JP7177132B2 - 相互接続のコバルト充填 - Google Patents
相互接続のコバルト充填 Download PDFInfo
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- JP7177132B2 JP7177132B2 JP2020500084A JP2020500084A JP7177132B2 JP 7177132 B2 JP7177132 B2 JP 7177132B2 JP 2020500084 A JP2020500084 A JP 2020500084A JP 2020500084 A JP2020500084 A JP 2020500084A JP 7177132 B2 JP7177132 B2 JP 7177132B2
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- composition
- cobalt
- ethoxylated
- propargyl alcohol
- ions
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- 229910017052 cobalt Inorganic materials 0.000 title claims description 77
- 239000010941 cobalt Substances 0.000 title claims description 77
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 title claims description 77
- 238000011049 filling Methods 0.000 title claims description 18
- 239000000203 mixture Substances 0.000 claims description 84
- 238000000034 method Methods 0.000 claims description 42
- 150000001875 compounds Chemical class 0.000 claims description 41
- TVDSBUOJIPERQY-UHFFFAOYSA-N prop-2-yn-1-ol Chemical compound OCC#C TVDSBUOJIPERQY-UHFFFAOYSA-N 0.000 claims description 30
- 238000000151 deposition Methods 0.000 claims description 21
- 239000003112 inhibitor Substances 0.000 claims description 20
- 230000008021 deposition Effects 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 19
- 230000002999 depolarising effect Effects 0.000 claims description 18
- 239000004065 semiconductor Substances 0.000 claims description 17
- 229910001429 cobalt ion Inorganic materials 0.000 claims description 16
- XLJKHNWPARRRJB-UHFFFAOYSA-N cobalt(2+) Chemical compound [Co+2] XLJKHNWPARRRJB-UHFFFAOYSA-N 0.000 claims description 16
- 238000004070 electrodeposition Methods 0.000 claims description 12
- LDHXNOAOCJXPAH-UHFFFAOYSA-M sodium;prop-2-yne-1-sulfonate Chemical compound [Na+].[O-]S(=O)(=O)CC#C LDHXNOAOCJXPAH-UHFFFAOYSA-M 0.000 claims description 11
- 239000003638 chemical reducing agent Substances 0.000 claims description 10
- 239000003795 chemical substances by application Substances 0.000 claims description 9
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 claims description 8
- 239000003623 enhancer Substances 0.000 claims description 8
- 229910052717 sulfur Inorganic materials 0.000 claims description 8
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 claims description 7
- 229910001431 copper ion Inorganic materials 0.000 claims description 7
- 150000003464 sulfur compounds Chemical class 0.000 claims description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- -1 alcohol compound Chemical class 0.000 claims description 6
- 239000000872 buffer Substances 0.000 claims description 6
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 claims description 5
- 239000006172 buffering agent Substances 0.000 claims description 5
- 238000009713 electroplating Methods 0.000 claims description 5
- 229910052760 oxygen Inorganic materials 0.000 claims description 5
- CVHZOJJKTDOEJC-UHFFFAOYSA-N saccharin Chemical compound C1=CC=C2C(=O)NS(=O)(=O)C2=C1 CVHZOJJKTDOEJC-UHFFFAOYSA-N 0.000 claims description 5
- 229940081974 saccharin Drugs 0.000 claims description 5
- 235000019204 saccharin Nutrition 0.000 claims description 5
- 239000000901 saccharin and its Na,K and Ca salt Substances 0.000 claims description 5
- VEQPNABPJHWNSG-UHFFFAOYSA-N Nickel(2+) Chemical compound [Ni+2] VEQPNABPJHWNSG-UHFFFAOYSA-N 0.000 claims description 4
