TWI806882B - 微晶片 - Google Patents
微晶片 Download PDFInfo
- Publication number
- TWI806882B TWI806882B TW107124187A TW107124187A TWI806882B TW I806882 B TWI806882 B TW I806882B TW 107124187 A TW107124187 A TW 107124187A TW 107124187 A TW107124187 A TW 107124187A TW I806882 B TWI806882 B TW I806882B
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- microchip
- flow path
- joint
- side wall
- Prior art date
Links
- 239000000758 substrate Substances 0.000 claims abstract description 167
- 229920005989 resin Polymers 0.000 claims abstract description 21
- 239000011347 resin Substances 0.000 claims abstract description 21
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 12
- 238000010438 heat treatment Methods 0.000 description 15
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 238000004458 analytical method Methods 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 6
- 230000004913 activation Effects 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 238000009832 plasma treatment Methods 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000003153 chemical reaction reagent Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 238000001746 injection moulding Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000005842 biochemical reaction Methods 0.000 description 1
- 238000003759 clinical diagnosis Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 150000001925 cycloalkenes Chemical class 0.000 description 1
- 229910052805 deuterium Inorganic materials 0.000 description 1
- 239000004205 dimethyl polysiloxane Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000007877 drug screening Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000295 emission spectrum Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 1
- -1 polydimethylsiloxane Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 230000036632 reaction speed Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C3/00—Assembling of devices or systems from individually processed components
- B81C3/001—Bonding of two components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00055—Grooves
- B81C1/00071—Channels
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
- G01N35/08—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor using a stream of discrete samples flowing along a tube system, e.g. flow injection analysis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N37/00—Details not covered by any other group of this subclass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/12—Specific details about manufacturing devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0848—Specific forms of parts of containers
- B01L2300/0858—Side walls
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
- B81C2201/019—Bonding or gluing multiple substrate layers
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Biochemistry (AREA)
- Immunology (AREA)
- Pathology (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Hematology (AREA)
- Dispersion Chemistry (AREA)
- Clinical Laboratory Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Micromachines (AREA)
- Automatic Analysis And Handling Materials Therefor (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017207839A JP6939415B2 (ja) | 2017-10-27 | 2017-10-27 | マイクロチップ |
| JP2017-207839 | 2017-10-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201922473A TW201922473A (zh) | 2019-06-16 |
| TWI806882B true TWI806882B (zh) | 2023-07-01 |
Family
ID=66246468
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW107124187A TWI806882B (zh) | 2017-10-27 | 2018-07-13 | 微晶片 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US11542157B2 (enExample) |
| EP (1) | EP3702789A4 (enExample) |
| JP (1) | JP6939415B2 (enExample) |
| CN (1) | CN111295591B (enExample) |
| TW (1) | TWI806882B (enExample) |
| WO (1) | WO2019082471A1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7311834B2 (ja) * | 2019-05-23 | 2023-07-20 | ウシオ電機株式会社 | マイクロチップ |
| JP7339603B2 (ja) * | 2019-08-30 | 2023-09-06 | ウシオ電機株式会社 | マイクロチップ |
| JP7543711B2 (ja) * | 2020-06-04 | 2024-09-03 | ウシオ電機株式会社 | マイクロ流体デバイス |
