JP7154195B2 - 切断装置及び切断品の製造方法 - Google Patents
切断装置及び切断品の製造方法 Download PDFInfo
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- JP7154195B2 JP7154195B2 JP2019137767A JP2019137767A JP7154195B2 JP 7154195 B2 JP7154195 B2 JP 7154195B2 JP 2019137767 A JP2019137767 A JP 2019137767A JP 2019137767 A JP2019137767 A JP 2019137767A JP 7154195 B2 JP7154195 B2 JP 7154195B2
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- 238000005520 cutting process Methods 0.000 title claims description 88
- 238000004519 manufacturing process Methods 0.000 title claims description 17
- 239000004065 semiconductor Substances 0.000 claims description 151
- 238000001035 drying Methods 0.000 claims description 92
- 230000007246 mechanism Effects 0.000 claims description 86
- 239000000758 substrate Substances 0.000 claims description 47
- 238000004140 cleaning Methods 0.000 claims description 46
- 230000007723 transport mechanism Effects 0.000 claims description 30
- 238000000034 method Methods 0.000 claims description 13
- 238000002347 injection Methods 0.000 claims description 9
- 239000007924 injection Substances 0.000 claims description 9
- 238000001694 spray drying Methods 0.000 claims description 3
- 238000005507 spraying Methods 0.000 claims 1
- 238000007689 inspection Methods 0.000 description 54
- 230000003287 optical effect Effects 0.000 description 22
- 239000011347 resin Substances 0.000 description 18
- 229920005989 resin Polymers 0.000 description 18
- 230000032258 transport Effects 0.000 description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 12
- 238000012790 confirmation Methods 0.000 description 10
- 239000007788 liquid Substances 0.000 description 7
- 230000002950 deficient Effects 0.000 description 6
- 238000007789 sealing Methods 0.000 description 5
- 238000000605 extraction Methods 0.000 description 4
- 230000004308 accommodation Effects 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- 239000000498 cooling water Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
- B08B1/12—Brushes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02076—Cleaning after the substrates have been singulated
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67046—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly scrubbing means, e.g. brushes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Dicing (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Description
まず、図1及び図2を用いて、第一実施形態に係る切断装置1の構成、及び切断装置1を用いた切断品の製造方法について説明する。本実施形態においては、例えば、切断装置1による切断対象物として、半導体チップが装着された基板を樹脂封止したパッケージ基板Pを用いる場合の、切断装置1の構成について説明する。
樹脂封止されたパッケージ基板Pを複数の半導体パッケージSに切断する切断装置1であって、
前記パッケージ基板Pを切断する切断機構(スピンドル5)と、
前記切断機構により切断された前記半導体パッケージSを吸着保持し、搬送する搬送機構20と、
前記搬送機構20により搬送された前記半導体パッケージSを洗浄する洗浄機構40と、
前記洗浄機構により洗浄された前記半導体パッケージSを吸引乾燥する吸引乾燥機構50と、
を備えたものである。
樹脂封止されたパッケージ基板Pを複数の半導体パッケージSに切断する切断工程S6と、
前記切断工程S6において切断された前記半導体パッケージSを搬送する搬送工程S12と、
前記搬送工程S12において搬送された前記半導体パッケージSを洗浄する洗浄工程(第二洗浄工程S14)と、
前記洗浄工程において洗浄された前記半導体パッケージSを吸引乾燥する吸引乾燥工程(第二乾燥工程S16)と、
を含むものである。
次に、図9及び図10を用いて、第二実施形態について説明する。
次に、図11及び図12を用いて、第三実施形態について説明する。
前記洗浄機構40により洗浄された前記半導体パッケージSに対して気体を噴射して乾燥する噴射乾燥機構60をさらに具備するものである。
前記吸引乾燥工程(第二乾燥工程S16)の後に、前記洗浄工程(第二洗浄工程S14)において洗浄された前記半導体パッケージSに対して気体を噴射して乾燥する噴射乾燥工程(第三乾燥工程S17)をさらに含むものである。
次に、図14を用いて、第四実施形態について説明する。
5 スピンドル
20 搬送機構
40 洗浄機構
50 吸引乾燥機構
52 吸引プレート
52a 吸引穴
52b 溝部
60 噴射乾燥機構
A 切断モジュール
B 検査モジュール
P パッケージ基板
S 半導体パッケージ
Claims (6)
