JP7057584B2 - 弁ロッドに対する弁板の取付構造 - Google Patents

弁ロッドに対する弁板の取付構造 Download PDF

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Publication number
JP7057584B2
JP7057584B2 JP2018002203A JP2018002203A JP7057584B2 JP 7057584 B2 JP7057584 B2 JP 7057584B2 JP 2018002203 A JP2018002203 A JP 2018002203A JP 2018002203 A JP2018002203 A JP 2018002203A JP 7057584 B2 JP7057584 B2 JP 7057584B2
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JP
Japan
Prior art keywords
valve
hole
rod
mounting
valve plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2018002203A
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English (en)
Japanese (ja)
Other versions
JP2019120380A (ja
JP2019120380A5 (enExample
Inventor
洋己 下田
格 長尾
健 越智
浩司 小川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SMC Corp
Original Assignee
SMC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SMC Corp filed Critical SMC Corp
Priority to JP2018002203A priority Critical patent/JP7057584B2/ja
Priority to EP18211845.5A priority patent/EP3511600A1/en
Priority to EP24170192.9A priority patent/EP4379243B1/en
Priority to TW107145424A priority patent/TWI791714B/zh
Priority to KR1020190002555A priority patent/KR102601415B1/ko
Priority to US16/243,112 priority patent/US10876639B2/en
Priority to CN201910021294.9A priority patent/CN110017384B/zh
Publication of JP2019120380A publication Critical patent/JP2019120380A/ja
Publication of JP2019120380A5 publication Critical patent/JP2019120380A5/ja
Application granted granted Critical
Publication of JP7057584B2 publication Critical patent/JP7057584B2/ja
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Anticipated expiration legal-status Critical

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/48—Attaching valve members to screw-spindles
    • F16K1/487—Attaching valve members to screw-spindles by a fixing element extending in the axial direction of the spindle, e.g. a screw
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0281—Guillotine or blade-type valves, e.g. no passage through the valve member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
  • Check Valves (AREA)
  • Compressor (AREA)
  • Snaps, Bayonet Connections, Set Pins, And Snap Rings (AREA)
JP2018002203A 2018-01-10 2018-01-10 弁ロッドに対する弁板の取付構造 Active JP7057584B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2018002203A JP7057584B2 (ja) 2018-01-10 2018-01-10 弁ロッドに対する弁板の取付構造
EP18211845.5A EP3511600A1 (en) 2018-01-10 2018-12-12 Mounting structure of valve plate with respect to valve rod
EP24170192.9A EP4379243B1 (en) 2018-01-10 2018-12-12 Mounting structure of valve plate with respect to valve rod
TW107145424A TWI791714B (zh) 2018-01-10 2018-12-17 閥板對閥桿的安裝構造
KR1020190002555A KR102601415B1 (ko) 2018-01-10 2019-01-09 밸브 로드에 대한 밸브판의 장착 구조
US16/243,112 US10876639B2 (en) 2018-01-10 2019-01-09 Mounting structure of valve plate with respect to valve rod
CN201910021294.9A CN110017384B (zh) 2018-01-10 2019-01-10 阀板相对于阀杆的安装构造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018002203A JP7057584B2 (ja) 2018-01-10 2018-01-10 弁ロッドに対する弁板の取付構造

Publications (3)

Publication Number Publication Date
JP2019120380A JP2019120380A (ja) 2019-07-22
JP2019120380A5 JP2019120380A5 (enExample) 2021-02-04
JP7057584B2 true JP7057584B2 (ja) 2022-04-20

Family

ID=64664972

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018002203A Active JP7057584B2 (ja) 2018-01-10 2018-01-10 弁ロッドに対する弁板の取付構造

Country Status (6)

