JP6913793B1 - 光センサ - Google Patents
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- JP6913793B1 JP6913793B1 JP2020082444A JP2020082444A JP6913793B1 JP 6913793 B1 JP6913793 B1 JP 6913793B1 JP 2020082444 A JP2020082444 A JP 2020082444A JP 2020082444 A JP2020082444 A JP 2020082444A JP 6913793 B1 JP6913793 B1 JP 6913793B1
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- 238000010586 diagram Methods 0.000 abstract description 4
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- 230000035945 sensitivity Effects 0.000 description 20
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- 239000000758 substrate Substances 0.000 description 7
- 230000000903 blocking effect Effects 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 229920005591 polysilicon Polymers 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
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- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
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- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14603—Special geometry or disposition of pixel-elements, address-lines or gate-electrodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14609—Pixel-elements with integrated switching, control, storage or amplification elements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1463—Pixel isolation structures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/02016—Circuit arrangements of general character for the devices
- H01L31/02019—Circuit arrangements of general character for the devices for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02027—Circuit arrangements of general character for the devices for devices characterised by at least one potential jump barrier or surface barrier for devices working in avalanche mode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
- H01L31/107—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier working in avalanche mode, e.g. avalanche photodiodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
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- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Light Receiving Elements (AREA)
Abstract
Description
[光検出装置の構成]
[測距イメージセンサの構成]
[アバランシェ増倍領域の詳細]
[光検出装置の動作例]
[作用及び効果]
[第1変形例]
[第2変形例]
[第3変形例]
[第4変形例]
[第5変形例]
[第6変形例]
Claims (13)
- 各々が層状に形成された第1導電型の第1増倍領域及び第2導電型の第2増倍領域を有するアバランシェ増倍領域と、
前記第1増倍領域及び前記第2増倍領域の厚さ方向において前記第2増倍領域が前記第1増倍領域に対して位置する側を第1側とすると、前記第2増倍領域に対して前記第1側に配置された第2導電型の電荷収集領域と、
前記第2増倍領域に対して前記第1側に配置された第1導電型の第1導電型領域と、を備え、
前記第2増倍領域は、前記厚さ方向において前記電荷収集領域と重なる第1部分と、前記厚さ方向において前記第1導電型領域と重なる第2部分と、を有し、
前記第1部分の不純物の濃度は、前記第2部分の不純物の濃度よりも高い、光センサ。 - 前記第1増倍領域は、前記厚さ方向において前記電荷収集領域及び前記第1導電型領域と重なっている、請求項1に記載の光センサ。
- 各々が層状に形成された第1導電型の第1増倍領域及び第2導電型の第2増倍領域を有するアバランシェ増倍領域と、
前記第1増倍領域及び前記第2増倍領域の厚さ方向において前記第2増倍領域が前記第1増倍領域に対して位置する側を第1側とすると、前記第2増倍領域に対して前記第1側に配置された第2導電型の電荷収集領域と、
前記第2増倍領域に対して前記第1側に配置された第1導電型の第1導電型領域と、を備え、
前記第1増倍領域は、前記第1増倍領域及び前記第2増倍領域の厚さ方向において前記電荷収集領域と重なる第1部分と、前記厚さ方向において前記第1導電型領域と重なる第2部分と、を有し、
前記第2部分の不純物の濃度は、前記第1部分の不純物の濃度よりも高い、光センサ。 - 前記第2増倍領域は、前記厚さ方向において前記電荷収集領域及び前記第1導電型領域と重なっている、請求項3に記載の光センサ。
- 前記アバランシェ増倍領域、前記電荷収集領域及び前記第1導電型領域を各々が含む複数の画素を備え、
前記第1増倍領域は、前記複数の画素に渡って繋がっているか、又は、前記複数の画素を互いに分離するように形成されたトレンチに至っている、請求項1〜4のいずれか一項に記載の光センサ。 - 前記アバランシェ増倍領域、前記電荷収集領域及び前記第1導電型領域を各々が含む複数の画素を備え、
