JP7190245B2 - 垂直窒化ガリウムショットキーダイオード - Google Patents
垂直窒化ガリウムショットキーダイオード Download PDFInfo
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- JP7190245B2 JP7190245B2 JP2019553299A JP2019553299A JP7190245B2 JP 7190245 B2 JP7190245 B2 JP 7190245B2 JP 2019553299 A JP2019553299 A JP 2019553299A JP 2019553299 A JP2019553299 A JP 2019553299A JP 7190245 B2 JP7190245 B2 JP 7190245B2
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- Prior art keywords
- layer
- epitaxial
- gallium nitride
- type gallium
- nitride layer
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- 229910002601 GaN Inorganic materials 0.000 title claims description 166
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 title claims description 163
- 238000000034 method Methods 0.000 claims description 123
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- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 8
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 21
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/66196—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by variation of the electric current supplied or the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. two-terminal devices with an active layer made of a group 13/15 material
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Description
初期の厚い酸化物は、多結晶コアの製造後に存在することがあり、図12に示すカプセル化層が形成されるときに存在し続けることがある、支持構造上に存在するボイドおよび表面フィーチャを埋めるのに役立つ。酸化物層はまた、デバイスの誘電体層としても機能する。CMPプロセスは、ボイド、パーティクル、または他のフィーチャがない実質的に平坦な表面を提供し、次いで、単結晶層1222(例えば、単結晶シリコン層)を接合層1220に結合するために、ウェハ移送プロセス中に使用され得る。接合層は、原子的に平坦な表面によって特徴付けられる必要はないが、所望の信頼性を有する単結晶層(例えば、単結晶シリコン層)の結合を支持するであろう実質的に平坦な表面を提供すべきである。
[例1]
垂直ショットキーダイオードであって、
オーミック接点と、
前記オーミック接点に物理的に接触し、第1のドーピング濃度を有する第1のエピタキシャルN型窒化ガリウム層と、
前記第1のエピタキシャルN型窒化ガリウム層に物理的に接触し、前記第1のドーピング濃度よりも低い第2のドーピング濃度を有する第2のエピタキシャルN型窒化ガリウム層と、
前記第2のエピタキシャルN型窒化ガリウム層に結合され、前記第2のエピタキシャルN型窒化ガリウム層の一部によって互いに分離された第1のエッジ終端領域および第2のエッジ終端領域と、
前記第2のエピタキシャルN型窒化ガリウム層の前記一部と、前記第1のエッジ終端領域および前記第2のエッジ終端領域に結合されたショットキー接点とを
備える垂直ショットキーダイオード。
[例2]
はんだを介して前記オーミック接点に取り付けられた金属タブをさらに備える、例1に記載の垂直ショットキーダイオード。
[例3]
