JP7265869B2 - イメージセンサ - Google Patents
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- JP7265869B2 JP7265869B2 JP2019000189A JP2019000189A JP7265869B2 JP 7265869 B2 JP7265869 B2 JP 7265869B2 JP 2019000189 A JP2019000189 A JP 2019000189A JP 2019000189 A JP2019000189 A JP 2019000189A JP 7265869 B2 JP7265869 B2 JP 7265869B2
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- 239000000758 substrate Substances 0.000 claims description 135
- 239000004065 semiconductor Substances 0.000 claims description 122
- 230000003287 optical effect Effects 0.000 claims description 100
- 230000000903 blocking effect Effects 0.000 claims description 23
- 238000006243 chemical reaction Methods 0.000 claims description 23
- 230000002093 peripheral effect Effects 0.000 claims description 23
- 230000000149 penetrating effect Effects 0.000 claims description 20
- 239000010410 layer Substances 0.000 description 162
- 238000002955 isolation Methods 0.000 description 62
- 229910052751 metal Inorganic materials 0.000 description 38
- 239000002184 metal Substances 0.000 description 38
- 239000011229 interlayer Substances 0.000 description 24
- 238000000034 method Methods 0.000 description 16
- 238000010586 diagram Methods 0.000 description 12
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 10
- 238000002161 passivation Methods 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 8
- 239000011810 insulating material Substances 0.000 description 7
- 238000009413 insulation Methods 0.000 description 7
- 239000007769 metal material Substances 0.000 description 7
- 229910052721 tungsten Inorganic materials 0.000 description 7
- 239000010937 tungsten Substances 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 239000010936 titanium Substances 0.000 description 6
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 6
- 229910052581 Si3N4 Inorganic materials 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 5
- 229910017052 cobalt Inorganic materials 0.000 description 5
- 239000010941 cobalt Substances 0.000 description 5
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 5
- 230000000875 corresponding effect Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 229910052759 nickel Inorganic materials 0.000 description 5
- 238000000059 patterning Methods 0.000 description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 5
- 229910052814 silicon oxide Inorganic materials 0.000 description 5
- 229910052719 titanium Inorganic materials 0.000 description 5
- 238000000231 atomic layer deposition Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 230000035515 penetration Effects 0.000 description 4
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 229910052707 ruthenium Inorganic materials 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 239000000109 continuous material Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 229910000449 hafnium oxide Inorganic materials 0.000 description 2
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 2
- 229910001936 tantalum oxide Inorganic materials 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 229910021341 titanium silicide Inorganic materials 0.000 description 1
- MAKDTFFYCIMFQP-UHFFFAOYSA-N titanium tungsten Chemical compound [Ti].[W] MAKDTFFYCIMFQP-UHFFFAOYSA-N 0.000 description 1
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 description 1
- -1 tungsten nitride Chemical class 0.000 description 1
- 229910021342 tungsten silicide Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
- H01L27/14623—Optical shielding
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- H01L27/144—Devices controlled by radiation
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- H01L27/144—Devices controlled by radiation
