JP7024700B2 - 石英ガラスルツボ - Google Patents

石英ガラスルツボ Download PDF

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Publication number
JP7024700B2
JP7024700B2 JP2018237641A JP2018237641A JP7024700B2 JP 7024700 B2 JP7024700 B2 JP 7024700B2 JP 2018237641 A JP2018237641 A JP 2018237641A JP 2018237641 A JP2018237641 A JP 2018237641A JP 7024700 B2 JP7024700 B2 JP 7024700B2
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natural
crucible
bubble
transparent layer
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Japanese (ja)
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JP2020100515A5 (https=
JP2020100515A (ja
Inventor
年幸 中尾
江梨子 北原
弘史 岸
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Sumco Corp
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Sumco Corp
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Priority to JP2018237641A priority Critical patent/JP7024700B2/ja
Priority to KR1020190169722A priority patent/KR102342039B1/ko
Priority to CN201911316941.5A priority patent/CN111334852B/zh
Publication of JP2020100515A publication Critical patent/JP2020100515A/ja
Publication of JP2020100515A5 publication Critical patent/JP2020100515A5/ja
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    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Glass Melting And Manufacturing (AREA)
JP2018237641A 2018-12-19 2018-12-19 石英ガラスルツボ Active JP7024700B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2018237641A JP7024700B2 (ja) 2018-12-19 2018-12-19 石英ガラスルツボ
KR1020190169722A KR102342039B1 (ko) 2018-12-19 2019-12-18 석영 유리 도가니
CN201911316941.5A CN111334852B (zh) 2018-12-19 2019-12-19 石英玻璃坩埚

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018237641A JP7024700B2 (ja) 2018-12-19 2018-12-19 石英ガラスルツボ

Publications (3)

Publication Number Publication Date
JP2020100515A JP2020100515A (ja) 2020-07-02
JP2020100515A5 JP2020100515A5 (https=) 2021-03-18
JP7024700B2 true JP7024700B2 (ja) 2022-02-24

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ID=71140984

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018237641A Active JP7024700B2 (ja) 2018-12-19 2018-12-19 石英ガラスルツボ

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JP (1) JP7024700B2 (https=)
KR (1) KR102342039B1 (https=)
CN (1) CN111334852B (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111996589A (zh) * 2020-08-31 2020-11-27 宁夏富乐德石英材料有限公司 抑制引晶硅液面抖动的石英坩埚及其制备方法
US11987900B2 (en) * 2020-11-11 2024-05-21 Globalwafers Co., Ltd. Methods for forming a silicon substrate with reduced grown-in nuclei for epitaxial defects and methods for forming an epitaxial wafer
JP7673758B2 (ja) * 2020-12-18 2025-05-09 株式会社Sumco 石英ガラスルツボ及びその製造方法並びにシリコン単結晶の製造方法
US20250270732A1 (en) * 2022-04-18 2025-08-28 Shin-Etsu Quartz Products Co., Ltd. Quartz glass crucible for pulling single crystal silicon ingot
CN116924661A (zh) * 2023-07-28 2023-10-24 新沂市中大石英科技有限公司 一种使用人工水晶石英砂生产高纯石英玻璃坩埚的方法
CN120309155B (zh) * 2025-06-16 2025-10-10 浙江美晶新材料股份有限公司 一种石英坩埚及其制备方法与应用

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005206446A (ja) 2004-07-16 2005-08-04 Shinetsu Quartz Prod Co Ltd シリコン単結晶引上げ用石英ガラスるつぼおよびその製造方法
JP2005343774A (ja) 2004-06-07 2005-12-15 Shinetsu Quartz Prod Co Ltd シリコン単結晶引上げ用石英ガラスルツボ及びその製造方法
JP2008201660A (ja) 2006-03-30 2008-09-04 Covalent Materials Corp シリカガラスルツボ
JP2008239415A (ja) 2007-03-28 2008-10-09 Covalent Materials Corp シリコン単結晶引上用シリカガラスルツボ
JP2010143818A (ja) 2008-12-19 2010-07-01 Heraeus Shin-Etsu America Inc 純粋且つ無気泡のるつぼ内層を有するシリカるつぼ及びその製造方法
WO2011013695A1 (ja) 2009-07-31 2011-02-03 ジャパンスーパークォーツ株式会社 シリコン単結晶引き上げ用シリカガラスルツボ

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3026088B2 (ja) * 1989-08-30 2000-03-27 三菱マテリアル株式会社 シリコン単結晶引上げ用石英ルツボ
JPH05252157A (ja) 1992-03-06 1993-09-28 Matsushita Electric Ind Co Ltd 呼制御装置
JP3136533B2 (ja) 1995-04-28 2001-02-19 三菱マテリアルクォーツ株式会社 シリコン単結晶引上げ用石英ルツボ
JP4447738B2 (ja) 2000-05-31 2010-04-07 信越石英株式会社 多層構造の石英ガラスルツボの製造方法
KR100718314B1 (ko) * 2003-05-01 2007-05-15 신에쯔 세끼에이 가부시키가이샤 실리콘 단결정 인상용 석영유리 도가니 및 그 제조방법
JP5685894B2 (ja) * 2010-11-05 2015-03-18 信越半導体株式会社 石英ガラスルツボ及びその製造方法、並びにシリコン単結晶の製造方法
JP5500689B2 (ja) * 2010-12-03 2014-05-21 株式会社Ｓｕｍｃｏ シリカガラスルツボ
KR101293526B1 (ko) * 2011-01-28 2013-08-06 쟈판 스파 쿼츠 가부시키가이샤 실리콘 단결정 인상용 석영 유리 도가니 및 그의 제조 방법
JP6351534B2 (ja) 2015-04-01 2018-07-04 クアーズテック株式会社 シリコン単結晶引き上げ用石英ガラスルツボ
CN204918839U (zh) * 2015-09-11 2015-12-30 江西中昱新材料科技有限公司 一种石英坩埚
CN108531978B (zh) * 2018-04-09 2021-01-01 江阴龙源石英制品有限公司 一种大规模集成电路用5层复合石英坩埚及其制备方法和表面处理方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005343774A (ja) 2004-06-07 2005-12-15 Shinetsu Quartz Prod Co Ltd シリコン単結晶引上げ用石英ガラスルツボ及びその製造方法
JP2005206446A (ja) 2004-07-16 2005-08-04 Shinetsu Quartz Prod Co Ltd シリコン単結晶引上げ用石英ガラスるつぼおよびその製造方法
JP2008201660A (ja) 2006-03-30 2008-09-04 Covalent Materials Corp シリカガラスルツボ
JP2008239415A (ja) 2007-03-28 2008-10-09 Covalent Materials Corp シリコン単結晶引上用シリカガラスルツボ
JP2010143818A (ja) 2008-12-19 2010-07-01 Heraeus Shin-Etsu America Inc 純粋且つ無気泡のるつぼ内層を有するシリカるつぼ及びその製造方法
WO2011013695A1 (ja) 2009-07-31 2011-02-03 ジャパンスーパークォーツ株式会社 シリコン単結晶引き上げ用シリカガラスルツボ

Also Published As

Publication number Publication date
KR102342039B1 (ko) 2021-12-22
CN111334852A (zh) 2020-06-26
KR20200076636A (ko) 2020-06-29
CN111334852B (zh) 2022-03-04
JP2020100515A (ja) 2020-07-02

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