JP5809479B2 - 電磁誘導式絶対位置測定用エンコーダ - Google Patents
電磁誘導式絶対位置測定用エンコーダ Download PDFInfo
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- JP5809479B2 JP5809479B2 JP2011170510A JP2011170510A JP5809479B2 JP 5809479 B2 JP5809479 B2 JP 5809479B2 JP 2011170510 A JP2011170510 A JP 2011170510A JP 2011170510 A JP2011170510 A JP 2011170510A JP 5809479 B2 JP5809479 B2 JP 5809479B2
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- Prior art keywords
- coil
- scale
- coils
- induced current
- absolute position
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
- G01D5/2086—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by movement of two or more coils with respect to two or more other coils
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D1/00—Measuring arrangements giving results other than momentary value of variable, of general application
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
Description
B∝(Ia−Id)
∴A/B≒(Ia+Id)/(Ia−Id)
B∝(Ia−Id)
∴C/B≒(Ia+Id)/(Ia−Id)
12…グリッド
14−1、14−2…スケールコイル
14−1a、14−2a…本体コイル
14−1b、14−2b…追加コイル
14−3…接続コイル
20−1、20−2…受信コイル
24−1、24−2…送信コイル
Claims (2)
- スケール上に、測定方向に沿って互いに異なるスケールピッチで多数配列された本体コイルを有する2列以上のスケールコイルと、
前記スケールに対して測定方向に相対移動自在なグリッド上に、前記スケールコイルと対向するように配設された送信コイル及び受信コイルとを備え、
前記送信コイルを励磁した時に、前記スケールコイルを経由して前記受信コイルで検出される磁束の変化から、前記スケールに対する前記グリッドの絶対位置測定を可能とする2つ以上のトラックを有する電磁誘導式絶対位置測定用エンコーダにおいて、
少なくとも1つのトラックの前記本体コイルの間に、ループ状のスケールコイルを少なくとも1つ追加し、この追加したスケールコイルの誘導電流によって、前記送信コイルを励磁した時の前記受信コイルでの信号検出強度を増加すると共に、クロストーク磁界による誘導電流を低減したことを特徴とする電磁誘導式絶対位置測定用エンコーダ。 - 前記受信コイルの形状が、前記本体コイルと前記追加したスケールコイルの両方をカバーする、測定方向に長い8の字型であることを特徴とする請求項1に記載の電磁誘導式絶対位置測定用エンコーダ。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011170510A JP5809479B2 (ja) | 2011-08-03 | 2011-08-03 | 電磁誘導式絶対位置測定用エンコーダ |
EP12178734.5A EP2554949B1 (en) | 2011-08-03 | 2012-07-31 | Electromagnetic induction type absolute position measuring encoder |
US13/564,141 US8847583B2 (en) | 2011-08-03 | 2012-08-01 | Electromagnetic induction type absolute position measuring encoder |
CN201210276426.0A CN102914245B (zh) | 2011-08-03 | 2012-08-03 | 电磁感应式绝对位置测量用编码器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011170510A JP5809479B2 (ja) | 2011-08-03 | 2011-08-03 | 電磁誘導式絶対位置測定用エンコーダ |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2013036758A JP2013036758A (ja) | 2013-02-21 |
JP2013036758A5 JP2013036758A5 (ja) | 2014-08-21 |
JP5809479B2 true JP5809479B2 (ja) | 2015-11-11 |
Family
ID=46982381
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011170510A Active JP5809479B2 (ja) | 2011-08-03 | 2011-08-03 | 電磁誘導式絶対位置測定用エンコーダ |
Country Status (4)
Country | Link |
---|---|
US (1) | US8847583B2 (ja) |
EP (1) | EP2554949B1 (ja) |
JP (1) | JP5809479B2 (ja) |
CN (1) | CN102914245B (ja) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103471494B (zh) * | 2013-09-18 | 2016-09-14 | 颜福才 | 高精度纯数字位置传感器 |
JP6297287B2 (ja) * | 2013-09-18 | 2018-03-20 | 株式会社ミツトヨ | ロータリエンコーダおよびこれを備えるマイクロメータ |
DE102013218768A1 (de) * | 2013-09-19 | 2015-03-19 | Dr. Johannes Heidenhain Gmbh | Induktive Positionsmesseinrichtung |
US10520335B2 (en) * | 2016-08-24 | 2019-12-31 | Mitutoyo Corporation | Winding configuration for inductive position encoder |
