-25 | 2024-01-23 | Skyworks Solutions, Inc. | Cascaded resonator with different reflector pitch |
US20220407496A1 (en) * | 2021-06-16 | 2022-12-22 | Skyworks Solutions, Inc. | Acoustic wave devices including high density interdigitated electrodes |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102017406A (zh) * | 2008-04-25 | 2011-04-13 | 京瓷株式会社 | 声表面波装置和使用该装置的通信装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4534307B2 (ja) | 2000-05-24 | 2010-09-01 | パナソニック株式会社 | 弾性表面波フィルタ |
EP1276235A1 (en) * | 2001-07-13 | 2003-01-15 | Matsushita Electric Industrial Co., Ltd. | Surface acoustic wave filter and communication device using the filter |
JP2003258595A (ja) | 2002-02-27 | 2003-09-12 | Fujitsu Media Device Kk | 弾性表面波装置 |
JP5094074B2 (ja) | 2006-07-27 | 2012-12-12 | 京セラ株式会社 | 弾性表面波素子及び弾性表面波装置 |
JP2008252678A (ja) | 2007-03-30 | 2008-10-16 | Tdk Corp | 縦結合共振子型弾性表面波フィルタ |
JP5033876B2 (ja) | 2007-06-28 | 2012-09-26 | 京セラ株式会社 | 弾性表面波装置及び通信装置 |
US8358177B2 (en) * | 2008-10-24 | 2013-01-22 | Seiko Epson Corporation | Surface acoustic wave resonator, surface acoustic wave oscillator, and surface acoustic wave module unit |
US8994479B2 (en) | 2009-08-25 | 2015-03-31 | Kyocera Corporation | Surface acoustic wave device |
-
2013
- 2013-02-05 CN CN201380001627.2A patent/CN103597743B/zh active Active
- 2013-02-05 US US14/112,547 patent/US9473107B2/en active Active
- 2013-02-05 WO PCT/JP2013/000609 patent/WO2013121734A1/ja active Application Filing
- 2013-02-05 JP JP2013540155A patent/JP5716096B2/ja active Active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102017406A (zh) * | 2008-04-25 | 2011-04-13 | 京瓷株式会社 | 声表面波装置和使用该装置的通信装置 |
Also Published As
Publication number | Publication date |
---|---|
JPWO2013121734A1 (ja) | 2015-05-11 |
JP5716096B2 (ja) | 2015-05-13 |
US9473107B2 (en) | 2016-10-18 |
CN103597743A (zh) | 2014-02-19 |
US20140049341A1 (en) | 2014-02-20 |
WO2013121734A1 (ja) | 2013-08-22 |
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Legal Events
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C06 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: SKYWORKS PANASONIC FILTRATE SOLUTIONS JAPAN CO., L Free format text: FORMER OWNER: MATSUSHITA ELECTRIC INDUSTRIAL CO, LTD. Effective date: 20141218 |
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C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20141218 Address after: Osaka Japan Applicant after: PANASONIC CORPORATION Address before: Osaka Japan Applicant before: Matsushita Electric Industrial Co., Ltd. |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee | ||
CP01 | Change in the name or title of a patent holder |
Address after: Osaka Japan Patentee after: Japan Industrial Co., Ltd. Address before: Osaka Japan Patentee before: PANASONIC CORPORATION |