前記第2のエピタキシャルN型窒化ガリウム層は、約10μm~約25μmの範囲の厚さを有する、例1に記載の垂直ショットキーダイオード。
[例4]
前記第2のエピタキシャルN型窒化ガリウム層は、前記第1のエピタキシャルN型窒化ガリウム層との界面にエピタキシャル界面層を備える、例1に記載の垂直ショットキーダイオード。
[例5]
前記第1のドーピング濃度が約1×10 18 cm -3 ~約5×10 18 cm -3 の範囲である、例1に記載の垂直ショットキーダイオード。
[例6]
前記第2のドーピング濃度が約2×10 15 cm -3 ~約1×10 16 cm -3 の範囲である、例5に記載の垂直ショットキーダイオード。
[例7]
前記第1のエッジ終端領域および前記第2のエッジ終端領域の各々は、マグネシウム(Mg)でドープされた窒化ガリウムを含む、例1に記載の垂直ショットキーダイオード。
[例8]
前記第1のエッジ終端領域と前記第2のエッジ終端領域との間の前記第2のエピタキシャルN型窒化ガリウム層の前記一部内に複数の接合障壁ショットキー(JBS)グリッド領域をさらに備え、前記複数のJBSグリッド領域は前記ショットキー接点に結合される、例1に記載の垂直ショットキーダイオード。
[例9]
前記複数のJBSグリッド領域の各々は、マグネシウム(Mg)がドープされた窒化ガリウムを含む、例8に記載の垂直ショットキーダイオード。
[例10]
前記第1のエッジ終端領域および前記第2のエッジ終端領域の各々は、約2×10 15 cm -3 ~約5×10 16 cm -3 の範囲の第3のドーピング濃度を有する単一ゾーンを備える、例1に記載の垂直ショットキーダイオード。
[例11]
前記第1のエッジ終端領域および前記第2のエッジ終端領域の各々は、第1のゾーンおよび第2のゾーンを含み、前記第1のゾーンは、約2×10 15 cm -3 ~約5×10 16 cm -3 の範囲の第3のドーピング濃度を有し、前記第2のゾーンは、約5×10 16 cm -3 ~約5×10 17 cm -3 の範囲の第4のドーピング濃度を有する、例1に記載の垂直ショットキーダイオード。
[例12]
垂直ショットキーダイオードを形成する方法であって、
多結晶セラミックコアと、
前記多結晶セラミックコアをカプセル化するバリア層と、
前記バリア層に結合された接合層と、
前記接合層に結合された実質的に単結晶のシリコン層とを備える加工基板を提供するステップと、
前記実質的に単結晶のシリコン層に結合され、第1のドーピング濃度を有する第1のエピタキシャルN型窒化ガリウム層を形成するステップと、
前記第1のエピタキシャルN型窒化ガリウム層に結合され、前記第1のドーピング濃度よりも低い第2のドーピング濃度を有する第2のエピタキシャルN型窒化ガリウム層を形成するステップと、
前記第2のエピタキシャルN型窒化ガリウム層に結合され、前記第2のエピタキシャルN型窒化ガリウム層の一部によって互いに分離された第1のエッジ終端領域および第2のエッジ終端領域を形成するステップと、
前記第2のエピタキシャルN型窒化ガリウム層の前記一部と、前記第1のエッジ終端領域および前記第2のエッジ終端領域とに結合されたショットキー接点を形成するステップと、
前記加工基板を除去し、前記第1のエピタキシャルN型窒化ガリウム層の裏面を露出させるステップと、
前記第1のエピタキシャルN型窒化ガリウム層の前記裏面に結合されたオーミック接点を形成するステップとを含む、方法。
[例13]
はんだを介して前記オーミック接点に取り付けられた金属タブを形成するステップをさらに含む、例12に記載の方法。
[例14]
前記第2のエピタキシャルN型窒化ガリウム層は、約10μm~約25μmの範囲の厚さを有する、例12に記載の方法。
[例15]
前記第1のエッジ終端領域および前記第2のエッジ終端領域を形成するステップは、前記第2のエピタキシャルN型窒化ガリウム層の第1の部分および第2の部分にマグネシウム(Mg)をイオン注入するステップを含む、例12に記載の方法。
[例16]
前記第1のエッジ終端領域と前記第2のエッジ終端領域との間の前記第2のエピタキシャルN型窒化ガリウム層の前記一部に複数の接合障壁ショットキー(JBS)グリッド領域を形成するステップをさらに含み、前記複数のJBSグリッド領域は前記ショットキー接点に結合される、例12に記載の方法。
[例17]
前記複数のJBSグリッド領域を形成するステップは、マグネシウム(Mg)イオン注入により前記第2のエピタキシャルN型窒化ガリウム層の前記一部を選択的領域ドーピングするステップを含む、例16に記載の方法。
[例18]
垂直ショットキーダイオードであって、
金属タブと、
前記金属タブに結合されたオーミック接点と、
