JP6924953B2 - 形状測定装置及び形状測定方法 - Google Patents

形状測定装置及び形状測定方法 Download PDF

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JP6924953B2
JP6924953B2 JP2017063444A JP2017063444A JP6924953B2 JP 6924953 B2 JP6924953 B2 JP 6924953B2 JP 2017063444 A JP2017063444 A JP 2017063444A JP 2017063444 A JP2017063444 A JP 2017063444A JP 6924953 B2 JP6924953 B2 JP 6924953B2
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measurement
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JP2018165688A (ja
JP2018165688A5 (ko
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肖南 王
肖南 王
智浩 青戸
智浩 青戸
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Tokyo Seimitsu Co Ltd
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Tokyo Seimitsu Co Ltd
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JP2017063444A 2017-03-28 2017-03-28 形状測定装置及び形状測定方法 Active JP6924953B2 (ja)

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JP2017063444A JP6924953B2 (ja) 2017-03-28 2017-03-28 形状測定装置及び形状測定方法

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JP2017063444A JP6924953B2 (ja) 2017-03-28 2017-03-28 形状測定装置及び形状測定方法

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JP2018165688A JP2018165688A (ja) 2018-10-25
JP2018165688A5 JP2018165688A5 (ko) 2020-04-30
JP6924953B2 true JP6924953B2 (ja) 2021-08-25

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7223939B2 (ja) * 2019-03-28 2023-02-17 株式会社東京精密 形状測定機及びその制御方法
WO2021240711A1 (ja) * 2020-05-28 2021-12-02 オリンパス株式会社 回転精度測定方法、回転精度測定装置、３次元形状測定方法、３次元形状測定装置及び光学機器
CN114370823B (zh) * 2022-01-12 2023-06-27 中冶赛迪信息技术(重庆)有限公司 直圆柱物料的径向尺寸的获取方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0495807A (ja) * 1990-08-13 1992-03-27 Nippon Telegr & Teleph Corp <Ntt> 管内径測定器
JP2001033233A (ja) * 1999-07-23 2001-02-09 Sumitomo Metal Ind Ltd 管状および棒状被検査物の検査方法
JP2004045206A (ja) * 2002-07-11 2004-02-12 Kobe Steel Ltd 円筒形状物体の寸法測定装置
JP2004101344A (ja) * 2002-09-09 2004-04-02 Tokyo Seimitsu Co Ltd 円柱形状物の測定装置
JP2007024646A (ja) * 2005-07-14 2007-02-01 Daido Gakuen 光学式測定装置
JP5939477B1 (ja) * 2015-03-31 2016-06-22 株式会社東京精密 形状測定装置

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