Country Link
US (1) US10876639B2 (enExample)
EP (2) EP4379243B1 (enExample)
JP (1) JP7057584B2 (enExample)
KR (1) KR102601415B1 (enExample)
CN (1) CN110017384B (enExample)
TW (1) TWI791714B (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7385185B2 (ja) * 2019-06-19 2023-11-22 Smc株式会社 ゲート弁における弁ロッドに対する弁板の取付構造、及びその取付構造を有するゲート弁
DE102020109920A1 (de) * 2020-04-08 2021-10-14 Westnetz Gmbh Absperrschieber, Gestänge für einen Absperrschieber und Verfahren zum Entlüften eines Absperrschiebers
JP7479586B2 (ja) * 2020-06-16 2024-05-09 Smc株式会社 ゲートバルブ
JP7474924B2 (ja) 2020-07-03 2024-04-26 中国電力株式会社 仕切弁、仕切弁用補助具および仕切弁改修方法
US12125688B2 (en) * 2020-11-20 2024-10-22 Applied Materials, Inc. L-motion slit door for substrate processing chamber
DE102021102283A1 (de) 2021-02-01 2022-08-04 Vat Holding Ag Verschlussvorrichtung zum vakuumdichten Verschließen einer Öffnung in einer Wand
DE102021102284A1 (de) 2021-02-01 2022-08-04 Vat Holding Ag Ventilplatte für eine Verschlusseinrichtung zum vakuumdichten Verschließen einer Öffnung in einer Wand
JP7636714B2 (ja) * 2021-04-20 2025-02-27 Smc株式会社 ゲートバルブ
KR20240056878A (ko) * 2022-10-21 2024-05-02 주식회사 원익아이피에스 게이트 밸브 어셈블리 및 이를 포함하는 기판 처리 시스템
US12292131B2 (en) * 2023-05-17 2025-05-06 Lasalle Bristol Corporation Gate valve and valve actuator
CN118728985A (zh) * 2024-06-21 2024-10-01 浙江先导精密机械有限公司 一种半导体真空传输阀结构及加工方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5158264A (en) 1991-02-22 1992-10-27 Baroid Technology, Inc. Parallel expanding gate valve
JP2005291221A (ja) 2004-03-31 2005-10-20 Vat Holding Ag 真空ゲートバルブ、バルブ板および多機能工具
JP2012225468A (ja) 2011-04-21 2012-11-15 Smc Corp ゲートバルブ
US20160238154A1 (en) 2015-02-12 2016-08-18 Fisher Controls International Llc Valve stem and plug connections and staking tools

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58196483U (ja) * 1982-06-24 1983-12-27 中川　進 小型電磁弁ユニツト
JP3771797B2 (ja) * 2000-12-27 2006-04-26 Ｓｍｃ株式会社 ゲートバルブ
DE102008061315B4 (de) * 2008-12-11 2012-11-15 Vat Holding Ag Aufhängung einer Ventilplatte an einer Ventilstange
JP5664846B2 (ja) * 2010-05-25 2015-02-04 Smc株式会社 真空用バルブ
JP5533839B2 (ja) * 2011-11-04 2014-06-25 Ｓｍｃ株式会社 無摺動型ゲートバルブ
JP6485689B2 (ja) * 2015-02-12 2019-03-20 Smc株式会社 ゲートバルブ
CN206438198U (zh) * 2016-12-19 2017-08-25 包头市山晟新能源有限责任公司 单晶炉籽晶夹头和具有其的籽晶夹头机构

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5158264A (en) 1991-02-22 1992-10-27 Baroid Technology, Inc. Parallel expanding gate valve
JP2005291221A (ja) 2004-03-31 2005-10-20 Vat Holding Ag 真空ゲートバルブ、バルブ板および多機能工具
JP2012225468A (ja) 2011-04-21 2012-11-15 Smc Corp ゲートバルブ
US20160238154A1 (en) 2015-02-12 2016-08-18 Fisher Controls International Llc Valve stem and plug connections and staking tools

Also Published As

Publication number Publication date
TWI791714B (zh) 2023-02-11
JP2019120380A (ja) 2019-07-22
KR102601415B1 (ko) 2023-11-13
EP4379243A3 (en) 2024-08-14
KR20190085488A (ko) 2019-07-18
US20190211936A1 (en) 2019-07-11
CN110017384A (zh) 2019-07-16
TW201938936A (zh) 2019-10-01
EP4379243A2 (en) 2024-06-05
CN110017384B (zh) 2023-03-28
US10876639B2 (en) 2020-12-29
EP3511600A1 (en) 2019-07-17
EP4379243B1 (en) 2025-09-03

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