JP7174555B2 - 基板検査装置、その位置合せ、及び基板検査方法 - Google Patents

基板検査装置、その位置合せ、及び基板検査方法 Download PDF

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JP7174555B2
JP7174555B2 JP2018142472A JP2018142472A JP7174555B2 JP 7174555 B2 JP7174555 B2 JP 7174555B2 JP 2018142472 A JP2018142472 A JP 2018142472A JP 2018142472 A JP2018142472 A JP 2018142472A JP 7174555 B2 JP7174555 B2 JP 7174555B2
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秀雄 西川
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JP2018142472A 2017-08-02 2018-07-30 基板検査装置、その位置合せ、及び基板検査方法 Active JP7174555B2 (ja)

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EP4060263B1 (en) 2019-12-18 2024-02-21 PHC Holdings Corporation Refrigeration device
JP7386725B2 (ja) * 2020-02-25 2023-11-27 株式会社Ｎｓテクノロジーズ 電子部品搬送装置、電子部品検査装置および電子部品搬送装置の状態確認方法

Citations (4)

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Publication number Priority date Publication date Assignee Title
JP2005207912A (ja) 2004-01-23 2005-08-04 Toppan Printing Co Ltd 布線検査方法及び布線検査装置
JP2010169651A (ja) 2008-12-26 2010-08-05 Nidec-Read Corp 基板検査装置及び検査治具
JP2010185784A (ja) 2009-02-12 2010-08-26 Nidec-Read Corp 基板検査装置及びその位置合せ方法
JP2014159978A (ja) 2013-02-19 2014-09-04 Hioki Ee Corp 基板検査装置および補正情報取得方法

Family Cites Families (1)

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JP3313085B2 (ja) * 1998-06-02 2002-08-12 日本電産リード株式会社 基板検査装置及び基板検査装置における基板と検査ヘッドとの相対位置調整方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005207912A (ja) 2004-01-23 2005-08-04 Toppan Printing Co Ltd 布線検査方法及び布線検査装置
JP2010169651A (ja) 2008-12-26 2010-08-05 Nidec-Read Corp 基板検査装置及び検査治具
JP2010185784A (ja) 2009-02-12 2010-08-26 Nidec-Read Corp 基板検査装置及びその位置合せ方法
JP2014159978A (ja) 2013-02-19 2014-09-04 Hioki Ee Corp 基板検査装置および補正情報取得方法

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