CN108351229B - 编码器装置 - Google Patents

编码器装置 Download PDF

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Publication number
CN108351229B
CN108351229B CN201680065370.0A CN201680065370A CN108351229B CN 108351229 B CN108351229 B CN 108351229B CN 201680065370 A CN201680065370 A CN 201680065370A CN 108351229 B CN108351229 B CN 108351229B
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China
Prior art keywords
sensor
scale
readhead
encoder
encoder apparatus
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CN201680065370.0A
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English (en)
Chinese (zh)
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CN108351229A (zh
Inventor
贾森·斯拉克
理查德·詹姆斯·贝尔
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Renishaw PLC
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Renishaw PLC
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices
    • G01D5/34723—Scale reading or illumination devices involving light-guides
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24428—Error prevention
    • G01D5/24433—Error prevention by mechanical means
    • G01D5/24438—Special design of the sensing element or scale
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24471—Error correction
    • G01D5/2448—Correction of gain, threshold, offset or phase control
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
CN201680065370.0A 2015-09-09 2016-09-08 编码器装置 Active CN108351229B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP15184459.4 2015-09-09
EP15184459 2015-09-09
PCT/GB2016/052781 WO2017042570A1 (en) 2015-09-09 2016-09-08 Encoder apparatus

Publications (2)

Publication Number Publication Date
CN108351229A CN108351229A (zh) 2018-07-31
CN108351229B true CN108351229B (zh) 2021-03-26

Family

ID=54072747

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201680065370.0A Active CN108351229B (zh) 2015-09-09 2016-09-08 编码器装置

Country Status (7)

Country Link
US (1) US10670431B2 (enExample)
EP (1) EP3347681B1 (enExample)
JP (1) JP6987045B2 (enExample)
KR (1) KR102697708B1 (enExample)
CN (1) CN108351229B (enExample)
ES (1) ES2830777T3 (enExample)
WO (1) WO2017042570A1 (enExample)

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US10274344B2 (en) * 2016-12-27 2019-04-30 Mitutoyo Corporation Displacement encoder
CN108390698B (zh) * 2018-03-16 2021-08-10 贵州电网有限责任公司 一种基于插值fft算法的电力线载波参数测量方法
EP3623769A1 (en) * 2018-09-12 2020-03-18 Renishaw PLC Measurement device
JP7148337B2 (ja) * 2018-09-14 2022-10-05 キヤノン株式会社 位置検出装置、リソグラフィ装置、力覚センサ及び力覚センサを有する装置
EP3663723A1 (en) * 2018-12-04 2020-06-10 Renishaw PLC Encoder apparatus
CN113074619B (zh) * 2021-03-18 2022-11-25 浙江禾川科技股份有限公司 传感器安装位置确定方法、装置、设备及存储介质
US20240369385A1 (en) 2021-08-12 2024-11-07 Renishaw Plc Position encoder apparatus
EP4134633A1 (en) 2021-08-12 2023-02-15 Renishaw PLC Position encoder apparatus
WO2024134155A1 (en) 2022-12-20 2024-06-27 Renishaw Plc Encoder apparatus
EP4390325A1 (en) 2022-12-20 2024-06-26 Renishaw PLC Encoder apparatus
EP4390328A1 (en) 2022-12-21 2024-06-26 Renishaw plc Encoder apparatus
CN115931015B (zh) * 2023-01-16 2025-08-12 传周半导体科技(上海)有限公司 一种光学编码器的像素单元设计方法
EP4435385A1 (en) * 2023-03-20 2024-09-25 Renishaw PLC Position encoder apparatus
DE102023208964A1 (de) * 2023-09-15 2025-03-20 Dr. Johannes Heidenhain Gmbh Positionsmesssystem

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DE1941731C2 (de) 1969-08-16 1973-11-15 Fa. Carl Zeiss, 7920 Heidenheim Einrichtung zur Messung von Lageande rungen zweier relativ zueinander bewegli eher Teile
DE3239108A1 (de) 1982-10-22 1984-04-26 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Positionsmessverfahren und einrichtungen zur durchfuehrung des verfahrens
DE3616144A1 (de) 1986-05-14 1987-11-19 Heidenhain Gmbh Dr Johannes Fotoelektrische messeinrichtung
EP0271549B1 (en) 1986-06-21 1991-06-05 Renishaw plc Interpolation apparatus
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WO2003021197A1 (en) * 2001-08-30 2003-03-13 Microe Systems Corporation Harmonic suppressing photodetector array
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Also Published As

Publication number Publication date
JP2018530751A (ja) 2018-10-18
EP3347681B1 (en) 2020-09-02
CN108351229A (zh) 2018-07-31
JP6987045B2 (ja) 2021-12-22
KR20180052676A (ko) 2018-05-18
EP3347681A1 (en) 2018-07-18
WO2017042570A1 (en) 2017-03-16
ES2830777T3 (es) 2021-06-04
KR102697708B1 (ko) 2024-08-21
US10670431B2 (en) 2020-06-02
US20180216972A1 (en) 2018-08-02

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