JP6970640B2 - 電磁誘導式エンコーダ - Google Patents
電磁誘導式エンコーダ Download PDFInfo
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- JP6970640B2 JP6970640B2 JP2018077297A JP2018077297A JP6970640B2 JP 6970640 B2 JP6970640 B2 JP 6970640B2 JP 2018077297 A JP2018077297 A JP 2018077297A JP 2018077297 A JP2018077297 A JP 2018077297A JP 6970640 B2 JP6970640 B2 JP 6970640B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
- G01D5/2053—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by a movable non-ferromagnetic conductive element
- G01D5/206—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by a movable non-ferromagnetic conductive element constituting a short-circuiting element
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
- G01D5/2086—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by movement of two or more coils with respect to two or more other coils
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Description
図1の例では、駆動コイル11内に受信コイル12が配置されていたが、それに限られない。図12は、受信コイル12が駆動コイル11内に配置されていない例について説明する。例えば、図12で例示するように、駆動コイル11は、1対の駆動コイル11aおよび駆動コイル11bを備える。受信コイル12は、駆動コイル11aと駆動コイル11bとの間に配置されている。
11 駆動コイル
12 受信コイル
13 パターン
14 貫通配線
20 スケール
21 結合コイル
22 第1ループ部
23 第2ループ部
30 駆動信号生成部
40 変位量測定部
100 電磁誘導式エンコーダ
Claims (5)
- それぞれが略平板形状を有して対向配置され、測定軸方向に相対移動する検出ヘッドおよびスケールを備え、
前記検出ヘッドは、磁束を発生する駆動コイルを備え、
前記スケールは、前記測定軸方向において基本周期λで配列され、前記駆動コイルが発生する磁束と電磁結合し、前記測定軸方向に所定の空間周期で変化する磁束を発生する複数の結合コイルを備え、
前記検出ヘッドは、前記測定軸方向において前記基本周期λで配列され、前記複数の結合コイルが発生する磁束と電磁結合して当該磁束の位相を検出する受信コイルと、を備え、
前記測定軸方向における前記結合コイルの線幅中心間の距離Lと、前記結合コイルの線幅dと、前記基本周期λとは、λ/2−2d<L<λ/2の関係を有することを特徴とする電磁誘導式エンコーダ。 - 前記スケールが構成する平面において、前記測定軸方向と直交する方向における前記複数の結合コイルの幅は、前記測定軸方向と直交する方向における前記駆動コイルの幅以下であることを特徴とする請求項1記載の電磁誘導式エンコーダ。
- 前記スケールが構成する平面において、前記結合コイルは、前記測定軸方向と直交する軸に対して線対称な形状を有することを特徴とする請求項1または2に記載の電磁誘導式エンコーダ。
- 前記複数の結合コイルは、略矩形状を有することを特徴とする請求項3記載の電磁誘導式エンコーダ。
- 前記結合コイルの線幅dは、200μm以上であることを特徴とする請求項1〜4のいずれか一項に記載の電磁誘導式エンコーダ。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018077297A JP6970640B2 (ja) | 2018-04-13 | 2018-04-13 | 電磁誘導式エンコーダ |
DE102019001496.0A DE102019001496A1 (de) | 2018-04-13 | 2019-03-04 | Codiereinrichtung vom elektromagnetischen induktionstyp |
US16/362,778 US10809100B2 (en) | 2018-04-13 | 2019-03-25 | Electromagnetic induction type encoder |
CN201910292772.XA CN110375775B (zh) | 2018-04-13 | 2019-04-12 | 电磁感应式编码器 |
Applications Claiming Priority (1)
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JP2018077297A JP6970640B2 (ja) | 2018-04-13 | 2018-04-13 | 電磁誘導式エンコーダ |
Publications (2)
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JP2019184477A JP2019184477A (ja) | 2019-10-24 |
JP6970640B2 true JP6970640B2 (ja) | 2021-11-24 |
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US (1) | US10809100B2 (ja) |
JP (1) | JP6970640B2 (ja) |
CN (1) | CN110375775B (ja) |
DE (1) | DE102019001496A1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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CN110487162B (zh) * | 2019-09-29 | 2020-09-08 | 桂林广陆数字测控有限公司 | 混合定位电磁感应式位移传感器 |
