JP6911444B2 - 物理量センサー、電子機器、および移動体 - Google Patents

物理量センサー、電子機器、および移動体 Download PDF

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Publication number
JP6911444B2
JP6911444B2 JP2017061701A JP2017061701A JP6911444B2 JP 6911444 B2 JP6911444 B2 JP 6911444B2 JP 2017061701 A JP2017061701 A JP 2017061701A JP 2017061701 A JP2017061701 A JP 2017061701A JP 6911444 B2 JP6911444 B2 JP 6911444B2
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Japan
Prior art keywords
beam portion
physical quantity
quantity sensor
axis direction
axis
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JP2017061701A
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Japanese (ja)
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JP2018163120A (ja
JP2018163120A5 (enExample
Inventor
田中　悟
悟 田中
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Seiko Epson Corp
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Seiko Epson Corp
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Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2017061701A priority Critical patent/JP6911444B2/ja
Priority to CN201810213123.1A priority patent/CN108663539B/zh
Priority to US15/924,805 priority patent/US10788510B2/en
Priority to EP18163898.2A priority patent/EP3382403B1/en
Publication of JP2018163120A publication Critical patent/JP2018163120A/ja
Publication of JP2018163120A5 publication Critical patent/JP2018163120A5/ja
Priority to US17/002,898 priority patent/US11181546B2/en
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Publication of JP6911444B2 publication Critical patent/JP6911444B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0235—Accelerometers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/04—Electrodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
    • G01P2015/0871—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system using stopper structures for limiting the travel of the seismic mass

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
JP2017061701A 2017-03-27 2017-03-27 物理量センサー、電子機器、および移動体 Active JP6911444B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2017061701A JP6911444B2 (ja) 2017-03-27 2017-03-27 物理量センサー、電子機器、および移動体
CN201810213123.1A CN108663539B (zh) 2017-03-27 2018-03-15 物理量传感器、电子设备、便携式电子设备及移动体
US15/924,805 US10788510B2 (en) 2017-03-27 2018-03-19 Physical quantity sensor, electronic device, and vehicle
EP18163898.2A EP3382403B1 (en) 2017-03-27 2018-03-26 Physical quantity sensor, electronic device, and vehicle
US17/002,898 US11181546B2 (en) 2017-03-27 2020-08-26 Physical quantity sensor, electronic device, and vehicle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017061701A JP6911444B2 (ja) 2017-03-27 2017-03-27 物理量センサー、電子機器、および移動体

Publications (3)

Publication Number Publication Date
JP2018163120A JP2018163120A (ja) 2018-10-18
JP2018163120A5 JP2018163120A5 (enExample) 2020-05-14
JP6911444B2 true JP6911444B2 (ja) 2021-07-28

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JP2017061701A Active JP6911444B2 (ja) 2017-03-27 2017-03-27 物理量センサー、電子機器、および移動体

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US (2) US10788510B2 (enExample)
EP (1) EP3382403B1 (enExample)
JP (1) JP6911444B2 (enExample)
CN (1) CN108663539B (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6930396B2 (ja) 2017-11-28 2021-09-01 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、複合センサーデバイス、慣性計測装置、携帯型電子機器および移動体
JP2020118609A (ja) * 2019-01-25 2020-08-06 セイコーエプソン株式会社 慣性センサー、電子機器および移動体
JP2021021676A (ja) * 2019-07-30 2021-02-18 セイコーエプソン株式会社 慣性センサー、電子機器および移動体
JP7383978B2 (ja) * 2019-10-23 2023-11-21 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
JP7419866B2 (ja) * 2020-02-19 2024-01-23 セイコーエプソン株式会社 慣性センサー、電子機器、及び移動体
JP7631700B2 (ja) * 2020-07-31 2025-02-19 セイコーエプソン株式会社 慣性センサー及び慣性計測装置
JP7585712B2 (ja) 2020-10-28 2024-11-19 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス及び慣性計測装置
JP7694182B2 (ja) * 2021-06-17 2025-06-18 セイコーエプソン株式会社 慣性センサー及び慣性計測装置

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JPH10125935A (ja) * 1996-10-15 1998-05-15 Nippon Motorola Ltd 可動容量構造体の製造方法及び可動容量構造体
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Also Published As

Publication number Publication date
US20200393489A1 (en) 2020-12-17
CN108663539A (zh) 2018-10-16
EP3382403A1 (en) 2018-10-03
US10788510B2 (en) 2020-09-29
EP3382403B1 (en) 2019-10-02
JP2018163120A (ja) 2018-10-18
CN108663539B (zh) 2021-12-21
US20180275163A1 (en) 2018-09-27
US11181546B2 (en) 2021-11-23

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