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- H01L27/14603—Special geometry or disposition of pixel-elements, address-lines or gate-electrodes
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- H01L27/144—Devices controlled by radiation
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- H01L27/14601—Structural or functional details thereof
- H01L27/14603—Special geometry or disposition of pixel-elements, address-lines or gate-electrodes
- H01L27/14605—Structural or functional details relating to the position of the pixel elements, e.g. smaller pixel elements in the center of the imager compared to pixel elements at the periphery
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- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Description
図1は、例示的な実施形態によるイメージセンサ100を示すレイアウト図である。図2は、例示的な実施形態によるイメージセンサ100を示す断面図であり、図1のII-II’部分の断面図である。図3は、図2のIII部分の拡大図であり、図4は、図2のIV部分の拡大図である。図1には、便宜上、イメージセンサ100の一部構成、例えば、遮光層160などを省略して図示する。
110 半導体基板
110B 第2面
110F 第1面
112 活性領域
120 光電変換領域
122 フォトダイオード領域
124、124A 素子分離領域
124I 背面絶縁層
124IA 素子分離絶縁層
124T、124TA 素子分離トレンチ
126 埋め込み絶縁層
128 パッド分離領域
128T パッド分離トレンチ
130 第1内部配線構造
134 第1層間絶縁膜
150、150A、150B、150C、150D 第1遮光壁構造物
150S1 第1側面
150S2 第2側面
150T 第1遮光トレンチ
150W1 第1幅
150W2 第2幅
152 遮光絶縁層
154 遮光金属層
156、156A、156B 第2遮光壁構造物
156AE 延長部
156T 第2遮光トレンチ
158 第3遮光壁構造物
158T 第3遮光トレンチ
160 遮光層
160P 金属層
162 ガイドパターン
172、172A 貫通ビア
172T 貫通ビアトレンチ
174 導電パッド
182 パッシベーション層
184 カラーフィルタ
186 マイクロレンズ
188 支持基板
190 反射遮断/防止金属層
210 下部基板
220 第2内部配線構造
224 第2層間絶縁膜
Claims (12)
- 画素領域とオプティカルブラック領域とを含む半導体基板と、
前記画素領域に配置される複数の光電変換領域と、
前記半導体基板の第1面上に形成される配線構造と、
前記オプティカルブラック領域に配置され、前記半導体基板の第2面上に配置される遮光層と、
前記画素領域と前記オプティカルブラック領域との間で、前記半導体基板を貫通し、前記遮光層と連結される第1遮光壁構造物と、を含み、
前記半導体基板は、前記画素領域と前記オプティカルブラック領域との間に配置されるダミー画素領域をさらに含み、
前記遮光層は、前記ダミー画素領域上に延長され、
前記第1遮光壁構造物は、前記ダミー画素領域内に配置され、
前記第1遮光壁構造物は、前記遮光層と垂直オーバーラップされ、
前記半導体基板は、前記オプティカルブラック領域の少なくとも一側上に配置される周辺領域をさらに含み、
イメージセンサは、前記オプティカルブラック領域と前記周辺領域との間に、第2遮光壁構造物をさらに含み、
前記第2遮光壁構造物は、前記半導体基板を貫通することを特徴とするイメージセンサ。 - 前記第1遮光壁構造物は、
前記半導体基板の前記第1面から前記半導体基板の前記第2面まで、前記半導体基板内で延長されるトレンチ内に形成される絶縁層を含むことを特徴とする請求項1に記載のイメージセンサ。 - 前記絶縁層は、前記トレンチの外部に位置する一部分を含み、前記半導体基板の前記第2面と前記遮光層との間に延長されることを特徴とする請求項2に記載のイメージセンサ。
- 前記トレンチは、前記半導体基板の前記第2面と同一レベルにおいて、第1幅、及び前記半導体基板の前記第1面と同一レベルにおいて第2幅を有し、前記第1幅が、前記第2幅よりさらに広いことを特徴とする請求項2に記載のイメージセンサ。
- 前記第1遮光壁構造物は、前記半導体基板の前記第1面から前記第2面まで、連続的に延長されることを特徴とする請求項1に記載のイメージセンサ。
- 前記第1遮光壁構造物の第1側面は、前記画素領域と対面し、前記第1遮光壁構造物の前記第1側面と反対の前記第1遮光壁構造物の第2側面は、前記オプティカルブラック領域と対面することを特徴とする請求項1に記載のイメージセンサ。
- 前記オプティカルブラック領域は、前記半導体基板の前面に平行であり、前記画素領域に平行な方向に沿って延長され、
前記ダミー画素領域は、前記オプティカルブラック領域と前記画素領域との間で、前記方向に沿って延長され、
前記第1遮光壁構造物は、前記ダミー画素領域が、前記方向に沿って延長される全体長ほど、前記方向に沿って延長されることを特徴とする請求項1に記載のイメージセンサ。 - 前記オプティカルブラック領域及び前記第1遮光壁構造物は、前記画素領域の境界を限定することを特徴とする請求項1に記載のイメージセンサ。
- 前記周辺領域において、前記半導体基板の前記第2面に配置される導電パッドと、
前記周辺領域内において、前記半導体基板を貫通し、前記導電パッド及び前記配線構造と電気的に連結される貫通ビアと、
前記ダミー画素領域において、前記半導体基板を貫通し、前記遮光層と接触する上面と、前記貫通ビアの下面と同一レベル上に配置される下面と、を含む第3遮光壁構造物と、をさらに含むことを特徴とする請求項1に記載のイメージセンサ。 - 画素領域と、オプティカルブラック領域と、前記画素領域と前記オプティカルブラック領域との間のダミー画素領域と、を含む半導体基板と、
前記画素領域に配置される複数の光電変換領域と、
前記半導体基板の第1面上に形成される配線構造と、
前記オプティカルブラック領域に配置され、前記半導体基板の第2面上に配置される遮光層と、
前記ダミー画素領域において、前記半導体基板を貫通する少なくとも1つの第1遮光壁構造物と、を含み、
前記半導体基板は、前記オプティカルブラック領域の横の周辺領域をさらに含み、
イメージセンサは、前記オプティカルブラック領域と前記周辺領域との間の第2遮光壁構造物をさらに含み、
前記第2遮光壁構造物は、前記半導体基板を貫通することを特徴とするイメージセンサ。 - 前記少なくとも1つの第1遮光壁構造物は、
前記半導体基板内のトレンチ内の絶縁層を含むことを特徴とする請求項10に記載のイメージセンサ。 - 前記少なくとも1つの第1遮光壁構造物及び前記第2遮光壁構造物は、前記半導体基板の前記第1面から前記第2面まで延長されることを特徴とする請求項10に記載のイメージセンサ。
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CN110034139B (zh) | 2023-07-25 |
SG10201807792SA (en) | 2019-08-27 |
US10804304B2 (en) | 2020-10-13 |
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CN110034139A (zh) | 2019-07-19 |
KR102619670B1 (ko) | 2023-12-29 |
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