前記第2増倍領域は、前記複数の画素に渡って繋がっているか、又は、前記複数の画素を互いに分離するように形成されたトレンチに至っている、請求項1〜5のいずれか一項に記載の光センサ。 - 前記第1部分は、前記厚さ方向において前記第1導電型領域と重なっていない、請求項1〜6のいずれか一項に記載の光センサ。
- 前記第1部分は、前記厚さ方向において前記第1導電型領域と重なっている、請求項1〜6のいずれか一項に記載の光センサ。
- 前記第1導電型領域は、回路を構成するウェル領域である、請求項1〜8のいずれか一項に記載の光センサ。
- 前記アバランシェ増倍領域、前記電荷収集領域及び前記第1導電型領域を各々が含む複数の画素を備え、
前記第1導電型領域は、前記複数の画素の間の境界部に設けられた分離領域である、請求項1〜9のいずれか一項に記載の光センサ。 - 前記第1導電型領域は、前記厚さ方向から見た場合に前記電荷収集領域を包囲している、請求項1〜10のいずれか一項に記載の光センサ。
- 前記電荷収集領域に対して前記第1側に配置された電極と、
前記電荷収集領域と前記電極との間に配置された第1導電型の介在領域と、を更に備える、請求項1〜11のいずれか一項に記載の光センサ。 - 前記第2増倍領域に対して前記第1側に配置された第2導電型の電荷転送領域と、
前記電荷転送領域に隣接する領域上に配置された転送ゲート電極と、を更に備える、請求項1〜12のいずれか一項に記載の光センサ。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
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JP2020082444A JP6913793B1 (ja) | 2020-05-08 | 2020-05-08 | 光センサ |
DE112021002675.5T DE112021002675T5 (de) | 2020-05-08 | 2021-01-12 | Optischer Sensor |
KR1020227040295A KR20230008752A (ko) | 2020-05-08 | 2021-01-12 | 광 센서 |
CN202180033487.1A CN115516636A (zh) | 2020-05-08 | 2021-01-12 | 光传感器 |
PCT/JP2021/000705 WO2021225015A1 (ja) | 2020-05-08 | 2021-01-12 | 光センサ |
US17/922,803 US20230223418A1 (en) | 2020-05-08 | 2021-01-12 | Optical sensor |
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JP2020082444A JP6913793B1 (ja) | 2020-05-08 | 2020-05-08 | 光センサ |
Publications (2)
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JP6913793B1 true JP6913793B1 (ja) | 2021-08-04 |
JP2021177521A JP2021177521A (ja) | 2021-11-11 |
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JP2020082444A Active JP6913793B1 (ja) | 2020-05-08 | 2020-05-08 | 光センサ |
Country Status (6)
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US (1) | US20230223418A1 (ja) |
JP (1) | JP6913793B1 (ja) |
KR (1) | KR20230008752A (ja) |
CN (1) | CN115516636A (ja) |
DE (1) | DE112021002675T5 (ja) |
WO (1) | WO2021225015A1 (ja) |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2008004547A1 (fr) * | 2006-07-03 | 2008-01-10 | Hamamatsu Photonics K.K. | Ensemble photodiode |
JP4971891B2 (ja) * | 2007-07-03 | 2012-07-11 | 浜松ホトニクス株式会社 | 裏面入射型測距センサ及び測距装置 |
WO2017004663A1 (en) * | 2015-07-08 | 2017-01-12 | The Commonwealth Of Australia | Spad array structures and methods of operation |
JP6260923B2 (ja) | 2015-09-09 | 2018-01-17 | パナソニックIpマネジメント株式会社 | 固体撮像素子 |
JP6846648B2 (ja) * | 2017-03-21 | 2021-03-24 | パナソニックIpマネジメント株式会社 | 固体撮像素子及びその製造方法 |
CN109155325A (zh) * | 2017-03-22 | 2019-01-04 | 索尼半导体解决方案公司 | 摄像装置和信号处理装置 |
KR102432861B1 (ko) * | 2017-06-15 | 2022-08-16 | 삼성전자주식회사 | 거리 측정을 위한 이미지 센서 |
-
2020
- 2020-05-08 JP JP2020082444A patent/JP6913793B1/ja active Active
-
2021
- 2021-01-12 DE DE112021002675.5T patent/DE112021002675T5/de active Pending
- 2021-01-12 WO PCT/JP2021/000705 patent/WO2021225015A1/ja active Application Filing
- 2021-01-12 US US17/922,803 patent/US20230223418A1/en active Pending
- 2021-01-12 KR KR1020227040295A patent/KR20230008752A/ko unknown
- 2021-01-12 CN CN202180033487.1A patent/CN115516636A/zh active Pending
Also Published As
Publication number | Publication date |
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DE112021002675T5 (de) | 2023-02-23 |
CN115516636A (zh) | 2022-12-23 |
US20230223418A1 (en) | 2023-07-13 |
JP2021177521A (ja) | 2021-11-11 |
WO2021225015A1 (ja) | 2021-11-11 |
KR20230008752A (ko) | 2023-01-16 |
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