JP6932628B2 - 磁気記録媒体 - Google Patents
磁気記録媒体 Download PDFInfo
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- -1 nitrogen-containing organic compound Chemical class 0.000 claims description 30
- 238000005477 sputtering target Methods 0.000 claims description 30
- 239000000956 alloy Substances 0.000 claims description 24
- 229910045601 alloy Inorganic materials 0.000 claims description 24
- 125000001434 methanylylidene group Chemical group [H]C#[*] 0.000 claims description 21
- 125000000325 methylidene group Chemical group [H]C([H])=* 0.000 claims description 21
- 150000002894 organic compounds Chemical class 0.000 claims description 20
- 229920000877 Melamine resin Polymers 0.000 claims description 18
- 239000004640 Melamine resin Substances 0.000 claims description 17
- 239000006249 magnetic particle Substances 0.000 claims description 17
- 229910005335 FePt Inorganic materials 0.000 claims description 15
- 239000004642 Polyimide Substances 0.000 claims description 15
- 239000000203 mixture Substances 0.000 claims description 15
- 229920001721 polyimide Polymers 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 15
- 150000001875 compounds Chemical class 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 238000003860 storage Methods 0.000 claims description 9
- 239000002243 precursor Substances 0.000 claims description 7
- 239000000696 magnetic material Substances 0.000 claims description 6
- 229910018979 CoPt Inorganic materials 0.000 claims description 5
- 238000005245 sintering Methods 0.000 claims description 5
- 239000006247 magnetic powder Substances 0.000 claims description 3
- 230000005389 magnetism Effects 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 77
- 238000000034 method Methods 0.000 description 13
- 229910052799 carbon Inorganic materials 0.000 description 10
- 239000011241 protective layer Substances 0.000 description 10
- 239000002245 particle Substances 0.000 description 9
- 239000000843 powder Substances 0.000 description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 8
- 239000004698 Polyethylene Substances 0.000 description 8
- 229920000573 polyethylene Polymers 0.000 description 8
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- 229910052697 platinum Inorganic materials 0.000 description 6
- 239000007789 gas Substances 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 241000209094 Oryza Species 0.000 description 4
- 235000007164 Oryza sativa Nutrition 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 238000002441 X-ray diffraction Methods 0.000 description 4
- 235000009566 rice Nutrition 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical group O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000009689 gas atomisation Methods 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- MBHRHUJRKGNOKX-UHFFFAOYSA-N [(4,6-diamino-1,3,5-triazin-2-yl)amino]methanol Chemical compound NC1=NC(N)=NC(NCO)=N1 MBHRHUJRKGNOKX-UHFFFAOYSA-N 0.000 description 2
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 2
- 230000000740 bleeding effect Effects 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 150000004985 diamines Chemical class 0.000 description 2
- 150000002484 inorganic compounds Chemical class 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
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- 230000005415 magnetization Effects 0.000 description 2
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- 229920005575 poly(amic acid) Polymers 0.000 description 2
- 229920005862 polyol Polymers 0.000 description 2
- 238000001552 radio frequency sputter deposition Methods 0.000 description 2
- CBCKQZAAMUWICA-UHFFFAOYSA-N 1,4-phenylenediamine Chemical compound NC1=CC=C(N)C=C1 CBCKQZAAMUWICA-UHFFFAOYSA-N 0.000 description 1
