JP7025683B2 - 光源装置 - Google Patents

光源装置 Download PDF

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Publication number
JP7025683B2
JP7025683B2 JP2017113552A JP2017113552A JP7025683B2 JP 7025683 B2 JP7025683 B2 JP 7025683B2 JP 2017113552 A JP2017113552 A JP 2017113552A JP 2017113552 A JP2017113552 A JP 2017113552A JP 7025683 B2 JP7025683 B2 JP 7025683B2
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JP
Japan
Prior art keywords
optical system
light
light source
led element
incident surface
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JP2017113552A
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English (en)
Japanese (ja)
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JP2018205635A (ja
Inventor
竹夫 松島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
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Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Priority to JP2017113552A priority Critical patent/JP7025683B2/ja
Priority to TW107117149A priority patent/TWI718376B/zh
Priority to PCT/JP2018/021675 priority patent/WO2018225774A1/ja
Publication of JP2018205635A publication Critical patent/JP2018205635A/ja
Application granted granted Critical
Publication of JP7025683B2 publication Critical patent/JP7025683B2/ja
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21S—NON-PORTABLE LIGHTING DEVICES; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLE EXTERIORS
    • F21S2/00—Systems of lighting devices, not provided for in main groups F21S4/00 - F21S10/00 or F21S19/00, e.g. of modular construction
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Projection Apparatus (AREA)
  • Led Device Packages (AREA)
JP2017113552A 2017-06-08 2017-06-08 光源装置 Active JP7025683B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2017113552A JP7025683B2 (ja) 2017-06-08 2017-06-08 光源装置
TW107117149A TWI718376B (zh) 2017-06-08 2018-05-21 光源裝置
PCT/JP2018/021675 WO2018225774A1 (ja) 2017-06-08 2018-06-06 光源装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017113552A JP7025683B2 (ja) 2017-06-08 2017-06-08 光源装置

Publications (2)

Publication Number Publication Date
JP2018205635A JP2018205635A (ja) 2018-12-27
JP7025683B2 true JP7025683B2 (ja) 2022-02-25

Family

ID=64565878

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017113552A Active JP7025683B2 (ja) 2017-06-08 2017-06-08 光源装置

Country Status (3)

Country Link
JP (1) JP7025683B2 (zh)
TW (1) TWI718376B (zh)
WO (1) WO2018225774A1 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6709405B1 (ja) * 2019-07-03 2020-06-17 フェニックス電機株式会社 光源装置、およびそれを備える照明装置
WO2024038533A1 (ja) * 2022-08-18 2024-02-22 株式会社ニコン 光源ユニット、照明ユニット、露光装置、及び露光方法
JP2024094490A (ja) * 2022-12-28 2024-07-10 ウシオ電機株式会社 光源装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004039871A (ja) 2002-07-03 2004-02-05 Hitachi Ltd 照明方法並びに露光方法及びその装置
JP2006133635A (ja) 2004-11-09 2006-05-25 Olympus Corp 照明光学装置及び光学装置
JP2016075799A (ja) 2014-10-07 2016-05-12 株式会社リコー 光源装置及びこれを備えた画像投射装置
JP2016184126A (ja) 2015-03-26 2016-10-20 ウシオ電機株式会社 光源装置、露光装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4389543B2 (ja) * 2003-10-08 2009-12-24 セイコーエプソン株式会社 プロジェクタ
DE112005003207B4 (de) * 2004-12-22 2014-10-16 Carl Zeiss Laser Optics Gmbh Optisches Beleuchtungssystem zum Erzeugen eines Linienstrahls
JP4678493B2 (ja) * 2005-05-23 2011-04-27 株式会社ニコン 光源ユニット、照明光学装置、露光装置、および露光方法
US7683300B2 (en) * 2006-10-17 2010-03-23 Asml Netherlands B.V. Using an interferometer as a high speed variable attenuator
JP5429475B2 (ja) * 2009-11-17 2014-02-26 セイコーエプソン株式会社 照明装置およびプロジェクター
JP5962089B2 (ja) * 2012-03-15 2016-08-03 岩崎電気株式会社 光照射装置
JP2014002212A (ja) * 2012-06-15 2014-01-09 Ushio Inc 光照射装置、露光装置
JP2014003086A (ja) * 2012-06-15 2014-01-09 Ushio Inc 光照射装置、露光装置
JP6057072B2 (ja) * 2013-03-22 2017-01-11 ウシオ電機株式会社 光源装置
JP6199591B2 (ja) * 2013-04-12 2017-09-20 株式会社オーク製作所 光源装置および露光装置
TWI620889B (zh) * 2013-04-15 2018-04-11 Hoya Candeo Optronics Corp Light irradiation device
JP6464865B2 (ja) * 2015-03-25 2019-02-06 富士通株式会社 センサシステム、センサ装置、及び情報処理方法
TWI592609B (zh) * 2015-12-30 2017-07-21 中強光電股份有限公司 照明系統以及投影裝置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004039871A (ja) 2002-07-03 2004-02-05 Hitachi Ltd 照明方法並びに露光方法及びその装置
JP2006133635A (ja) 2004-11-09 2006-05-25 Olympus Corp 照明光学装置及び光学装置
JP2016075799A (ja) 2014-10-07 2016-05-12 株式会社リコー 光源装置及びこれを備えた画像投射装置
JP2016184126A (ja) 2015-03-26 2016-10-20 ウシオ電機株式会社 光源装置、露光装置

Also Published As

Publication number Publication date
TW201903318A (zh) 2019-01-16
JP2018205635A (ja) 2018-12-27
WO2018225774A1 (ja) 2018-12-13
TWI718376B (zh) 2021-02-11

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