JP6987045B2 - エンコーダ装置 - Google Patents

エンコーダ装置 Download PDF

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Publication number
JP6987045B2
JP6987045B2 JP2018512563A JP2018512563A JP6987045B2 JP 6987045 B2 JP6987045 B2 JP 6987045B2 JP 2018512563 A JP2018512563 A JP 2018512563A JP 2018512563 A JP2018512563 A JP 2018512563A JP 6987045 B2 JP6987045 B2 JP 6987045B2
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Prior art keywords
sensor
encoder device
scale
weighting
signal
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Japanese (ja)
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JP2018530751A (ja
JP2018530751A5 (enExample
Inventor
スラック ジェイソン
ジェームズ ベイル リチャード
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Renishaw PLC
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Renishaw PLC
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices
    • G01D5/34723—Scale reading or illumination devices involving light-guides
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24428—Error prevention
    • G01D5/24433—Error prevention by mechanical means
    • G01D5/24438—Special design of the sensing element or scale
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24471—Error correction
    • G01D5/2448—Correction of gain, threshold, offset or phase control
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
JP2018512563A 2015-09-09 2016-09-08 エンコーダ装置 Active JP6987045B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP15184459.4 2015-09-09
EP15184459 2015-09-09
PCT/GB2016/052781 WO2017042570A1 (en) 2015-09-09 2016-09-08 Encoder apparatus

Publications (3)

Publication Number Publication Date
JP2018530751A JP2018530751A (ja) 2018-10-18
JP2018530751A5 JP2018530751A5 (enExample) 2020-03-19
JP6987045B2 true JP6987045B2 (ja) 2021-12-22

Family

ID=54072747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018512563A Active JP6987045B2 (ja) 2015-09-09 2016-09-08 エンコーダ装置

Country Status (7)

Country Link
US (1) US10670431B2 (enExample)
EP (1) EP3347681B1 (enExample)
JP (1) JP6987045B2 (enExample)
KR (1) KR102697708B1 (enExample)
CN (1) CN108351229B (enExample)
ES (1) ES2830777T3 (enExample)
WO (1) WO2017042570A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020046223A (ja) * 2018-09-14 2020-03-26 キヤノン株式会社 位置検出装置、リソグラフィ装置、力覚センサ及び力覚センサを有する装置

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10274344B2 (en) * 2016-12-27 2019-04-30 Mitutoyo Corporation Displacement encoder
CN108390698B (zh) * 2018-03-16 2021-08-10 贵州电网有限责任公司 一种基于插值fft算法的电力线载波参数测量方法
EP3623769A1 (en) * 2018-09-12 2020-03-18 Renishaw PLC Measurement device
EP3663723A1 (en) * 2018-12-04 2020-06-10 Renishaw PLC Encoder apparatus
CN113074619B (zh) * 2021-03-18 2022-11-25 浙江禾川科技股份有限公司 传感器安装位置确定方法、装置、设备及存储介质
US20240369385A1 (en) 2021-08-12 2024-11-07 Renishaw Plc Position encoder apparatus
EP4134633A1 (en) 2021-08-12 2023-02-15 Renishaw PLC Position encoder apparatus
WO2024134155A1 (en) 2022-12-20 2024-06-27 Renishaw Plc Encoder apparatus
EP4390325A1 (en) 2022-12-20 2024-06-26 Renishaw PLC Encoder apparatus
EP4390328A1 (en) 2022-12-21 2024-06-26 Renishaw plc Encoder apparatus
CN115931015B (zh) * 2023-01-16 2025-08-12 传周半导体科技(上海)有限公司 一种光学编码器的像素单元设计方法
EP4435385A1 (en) * 2023-03-20 2024-09-25 Renishaw PLC Position encoder apparatus
DE102023208964A1 (de) * 2023-09-15 2025-03-20 Dr. Johannes Heidenhain Gmbh Positionsmesssystem

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GB1227941A (enExample) 1967-03-16 1971-04-15
DE1921507C2 (de) 1969-04-26 1971-02-11 Zeiss Carl Fa Einrichtung zur Erzeugung phasenverschobener elektrischer Signale
DE1941731C2 (de) 1969-08-16 1973-11-15 Fa. Carl Zeiss, 7920 Heidenheim Einrichtung zur Messung von Lageande rungen zweier relativ zueinander bewegli eher Teile
DE3239108A1 (de) 1982-10-22 1984-04-26 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Positionsmessverfahren und einrichtungen zur durchfuehrung des verfahrens
DE3616144A1 (de) 1986-05-14 1987-11-19 Heidenhain Gmbh Dr Johannes Fotoelektrische messeinrichtung
EP0271549B1 (en) 1986-06-21 1991-06-05 Renishaw plc Interpolation apparatus
GB9424969D0 (en) 1994-12-10 1995-02-08 Renishaw Plc Opto-electronic scale reading apparatus
US5708756A (en) 1995-02-24 1998-01-13 Industrial Technology Research Institute Low delay, middle bit rate speech coder
WO2003021197A1 (en) * 2001-08-30 2003-03-13 Microe Systems Corporation Harmonic suppressing photodetector array
WO2003021194A2 (en) * 2001-08-30 2003-03-13 Microe Systems Corporation Reference point talbot encoder
US7394061B2 (en) * 2005-08-31 2008-07-01 Avago Technologies Ecbu Pte Ltd Optical encoder with integrated index channel
JP2008014806A (ja) 2006-07-06 2008-01-24 Sharp Corp 光電式エンコーダおよびそれを用いた変位検出装置
GB0621487D0 (en) 2006-10-28 2006-12-06 Renishaw Plc Opto-electronic read head
GB0903550D0 (en) 2009-03-02 2009-04-08 Rls Merilna Tehnika D O O Position encoder apparatus
GB0903535D0 (en) * 2009-03-02 2009-04-08 Rls Merilna Tehnika D O O Encoder readhead
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JP5616741B2 (ja) 2010-10-08 2014-10-29 株式会社ミツトヨ エンコーダ
US8525102B2 (en) * 2011-02-15 2013-09-03 Avago Technologies General Ip (Singapore) Pte. Ltd. Optical encoding system and optical encoder having an array of incremental photodiodes and an index photodiode for use in an optical encoding system
JP5755010B2 (ja) 2011-04-14 2015-07-29 キヤノン株式会社 エンコーダ
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JP7032045B2 (ja) 2013-10-01 2022-03-08 レニショウ パブリック リミテッド カンパニー 測定エンコーダ
JP5877212B2 (ja) 2014-01-10 2016-03-02 キヤノンプレシジョン株式会社 エンコーダ、エンコーダを用いた装置およびエンコーダ演算プログラム

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020046223A (ja) * 2018-09-14 2020-03-26 キヤノン株式会社 位置検出装置、リソグラフィ装置、力覚センサ及び力覚センサを有する装置
JP7148337B2 (ja) 2018-09-14 2022-10-05 キヤノン株式会社 位置検出装置、リソグラフィ装置、力覚センサ及び力覚センサを有する装置

Also Published As

Publication number Publication date
JP2018530751A (ja) 2018-10-18
EP3347681B1 (en) 2020-09-02
CN108351229B (zh) 2021-03-26
CN108351229A (zh) 2018-07-31
KR20180052676A (ko) 2018-05-18
EP3347681A1 (en) 2018-07-18
WO2017042570A1 (en) 2017-03-16
ES2830777T3 (es) 2021-06-04
KR102697708B1 (ko) 2024-08-21
US10670431B2 (en) 2020-06-02
US20180216972A1 (en) 2018-08-02

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