- 樹脂封止されたパッケージ基板を複数の半導体パッケージに切断する切断装置であって、
前記パッケージ基板を切断する切断機構と、
前記切断機構により切断された前記半導体パッケージを吸着保持し、搬送する搬送機構と、
前記搬送機構により搬送された前記半導体パッケージを洗浄する洗浄機構と、
前記洗浄機構により洗浄された前記半導体パッケージを吸引乾燥する吸引乾燥機構と、
を備え、
前記吸引乾燥機構は、複数の吸引穴を有する吸引プレートを備え、
前記吸引プレートは、前記半導体パッケージと向き合う面において、前記複数の吸引穴を互いに接続するように形成された溝部を有する、
切断装置。 - 前記溝部は、前記半導体パッケージが並ぶ方向に対して傾斜して形成されている、
請求項1に記載の切断装置。 - 前記洗浄機構により洗浄された前記半導体パッケージに対して気体を噴射して乾燥する噴射乾燥機構をさらに具備する、
請求項1又は請求項2に記載の切断装置。 - 樹脂封止されたパッケージ基板を複数の半導体パッケージに切断する切断工程と、
前記切断工程において切断された前記半導体パッケージを搬送する搬送工程と、
前記搬送工程において搬送された前記半導体パッケージを洗浄する洗浄工程と、
前記洗浄工程において洗浄された前記半導体パッケージを吸引乾燥する吸引乾燥工程と、
を含み、
前記吸引乾燥工程では、
複数の吸引穴と、
前記半導体パッケージと向き合う面において、前記複数の吸引穴を互いに接続するように形成された溝部と、
を有する吸引プレートを用いて吸引乾燥が行われる、
切断品の製造方法。 - 前記吸引乾燥工程では、前記半導体パッケージを所定の方向に移動させる、
請求項4に記載の切断品の製造方法。 - 前記吸引乾燥工程の前又は後に、前記洗浄工程において洗浄された前記半導体パッケージに対して気体を噴射して乾燥する噴射乾燥工程をさらに含む、
請求項4又は請求項5に記載の切断品の製造方法。
Priority Applications (4)
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JP2019137767A JP7154195B2 (ja) | 2019-07-26 | 2019-07-26 | 切断装置及び切断品の製造方法 |
TW109111274A TWI737247B (zh) | 2019-07-26 | 2020-04-01 | 切斷裝置及切斷品的製造方法 |
CN202010249986.1A CN112309893B (zh) | 2019-07-26 | 2020-04-01 | 切断装置及切断品的制造方法 |
KR1020200049123A KR102374339B1 (ko) | 2019-07-26 | 2020-04-23 | 절단 장치 및 절단품의 제조 방법 |
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JP2019137767A JP7154195B2 (ja) | 2019-07-26 | 2019-07-26 | 切断装置及び切断品の製造方法 |
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KR (1) | KR102374339B1 (ja) |
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JP2023155541A (ja) * | 2022-04-11 | 2023-10-23 | Towa株式会社 | 切断装置、及び、切断品の製造方法 |
KR102560434B1 (ko) * | 2022-10-14 | 2023-07-27 | 주식회사 옵티멀이노베이션 | 모듈형 pcb 기판 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2002214288A (ja) | 2000-12-20 | 2002-07-31 | Hanmi Co Ltd | 半導体パッケージ装置切断用ハンドラ・システム |
JP2003163180A (ja) | 2001-11-26 | 2003-06-06 | Apic Yamada Corp | ワーク搬送装置及びダイシング装置 |
JP2011181936A (ja) | 2011-03-28 | 2011-09-15 | Renesas Electronics Corp | 半導体装置の製造方法 |
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KR100385876B1 (ko) * | 2000-12-20 | 2003-06-02 | 한미반도체 주식회사 | 반도체 패키지장치 절단용 핸들러 시스템 |
JP4287090B2 (ja) * | 2002-01-15 | 2009-07-01 | Towa株式会社 | 樹脂封止済基板の切断用治具 |
KR100814448B1 (ko) * | 2003-12-12 | 2008-03-17 | 한미반도체 주식회사 | 반도체 패키지 건조시스템 |
KR200468411Y1 (ko) * | 2011-12-16 | 2013-08-09 | 세메스 주식회사 | 반도체 소자들을 건조하기 위한 장치 |
JP2016082195A (ja) * | 2014-10-22 | 2016-05-16 | Towa株式会社 | 切断装置及び切断方法 |
KR102053480B1 (ko) * | 2015-09-14 | 2019-12-06 | 한미반도체 주식회사 | 반도체 패키지 건조장치 및 이를 구비하는 반도체 스트립 절단 시스템 |
JP6785735B2 (ja) * | 2017-09-07 | 2020-11-18 | Towa株式会社 | 切断装置及び半導体パッケージの搬送方法 |
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- 2020-04-01 CN CN202010249986.1A patent/CN112309893B/zh active Active
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JP2002214288A (ja) | 2000-12-20 | 2002-07-31 | Hanmi Co Ltd | 半導体パッケージ装置切断用ハンドラ・システム |
JP2003163180A (ja) | 2001-11-26 | 2003-06-06 | Apic Yamada Corp | ワーク搬送装置及びダイシング装置 |
JP2011181936A (ja) | 2011-03-28 | 2011-09-15 | Renesas Electronics Corp | 半導体装置の製造方法 |
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CN112309893A (zh) | 2021-02-02 |
JP2021022641A (ja) | 2021-02-18 |
KR102374339B1 (ko) | 2022-03-16 |
KR20210012889A (ko) | 2021-02-03 |
TWI737247B (zh) | 2021-08-21 |
TW202105486A (zh) | 2021-02-01 |
CN112309893B (zh) | 2023-11-03 |
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