JP7328121B2 (ja) * | 2019-11-07 | 2023-08-16 | 株式会社ミツトヨ | スケール |
JP2021096160A (ja) * | 2019-12-17 | 2021-06-24 | 株式会社ミツトヨ | スケールおよびエンコーダ |
JP7431032B2 (ja) * | 2019-12-23 | 2024-02-14 | 株式会社ミツトヨ | 電磁誘導式エンコーダ |
JP7106591B2 (ja) * | 2020-03-18 | 2022-07-26 | Tdk株式会社 | 磁場検出装置および電流検出装置 |
DE102020205398A1 (de) * | 2020-04-29 | 2021-11-04 | Dr. Johannes Heidenhain Gesellschaft Mit Beschränkter Haftung | Induktive Positionsmesseinrichtung |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
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US5886519A (en) * | 1997-01-29 | 1999-03-23 | Mitutoyo Corporation | Multi-scale induced current absolute position transducer |
US6005387A (en) | 1997-04-16 | 1999-12-21 | Mitutoyo Corporation | Reduced offset high accuracy induced current position transducer |
JP3654626B2 (ja) | 2000-03-13 | 2005-06-02 | 株式会社ミツトヨ | 電磁誘導型位置検出装置 |
US6636035B2 (en) | 2000-03-13 | 2003-10-21 | Mitutoyo Corporation | Position measuring device and error detecting method for the same, and electromagnetic induction position detecting device |
JP4172918B2 (ja) * | 2001-01-22 | 2008-10-29 | 株式会社ミツトヨ | 電磁誘導型絶対位置トランスデューサ |
US6720760B2 (en) * | 2001-11-14 | 2004-04-13 | Mitutoyo Corporation | Induced current position transducers having improved scale loop structures |
JP4249529B2 (ja) | 2003-04-10 | 2009-04-02 | 株式会社ミツトヨ | 電磁誘導型トランスジューサ |
JP5224830B2 (ja) * | 2008-01-18 | 2013-07-03 | 株式会社ミツトヨ | 電磁誘導式エンコーダ |
JP5798397B2 (ja) * | 2011-07-22 | 2015-10-21 | 株式会社ミツトヨ | 電磁誘導式絶対位置測定用エンコーダ |
JP5809479B2 (ja) * | 2011-08-03 | 2015-11-11 | 株式会社ミツトヨ | 電磁誘導式絶対位置測定用エンコーダ |
DE102013218768A1 (de) | 2013-09-19 | 2015-03-19 | Dr. Johannes Heidenhain Gmbh | Induktive Positionsmesseinrichtung |
DE102014221967A1 (de) | 2014-10-28 | 2016-04-28 | Horst Siedle Gmbh & Co. Kg | Positionsgeber, Positionsmesseinrichtung und Betriebsverfahren hierfür |
JP6475072B2 (ja) * | 2015-04-27 | 2019-02-27 | 株式会社ミツトヨ | 電磁誘導式エンコーダおよびスケール |
JP6021136B1 (ja) * | 2016-02-03 | 2016-11-09 | 三菱重工工作機械株式会社 | 電磁誘導式位置検出器 |
US9877042B1 (en) * | 2017-05-26 | 2018-01-23 | Mitutoyo Corporation | Position encoder sample timing system |
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2018
- 2018-04-13 JP JP2018077297A patent/JP6970640B2/ja active Active
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2019
- 2019-03-04 DE DE102019001496.0A patent/DE102019001496A1/de active Pending
- 2019-03-25 US US16/362,778 patent/US10809100B2/en active Active
- 2019-04-12 CN CN201910292772.XA patent/CN110375775B/zh active Active
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DE102019001496A1 (de) | 2019-10-17 |
US20190316936A1 (en) | 2019-10-17 |
CN110375775A (zh) | 2019-10-25 |
US10809100B2 (en) | 2020-10-20 |
JP2019184477A (ja) | 2019-10-24 |
CN110375775B (zh) | 2022-07-12 |
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