- 239000004327 boric acid Substances 0.000 claims description 4
- 239000012535 impurity Substances 0.000 claims description 4
- 229910001453 nickel ion Inorganic materials 0.000 claims description 4
- VILCJCGEZXAXTO-UHFFFAOYSA-N 2,2,2-tetramine Chemical compound NCCNCCNCCN VILCJCGEZXAXTO-UHFFFAOYSA-N 0.000 claims description 3
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 claims description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 3
- IXAWTPMDMPUGLV-UHFFFAOYSA-N 2-[4-(2-hydroxyethoxy)but-2-ynoxy]ethanol Chemical compound OCCOCC#CCOCCO IXAWTPMDMPUGLV-UHFFFAOYSA-N 0.000 claims description 3
- CEBKHWWANWSNTI-UHFFFAOYSA-N 2-methylbut-3-yn-2-ol Chemical compound CC(C)(O)C#C CEBKHWWANWSNTI-UHFFFAOYSA-N 0.000 claims description 3
- RPNUMPOLZDHAAY-UHFFFAOYSA-N Diethylenetriamine Chemical compound NCCNCCN RPNUMPOLZDHAAY-UHFFFAOYSA-N 0.000 claims description 3
- SLINHMUFWFWBMU-UHFFFAOYSA-N Triisopropanolamine Chemical compound CC(O)CN(CC(C)O)CC(C)O SLINHMUFWFWBMU-UHFFFAOYSA-N 0.000 claims description 3
- DLDJFQGPPSQZKI-UHFFFAOYSA-N but-2-yne-1,4-diol Chemical compound OCC#CCO DLDJFQGPPSQZKI-UHFFFAOYSA-N 0.000 claims description 3
- GKPOMITUDGXOSB-UHFFFAOYSA-N but-3-yn-2-ol Chemical compound CC(O)C#C GKPOMITUDGXOSB-UHFFFAOYSA-N 0.000 claims description 3
- YTIVTFGABIZHHX-UHFFFAOYSA-N butynedioic acid Chemical compound OC(=O)C#CC(O)=O YTIVTFGABIZHHX-UHFFFAOYSA-N 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 229910052801 chlorine Inorganic materials 0.000 claims description 3
- QXLPXWSKPNOQLE-UHFFFAOYSA-N methylpentynol Chemical compound CCC(C)(O)C#C QXLPXWSKPNOQLE-UHFFFAOYSA-N 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- CRWVOXFUXPYTRK-UHFFFAOYSA-N pent-4-yn-1-ol Chemical compound OCCCC#C CRWVOXFUXPYTRK-UHFFFAOYSA-N 0.000 claims description 3
- UORVCLMRJXCDCP-UHFFFAOYSA-N propynoic acid Chemical compound OC(=O)C#C UORVCLMRJXCDCP-UHFFFAOYSA-N 0.000 claims description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 2
- 229910052742 iron Inorganic materials 0.000 claims description 2
- ZQNBDEOGKNZIQM-UHFFFAOYSA-N 3-[2-(2-prop-2-ynoxyethoxy)ethoxy]prop-1-yne Chemical compound C#CCOCCOCCOCC#C ZQNBDEOGKNZIQM-UHFFFAOYSA-N 0.000 claims 2
- 239000002659 electrodeposit Substances 0.000 claims 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 32
- 229910052802 copper Inorganic materials 0.000 description 32
- 239000010949 copper Substances 0.000 description 32
- 238000007747 plating Methods 0.000 description 27
- 230000004888 barrier function Effects 0.000 description 20
- 230000008569 process Effects 0.000 description 10
- 239000002184 metal Substances 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000000654 additive Substances 0.000 description 7
- 238000009792 diffusion process Methods 0.000 description 7
- 150000002500 ions Chemical class 0.000 description 6
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 5
- 230000010287 polarization Effects 0.000 description 5
- 239000011593 sulfur Substances 0.000 description 5
- 239000003989 dielectric material Substances 0.000 description 4
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 239000002244 precipitate Substances 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- 239000004615 ingredient Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000028161 membrane depolarization Effects 0.000 description 3
- 238000001465 metallisation Methods 0.000 description 3
