TWI806882B - 微晶片 - Google Patents

微晶片 Download PDF

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Publication number
TWI806882B
TWI806882B TW107124187A TW107124187A TWI806882B TW I806882 B TWI806882 B TW I806882B TW 107124187 A TW107124187 A TW 107124187A TW 107124187 A TW107124187 A TW 107124187A TW I806882 B TWI806882 B TW I806882B
Authority
TW
Taiwan
Prior art keywords
substrate
microchip
flow path
joint
side wall
Prior art date
Application number
TW107124187A
Other languages
English (en)
Chinese (zh)
Other versions
TW201922473A (zh
Inventor
廣瀬賢一
山中誠
鈴木信二
畠山健治
Original Assignee
日商牛尾電機股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商牛尾電機股份有限公司 filed Critical 日商牛尾電機股份有限公司
Publication of TW201922473A publication Critical patent/TW201922473A/zh
Application granted granted Critical
Publication of TWI806882B publication Critical patent/TWI806882B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C3/00—Assembling of devices or systems from individually processed components
    • B81C3/001—Bonding of two components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00055—Grooves
    • B81C1/00071—Channels
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N35/08—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor using a stream of discrete samples flowing along a tube system, e.g. flow injection analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N37/00—Details not covered by any other group of this subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/12—Specific details about manufacturing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0848—Specific forms of parts of containers
    • B01L2300/0858—Side walls
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
    • B81C2201/019—Bonding or gluing multiple substrate layers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • Hematology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Clinical Laboratory Science (AREA)
  • Dispersion Chemistry (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
  • Micromachines (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
TW107124187A 2017-10-27 2018-07-13 微晶片 TWI806882B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017-207839 2017-10-27
JP2017207839A JP6939415B2 (ja) 2017-10-27 2017-10-27 マイクロチップ

Publications (2)

Publication Number Publication Date
TW201922473A TW201922473A (zh) 2019-06-16
TWI806882B true TWI806882B (zh) 2023-07-01

Family

ID=66246468

Family Applications (1)

Application Number Title Priority Date Filing Date
TW107124187A TWI806882B (zh) 2017-10-27 2018-07-13 微晶片

Country Status (6)

Country Link
US (1) US11542157B2 (enExample)
EP (1) EP3702789A4 (enExample)
JP (1) JP6939415B2 (enExample)
CN (1) CN111295591B (enExample)
TW (1) TWI806882B (enExample)
WO (1) WO2019082471A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7311834B2 (ja) * 2019-05-23 2023-07-20 ウシオ電機株式会社 マイクロチップ
JP7339603B2 (ja) * 2019-08-30 2023-09-06 ウシオ電機株式会社 マイクロチップ
JP7543711B2 (ja) * 2020-06-04 2024-09-03 ウシオ電機株式会社 マイクロ流体デバイス
JP7470288B2 (ja) * 2020-06-04 2024-04-18 ウシオ電機株式会社 マイクロ流体デバイス
JP2026516548A (ja) * 2023-04-27 2026-05-26 学校法人沖縄科学技術大学院大学学園 流路素子、パッケージ、ドラッグデリバリ装置、生体分子検査装置、及び、流路形成方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6176962B1 (en) * 1990-02-28 2001-01-23 Aclara Biosciences, Inc. Methods for fabricating enclosed microchannel structures
CN101048338A (zh) * 2004-10-27 2007-10-03 皇家飞利浦电子股份有限公司 由两块板构成的流体容器
JP2011161578A (ja) * 2010-02-10 2011-08-25 Fujifilm Corp 接合方法、及びマイクロ流路デバイスの製造方法
JP2014122831A (ja) * 2012-12-21 2014-07-03 Sumitomo Bakelite Co Ltd マイクロ流路デバイス
US20150086446A1 (en) * 2013-09-26 2015-03-26 Canon Kabushiki Kaisha Channel device

