JP6939415B2 - マイクロチップ - Google Patents

マイクロチップ Download PDF

Info

Publication number
JP6939415B2
JP6939415B2 JP2017207839A JP2017207839A JP6939415B2 JP 6939415 B2 JP6939415 B2 JP 6939415B2 JP 2017207839 A JP2017207839 A JP 2017207839A JP 2017207839 A JP2017207839 A JP 2017207839A JP 6939415 B2 JP6939415 B2 JP 6939415B2
Authority
JP
Japan
Prior art keywords
substrate
microchip
flow path
joint
side wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2017207839A
Other languages
English (en)
Japanese (ja)
Other versions
JP2019078707A5 (enExample
JP2019078707A (ja
Inventor
廣瀬 賢一
賢一 廣瀬
誠 山中
誠 山中
鈴木 信二
信二 鈴木
健治 畠山
健治 畠山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Priority to JP2017207839A priority Critical patent/JP6939415B2/ja
Priority to TW107124187A priority patent/TWI806882B/zh
Priority to US16/758,362 priority patent/US11542157B2/en
Priority to PCT/JP2018/029538 priority patent/WO2019082471A1/ja
Priority to EP18871454.7A priority patent/EP3702789A4/en
Priority to CN201880069788.8A priority patent/CN111295591B/zh
Publication of JP2019078707A publication Critical patent/JP2019078707A/ja
Publication of JP2019078707A5 publication Critical patent/JP2019078707A5/ja
Application granted granted Critical
Publication of JP6939415B2 publication Critical patent/JP6939415B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C3/00Assembling of devices or systems from individually processed components
    • B81C3/001Bonding of two components
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00055Grooves
    • B81C1/00071Channels
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N35/08Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor using a stream of discrete samples flowing along a tube system, e.g. flow injection analysis
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N37/00Details not covered by any other group of this subclass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/12Specific details about manufacturing devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/08Geometry, shape and general structure
    • B01L2300/0848Specific forms of parts of containers
    • B01L2300/0858Side walls
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00Manufacture or treatment of microstructural devices or systems
    • B81C2201/01Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0174Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
    • B81C2201/019Bonding or gluing multiple substrate layers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Hematology (AREA)
  • Dispersion Chemistry (AREA)
  • Micromachines (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
JP2017207839A 2017-10-27 2017-10-27 マイクロチップ Active JP6939415B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2017207839A JP6939415B2 (ja) 2017-10-27 2017-10-27 マイクロチップ
TW107124187A TWI806882B (zh) 2017-10-27 2018-07-13 微晶片
PCT/JP2018/029538 WO2019082471A1 (ja) 2017-10-27 2018-08-07 マイクロチップ
EP18871454.7A EP3702789A4 (en) 2017-10-27 2018-08-07 MICROCHIP
US16/758,362 US11542157B2 (en) 2017-10-27 2018-08-07 Microchip
CN201880069788.8A CN111295591B (zh) 2017-10-27 2018-08-07 微芯片

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017207839A JP6939415B2 (ja) 2017-10-27 2017-10-27 マイクロチップ

Publications (3)

Publication Number Publication Date
JP2019078707A JP2019078707A (ja) 2019-05-23
JP2019078707A5 JP2019078707A5 (enExample) 2020-04-09
JP6939415B2 true JP6939415B2 (ja) 2021-09-22

Family

ID=66246468

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017207839A Active JP6939415B2 (ja) 2017-10-27 2017-10-27 マイクロチップ

Country Status (6)

Country Link
US (1) US11542157B2 (enExample)
EP (1) EP3702789A4 (enExample)
JP (1) JP6939415B2 (enExample)
CN (1) CN111295591B (enExample)
TW (1) TWI806882B (enExample)
WO (1) WO2019082471A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7311834B2 (ja) * 2019-05-23 2023-07-20 ウシオ電機株式会社 マイクロチップ
JP7339603B2 (ja) * 2019-08-30 2023-09-06 ウシオ電機株式会社 マイクロチップ
JP7543711B2 (ja) * 2020-06-04 2024-09-03 ウシオ電機株式会社 マイクロ流体デバイス
JP7470288B2 (ja) * 2020-06-04 2024-04-18 ウシオ電機株式会社 マイクロ流体デバイス
WO2024225477A1 (en) * 2023-04-27 2024-10-31 Okinawa Institute Of Science And Technology School Corporation Channel element, package, drug delivery device, biomolecule testing apparatus, and channel forming method