前記オーミック接点に電気的に接触し、第1のドーピング濃度を有する第1のエピタキシャルN型窒化ガリウム層と、
前記第1のエピタキシャルN型窒化ガリウム層に物理的に接触し、前記第1のドーピング濃度よりも低い第2のドーピング濃度を有する第2のエピタキシャルN型窒化ガリウム層と、
前記第2のエピタキシャルN型窒化ガリウム層の一部に結合されたショットキー接点であって、前記ショットキー接点の断面が、前記第2のエピタキシャルN型窒化ガリウム層に近い領域で狭く、前記第2のエピタキシャルN型窒化ガリウム層から遠い第2の領域で広くなるような階段状構造を有するショットキー接点とを
備える、垂直ショットキーダイオード。
[例19]
前記第2のエピタキシャルN型窒化ガリウム層は、約10μm~約25μmの範囲の厚さを有する、例18に記載の垂直ショットキーダイオード。
[例20]
前記第1のドーピング濃度が約1×10 18 ~約5×10 18 の範囲である、例18に記載の垂直ショットキーダイオード。
[例21]
前記第2のドーピング濃度が約2×10 15 ~約1×10 16 の範囲である、例20に記載の垂直ショットキーダイオード。
Claims (6)
- 垂直ショットキーダイオードを形成する方法であって、
多結晶セラミックコアと、
前記多結晶セラミックコアをカプセル化するバリア層と、
前記バリア層に結合された接合層と、
前記接合層に結合された単結晶のシリコン層とを備える加工基板を提供するステップと、
前記単結晶のシリコン層に結合され、第1のドーピング濃度を有する第1のエピタキシャルN型窒化ガリウム層を形成するステップと、
前記第1のエピタキシャルN型窒化ガリウム層に結合され、前記第1のドーピング濃度よりも低い第2のドーピング濃度を有する第2のエピタキシャルN型窒化ガリウム層を形成するステップと、
前記第2のエピタキシャルN型窒化ガリウム層に結合され、前記第2のエピタキシャルN型窒化ガリウム層の一部によって互いに分離された第1のエッジ終端領域および第2のエッジ終端領域を形成するステップと、
前記第2のエピタキシャルN型窒化ガリウム層の前記一部と、前記第1のエッジ終端領域および前記第2のエッジ終端領域とに結合されたショットキー接点を形成するステップと、
前記加工基板を除去し、前記第1のエピタキシャルN型窒化ガリウム層の裏面を露出させるステップと、
前記第1のエピタキシャルN型窒化ガリウム層の前記裏面に結合されたオーミック接点を形成するステップとを含む、方法。 - はんだを介して前記オーミック接点に取り付けられた金属タブを形成するステップをさらに含む、請求項1に記載の方法。
- 前記第2のエピタキシャルN型窒化ガリウム層は、10μm~25μmの範囲の厚さを有する、請求項1に記載の方法。
- 前記第1のエッジ終端領域および前記第2のエッジ終端領域を形成するステップは、前記第2のエピタキシャルN型窒化ガリウム層の第1の部分および第2の部分にマグネシウム(Mg)をイオン注入するステップを含む、請求項1に記載の方法。
- 前記第1のエッジ終端領域と前記第2のエッジ終端領域との間の前記第2のエピタキシャルN型窒化ガリウム層の前記一部に複数の接合障壁ショットキー(JBS)グリッド領域を形成するステップをさらに含み、前記複数のJBSグリッド領域は前記ショットキー接点に結合される、請求項1に記載の方法。
- 前記複数のJBSグリッド領域を形成するステップは、マグネシウム(Mg)イオン注入により前記第2のエピタキシャルN型窒化ガリウム層の前記一部を選択的領域ドーピングするステップを含む、請求項5に記載の方法。
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JP2020512698A (ja) | 2020-04-23 |
TWI803485B (zh) | 2023-06-01 |
EP3602635A1 (en) | 2020-02-05 |
SG11201908769TA (en) | 2019-10-30 |
WO2018183374A1 (en) | 2018-10-04 |
TW201838194A (zh) | 2018-10-16 |
KR20190133232A (ko) | 2019-12-02 |
CN110582852B (zh) | 2024-05-17 |
US10411108B2 (en) | 2019-09-10 |
US20190334015A1 (en) | 2019-10-31 |
CN110582852A (zh) | 2019-12-17 |
EP3602635A4 (en) | 2020-12-23 |
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