- BQMQLJQPTQPEOV-UHFFFAOYSA-N OP(=O)OC=C Chemical class OP(=O)OC=C BQMQLJQPTQPEOV-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 229920002366 Tetronic® 1307 Polymers 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 150000001868 cobalt Chemical class 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000011068 loading method Methods 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 125000004434 sulfur atom Chemical group 0.000 description 2
- SHKUUQIDMUMQQK-UHFFFAOYSA-N 2-[4-(oxiran-2-ylmethoxy)butoxymethyl]oxirane Chemical compound C1OC1COCCCCOCC1CO1 SHKUUQIDMUMQQK-UHFFFAOYSA-N 0.000 description 1
- HRDCVMSNCBAMAM-UHFFFAOYSA-N 3-prop-2-ynoxyprop-1-yne Chemical compound C#CCOCC#C HRDCVMSNCBAMAM-UHFFFAOYSA-N 0.000 description 1
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 238000001479 atomic absorption spectroscopy Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- KTVIXTQDYHMGHF-UHFFFAOYSA-L cobalt(2+) sulfate Chemical compound [Co+2].[O-]S([O-])(=O)=O KTVIXTQDYHMGHF-UHFFFAOYSA-L 0.000 description 1
- MEYVLGVRTYSQHI-UHFFFAOYSA-L cobalt(2+) sulfate heptahydrate Chemical compound O.O.O.O.O.O.O.[Co+2].[O-]S([O-])(=O)=O MEYVLGVRTYSQHI-UHFFFAOYSA-L 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229920001940 conductive polymer Polymers 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000004100 electronic packaging Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003607 modifier Substances 0.000 description 1
- 238000010979 pH adjustment Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920005862 polyol Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000004626 scanning electron microscopy Methods 0.000 description 1
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
- 238000004448 titration Methods 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- ZTWTYVWXUKTLCP-UHFFFAOYSA-N vinylphosphonic acid Chemical compound OP(O)(=O)C=C ZTWTYVWXUKTLCP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/12—Electroplating: Baths therefor from solutions of nickel or cobalt
- C25D3/14—Electroplating: Baths therefor from solutions of nickel or cobalt from baths containing acetylenic or heterocyclic compounds
- C25D3/16—Acetylenic compounds
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/12—Electroplating: Baths therefor from solutions of nickel or cobalt
- C25D3/14—Electroplating: Baths therefor from solutions of nickel or cobalt from baths containing acetylenic or heterocyclic compounds
- C25D3/18—Heterocyclic compounds
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/02—Electroplating of selected surface areas
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/12—Semiconductors
- C25D7/123—Semiconductors first coated with a seed layer or a conductive layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/288—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition
- H01L21/2885—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition using an external electrical current, i.e. electro-deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
- H01L21/76879—Filling of holes, grooves or trenches, e.g. vias, with conductive material by selective deposition of conductive material in the vias, e.g. selective C.V.D. on semiconductor material, plating
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electroplating And Plating Baths Therefor (AREA)
- Electrodes Of Semiconductors (AREA)
- Electroplating Methods And Accessories (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Description