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6176962B1 (en) * 1990-02-28 2001-01-23 Aclara Biosciences, Inc. Methods for fabricating enclosed microchannel structures
JP4500544B2 (ja) * 2001-12-31 2010-07-14 ユィロス・パテント・アクチボラグ ミクロ流体装置及びその製造
JP3880930B2 (ja) * 2002-07-26 2007-02-14 株式会社エンプラス プレートの接着部構造
JP3714338B2 (ja) 2003-04-23 2005-11-09 ウシオ電機株式会社 接合方法
US7087337B2 (en) * 2004-02-05 2006-08-08 General Motors Corporation Flow field geometries for improved water management
JP4406587B2 (ja) * 2004-08-13 2010-01-27 アルプス電気株式会社 検査用プレート
JP2006112836A (ja) * 2004-10-12 2006-04-27 Sekisui Chem Co Ltd マイクロリアクター
EP1807341A1 (en) 2004-10-27 2007-07-18 Koninklijke Philips Electronics N.V. Fluid container composed of two plates
JP4993243B2 (ja) 2005-01-06 2012-08-08 日本フイルコン株式会社 樹脂製微小流路化学デバイスの製造方法並びに該製法により製造された樹脂製微小流路化学デバイス構造体
CA2656686A1 (en) * 2006-07-05 2008-01-10 Aida Engineering, Ltd. Micro passage chip and fluid transferring method
JP4919474B2 (ja) 2006-07-13 2012-04-18 国立大学法人京都大学 光照射による樹脂の接着方法および樹脂物品の製造方法
WO2008087800A1 (ja) 2007-01-17 2008-07-24 Konica Minolta Opto, Inc. マイクロチップの製造方法、及びマイクロチップ
JP2008224431A (ja) * 2007-03-13 2008-09-25 Konica Minolta Opto Inc マイクロチップの製造方法、及びマイクロチップ
JP5040388B2 (ja) * 2007-03-22 2012-10-03 コニカミノルタアドバンストレイヤー株式会社 マイクロチップの製造方法
DK2376226T3 (en) * 2008-12-18 2018-10-15 Opko Diagnostics Llc IMPROVED REAGENT STORAGE IN MICROFLUIDIC SYSTEMS AND RELATED ARTICLES AND PROCEDURES
JP5208826B2 (ja) * 2009-03-23 2013-06-12 株式会社東芝 微細流路装置
JP2011161578A (ja) * 2010-02-10 2011-08-25 Fujifilm Corp 接合方法、及びマイクロ流路デバイスの製造方法
JP5152361B2 (ja) 2011-04-20 2013-02-27 ウシオ電機株式会社 ワークの貼り合わせ方法および貼り合わせ装置
US9079359B2 (en) * 2011-04-21 2015-07-14 Rohm Co., Ltd. Microchip and method of manufacturing the same
GB2505706A (en) * 2012-09-10 2014-03-12 Univ Leiden Apparatus comprising meniscus alignment barriers
JP2014097485A (ja) * 2012-10-18 2014-05-29 Enplas Corp 液体取扱装置
JP2014122831A (ja) * 2012-12-21 2014-07-03 Sumitomo Bakelite Co Ltd マイクロ流路デバイス
JP6454956B2 (ja) * 2013-02-28 2019-01-23 株式会社リコー 流体デバイス及びその製造方法、並びに流体デバイス製造用転写材料
JP2015064321A (ja) * 2013-09-26 2015-04-09 キヤノン株式会社 流路デバイス

Also Published As

Publication number Publication date
EP3702789A1 (en) 2020-09-02
TWI806882B (zh) 2023-07-01
US20200255288A1 (en) 2020-08-13
TW201922473A (zh) 2019-06-16
JP2019078707A (ja) 2019-05-23
EP3702789A4 (en) 2020-12-23
CN111295591B (zh) 2023-11-28
CN111295591A (zh) 2020-06-16
WO2019082471A1 (ja) 2019-05-02
US11542157B2 (en) 2023-01-03

Similar Documents

Publication Publication Date Title
JP6939415B2 (ja) マイクロチップ
JP6394651B2 (ja) 基板の貼り合わせ方法およびマイクロチップの製造方法
US10100939B2 (en) Valve, fluid control structure, fluid device and method of manufacturing valve
WO2010021264A1 (ja) 微細流路チップ製造方法及び微細流路チップ
JP2010151717A (ja) マイクロ流路チップ
JP6531749B2 (ja) 基板の貼り合わせ方法、並びに、マイクロチップおよびその製造方法
JP2008175795A (ja) プラスチック製マイクロチップ、及びその製造方法、並びにそれを利用したバイオチップ又はマイクロ分析チップ
TWI654071B (zh) 工件的貼合方法
Gou et al. Machining technologies and structural models of microfluidic devices
JP2012007920A (ja) マイクロ流路デバイスの製造方法
JPWO2016060080A1 (ja) ワークの貼り合わせ方法
JP2007240461A (ja) プラスチック製マイクロチップ、及びその接合方法、及びそれを利用したバイオチップ又はマイクロ分析チップ。
KR20050037394A (ko) 기판의 가공결합재
JP2005224688A (ja) マイクロリアクターチップの作製方法
Li et al. Energy director structure and self‐balancing jig for the ultrasonic bonding of microfluidic chips
KR101151221B1 (ko) 마이크로 채널을 가진 구조물의 제조 방법 및 그 구조물
CN102430512A (zh) Mems玻璃球面超声换能器片上集成系统及其制备方法
JP2009220477A (ja) 非接着部を有するマイクロチップの製造方法
JP2007144419A (ja) マイクロ化学反応装置
Lapisa et al. Wafer-level capping and sealing of heat sensitive substances and liquids with gold gaskets
WO2020124301A1 (zh) 一种液滴阵列生成装置及其制备方法和应用
JP7339603B2 (ja) マイクロチップ
Chen et al. Test channels for flow characterization of processed plastic microchannels
JP2013101081A (ja) マイクロチップ

Legal Events

Date Code Title Description
RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7423

Effective date: 20190131

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20200228

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20200228

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20200708

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20210202

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20210329

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20210803

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20210816

R151 Written notification of patent or utility model registration

Ref document number: 6939415

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250