JP7042261B2 - 縦型トランジスタを有するデバイス・レイアウトのための方法およびコンピュータ可読プログラムならびに半導体デバイス - Google Patents
縦型トランジスタを有するデバイス・レイアウトのための方法およびコンピュータ可読プログラムならびに半導体デバイス Download PDFInfo
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Description
Claims (15)
- 縦型トランジスタを有するデバイス・レイアウトのための方法であって、
縦型トランジスタを有する半導体デバイスのレイアウトにおける活性エリア領域を識別することと、
識別した前記活性エリア領域から同じ電位を有する隣接活性エリア領域の複数のセットを決定することと、
決定した前記セットの隣接活性エリア領域の接点の抵抗を下げる性能基準に基づいて、マージされることになる隣接活性エリア領域の前記セットが供給電位または接地電位に関係するかを指定することと、
前記供給電位または接地電位に関係するかの指定に応じて、さらに大きい活性エリア領域を形成するために、指定した前記セットの隣接活性エリア領域をマージすることと
を含み、
前記レイアウト内の活性エリア領域に隣接した、誘電材料が充填の充填領域または誘電材料が非充填の非充填領域を識別することと、
前記さらに大きい活性エリア領域を形成するために前記充填領域または前記非充填領域を、指定した前記セットの隣接活性エリア領域とマージすることと
をさらに含む、
方法。 - 前記同じ電位を有する隣接活性エリア領域の前記セットを決定することが、前記充填領域または前記非充填領域の隣に固定電位または過渡電位を有する隣接活性エリア領域の前記セットを決定することを含む、請求項1に記載の方法。
- 前記同じ電位を有する隣接活性エリア領域の前記セットを決定することが、同じ固定電位を有する隣接活性エリア領域の前記セットを決定することを含む、請求項1に記載の方法。
- 指定した前記セットの隣接活性エリア領域をマージすることが、前記活性エリア領域をマージするために前記活性エリア領域の形状を変更することを含む、請求項1に記載の方法。
- 指定した前記セットの隣接活性エリア領域をマージすることが、ロジック・デバイス間で前記ロジック・デバイスの活性エリア領域をマージすることを含む、請求項1に記載の方法。
- 前記ロジック・デバイスが、NORゲート、インバータ、ANDゲート、ORゲートおよびNANDゲートからなるグループから選択される、請求項5に記載の方法。
- 1つまたは複数のつながった共通バスに前記さらに大きい活性エリア領域を接続することであって、前記つながった共通バスが複数の別々の供給電圧または接地電圧の接点に取って代わる、接続することをさらに含む、請求項1に記載の方法。
- 指定した前記セットの隣接活性エリア領域をマージすることが、前記セットの隣接活性エリア領域間のトレンチ分離領域を減らすことをさらに含む、請求項1に記載の方法。
- 指定した前記セットの隣接活性エリア領域をマージすることが、セル境界を越えて前記セットの隣接活性エリア領域をマージすることを含む、請求項1に記載の方法。
- 縦型トランジスタを有するデバイス・レイアウトのためのコンピュータ可読プログラムを含む非一時的コンピュータ可読ストレージ媒体であって、前記コンピュータ可読プログラムが、コンピュータ上で実行されると、
縦型トランジスタを有する半導体デバイスのレイアウトにおける活性エリア領域を識別することと、
識別した前記活性エリア領域から同じ電位を有する隣接活性エリア領域の複数のセットを決定することと、
決定した前記セットの隣接活性エリア領域の接点の抵抗を下げる性能基準に基づいて、マージされることになる隣接活性エリア領域の前記セットが供給電位または接地電位に関係するかを指定することと、
前記供給電位または接地電位に関係するかの指定に応じて、さらに大きい活性エリア領域を形成するために、指定した前記セットの隣接活性エリア領域をマージすることと、
前記レイアウト内の活性エリア領域に隣接した、誘電材料が充填の充填領域または誘電材料が非充填の非充填領域を識別することと、
前記さらに大きい活性エリア領域を形成するために前記充填領域または前記非充填領域を、指定した前記セットの隣接活性エリア領域とマージすることと
を行うステップを前記コンピュータに行わせる、コンピュータ可読ストレージ媒体。 - 前記同じ電位を有する隣接活性エリア領域の前記セットを決定することが、前記充填領域または前記非充填領域の隣に固定電位または過渡電位を有する隣接活性エリア領域の前記セットを決定することを含む、請求項10に記載のコンピュータ可読ストレージ媒体。
- 前記同じ電位を有する隣接活性エリア領域の前記セットを決定することが、同じ固定電位を有する隣接活性エリア領域の前記セットを決定することを含む、請求項10に記載のコンピュータ可読ストレージ媒体。
- 指定した前記セットの隣接活性エリア領域をマージすることが、NORゲート、インバータ、ANDゲート、ORゲートおよびNANDゲートからなるグループから選択されるロジック・デバイス間で前記ロジック・デバイスの活性エリア領域をマージすることを含む、請求項10に記載のコンピュータ可読ストレージ媒体。
- 1つまたは複数のつながった共通バスに前記さらに大きい活性エリア領域を接続することであって、前記つながった共通バスが複数の別々の供給電圧または接地電圧の接点に取って代わる、接続することと、
前記セットの隣接活性エリア領域間のトレンチ分離領域を減らすことと
をさらに含む、請求項10に記載のコンピュータ可読ストレージ媒体。 - 指定した前記セットの隣接活性エリア領域をマージすることが、セル境界を越えて前記セットの隣接活性エリア領域をマージすることを含む、請求項10に記載のコンピュータ可読ストレージ媒体。
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