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1467949A1 (en) * 2001-12-31 2004-10-20 Gyros AB A microfluidic device and its manufacture
JP3880930B2 (ja) * 2002-07-26 2007-02-14 株式会社エンプラス プレートの接着部構造
JP3714338B2 (ja) 2003-04-23 2005-11-09 ウシオ電機株式会社 接合方法
US7087337B2 (en) * 2004-02-05 2006-08-08 General Motors Corporation Flow field geometries for improved water management
JP4406587B2 (ja) * 2004-08-13 2010-01-27 アルプス電気株式会社 検査用プレート
JP2006112836A (ja) * 2004-10-12 2006-04-27 Sekisui Chem Co Ltd マイクロリアクター
JP4993243B2 (ja) 2005-01-06 2012-08-08 日本フイルコン株式会社 樹脂製微小流路化学デバイスの製造方法並びに該製法により製造された樹脂製微小流路化学デバイス構造体
GB2453310A (en) * 2006-07-05 2009-04-08 Aida Eng Ltd Micro passage chip, and fluid transferring method
JP4919474B2 (ja) 2006-07-13 2012-04-18 国立大学法人京都大学 光照射による樹脂の接着方法および樹脂物品の製造方法
JPWO2008087800A1 (ja) 2007-01-17 2010-05-06 コニカミノルタオプト株式会社 マイクロチップの製造方法、及びマイクロチップ
JP2008224431A (ja) * 2007-03-13 2008-09-25 Konica Minolta Opto Inc マイクロチップの製造方法、及びマイクロチップ
JP5040388B2 (ja) * 2007-03-22 2012-10-03 コニカミノルタアドバンストレイヤー株式会社 マイクロチップの製造方法
WO2010080115A2 (en) * 2008-12-18 2010-07-15 Claros Diagnostics, Inc. Improved reagent storage in microfluidic systems and related articles and methods
JP5208826B2 (ja) * 2009-03-23 2013-06-12 株式会社東芝 微細流路装置
JP5152361B2 (ja) 2011-04-20 2013-02-27 ウシオ電機株式会社 ワークの貼り合わせ方法および貼り合わせ装置
US9079359B2 (en) * 2011-04-21 2015-07-14 Rohm Co., Ltd. Microchip and method of manufacturing the same
GB2505706A (en) * 2012-09-10 2014-03-12 Univ Leiden Apparatus comprising meniscus alignment barriers
JP2014097485A (ja) * 2012-10-18 2014-05-29 Enplas Corp 液体取扱装置
JP6454956B2 (ja) * 2013-02-28 2019-01-23 株式会社リコー 流体デバイス及びその製造方法、並びに流体デバイス製造用転写材料

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6176962B1 (en) * 1990-02-28 2001-01-23 Aclara Biosciences, Inc. Methods for fabricating enclosed microchannel structures
CN101048338A (zh) * 2004-10-27 2007-10-03 皇家飞利浦电子股份有限公司 由两块板构成的流体容器
JP2011161578A (ja) * 2010-02-10 2011-08-25 Fujifilm Corp 接合方法、及びマイクロ流路デバイスの製造方法
JP2014122831A (ja) * 2012-12-21 2014-07-03 Sumitomo Bakelite Co Ltd マイクロ流路デバイス
US20150086446A1 (en) * 2013-09-26 2015-03-26 Canon Kabushiki Kaisha Channel device

Also Published As

Publication number Publication date
US20200255288A1 (en) 2020-08-13
JP2019078707A (ja) 2019-05-23
EP3702789A1 (en) 2020-09-02
TW201922473A (zh) 2019-06-16
EP3702789A4 (en) 2020-12-23
CN111295591B (zh) 2023-11-28
JP6939415B2 (ja) 2021-09-22
CN111295591A (zh) 2020-06-16
US11542157B2 (en) 2023-01-03
WO2019082471A1 (ja) 2019-05-02

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