- HLBLWEWZXPIGSM-UHFFFAOYSA-N 4-Aminophenyl ether Chemical compound C1=CC(N)=CC=C1OC1=CC=C(N)C=C1 HLBLWEWZXPIGSM-UHFFFAOYSA-N 0.000 description 1
- 229910001149 41xx steel Inorganic materials 0.000 description 1
- VQVIHDPBMFABCQ-UHFFFAOYSA-N 5-(1,3-dioxo-2-benzofuran-5-carbonyl)-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(C(C=2C=C3C(=O)OC(=O)C3=CC=2)=O)=C1 VQVIHDPBMFABCQ-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 230000005374 Kerr effect Effects 0.000 description 1
- 229910000943 NiAl Inorganic materials 0.000 description 1
- 229920002292 Nylon 6 Polymers 0.000 description 1
- 229920002302 Nylon 6,6 Polymers 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- NPXOKRUENSOPAO-UHFFFAOYSA-N Raney nickel Chemical compound [Al].[Ni] NPXOKRUENSOPAO-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- WKDNYTOXBCRNPV-UHFFFAOYSA-N bpda Chemical compound C1=C2C(=O)OC(=O)C2=CC(C=2C=C3C(=O)OC(C3=CC=2)=O)=C1 WKDNYTOXBCRNPV-UHFFFAOYSA-N 0.000 description 1
- 235000013339 cereals Nutrition 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical group C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 1
- USIUVYZYUHIAEV-UHFFFAOYSA-N diphenyl ether Natural products C=1C=CC=CC=1OC1=CC=CC=C1 USIUVYZYUHIAEV-UHFFFAOYSA-N 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229920001903 high density polyethylene Polymers 0.000 description 1
- 239000004700 high-density polyethylene Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229920001179 medium density polyethylene Polymers 0.000 description 1
- 239000004701 medium-density polyethylene Substances 0.000 description 1
- JDSHMPZPIAZGSV-UHFFFAOYSA-N melamine Chemical compound NC1=NC(N)=NC(N)=N1 JDSHMPZPIAZGSV-UHFFFAOYSA-N 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- WSFSSNUMVMOOMR-NJFSPNSNSA-N methanone Chemical compound O=[14CH2] WSFSSNUMVMOOMR-NJFSPNSNSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920001228 polyisocyanate Polymers 0.000 description 1
- 239000005056 polyisocyanate Substances 0.000 description 1
- 125000006160 pyromellitic dianhydride group Chemical group 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 125000001424 substituent group Chemical group 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 125000006158 tetracarboxylic acid group Chemical group 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/65—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D179/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen, with or without oxygen, or carbon only, not provided for in groups C09D161/00 - C09D177/00
- C09D179/04—Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
- C09D179/08—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/65—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
- G11B5/656—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition containing Co
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/68—Record carriers characterised by the selection of the material comprising one or more layers of magnetisable material homogeneously mixed with a bonding agent
- G11B5/70—Record carriers characterised by the selection of the material comprising one or more layers of magnetisable material homogeneously mixed with a bonding agent on a base layer
- G11B5/716—Record carriers characterised by the selection of the material comprising one or more layers of magnetisable material homogeneously mixed with a bonding agent on a base layer characterised by two or more magnetic layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/72—Protective coatings, e.g. anti-static or antifriction
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/74—Record carriers characterised by the form, e.g. sheet shaped to wrap around a drum