| JP7470288B2 (ja) * | 2020-06-04 | 2024-04-18 | ウシオ電機株式会社 | マイクロ流体デバイス |
| WO2024225477A1 (en) * | 2023-04-27 | 2024-10-31 | Okinawa Institute Of Science And Technology School Corporation | Channel element, package, drug delivery device, biomolecule testing apparatus, and channel forming method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6176962B1 (en) * | 1990-02-28 | 2001-01-23 | Aclara Biosciences, Inc. | Methods for fabricating enclosed microchannel structures |
| CN101048338A (zh) * | 2004-10-27 | 2007-10-03 | 皇家飞利浦电子股份有限公司 | 由两块板构成的流体容器 |
| JP2011161578A (ja) * | 2010-02-10 | 2011-08-25 | Fujifilm Corp | 接合方法、及びマイクロ流路デバイスの製造方法 |
| JP2014122831A (ja) * | 2012-12-21 | 2014-07-03 | Sumitomo Bakelite Co Ltd | マイクロ流路デバイス |
| US20150086446A1 (en) * | 2013-09-26 | 2015-03-26 | Canon Kabushiki Kaisha | Channel device |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4500544B2 (ja) * | 2001-12-31 | 2010-07-14 | ユィロス・パテント・アクチボラグ | ミクロ流体装置及びその製造 |
| JP3880930B2 (ja) * | 2002-07-26 | 2007-02-14 | 株式会社エンプラス | プレートの接着部構造 |
| JP3714338B2 (ja) | 2003-04-23 | 2005-11-09 | ウシオ電機株式会社 | 接合方法 |
| US7087337B2 (en) * | 2004-02-05 | 2006-08-08 | General Motors Corporation | Flow field geometries for improved water management |
| JP4406587B2 (ja) * | 2004-08-13 | 2010-01-27 | アルプス電気株式会社 | 検査用プレート |
| JP2006112836A (ja) * | 2004-10-12 | 2006-04-27 | Sekisui Chem Co Ltd | マイクロリアクター |
| JP4993243B2 (ja) | 2005-01-06 | 2012-08-08 | 日本フイルコン株式会社 | 樹脂製微小流路化学デバイスの製造方法並びに該製法により製造された樹脂製微小流路化学デバイス構造体 |
| CA2656686A1 (en) * | 2006-07-05 | 2008-01-10 | Aida Engineering, Ltd. | Micro passage chip and fluid transferring method |
| JP4919474B2 (ja) | 2006-07-13 | 2012-04-18 | 国立大学法人京都大学 | 光照射による樹脂の接着方法および樹脂物品の製造方法 |
| WO2008087800A1 (ja) | 2007-01-17 | 2008-07-24 | Konica Minolta Opto, Inc. | マイクロチップの製造方法、及びマイクロチップ |
| JP2008224431A (ja) * | 2007-03-13 | 2008-09-25 | Konica Minolta Opto Inc | マイクロチップの製造方法、及びマイクロチップ |
| JP5040388B2 (ja) * | 2007-03-22 | 2012-10-03 | コニカミノルタアドバンストレイヤー株式会社 | マイクロチップの製造方法 |
| DK2376226T3 (en) * | 2008-12-18 | 2018-10-15 | Opko Diagnostics Llc | IMPROVED REAGENT STORAGE IN MICROFLUIDIC SYSTEMS AND RELATED ARTICLES AND PROCEDURES |
| JP5208826B2 (ja) * | 2009-03-23 | 2013-06-12 | 株式会社東芝 | 微細流路装置 |
| JP5152361B2 (ja) | 2011-04-20 | 2013-02-27 | ウシオ電機株式会社 | ワークの貼り合わせ方法および貼り合わせ装置 |
| US9079359B2 (en) * | 2011-04-21 | 2015-07-14 | Rohm Co., Ltd. | Microchip and method of manufacturing the same |
| GB2505706A (en) * | 2012-09-10 | 2014-03-12 | Univ Leiden | Apparatus comprising meniscus alignment barriers |
| JP2014097485A (ja) * | 2012-10-18 | 2014-05-29 | Enplas Corp | 液体取扱装置 |
| JP6454956B2 (ja) * | 2013-02-28 | 2019-01-23 | 株式会社リコー | 流体デバイス及びその製造方法、並びに流体デバイス製造用転写材料 |
-
2017
- 2017-10-27 JP JP2017207839A patent/JP6939415B2/ja active Active
-
2018
- 2018-07-13 TW TW107124187A patent/TWI806882B/zh active
- 2018-08-07 CN CN201880069788.8A patent/CN111295591B/zh active Active
- 2018-08-07 EP EP18871454.7A patent/EP3702789A4/en active Pending
- 2018-08-07 WO PCT/JP2018/029538 patent/WO2019082471A1/ja not_active Ceased
- 2018-08-07 US US16/758,362 patent/US11542157B2/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6176962B1 (en) * | 1990-02-28 | 2001-01-23 | Aclara Biosciences, Inc. | Methods for fabricating enclosed microchannel structures |
| CN101048338A (zh) * | 2004-10-27 | 2007-10-03 | 皇家飞利浦电子股份有限公司 | 由两块板构成的流体容器 |
| JP2011161578A (ja) * | 2010-02-10 | 2011-08-25 | Fujifilm Corp | 接合方法、及びマイクロ流路デバイスの製造方法 |
| JP2014122831A (ja) * | 2012-12-21 | 2014-07-03 | Sumitomo Bakelite Co Ltd | マイクロ流路デバイス |
| US20150086446A1 (en) * | 2013-09-26 | 2015-03-26 | Canon Kabushiki Kaisha | Channel device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6939415B2 (ja) | 2021-09-22 |
| EP3702789A1 (en) | 2020-09-02 |
| US20200255288A1 (en) | 2020-08-13 |
| TW201922473A (zh) | 2019-06-16 |
| JP2019078707A (ja) | 2019-05-23 |
| EP3702789A4 (en) | 2020-12-23 |
| CN111295591B (zh) | 2023-11-28 |
| CN111295591A (zh) | 2020-06-16 |
| WO2019082471A1 (ja) | 2019-05-02 |
| US11542157B2 (en) | 2023-01-03 |
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