コバルトイオン源と、
抑制剤化合物と、
緩衝剤と、
脱分極化合物及び均一性向上剤のうちの1つ以上とを含み、
組成物が、二価硫黄化合物を少なくとも実質的に含まない、組成物として要約することができる。
a)メタライズ基板を電解組成物と接触させる工程であって、電解組成物が、
コバルトイオン源と、
抑制剤化合物と、
緩衝剤と、
脱分極化合物及び均一性向上剤のうちの1つ以上とを含み、
組成物が、二価硫黄化合物を少なくとも実質的に含まない、工程と、
b)電解組成物に電流を供給して、コバルトをベース構造体上に析出させ、サブミクロンサイズの電気相互接続機構にコバルトを充填する工程と、を含む方法として要約することができる。
以下の成分を用いて電解コバルト析出組成物を調製した。
Co2+イオン-2.95g/L
H3BO3-30g/L
エトキシ化プロパルギルアルコール-20mg/L
テトロニック1307(エトキシ化プロポキシ化エチレンジアミン)-1000mg/L
水(1Lになるように)
3.0に調整されたpH
以下の成分を用いて電解コバルト析出組成物を調製した。
Co2+イオン-2.95g/L
H3BO3-30g/L
エトキシ化プロパルギルアルコール-50mg/L
テトロニック1307(エトキシ化プロポキシ化エチレンジアミン)-1000mg/L
ビニルホスホン酸-200mg/L
水(1Lになるように)
3.0に調整されたpH
以下の成分を用いて電解コバルト析出組成物を調製した。
Co2+イオン-2.95g/L
H3BO3-30g/L
エトキシ化プロパルギルアルコール-50mg/L
ナトリウムプロパルギルスルホネート-200mg/L
水(1Lになるように)
3.0に調整されたpH
Claims (18)
- コバルトの電解析出のための組成物であって、
前記組成物において1~50g/Lを提供するコバルトイオン源と、
1~250mg/Lの、プロパルギルアルコール、エトキシ化プロパルギルアルコール、プロポキシ化プロパルギルアルコール、ジエチレングリコールビス(2-プロピニル)エーテル、1,4-ビス(2-ヒドロキシエトキシ)-2-ブチン、2-ブチン-1,4-ジオール、4-ペンチン-1-オール、2-メチル-3-ブチン-2-オール、3-メチル-1-ペンチン-3-オール、3-ブチン-2-オール、及び前述のもののうちの1つ以上の組み合わせからなる群から選択されるアセチレンアルコール化合物又はその誘導体である抑制剤化合物と、
5~50g/Lの、ホウ酸を含む緩衝剤と、
10~4000mg/Lの、エトキシ化プロポキシ化トリイソプロパノールアミン、エトキシ化プロポキシ化エチレンジアミン、エトキシ化プロポキシ化ジエチレントリアミン、エトキシ化プロポキシ化トリエチレンテトラミン、及び前述のもののうちの1つ以上の組み合わせからなる群から選択される均一性向上剤と、
残部の実質的に水と、を含み、
前記組成物が促進剤を含まず、
前記組成物が、1mg/L未満の二価硫黄化合物の濃度を有し、
前記組成物がニッケルイオンを含まず、
前記組成物が、析出物中に5,000重量ppm未満のC、O、N、Cl、及びSの全不純物を伴いコバルトを電着させるように構成されている、組成物。 - 前記組成物が、コバルトイオン(Co2+)を金属コバルト(Co0)に還元することができる、任意の機能的濃度の還元剤を少なくとも実質的に含まない、請求項1に記載の組成物。
- 応力減少剤を更に含み、前記応力減少剤がサッカリンを含み、サッカリンの濃度が10~300ppmである、請求項1に記載の組成物。
- 前記抑制剤化合物が、エトキシ化プロパルギルアルコールを含む、請求項1に記載の組成物。
- pHが1.5~7である、請求項1に記載の組成物。
- 5~10g/Lのコバルトイオンと、
15~65mg/Lの、プロパルギルアルコール及びエトキシ化プロパルギルアルコールからなる群から選択される前記抑制剤化合物と、
100~1000mg/Lの前記均一性向上剤と、
15~40g/Lの緩衝剤と、
残部の実質的に水とを含む、請求項1に記載の組成物。 - 20ppb未満の銅イオンを含む、請求項1に記載の組成物。
- ナトリウムプロパルギルスルホネート、アセチレンジカルボン酸、アクリル酸、プロピオール酸、及びこれらの混合物からなる群から選択される脱分極化合物を更に含む、請求項1に記載の組成物。
- 半導体ベース構造体上に組成物を用いてコバルト析出物を電気めっきするための方法であって、
前記半導体ベース構造体は、サブミクロンサイズの電気相互接続機構を含むメタライズ基板を含み、前記方法は、
a)前記メタライズ基板を、
前記組成物であって、1~50g/Lを提供するコバルトイオン源、
1~250mg/Lの、プロパルギルアルコール、エトキシ化プロパルギルアルコール、プロポキシ化プロパルギルアルコール、ジエチレングリコールビス(2-プロピニル)エーテル、1,4-ビス(2-ヒドロキシエトキシ)-2-ブチン、2-ブチン-1,4-ジオール、4-ペンチン-1-オール、2-メチル-3-ブチン-2-オール、3-メチル-1-ペンチン-3-オール、3-ブチン-2-オール、及び前述のもののうちの1つ以上の組み合わせからなる群から選択されるアセチレンアルコール化合物又はその誘導体である抑制剤化合物、
5~50g/Lの、ホウ酸を含む緩衝剤、
10~4000mg/Lの、エトキシ化プロポキシ化トリイソプロパノールアミン、エトキシ化プロポキシ化エチレンジアミン、エトキシ化プロポキシ化ジエチレントリアミン、エトキシ化プロポキシ化トリエチレンテトラミン、及び前述のもののうちの1つ以上の組み合わせからなる群から選択される均一性向上剤、及び
残部の実質的に水を含む前記組成物と接触させる工程であって、
前記組成物は、促進剤又は脱分極化合物を含まず、
前記組成物は、1mg/L未満の二価硫黄化合物の濃度を有し、
前記組成物は、ニッケルイオンを含まない、接触させる工程と、
b)前記組成物に電流を供給して、コバルトを前記半導体ベース構造体上に析出させ、ボトムアップ析出によって前記サブミクロンサイズの電気相互接続機構にコバルトをスーパーフィリングする工程であって、
前記コバルト析出物は、前記コバルト析出物中に5,000重量ppm未満のC、O、N、Cl、及びSの全不純物を有する、スーパーフィリングする工程と、
を含む、方法。 - 前記組成物が、コバルトイオン(Co2+)を金属コバルト(Co0)に還元することができる、任意の機能的濃度の還元剤を含まない、請求項9に記載の方法。
- 前記組成物が、銅イオン、ニッケルイオン、及び鉄イオンを含まない、請求項9に記載の方法。
- 前記抑制剤化合物が、エトキシ化プロパルギルアルコールを含む、請求項9に記載の方法。
- 前記組成物が、1.5~7のpHを有する、請求項9に記載の方法。
- 前記組成物が、応力減少剤を更に含み、前記応力減少剤が、10~300ppmの濃度のサッカリンを含む、請求項9に記載の方法。
- コバルトの電着が、水平方向の成長速度よりも大きい垂直方向の成長速度での急速なボトムアップ析出により、前記サブミクロンサイズの電気相互接続機構を、底部から上方に充填する、請求項9に記載の方法。
- 前記サブミクロンサイズの電気相互接続機構を充填する前記コバルト中の内部引張応力が、0~500MPaである、請求項9に記載の方法。
- 前記サブミクロンサイズの電気相互接続機構の入口寸法が50nm未満であり、前記サブミクロンサイズの電気相互接続機構が、3:1超又は4:1超又は4:1~10:1のアスペクト比を有する、請求項9に記載の方法。
- 前記サブミクロンサイズの電気相互接続機構が、15:1超、又は20:1超、又は30:1超、又は10:1~50:1のアスペクト比を有する、請求項17に記載の方法。
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