- G11B5/82—Disk carriers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L61/00—Compositions of condensation polymers of aldehydes or ketones; Compositions of derivatives of such polymers
- C08L61/20—Condensation polymers of aldehydes or ketones with only compounds containing hydrogen attached to nitrogen
- C08L61/26—Condensation polymers of aldehydes or ketones with only compounds containing hydrogen attached to nitrogen of aldehydes with heterocyclic compounds
- C08L61/28—Condensation polymers of aldehydes or ketones with only compounds containing hydrogen attached to nitrogen of aldehydes with heterocyclic compounds with melamine
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L77/00—Compositions of polyamides obtained by reactions forming a carboxylic amide link in the main chain; Compositions of derivatives of such polymers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L79/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen or carbon only, not provided for in groups C08L61/00 - C08L77/00
- C08L79/04—Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
- C08L79/08—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/851—Coating a support with a magnetic layer by sputtering
Description
(2)前記有機化合物は、含窒素有機化合物であることを特徴とする(1)に記載の磁気記録媒体。
(3)前記含窒素有機化合物は、ポリイミド、メラミン樹脂、または、アミド結合もしくはウレタン結合を有する化合物であることを特徴とする(2)に記載の磁気記録媒体。
(4)前記磁性層は、前記メチレン骨格またはメチン骨格を有する有機化合物の含有量が0.5体積%以上40体積%以下であることを特徴とする(1)〜(3)の何れか1項に記載の磁気記録媒体。
(5)前記磁性層は、厚さが1nm以上7nm以下であることを特徴とする(1)〜(4)の何れか1項に記載の磁気記録媒体。
(6)前記磁性粒子は、FePt合金またはCoPt合金を含むことを特徴とする(1)〜(5)の何れか1項に記載の磁気記録媒体。
(7)磁性層の形成に用いられるスパッタリングターゲットであって、含窒素有機化合物および磁性材料を含み、前記含窒素有機化合物は、ポリイミド、メラミン樹脂、または、アミド結合もしくはウレタン結合を有する化合物であり、前記含窒素有機化合物の含有量が0.5体積%以上40体積%以下であることを特徴とするスパッタリングターゲット。
(8)磁性層の形成に用いられるスパッタリングターゲットを製造する方法であって、含窒素有機化合物の前駆体と、磁性粉末を含む組成物を焼結する工程を含み、前記含窒素有機化合物は、ポリイミド、メラミン樹脂、または、アミド結合もしくはウレタン結合を有する化合物であることを特徴とするスパッタリングターゲットの製造方法。
(9)(1)〜(6)の何れか1項に記載の磁気記録媒体を有することを特徴とする磁気記憶装置。
図1に、本実施の形態における磁気記録媒体の一例を示す。
本実施の形態における磁気記憶装置は、前述の本実施の形態における磁気記録媒体を有していれば、特に限定されない。
以下に示す製造方法により、90体積%(70mol%(52at%Fe−48at%Pt)−30mol%C)−10体積%(ポリイミド)の組成を有するスパッタリングターゲットを製造した。
以下に示す製造方法により、90体積%(70mol%(52at%Fe−48at%Pt)−30mol%C)−10体積%(メラミン樹脂)の組成を有するスパッタリングターゲットを製造した。
以下に示す製造方法により、90体積%(70mol%(52at%Fe−48at%Pt)−30mol%C)−10体積%(ポリエチレン)の組成を有するスパッタリングターゲットを製造した。
最初に、2.5インチのガラス基板上に、下地層を成膜した。具体的には、2.5インチのガラス基板上に、第1の下地層として、膜厚50nmの50Co−50Ti(50原子%のCoと50原子%のTiとの合金。以下、同様に記載する。)膜を成膜した後、ガラス基板を300℃で加熱した。次に、第2の下地層として、膜厚12nmの80Cr−20V膜を成膜し、第3の下地層として、膜厚40nmのW膜、第4の下地層として、膜厚3nmのMgO膜をこの順で成膜した。なお、下地層を成膜する際には、DCマグネトロンスパッタ装置を用い、スパッタガスとしては、Arを用いた。
スパッタリングターゲット1の代わりに、スパッタリングターゲット2を用いた以外は、実施例1と同様にして、磁気記録媒体を製造した。
スパッタリングターゲット1の代わりに、スパッタリングターゲット3を用いた以外は、実施例1と同様にして、磁気記録媒体を製造した。
磁性層の組成を表1に示す組成とした以外は、実施例1と同様にして、磁気記録媒体を製造した。
図3の磁気ヘッドを用いて、磁気記録媒体のSNRを測定した。
Kerr効果を用いる磁化曲線測定装置(ネオアーク製)を用いて、磁気記録媒体の保磁力(Hc)を測定した。
2 下地層
3 磁性層
4 保護層
100 磁気記録媒体
101 磁気記録媒体駆動部
102 磁気ヘッド
103 磁気ヘッド駆動部
104 記録再生信号処理系
201 主磁極
202 補助磁極
203 コイル
204 レーザーダイオード(LD)
205 レーザー光
206 近接場光発生素子
207 導波路
208 記録ヘッド
209 シールド
210 再生素子
211 再生ヘッド
Claims (9)
- 基板と、下地層と、(001)配向し、L10構造を有する磁性層をこの順で有し、
前記磁性層は、グラニュラー構造を有し、磁性粒子の粒界部に、メチレン骨格またはメチン骨格を有する有機化合物が存在していることを特徴とする磁気記録媒体。 - 前記有機化合物は、含窒素有機化合物であることを特徴とする請求項1に記載の磁気記録媒体。
- 前記含窒素有機化合物は、ポリイミド、メラミン樹脂、または、アミド結合もしくはウレタン結合を有する化合物であることを特徴とする請求項2に記載の磁気記録媒体。
- 前記磁性層は、前記メチレン骨格またはメチン骨格を有する有機化合物の含有量が0.5体積%以上40体積%以下であることを特徴とする請求項1〜3の何れか1項に記載の磁気記録媒体。
- 前記磁性層は、厚さが1nm以上7nm以下であることを特徴とする請求項1〜4の何れか1項に記載の磁気記録媒体。
- 前記磁性粒子は、FePt合金またはCoPt合金を含むことを特徴とする請求項1〜5の何れか1項に記載の磁気記録媒体。
- 磁性層の形成に用いられるスパッタリングターゲットであって、
含窒素有機化合物および磁性材料を含み、
前記含窒素有機化合物は、ポリイミド、メラミン樹脂、または、アミド結合もしくはウレタン結合を有する化合物であり、
前記含窒素有機化合物の含有量が0.5体積%以上40体積%以下であることを特徴とするスパッタリングターゲット。 - 磁性層の形成に用いられるスパッタリングターゲットを製造する方法であって、
含窒素有機化合物の前駆体と、磁性粉末を含む組成物を焼結する工程を含み、
前記含窒素有機化合物は、ポリイミド、メラミン樹脂、または、アミド結合もしくはウレタン結合を有する化合物であることを特徴とするスパッタリングターゲットの製造方法。 - 請求項1〜6の何れか1項に記載の磁気記録媒体を有することを特徴とする磁気記憶装置。
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