JP7131901B2 - 運搬方法 - Google Patents
運搬方法 Download PDFInfo
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- JP7131901B2 JP7131901B2 JP2017225973A JP2017225973A JP7131901B2 JP 7131901 B2 JP7131901 B2 JP 7131901B2 JP 2017225973 A JP2017225973 A JP 2017225973A JP 2017225973 A JP2017225973 A JP 2017225973A JP 7131901 B2 JP7131901 B2 JP 7131901B2
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67383—Closed carriers characterised by substrate supports
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
- B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/284—Interference filters of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67359—Closed carriers specially adapted for containing masks, reticles or pellicles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67376—Closed carriers characterised by sealing arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Mechanical Engineering (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Spectrometry And Color Measurement (AREA)
- Micromachines (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Optical Filters (AREA)
- Control And Other Processes For Unpacking Of Materials (AREA)
Description
[ファブリペロー干渉フィルタ及びダミーフィルタの構成]
[ウェハの構成]
[運搬方法の一実施形態]
Claims (4)
- 複数のファブリペロー干渉フィルタを含む対象物を運搬するための運搬方法であって、
前記対象物を収容容器に収容する第1工程を備え、
前記ファブリペロー干渉フィルタは、基板と、前記基板上に設けられ、空隙を介して互いに対向すると共に互いの距離が可変とされた第1ミラー部及び第2ミラー部と、を有し、
前記対象物は、前記複数のファブリペロー干渉フィルタが形成されたウェハであり、
前記ウェハは、前記基板に対して前記第1ミラー部及び前記第2ミラー部側の第1表面と、前記第1表面とは反対側の第2表面と、を含むと共に、前記複数のファブリペロー干渉フィルタを含む有効エリアと、有効エリアを囲む外縁と、を含み、
前記収容容器の内面には、前記外縁において前記対象物を挟持する挟持部が設けられ、
前記第1工程においては、前記ウェハとして前記複数のファブリペロー干渉フィルタが二次元状に配列された状態において前記対象物を前記収容容器に収容して支持し、
前記第1工程においては、前記挟持部により前記外縁を挟持することにより前記対象物を前記収容容器内に支持する、
運搬方法。 - 前記ウェハには、前記複数のファブリペロー干渉フィルタを含む前記有効エリアと、前記有効エリアを囲むように設けられて前記外縁を形成するダミーエリアと、が形成されており、
前記ダミーエリアは、互いに対向する前記第1ミラー部と前記第2ミラー部との間に中間層が設けられた複数のダミーフィルタを含み、
前記収容容器の内面には、前記ダミーエリアにおいて前記対象物を挟持する前記挟持部が設けられており、
前記第1工程においては、前記挟持部により前記ダミーエリアを挟持することにより前記対象物を前記収容容器内に支持する、
請求項1に記載の運搬方法。 - 前記第1工程においては、前記第1表面を下方に向けた状態において、前記挟持部により前記ダミーエリアを上下方向に挟持することにより前記対象物を前記収容容器内に支持する、
請求項2に記載の運搬方法。 - 前記第1工程の後に、前記収容容器を真空パックに収容すると共に、前記真空パックの排気により前記収容容器内を真空引きする第2工程を備える、
請求項1~3のいずれか一項に記載の運搬方法。
Priority Applications (11)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017225973A JP7131901B2 (ja) | 2017-11-24 | 2017-11-24 | 運搬方法 |
PCT/JP2018/041729 WO2019102877A1 (ja) | 2017-11-24 | 2018-11-09 | 運搬方法 |
US16/765,765 US11592332B2 (en) | 2017-11-24 | 2018-11-09 | Transportation method |
KR1020237042570A KR20230170152A (ko) | 2017-11-24 | 2018-11-09 | 운반 방법 |
EP18880251.6A EP3716318A4 (en) | 2017-11-24 | 2018-11-09 | TRANSPORT PROCEDURE |
CN201880075402.4A CN111373521A (zh) | 2017-11-24 | 2018-11-09 | 搬运方法 |
KR1020207016002A KR102613360B1 (ko) | 2017-11-24 | 2018-11-09 | 운반 방법 |
TW107141582A TWI780265B (zh) | 2017-11-24 | 2018-11-22 | 搬運方法 |
JP2022134057A JP7470158B2 (ja) | 2017-11-24 | 2022-08-25 | 運搬方法 |
US18/082,641 US20230122733A1 (en) | 2017-11-24 | 2022-12-16 | Transportation method |
US18/083,074 US20230118479A1 (en) | 2017-11-24 | 2022-12-16 | Transportation method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017225973A JP7131901B2 (ja) | 2017-11-24 | 2017-11-24 | 運搬方法 |
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JP2022134057A Division JP7470158B2 (ja) | 2017-11-24 | 2022-08-25 | 運搬方法 |
Publications (2)
Publication Number | Publication Date |
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JP2019096781A JP2019096781A (ja) | 2019-06-20 |
JP7131901B2 true JP7131901B2 (ja) | 2022-09-06 |
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JP2017225973A Active JP7131901B2 (ja) | 2017-11-24 | 2017-11-24 | 運搬方法 |
JP2022134057A Active JP7470158B2 (ja) | 2017-11-24 | 2022-08-25 | 運搬方法 |
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JP2022134057A Active JP7470158B2 (ja) | 2017-11-24 | 2022-08-25 | 運搬方法 |
Country Status (7)
Country | Link |
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US (3) | US11592332B2 (ja) |
EP (1) | EP3716318A4 (ja) |
JP (2) | JP7131901B2 (ja) |
KR (2) | KR20230170152A (ja) |
CN (1) | CN111373521A (ja) |
TW (1) | TWI780265B (ja) |
WO (1) | WO2019102877A1 (ja) |
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KR20220121297A (ko) * | 2021-02-24 | 2022-09-01 | 삼성디스플레이 주식회사 | 유리판 적재 장치 및 이를 이용한 유리판 강화 방법 |
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WO2019102877A1 (ja) | 2019-05-31 |
TW201926528A (zh) | 2019-07-01 |
KR102613360B1 (ko) | 2023-12-14 |
CN111373521A (zh) | 2020-07-03 |
EP3716318A1 (en) | 2020-09-30 |
EP3716318A4 (en) | 2021-08-25 |
US20230122733A1 (en) | 2023-04-20 |
US11592332B2 (en) | 2023-02-28 |
TWI780265B (zh) | 2022-10-11 |
JP7470158B2 (ja) | 2024-04-17 |
JP2022179478A (ja) | 2022-12-02 |
KR20200091875A (ko) | 2020-07-31 |
US20200292386A1 (en) | 2020-09-17 |
US20230118479A1 (en) | 2023-04-20 |
KR20230170152A (ko) | 2023-12-18 |
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