US10612943B2 (en) * | 2016-08-24 | 2020-04-07 | Mitutoyo Corporation | Winding and scale configuration for inductive position encoder |
US10775199B2 (en) * | 2016-08-24 | 2020-09-15 | Mitutoyo Corporation | Winding and scale configuration for inductive position encoder |
JP7118627B2 (ja) * | 2017-12-01 | 2022-08-16 | 株式会社ミツトヨ | 電磁誘導式位置検出装置 |
JP6970640B2 (ja) * | 2018-04-13 | 2021-11-24 | 株式会社ミツトヨ | 電磁誘導式エンコーダ |
JP2020056754A (ja) * | 2018-10-04 | 2020-04-09 | 株式会社ミツトヨ | 電磁誘導式エンコーダ |
JP7346879B2 (ja) * | 2019-04-02 | 2023-09-20 | 村田機械株式会社 | 磁気式リニアセンサ |
JP7294915B2 (ja) * | 2019-06-27 | 2023-06-20 | 株式会社ミツトヨ | オフセット補正装置および位置測定装置 |
JP7431032B2 (ja) * | 2019-12-23 | 2024-02-14 | 株式会社ミツトヨ | 電磁誘導式エンコーダ |
US11692852B2 (en) * | 2020-02-28 | 2023-07-04 | Kyocera Avx Components (Werne) Gmbh | Position sensor having segment sensor element |
US11169008B2 (en) | 2020-03-23 | 2021-11-09 | Mitutoyo Corporation | Transmitter and receiver configuration for inductive position encoder |
US11181395B2 (en) | 2020-03-23 | 2021-11-23 | Mitutoyo Corporation | Transmitter and receiver configuration for inductive position encoder |
US11067414B1 (en) | 2020-03-23 | 2021-07-20 | Mitutoyo Corporation | Transmitter and receiver configuration for inductive position encoder |
US11713983B2 (en) | 2021-06-30 | 2023-08-01 | Mitutoyo Corporation | Sensing winding configuration for inductive position encoder |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU679378B2 (en) * | 1994-05-14 | 1997-06-26 | Synaptics (Uk) Limited | Position encoder |
US6005387A (en) | 1997-04-16 | 1999-12-21 | Mitutoyo Corporation | Reduced offset high accuracy induced current position transducer |
DE10111975B9 (de) * | 2000-03-13 | 2012-11-15 | Mitutoyo Corp. | Verfahren zur Fehlererfassung für eine Vorrichtung zur Positionserfassung mit elektromagnetischer Induktion |
JP3504904B2 (ja) * | 2000-03-13 | 2004-03-08 | 株式会社ミツトヨ | 誘導型トランスデューサ及び電子ノギス |
JP4172918B2 (ja) * | 2001-01-22 | 2008-10-29 | 株式会社ミツトヨ | 電磁誘導型絶対位置トランスデューサ |
JP3842099B2 (ja) | 2001-10-12 | 2006-11-08 | 株式会社ミツトヨ | 磁気式エンコーダ |
JP3978049B2 (ja) * | 2002-02-28 | 2007-09-19 | 株式会社ミツトヨ | 誘導型位置トランスデューサ |
JP4199583B2 (ja) * | 2003-04-10 | 2008-12-17 | 株式会社ミツトヨ | 誘導型トランスデューサ |
US7449878B2 (en) * | 2005-06-27 | 2008-11-11 | Ksr Technologies Co. | Linear and rotational inductive position sensor |
JP5224838B2 (ja) | 2008-02-04 | 2013-07-03 | 株式会社ミツトヨ | 電磁誘導式エンコーダ |
US8283921B2 (en) * | 2008-11-26 | 2012-10-09 | General Electric Company | Magnetoresistance sensors for position and orientation determination |
JP5798397B2 (ja) * | 2011-07-22 | 2015-10-21 | 株式会社ミツトヨ | 電磁誘導式絶対位置測定用エンコーダ |
-
2011
- 2011-08-03 JP JP2011170510A patent/JP5809479B2/ja active Active
-
2012
- 2012-07-31 EP EP12178734.5A patent/EP2554949B1/en active Active
- 2012-08-01 US US13/564,141 patent/US8847583B2/en active Active
- 2012-08-03 CN CN201210276426.0A patent/CN102914245B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
CN102914245B (zh) | 2016-08-17 |
JP2013036758A (ja) | 2013-02-21 |
US8847583B2 (en) | 2014-09-30 |
EP2554949B1 (en) | 2018-12-19 |
CN102914245A (zh) | 2013-02-06 |
EP2554949A3 (en) | 2017-08-30 |
US20130033257A1 (en) | 2013-02-07 |
EP2554949A2 (en) | 2013-02-06 |
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